JP4042179B2 - 薬液処理装置 - Google Patents

薬液処理装置 Download PDF

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Publication number
JP4042179B2
JP4042179B2 JP11825497A JP11825497A JP4042179B2 JP 4042179 B2 JP4042179 B2 JP 4042179B2 JP 11825497 A JP11825497 A JP 11825497A JP 11825497 A JP11825497 A JP 11825497A JP 4042179 B2 JP4042179 B2 JP 4042179B2
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Japan
Prior art keywords
brush
substrate
chemical
color filter
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11825497A
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English (en)
Japanese (ja)
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JPH10307406A (ja
JPH10307406A5 (https=
Inventor
伸二 富松
哲哉 後藤
哲男 鈴木
剛広 垣貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
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Toray Industries Inc
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Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP11825497A priority Critical patent/JP4042179B2/ja
Publication of JPH10307406A publication Critical patent/JPH10307406A/ja
Publication of JPH10307406A5 publication Critical patent/JPH10307406A5/ja
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Publication of JP4042179B2 publication Critical patent/JP4042179B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Filters (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Cleaning In General (AREA)
JP11825497A 1997-05-08 1997-05-08 薬液処理装置 Expired - Fee Related JP4042179B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11825497A JP4042179B2 (ja) 1997-05-08 1997-05-08 薬液処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11825497A JP4042179B2 (ja) 1997-05-08 1997-05-08 薬液処理装置

Publications (3)

Publication Number Publication Date
JPH10307406A JPH10307406A (ja) 1998-11-17
JPH10307406A5 JPH10307406A5 (https=) 2005-04-07
JP4042179B2 true JP4042179B2 (ja) 2008-02-06

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ID=14732069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11825497A Expired - Fee Related JP4042179B2 (ja) 1997-05-08 1997-05-08 薬液処理装置

Country Status (1)

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JP (1) JP4042179B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249906A (ja) * 2004-03-02 2005-09-15 Toppan Printing Co Ltd 液晶表示装置用カラーフィルタの洗浄装置及び洗浄方法
JP2006231144A (ja) * 2005-02-23 2006-09-07 Toray Monofilament Co Ltd 液晶画面洗浄用ブラシ毛材および液晶画面洗浄用ブラシ
CN103521491B (zh) * 2013-09-25 2015-05-20 京东方科技集团股份有限公司 清洗液吸取装置和显影液冲洗设备

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Publication number Publication date
JPH10307406A (ja) 1998-11-17

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