JP4043495B2 - ワーククランプ及びワイヤボンディング装置 - Google Patents
ワーククランプ及びワイヤボンディング装置 Download PDFInfo
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- JP4043495B2 JP4043495B2 JP2006116549A JP2006116549A JP4043495B2 JP 4043495 B2 JP4043495 B2 JP 4043495B2 JP 2006116549 A JP2006116549 A JP 2006116549A JP 2006116549 A JP2006116549 A JP 2006116549A JP 4043495 B2 JP4043495 B2 JP 4043495B2
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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Description
ワークのボンディングエリアに対してボンディングを行う際に酸化防止ガスの雰囲気にする内部中空部と、
前記内部中空部の下に設けられ、前記内部中空部に前記ボンディングエリアを入れるための下部開口部と、
前記内部中空部の上に設けられ、前記ボンディングエリアを露出させる上部開口部と、
前記内部中空部を覆い、且つ前記上部開口部の開口面積より広い面積を有するキャビティと、
前記キャビティに設けられ、前記キャビティに前記酸化防止ガスが導入されるガス導入口と、
前記キャビティの下方に繋げられ、前記ガス導入口から導入された前記酸化防止ガスを前記ワークのボンディングエリア以外の部分に吹き付ける孔と、
を具備することを特徴とする。
前記ワークを載置するステージと、
前記ワークを前記ステージ上に固定するワーククランプと、
前記ワークに対してボンディングを行うボンディングツールと、
を具備し、
前記ワーククランプは、
前記ワークのボンディングエリアが配置される内部中空部と、
前記内部中空部の上に設けられ、前記ボンディングエリアを露出させる上部開口部と、
前記内部中空部を覆い、且つ前記上部開口部の開口面積より広い面積を有するキャビティと、
前記キャビティに設けられ、前記キャビティに酸化防止ガスが導入されるガス導入口と、
前記キャビティに繋げられ、前記ステージ上に載置された前記ワークにおけるボンディングエリア以外の部分の上方に位置する孔とを有することを特徴とする。
図1は、本発明の実施の形態によるワイヤボンディング装置を示す斜視図である。図2は、図1に示すワーククランプの上面図である。図3は、図2に示すワーククランプによってワークをステージ上に保持してボンディングを行う状態を示す断面図であって、図2に示す矢印3−3に沿ったワーククランプの断面に相当する部分を示している。図4(A)は、図2に示すワーククランプをガス経路に沿った面で切断した断面図である。
ワークをヒーター7によって加熱してボンディングを行う際、ボンディングワイヤ、ボンディングチップ5及びリードフレーム6の酸化を防止するために、内部中空部10に酸化防止ガスを導入して酸化防止ガスの雰囲気とする。詳細には、まずガス入り口19a〜19dから酸化防止ガスをガス経路15a〜15dに導入し、その酸化防止ガスをガス導入口14a〜14dからキャビティ13に導入し、その酸化防止ガスをキャビティ13から内部中空部10に流すと共にキャビティ13から複数の孔21を通してスペース25に導入してリードフレーム6に吹き付け、内部中空部10から上部開口部11を通してワーククランプの外部に酸化防止ガスを放出し、スペース25のボンディングエリアから遠い側の端部から外部に酸化防止ガスを放出する。
2…ボンディングヘッド
4…レール
5…ボンディングチップ
6…リードフレーム
7…ヒーター
8…ボンディングツール(キャピラリ)
9…ワーククランプ
10…内部中空部
11…上部開口部
11a…下部開口部
12…リードフレーム
13…キャビティ
14a〜14d…ガス導入口
15a〜15d…ガス経路
16…ウインドクランプ
17…開口
18…ダイ
19a〜19d…ガス入り口
20…カバー
21…孔
22…キャビティ
23…蓋部
24…導管
25…スペース
26…ガス入り口
27…ボンディングステージ
28…中空スペース
29…上部プレート
Claims (4)
- ワイヤボンディング装置において用いられるワーククランプであって、
酸化防止ガスの雰囲気にしながらワークのボンディングエリアに対してボンディング作業を行う空間である内部中空部と、
前記内部中空部の下に設けられ、前記内部中空部に前記ボンディングエリアを入れるための下部開口部と、
前記内部中空部の上に設けられ、前記ボンディングエリアを露出させる上部開口部と、
前記上部開口部と前記下部開口部との間に位置する前記内部中空部の側方全体を覆い、且つ前記上部開口部の開口面積より広い面積を有するキャビティと、
前記キャビティの側方の外周に設けられ、前記ワーククランプ内に設けられた第1内壁と、
前記キャビティ上に設けられ、前記上部開口部に繋げられ、前記ワーククランプ内に設けられた第2内壁と、
前記キャビティ下に設けられ、前記下部開口部に繋げられ、前記ワーククランプ内に設けられた第3内壁と、
前記キャビティに設けられ、前記キャビティに前記酸化防止ガスが導入されるガス導入口と、
前記第3内壁から前記ワーククランプの外部に貫通して設けられ、前記ガス導入口から前記キャビティに導入された前記酸化防止ガスを前記ワークのボンディングエリア以外の部分に吹き付ける孔と、
を具備することを特徴とするワーククランプ。 - 請求項1において、前記ワークのボンディングエリアに対してボンディングを行う際に、前記酸化防止ガスは、前記ガス導入口から前記キャビティに導入され、前記キャビティから前記内部中空部に流されると共に前記キャビティから前記孔を通して前記ボンディングエリア以外の部分に吹き付けられ、前記内部中空部から前記上部開口部を通して外部に放出されることを特徴とするワーククランプ。
- ワークのボンディングエリアに対してワイヤボンディングを行う装置であって、
前記ワークを載置するステージと、
前記ワークを前記ステージ上に固定するワーククランプと、
前記ワークに対してボンディングを行うボンディングツールと、
を具備し、
前記ワーククランプは、
酸化防止ガスの雰囲気にしながら前記ワークのボンディングエリアに対してボンディング作業を行う空間である内部中空部と、
前記内部中空部の下に設けられ、前記内部中空部に前記ボンディングエリアが入れられる下部開口部と、
前記内部中空部の上に設けられ、前記ボンディングエリアを露出させる上部開口部と、
前記上部開口部と前記下部開口部との間に位置する前記内部中空部の側方全体を覆い、且つ前記上部開口部の開口面積より広い面積を有するキャビティと、
前記キャビティの側方の外周に設けられ、前記ワーククランプ内に設けられた第1内壁と、
前記キャビティ上に設けられ、前記上部開口部に繋げられ、前記ワーククランプ内に設けられた第2内壁と、
前記キャビティ下に設けられ、前記下部開口部に繋げられ、前記ワーククランプ内に設けられた第3内壁と、
前記キャビティに設けられ、前記キャビティに前記酸化防止ガスが導入されるガス導入口と、
