JP4046827B2 - 平面コイル及び平面トランス - Google Patents
平面コイル及び平面トランス Download PDFInfo
- Publication number
- JP4046827B2 JP4046827B2 JP00385398A JP385398A JP4046827B2 JP 4046827 B2 JP4046827 B2 JP 4046827B2 JP 00385398 A JP00385398 A JP 00385398A JP 385398 A JP385398 A JP 385398A JP 4046827 B2 JP4046827 B2 JP 4046827B2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- planar
- thickness
- conductor
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004020 conductor Substances 0.000 claims description 70
- 238000007747 plating Methods 0.000 claims description 48
- 239000010408 film Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 26
- 239000010409 thin film Substances 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 230000005294 ferromagnetic effect Effects 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 27
- 229910052802 copper Inorganic materials 0.000 description 24
- 239000010949 copper Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 17
- 229910000365 copper sulfate Inorganic materials 0.000 description 12
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000000206 photolithography Methods 0.000 description 8
- 238000000992 sputter etching Methods 0.000 description 8
- 229910000859 α-Fe Inorganic materials 0.000 description 6
- 229910003962 NiZn Inorganic materials 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 239000011889 copper foil Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000007766 curtain coating Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Landscapes
- Coils Of Transformers For General Uses (AREA)
- Coils Or Transformers For Communication (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00385398A JP4046827B2 (ja) | 1998-01-12 | 1998-01-12 | 平面コイル及び平面トランス |
| US09/228,971 US6600404B1 (en) | 1998-01-12 | 1999-01-12 | Planar coil and planar transformer, and process of fabricating a high-aspect conductive device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00385398A JP4046827B2 (ja) | 1998-01-12 | 1998-01-12 | 平面コイル及び平面トランス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11204337A JPH11204337A (ja) | 1999-07-30 |
| JPH11204337A5 JPH11204337A5 (enrdf_load_stackoverflow) | 2005-06-23 |
| JP4046827B2 true JP4046827B2 (ja) | 2008-02-13 |
Family
ID=11568751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00385398A Expired - Fee Related JP4046827B2 (ja) | 1998-01-12 | 1998-01-12 | 平面コイル及び平面トランス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4046827B2 (enrdf_load_stackoverflow) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001102217A (ja) * | 1999-09-30 | 2001-04-13 | Tdk Corp | コイル装置 |
| JP2005191408A (ja) | 2003-12-26 | 2005-07-14 | Matsushita Electric Ind Co Ltd | コイル導電体とその製造方法およびこれを用いた電子部品 |
| JP5174424B2 (ja) * | 2007-10-24 | 2013-04-03 | デクセリアルズ株式会社 | アンテナ回路及びその抵抗低減方法、並びにトランスポンダ |
| JP5382064B2 (ja) * | 2011-05-26 | 2014-01-08 | Ｔｄｋ株式会社 | コイル部品及びその製造方法 |
| KR101506910B1 (ko) * | 2012-09-27 | 2015-03-30 | 티디케이가부시기가이샤 | 이방성 도금 방법 및 박막 코일 |
| KR102069629B1 (ko) | 2014-05-08 | 2020-01-23 | 삼성전기주식회사 | 칩 전자부품 및 그 제조방법 |
