JP4171093B2 - 真空容器とその製造方法 - Google Patents
真空容器とその製造方法 Download PDFInfo
- Publication number
- JP4171093B2 JP4171093B2 JP36748997A JP36748997A JP4171093B2 JP 4171093 B2 JP4171093 B2 JP 4171093B2 JP 36748997 A JP36748997 A JP 36748997A JP 36748997 A JP36748997 A JP 36748997A JP 4171093 B2 JP4171093 B2 JP 4171093B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- vacuum
- thermal conductivity
- vacuum container
- vacuum vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000956 alloy Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000011777 magnesium Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 description 9
- 238000005266 casting Methods 0.000 description 8
- 239000002131 composite material Substances 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000004108 freeze drying Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
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- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packages (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36748997A JP4171093B2 (ja) | 1997-12-04 | 1997-12-04 | 真空容器とその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36748997A JP4171093B2 (ja) | 1997-12-04 | 1997-12-04 | 真空容器とその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11165057A JPH11165057A (ja) | 1999-06-22 |
| JPH11165057A5 JPH11165057A5 (enrdf_load_stackoverflow) | 2005-07-21 |
| JP4171093B2 true JP4171093B2 (ja) | 2008-10-22 |
Family
ID=18489440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP36748997A Expired - Fee Related JP4171093B2 (ja) | 1997-12-04 | 1997-12-04 | 真空容器とその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4171093B2 (enrdf_load_stackoverflow) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050056188A (ko) * | 2002-08-14 | 2005-06-14 | 에이제토 엘렉토로닉 마티리알즈 가부시키가이샤 | 액체 화학약품 보관 및 운반 용기 |
| JP2007260624A (ja) * | 2006-03-29 | 2007-10-11 | Tokyo Electron Ltd | 真空装置に用いる真空容器及びその製造方法 |
| JP5125031B2 (ja) | 2006-08-29 | 2013-01-23 | 東京エレクトロン株式会社 | 真空処理装置及び真空処理方法 |
| KR100868971B1 (ko) * | 2008-03-31 | 2008-11-17 | 지기청 | 냉각 컵 및 냉각 컵을 구비한 냉각 테이블 |
| CN101624122B (zh) | 2008-07-07 | 2011-07-06 | 北京天擎化工有限公司 | 一种用于储存危险化学品的泄漏自救容器 |
| CN101624999B (zh) * | 2008-07-07 | 2011-08-31 | 北京天擎化工有限公司 | 一种危险化学品泄漏救援设备 |
| CN102039395B (zh) * | 2011-01-05 | 2012-05-09 | 无锡市回力铸造厂 | 船用合金预埋管铸件的制作方法 |
| KR101499772B1 (ko) * | 2012-12-21 | 2015-03-09 | 주식회사 포스코 | 마그네슘 합금의 제조 장치 |
| CN105546902A (zh) * | 2016-02-24 | 2016-05-04 | 苏州黄章妹族工业设计有限公司 | 一种高温金属陶瓷循环冷却装置 |
-
1997
- 1997-12-04 JP JP36748997A patent/JP4171093B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11165057A (ja) | 1999-06-22 |
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