前記第3内壁から前記ワーククランプの外部に貫通して設けられ、前記ガス導入口から前記キャビティに導入された前記酸化防止ガスを前記ステージ上に載置された前記ワークにおけるボンディングエリア以外の部分に吹き付ける孔とを有することを特徴とするワイヤボンディング装置。 - 請求項3において、前記孔と前記ボンディングエリア以外の部分との間に設けられたスペースを具備し、前記酸化防止ガスを、前記ガス導入口から前記キャビティに導入し、前記キャビティから前記内部中空部に流すと共に前記キャビティから前記孔を通して前記スペースに流し、前記内部中空部から前記上部開口部を通して外部に放出しながらボンディングを行うことを特徴とするワイヤボンディング装置。
Priority Applications (6)
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JP2006116549A JP4043495B2 (ja) | 2006-04-20 | 2006-04-20 | ワーククランプ及びワイヤボンディング装置 |
US12/226,348 US7975899B2 (en) | 2006-04-20 | 2007-03-10 | Work clamp and wire bonding apparatus |
KR1020087019612A KR101005488B1 (ko) | 2006-04-20 | 2007-04-10 | 워크 클램프 및 와이어 본딩 장치 |
CN2007800140429A CN101427359B (zh) | 2006-04-20 | 2007-04-10 | 工件夹具及引线接合装置 |
MYPI20084155A MY144367A (en) | 2006-04-20 | 2007-04-10 | Work clamp and wire bonding apparatus |
PCT/JP2007/057901 WO2007123026A1 (ja) | 2006-04-20 | 2007-04-10 | ワーククランプ及びワイヤボンディング装置 |
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JP2006116549A JP4043495B2 (ja) | 2006-04-20 | 2006-04-20 | ワーククランプ及びワイヤボンディング装置 |
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JP (1) | JP4043495B2 (ja) |
KR (1) | KR101005488B1 (ja) |
CN (1) | CN101427359B (ja) |
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JP5411529B2 (ja) * | 2009-02-27 | 2014-02-12 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 半導体装置の製造方法 |
JP5411553B2 (ja) * | 2009-03-31 | 2014-02-12 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 半導体装置の製造方法 |
CN101882562B (zh) * | 2009-05-08 | 2012-02-22 | 日月光封装测试(上海)有限公司 | 半导体封装用导线接合装置及其方法 |
KR101121849B1 (ko) * | 2010-03-31 | 2012-03-21 | 앰코 테크놀로지 코리아 주식회사 | 와이어 본딩 장치 |
US8186562B1 (en) * | 2010-12-14 | 2012-05-29 | Asm Technology Singapore Pte Ltd | Apparatus for increasing coverage of shielding gas during wire bonding |
WO2013111452A1 (ja) * | 2012-01-26 | 2013-08-01 | 株式会社新川 | 酸化防止ガス吹き出しユニット |
JP5804644B2 (ja) * | 2012-02-21 | 2015-11-04 | 超音波工業株式会社 | 超音波ワイヤボンディング装置および超音波ワイヤボンディング方法 |
JP2014075519A (ja) | 2012-10-05 | 2014-04-24 | Shinkawa Ltd | 酸化防止ガス吹き出しユニット |
US9521738B1 (en) | 2013-12-23 | 2016-12-13 | Flextronics Ap, Llc | Graphite sheet to protect SMT components from thermal exposure |
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JP6266167B2 (ja) * | 2015-11-05 | 2018-01-24 | 古河電気工業株式会社 | ダイボンディング装置およびダイボンディング方法 |
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KR102366278B1 (ko) * | 2020-08-05 | 2022-02-23 | 한국전자기술연구원 | 고속 스위칭 전력 변환 장치 |
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2006
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2007
- 2007-03-10 US US12/226,348 patent/US7975899B2/en not_active Expired - Fee Related
- 2007-04-10 CN CN2007800140429A patent/CN101427359B/zh active Active
- 2007-04-10 MY MYPI20084155A patent/MY144367A/en unknown
- 2007-04-10 KR KR1020087019612A patent/KR101005488B1/ko active IP Right Grant
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Publication number | Publication date |
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KR101005488B1 (ko) | 2011-01-04 |
MY144367A (en) | 2011-09-15 |
WO2007123026A1 (ja) | 2007-11-01 |
US20090134201A1 (en) | 2009-05-28 |
KR20080095249A (ko) | 2008-10-28 |
CN101427359A (zh) | 2009-05-06 |
JP2007288093A (ja) | 2007-11-01 |
US7975899B2 (en) | 2011-07-12 |
CN101427359B (zh) | 2011-01-19 |
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