| KR102004791B1 (ko) | 2014-05-21 | 2019-07-29 | 삼성전기주식회사 | 칩 전자부품 및 그 실장기판 |
| KR102047561B1 (ko) | 2014-05-23 | 2019-11-21 | 삼성전기주식회사 | 칩 전자부품 및 그 실장기판 |
| JP6311200B2 (ja) * | 2014-06-26 | 2018-04-18 | 住友電工プリントサーキット株式会社 | プリント配線板、電子部品及びプリント配線板の製造方法 |
| KR102025708B1 (ko) | 2014-08-11 | 2019-09-26 | 삼성전기주식회사 | 칩 전자부품 및 그 실장기판 |
| KR101832545B1 (ko) * | 2014-09-18 | 2018-02-26 | 삼성전기주식회사 | 칩 전자부품 |
| KR101598295B1 (ko) | 2014-09-22 | 2016-02-26 | 삼성전기주식회사 | 다층 시드 패턴 인덕터, 그 제조방법 및 그 실장 기판 |
| JP6406354B2 (ja) * | 2014-10-09 | 2018-10-17 | 株式会社村田製作所 | インダクタ部品 |
| KR101892689B1 (ko) | 2014-10-14 | 2018-08-28 | 삼성전기주식회사 | 칩 전자부품 및 칩 전자부품의 실장 기판 |
| KR102105397B1 (ko) | 2014-12-08 | 2020-04-28 | 삼성전기주식회사 | 칩 전자부품 및 그 실장기판 |
| WO2016147993A1 (ja) * | 2015-03-13 | 2016-09-22 | 住友電工プリントサーキット株式会社 | 平面コイル素子及び平面コイル素子の製造方法 |
| KR101823199B1 (ko) | 2015-04-16 | 2018-01-29 | 삼성전기주식회사 | 칩 전자부품 |
| KR102122929B1 (ko) | 2015-05-19 | 2020-06-15 | 삼성전기주식회사 | 칩 전자부품 및 그 실장기판 |
| KR102658611B1 (ko) * | 2016-11-03 | 2024-04-19 | 삼성전기주식회사 | 코일 전자 부품 |
| KR101876878B1 (ko) | 2017-03-16 | 2018-07-11 | 삼성전기주식회사 | 코일 부품 |
| US10847308B2 (en) | 2017-06-01 | 2020-11-24 | Samsung Electro-Mechanics Co., Ltd. | Coil component |
| KR101973437B1 (ko) | 2017-06-01 | 2019-09-02 | 삼성전기주식회사 | 코일 부품 |
| KR102004807B1 (ko) | 2017-06-13 | 2019-10-08 | 삼성전기주식회사 | 코일 부품 |
| KR102429685B1 (ko) | 2017-07-05 | 2022-08-05 | 삼성전기주식회사 | 박막형 인덕터 |
| KR101952873B1 (ko) | 2017-07-05 | 2019-02-27 | 삼성전기주식회사 | 박막형 인덕터 |
| KR101983191B1 (ko) | 2017-07-25 | 2019-05-28 | 삼성전기주식회사 | 인덕터 및 그 제조방법 |
| KR101994754B1 (ko) | 2017-08-23 | 2019-07-01 | 삼성전기주식회사 | 인덕터 |
| KR101983192B1 (ko) | 2017-09-15 | 2019-05-28 | 삼성전기주식회사 | 코일 전자부품 |
| KR101983193B1 (ko) | 2017-09-22 | 2019-05-28 | 삼성전기주식회사 | 코일 부품 |
| KR101998269B1 (ko) | 2017-09-26 | 2019-09-27 | 삼성전기주식회사 | 코일 부품 |
| KR102463332B1 (ko) | 2017-09-26 | 2022-11-07 | 삼성전기주식회사 | 코일 전자부품 |
| US10892086B2 (en) | 2017-09-26 | 2021-01-12 | Samsung Electro-Mechanics Co., Ltd. | Coil electronic component |
| KR102504067B1 (ko) | 2017-12-07 | 2023-02-27 | 삼성전기주식회사 | 박막형 코일 부품 |
| TWI798287B (zh) * | 2017-12-08 | 2023-04-11 | 日商日本電產理德股份有限公司 | Mi元件的製造方法及mi元件 |
| KR102511868B1 (ko) | 2017-12-20 | 2023-03-20 | 삼성전기주식회사 | 코일 전자부품 |
| KR102464311B1 (ko) | 2018-03-20 | 2022-11-08 | 삼성전기주식회사 | 인덕터 및 그 제조방법 |
| KR102560377B1 (ko) | 2018-04-25 | 2023-07-27 | 삼성전기주식회사 | 인덕터 |
| KR102185057B1 (ko) | 2018-07-04 | 2020-12-01 | 삼성전기주식회사 | 코일 부품 |
| JP7498447B2 (ja) * | 2019-03-04 | 2024-06-12 | 株式会社プリケン | コイル装置 |
| KR102099133B1 (ko) | 2019-07-03 | 2020-04-09 | 삼성전기주식회사 | 코일 부품 |
| KR102154199B1 (ko) | 2019-09-11 | 2020-09-09 | 삼성전기주식회사 | 칩 전자부품 및 그 실장기판 |
| KR102249294B1 (ko) | 2020-04-01 | 2021-05-07 | 삼성전기주식회사 | 코일 부품 |
| CN111477438A (zh) * | 2020-05-25 | 2020-07-31 | 深圳市麦捷微电子科技股份有限公司 | 一种一体成型功率电感用线圈及其制备方法 |
| JP7738420B2 (ja) * | 2021-07-21 | 2025-09-12 | Tdk株式会社 | コイル部品 |
-
1998
- 1998-01-12 JP JP00385398A patent/JP4046827B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11204337A (ja) | 1999-07-30 |
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