JP4142134B2 - 測長装置の目盛板と走査ユニットおよび目盛板の取付方法 - Google Patents

測長装置の目盛板と走査ユニットおよび目盛板の取付方法 Download PDF

Info

Publication number
JP4142134B2
JP4142134B2 JP27297097A JP27297097A JP4142134B2 JP 4142134 B2 JP4142134 B2 JP 4142134B2 JP 27297097 A JP27297097 A JP 27297097A JP 27297097 A JP27297097 A JP 27297097A JP 4142134 B2 JP4142134 B2 JP 4142134B2
Authority
JP
Japan
Prior art keywords
scale plate
shape
scanning unit
scale
ball
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27297097A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10148518A5 (https=
JPH10148518A (ja
Inventor
ギユンター・ネレ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1996141965 external-priority patent/DE19641965A1/de
Priority claimed from DE19729481A external-priority patent/DE19729481A1/de
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JPH10148518A publication Critical patent/JPH10148518A/ja
Publication of JPH10148518A5 publication Critical patent/JPH10148518A5/ja
Application granted granted Critical
Publication of JP4142134B2 publication Critical patent/JP4142134B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
JP27297097A 1996-10-11 1997-10-06 測長装置の目盛板と走査ユニットおよび目盛板の取付方法 Expired - Fee Related JP4142134B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE1996141965 DE19641965A1 (de) 1996-10-11 1996-10-11 Anordnung und Verfahren zur Anbringung eines Maßstabs und Maßstab einer Meßeinrichtung
DE19641966 1996-10-11
DE19729481A DE19729481A1 (de) 1996-10-11 1997-07-10 Maßstab und Abtasteinheit einer Längenmeßeinrichtung sowie Meßeinrichtung
DE19641966:2 1997-07-10
DE19641965:4 1997-07-10
DE19729481:2 1997-07-10

Publications (3)

Publication Number Publication Date
JPH10148518A JPH10148518A (ja) 1998-06-02
JPH10148518A5 JPH10148518A5 (https=) 2005-06-16
JP4142134B2 true JP4142134B2 (ja) 2008-08-27

Family

ID=27216722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27297097A Expired - Fee Related JP4142134B2 (ja) 1996-10-11 1997-10-06 測長装置の目盛板と走査ユニットおよび目盛板の取付方法

Country Status (4)

Country Link
US (1) US6092296A (https=)
EP (1) EP0836078B1 (https=)
JP (1) JP4142134B2 (https=)
AT (1) ATE230103T1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19857132A1 (de) * 1998-12-11 2000-06-15 Heidenhain Gmbh Dr Johannes Verfahren und Anordnung zur Verringerung temperaturbedingter Maßabweichungen bei parallel angeordneten Meßsystemen
DE19914311A1 (de) * 1999-03-29 2000-10-05 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zum Anbringen eines Maßstabes
DE19922363A1 (de) * 1999-05-14 2000-11-23 Rexroth Star Gmbh Einrichtung zur Ermittlung der Relativposition zweier relativ zueinander beweglicher Körper und Verfahren zur Herstellung einer solchen Einrichtung
JP3292709B2 (ja) * 1999-07-01 2002-06-17 エスエムシー株式会社 計測機能付きエアチャック
JP3590024B2 (ja) * 2000-05-03 2004-11-17 コメグ インドゥストリエレ メステヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング １つの対象物を複数の軸に関して測定するための装置
DE10056947A1 (de) * 2000-11-17 2002-05-23 Optolab Licensing Gmbh Verfahren und Anordnung zur Montage von Messsystemen
US6820348B2 (en) 2001-02-09 2004-11-23 Acu-Rite, Inc. Mounting tool for linear encoders
DE10204611B4 (de) * 2002-02-05 2007-04-05 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zum Anbringen eines Maßstabes oder Maßstabträgers
JP4024600B2 (ja) * 2002-06-25 2007-12-19 株式会社ミツトヨ 枠多点固定タイプのユニット型直線変位測定装置、及び、その固定方法
DE10236381A1 (de) * 2002-08-08 2004-02-19 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
FR2875832B1 (fr) * 2004-09-24 2006-12-15 Roger Mondelin Sa Sa Appareil de levage et de manutention avec dispositif d'orientation de porte-plaques de materiaux
US7299562B2 (en) * 2005-09-22 2007-11-27 Acu-Rite Companies, Inc. Device and method for mounting a position measuring device onto a machine tool, and position measuring system
JP6909567B2 (ja) * 2016-09-26 2021-07-28 株式会社ミツトヨ 直線変位測定装置の取付け具

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2505585C3 (de) * 1975-02-11 1978-06-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE2518745C3 (de) * 1975-04-26 1979-06-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Fehlerkompensation in Positioniersystemen
CH609149A5 (https=) * 1975-10-23 1979-02-15 Heidenhain Gmbh Dr Johannes
DE2623526C2 (de) * 1976-05-26 1978-03-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Meßeinrichtung
DE2628623C3 (de) * 1976-06-25 1979-06-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Andruck-Vorrichtung
US4198757A (en) * 1976-07-09 1980-04-22 Dr. Johannes Heidenhain Gmbh Fastening apparatus for longitudinal measuring system
DE2706926C2 (de) * 1977-02-18 1979-06-07 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßeinrichtung
DE2712422C2 (de) * 1977-03-22 1978-11-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE2712421C2 (de) * 1977-03-22 1982-06-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Längenmeßeinrichtung
DE2727769C2 (de) * 1977-06-21 1979-01-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Längenmeßeinrichtung für große Meßlängen
DE2735154C2 (de) * 1977-08-04 1984-04-05 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßsystem
DE2844066C2 (de) * 1978-10-10 1982-04-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßeinrichtung
DE2850875C2 (de) * 1978-11-24 1982-05-19 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Präzisionslängenmeßeinrichtung
DE2853771C2 (de) * 1978-12-13 1986-08-28 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE3008384A1 (de) * 1980-03-05 1981-09-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
DE3016908C2 (de) * 1980-05-02 1982-04-15 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Präzisionslängenmeßeinrichtung
DE3020003C2 (de) * 1980-05-24 1983-01-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Sicherungsvorrichtung für Transport und Montage einer Meßeinrichtung
DE3201887C2 (de) * 1982-01-22 1983-11-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE3219083C2 (de) * 1982-05-21 1986-01-23 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE3224005A1 (de) * 1982-06-26 1984-01-05 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengen- oder winkelmesssystem
DE3243966A1 (de) * 1982-11-27 1984-05-30 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengenmesseinrichtung
DE3245357C2 (de) * 1982-12-08 1985-02-14 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale Meßeinrichtung
DE3302151C2 (de) * 1983-01-22 1987-02-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Längenmeßvorrichtung
DE3302643C2 (de) * 1983-01-27 1987-01-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Spanneinrichtung für eine Längenmeßeinrichtung
EP0118607B1 (de) * 1983-02-12 1989-02-01 Dr. Johannes Heidenhain GmbH Gekapselte Messeinrichtung
DE3315214A1 (de) * 1983-04-27 1984-10-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengen- oder winkelmesseinrichtung
DE3316082A1 (de) * 1983-05-03 1984-11-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
DE3316081A1 (de) * 1983-05-03 1984-11-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
DE3319600A1 (de) * 1983-05-30 1984-12-06 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengenmesseinrichtung
DE3334609C1 (de) * 1983-09-24 1984-11-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengen- oder Winkelmesseinrichtung
DE3530776A1 (de) * 1984-08-31 1986-03-06 Sony Magnescale Inc., Tokio/Tokyo Geradlinige messskala
DE3625795A1 (de) * 1986-07-30 1988-02-04 Heidenhain Gmbh Dr Johannes Laengenmesseinrichtung
DE4406797C2 (de) * 1994-03-02 1997-11-27 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE4406799C2 (de) * 1994-03-02 1997-11-06 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE4406798C2 (de) * 1994-03-02 1997-11-27 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JPH0953638A (ja) * 1995-08-11 1997-02-25 Nippon Thompson Co Ltd 位置検出装置並びにこれを具備した軌道台ユニット及び案内ユニット

Also Published As

Publication number Publication date
ATE230103T1 (de) 2003-01-15
EP0836078B1 (de) 2002-12-18
EP0836078A3 (de) 1999-11-03
EP0836078A2 (de) 1998-04-15
US6092296A (en) 2000-07-25
JPH10148518A (ja) 1998-06-02

Similar Documents

Publication Publication Date Title
JP4142134B2 (ja) 測長装置の目盛板と走査ユニットおよび目盛板の取付方法
JP2005510683A (ja) ユニバーサルジョイント付調整装置
US4936023A (en) Method of and apparatus for mounting a position measuring device
JPH02502124A (ja) 工作物の寸法をチェックする装置
JPH03502491A (ja) 相前後して位置する円筒孔を同時に測定する測定装置
JPH10148518A5 (https=)
ATE111590T1 (de) Mehrkoordinaten-tastkopf.
US7099008B2 (en) Alignment adjuster of probe, measuring instrument and alignment adjusting method of probe
US7552542B2 (en) Measuring arrangement and measuring method for measuring bearing clearance
US4926559A (en) Measuring device for determining the position of workpiece faces
US5806200A (en) Probe head of a coordinate measuring apparatus
JPS5827842B2 (ja) フオ−クゲ−ジ
WO2018097782A1 (en) Measuring device and method for measuring play in a ball joint
CN118518025A (zh) 齿轮渐开线样板齿廓偏差的测量装置及其测点调整方法
JP4361933B2 (ja) 結合部材
US6678964B2 (en) Tracer device
CN110823150A (zh) 一种简易高效回转夹具跳动检具
JP4052989B2 (ja) 弾性率測定装置
JPH11304463A (ja) 形状測定装置および形状測定方法
JP3259378B2 (ja) チップ装着機のチップ吸着ノズル検査装置
JPS598161Y2 (ja) マイクロメ−タヘツドの送り誤差測定装置
EP0962744B1 (en) Differential curvature transducer
JPH065075Y2 (ja) 回転体心振れ測定用治具
JPH0539452Y2 (https=)
JPH0424403Y2 (https=)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040818

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040818

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040909

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070626

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070911

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20071204

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080205

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080610

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080612

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110620

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110620

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120620

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120620

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130620

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees