JP3865722B2 - Fine coarse motion device - Google Patents

Description

  The present invention is a fine coarse movement device, and in particular, a fine body capable of finely and coarsely moving a movable body (or a table) supporting a member to be moved in a predetermined direction in alignment with various precision machines and instruments. The present invention relates to the configuration of a coarse motion device.

  Conventionally, fine coarse movement devices have been used in precision machines, instruments, optical members, etc., and this type of device has been used in recent years in production research in the nanotechnology field dealing with carbon nanotubes. Used for alignment and positioning.

FIG. 7 shows an example of a conventional fine movement device. As shown in the figure, a movable table 3 is arranged on the base 1 via two guides 2A and 2B. 3 is configured to be movable in the vertical direction in the figure. This mobile base 3, the lever (lever) 4 is provided for the axial Z ₁₀ and the rotary shaft, the tip of the coarse micrometer 5 (ball 5B) is brought into contact with the right end (front) view of the lever 4 The micrometer 5 is attached to the fixed portion 1E of the base 1. On the other hand, a micrometer 6 for fine movement is disposed at the left end (front surface) of the lever 4, and the micrometer 6 is attached to the fixed portion 3 </ b> E of the moving table 3. Further, the moving table 3 is pulled downward in the figure by a spring 7 attached between the moving table 3 and the base 1. In the figure, only the lower side of the moving table 3 is shown, and the upper side of the moving table 3 exists above the lever 4 and the fixing portion 3E, and a member to be moved is arranged on the upper upper surface of the moving table 3. Is done.

According to such a fine movement device, when the operation portion 5A of the coarse movement micrometer 5 is rotated, the tip ball 5B moves linearly upward (or downward) in the drawing and pushes the right end of the lever 4. . Since the lever 4 is fixed to the moving table 3 by the axis Z ₁₀ and the rotation is restricted by the tip ball 6B of the fine movement micrometer 6, the moving table 3 is moved by the amount of movement by the coarse movement micrometer 5. It will move up and down. That is, if the feed amount of the micrometer 5 is Xa, the moving amount Y of the moving table 3 is Xa (Y = Xa), and a one-to-one movement is performed.

On the other hand, when the operation unit 6A of the micrometer 6 for fine movement is rotated, the tip ball 6B moves linearly to the upper side (or lower side) in the drawing (movement amount X ₁ ) and pushes the left end of the lever 4. At this time, the lever 4 attempts to right rotation, the mobile base 3 is _{Y 1 = a / (a +} b) the distance between the center and the axis _{Z 10} of the ball 5B of _{X 1} (Sodoyo micrometer 5 a, the axis Z ₁₀ and the distance between the center of the ball 6B of the fine micrometer 6 and b) only motion, since it is simultaneously secured micrometer 6 to the mobile base 3 moves only a / (a + b) X 1. This fine control micrometer 6 moves by _{a / (a + b) X} 1, the mobile base 3 is also _{Y 2 = a / (a +} b) Y 1 only motion, further fine control micrometer 6 so that moving the same amount As a result, the moving table 3 finally moves the Y in the following mathematical formula 1 that has undergone series conversion.

例えば、ａ：ｂ＝１：１０とした場合、１０対１の微動が行われる。
特開平１０−１８６１９８号公報

For example, when a: b = 1: 10, 10: 1 fine movement is performed.
JP-A-10-186198

  By the way, in recent years, it has been demanded that this type of fine coarse motion apparatus can set a more precise (fine) movement amount. However, when the apparatus of FIG. Therefore, it is necessary to increase the ratio of the distances a and b. However, there is a problem that the larger the ratio between the distances a and b, the larger the apparatus. For example, if a: b = 1: 100, a fine movement of 100 to 1 is possible, but the interval b is 10 times longer than the conventional one, which is an unrealistic size. On the other hand, the distance b can be shortened by reducing the distance a. However, in this case, there is a limit to precision, and a dense structure must be adopted, and the apparatus itself is expensive. It becomes.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a fine coarse motion apparatus capable of realizing movement with higher precision than before without increasing the size of the apparatus.

  In order to achieve the above object, a fine coarse motion apparatus according to the invention of claim 1 is provided with a base provided with a coarse motion operation member for coarse motion feed, a fine motion operation member for fine motion feed, A moving body (base) mounted on the base so as to move in one direction, an urging member for urging the moving body in the reverse direction of fine coarse feed, and one end side of the moving body is rotated. A first lever (lever) that is pivotally supported by a shaft and abuts the tip feed portion of the coarse operation member on the outside of the one-end rotating shaft, and a rotating shaft on the other end side of the first lever. A second lever (lever) that is pivotally supported at one end and the tip feed portion of the fine movement operating member is placed in contact with the other end, and the outer side of the rotating shaft at one end of the second lever is used as the moving body. Set to a fixed state (restricts movement in the opposite direction to fine coarse feed and sets a fulcrum at one end of the second lever). And a rotation restricting member for restricting rotation in the direction opposite to the moving direction outside the rotating shaft at one end of the second lever, and the movement in a one-to-one operation by the coarse operation member. The body is moved, and the movable body is moved with high precision by the fine movement operation member.

  According to a second aspect of the present invention, an intermediate lever and intermediate fixing means are provided between the first lever and the second lever, and one end of the intermediate lever is connected to the other end of the first lever as a rotating shaft. The other end is pivotally supported on one end of the second lever by a rotating shaft, and the intermediate fixing means fixes the outer side of the rotating shaft at one end of the intermediate lever to the moving body ( The fulcrum is set at one end of the intermediate lever).

  According to the above configuration, the one end (right end) of the first lever is moved in the feeding direction by the operation of the coarse operation member (for example, a micrometer), thereby performing the one-to-one coarse movement with respect to the moving body. By moving the other end (left end) of the second lever in the feed direction by operating the operation member (for example, a micrometer), for example, 100 to 1 movement is performed by series conversion, and fine movement with higher precision (minute) than before. Can be realized. Further, as described in claim 2, by providing the intermediate lever and the intermediate restricting member (a plurality of intermediate restriction members may be provided), it is possible to perform fine movement with higher precision, for example, 1000 to 1.

  According to the fine coarse motion apparatus of the present invention, the first lever and the second lever are coupled by the rotation shaft, and the rotation of the predetermined lever is restricted, and the triangular theorem, series conversion, and tangential direction on the circumference By utilizing the properties of the above, it becomes possible to realize movement with higher precision than before without increasing the size of the apparatus. In particular, contributions in the field of nanotechnology can be expected.

  In the present invention, not only the second lever is connected to the first lever and the fine movement operation / setting is performed, for example, 1/100 (Example 1), but an intermediate lever is disposed between these levers, for example, 1000 minutes. It is also possible to enable the fine movement operation / setting of 1 (Example 2).

  1 and 2 show the configuration of the fine coarse motion apparatus according to the first embodiment. FIG. 1 (A) is a diagram showing a state in which the top surface of the moving base is removed and the inside is exposed. 1 (B) is a cross-sectional view taken along the line II of FIG. 1 (A). As shown in the drawing, in this apparatus, a coarse movement micrometer (rough movement operation member) 12 is provided in a box-shaped fixing portion 10E provided on the right side of the base (base) 10 in the figure. The coarse movement micrometer 12 rotates the operation portion (knob) 12A to linearly move the action rod 12B in the vertical direction of the figure. The tip feed portion of the action rod 12B has a rotating ball (steel ball) 12C. is doing. A box-shaped moving table (moving body) 14 is disposed on the upper side of the base 10. The moving table 14 includes two guides (rails) 15 A and 15 B provided on the lower side and the base 10. Two guides (rails) 16A and 16B provided on the side and a plurality of cross rollers 17 arranged between these guides can be moved in a straight line with respect to the base 10 in the vertical direction in the figure. .

  Further, a spring (spring) 19 as an urging member is provided between the fixed pin 18A on the base 10 side and the fixed pin 18B on the movable table 14 side. It is pulled to the bottom of the figure. In the moving table 14, the upper surface of the box serves as a mounting (mounting) table for moving objects.

Above the protruding portion of the right end of the moving table 14, the right end (one end) is attached to the first lever 21 by a shaft Z ₁ as a rotation axis, the right end of the micrometer for the flutter in front of the first lever 21 Twelve tip balls (feeding portions) 12C are brought into contact with each other. Then, the left end of the first lever 21 (the other end), the axis Z ₂ which is a rotating shaft right end of the second lever 22 (one end) is attached. On the other hand, the movable table 14 is provided with a fine movement micrometer (fine movement operation member) 24. The fine movement micrometer 24 also rotates the operation portion (knob) 24A to move the action rod 24B in the vertical direction in the figure. The rotating ball 24C at the tip of the action rod 24B is brought into contact with the front surface of the left end (the other end) of the second lever 22 for linear movement.

Further, a fixing rod (locking rod) 25 as a fixing means is arranged for the second lever 22, and the rear end of the fixing rod 25 is fixed to the fixing portion 14 </ b> E of the movable table 14, rotating the ball 25C is brought into contact with the front surface of the outer (first lever-side) than the shaft Z ₂ at the right end of the second lever 22. Since the right end of the second lever 22 is fixed to the moving base 14 by the fixing rod 25, the second lever 22 rotates with the center C point of the ball 25C as a fulcrum.

The first embodiment is configured as described above, and its operation will be described with reference to FIGS. First, in the case of coarse feed, as shown in FIG. 3, by rotating the operation portion 12A of the coarse movement micrometer 12, the action rod 12B is sent to the upper side of the figure, and the first through the ball 12C. The right end of the lever 21 is pushed in the same direction. Here, the shaft Z ₁ , the fixed rod 25 that restricts rotation at the right end of the second lever 22, and the micrometer 24 for fine movement that is in contact with the left end of the second lever 22 are fixed to the moving base 14. Both the first lever 21 and the second lever 22 are pushed in the feeding direction, and the moving base 14 moves upward. The moving table 14 is moved in parallel with the coarse movement micrometer 12, and when the feed amount of the coarse movement micrometer 12 is Xa, the moving amount L of the moving table 3 is also X (L = Xa). Is moved.

Next, as shown in FIG. 4, the center (rotation center) point of the ball 24C of the fine micrometer 24 A, B the center point of the axis _{Z 2,} the center point of the ball 25C C, the axis _{Z 1} The center point is D, the center point of the ball 12C of the coarse movement micrometer 12 is E (the points A to E are on the same line), and the distance (interval) between the points A and C is a, the points B and C The fine feed operation will be described with b as the distance between points, c as the distance between points B and E, and d as the distance between points D and E. In FIG. 4A, by rotating the operation portion 24A of the micrometer for fine movement 24, the action rod 24B is sent to the upper side of the figure, and the second lever 22 is pushed in the same direction via the ball 24C (A Dot). Here, since the right end (point C) of the second lever 22 with which the ball 25C of the fixing rod 25 abuts is fixed and does not move, the point B rotates with the point C as a fulcrum as the point A moves.

即ち、第２レバー２２のＢ点は、Ｃ点を中心として回転運動することにより、上記数式２の量だけ移動することになる。この数式２の計算において、Ｂ点の移動軌跡はＥ点を中心とした円周上にあるが、円の接線方向での移動であるため、距離ｂ（Ｂ−Ｃ間）の変位は無視することができる［距離ａ（Ａ−Ｃ間）は一定］。 Movement amount L ₂ of the point B, when the amount of movement of the point A and L _1, is as in Equation 2.

That is, the point B of the second lever 22 moves by the amount of the above formula 2 by rotating around the point C. In the calculation of Equation 2, the movement trajectory of point B is on the circumference centering on point E, but the displacement at the distance b (between B and C) is ignored because the movement is in the tangential direction of the circle. [Distance a (between A and C) is constant].

When the point B moves, the first lever 21 rotates about the center E point of the ball 12C. If the movement amount of point B is l ₂ , the movement amount l _{3 of} point D is given by the following equation 3.

However, since the axis _{Z 1} is linked to the first lever 21 to the moving base 14, the point D is moved by (d / c) _{l 2,} also moved similarly (d / c) _{l 2} B points This movement amount moves the point D by {(d / c) l ₂ } × (d / c). While repeating such a movement relationship, the movement of the points B and D is completed. As a result, the movement amount L ₃ at the point D is as in Equation 4.

この移動量の計算において、距離ｃ（Ｃ−Ｅ間）の部分はＢ点がＥ点を中心とした半径ＢＥの円の接線方向に移動するので、このｃ（Ｃ−Ｅ間）の変位は無視することができる［距離ｄ（Ｄ−Ｅ間）は一定］。

In the calculation of the amount of movement, the distance c (between CE) moves from the point B in the tangential direction of the circle with the radius BE centered on the point E, so the displacement of c (between CE) is Can be ignored [distance d (between DE) constant].

FIG. 5 shows the relationship between the distance between the points of each lever 21 and 22 and the amount of movement. For example, in the above equation 2, when a: b = 10: 1 is set, the amount of movement L of point B is shown. ₂ is 1/10 of the movement amount L ₁ of the point A. Further, in the above equation 4, when c: d = 11: 1 is set, the movement amount L _{3 of the} point D is 1/10 of the above L _2. Become. Accordingly, the final moving amount of the moving table 14 that can be set by the micrometer for fine movement 24 is 1/100, and compared with the conventional apparatus of FIG. Become.

FIG. 6 shows the configuration of the second embodiment. In the second embodiment, an intermediate lever (two or more intermediate levers may be provided between the first lever 21 and the second lever 22). 27) is arranged. That is, the right end (one end) of the intermediate lever 27 is connected to the first lever 21 at the axis Z ₃ (point F), and the left end (the other end) is connected to the second lever 22 at the axis Z ₂ (point B). And the tip ball (point G) of the fixing rod 28 is brought into contact (locked) with the front surface of the right end (lever 27). Further, as in the first embodiment, the first lever 21 is connected and fixed to the movable table 14 by the axis Z ₁ (point D). The second lever 22 rotates with the point C as a fulcrum, the intermediate lever 27 rotates with the point G as a fulcrum, and the first lever 21 rotates with the point E as a fulcrum (these points A to G are aligned on the same line).

According to the second embodiment, by setting the distance e~j between each point of the point A ~G point, the amount of movement of the point B relative movement amount L ₁ at the point A by the fine control micrometer 24 On the moving table 14, L _{2 is set} to 1/10, the movement amount L ₃ at point F is set to 1/10 of the above L ₂ , and the movement amount L ₄ at point D is set to 1/10 of the above L ₃ . It becomes possible to realize high-accuracy movement of 1/1000.

  The fine movement device of the present invention can be used as an alignment device, a positioning device, a manipulator, or each device in the field of nanotechnology under the name of a translation stage or the like.

The structure of the fine coarse motion apparatus which concerns on Example 1 of this invention is shown, A figure (A) is a top view (The upper surface side of the moving stand is abbreviate | omitted), A figure (B) is II of figure (A). It is line sectional drawing. The exploded perspective view of the apparatus of Example 1 is shown, FIG. (A) is a block diagram of a 1st lever, a 2nd lever, and its related member, FIG. (B) is a block diagram of a moving stand side, FIG. (C) is a figure. It is a block diagram by the side of a base. It is explanatory drawing which shows the operation | movement of coarse movement operation in an Example. It is explanatory drawing which shows the operation | movement of fine movement operation in Example 1. FIG. It is a figure which shows the relationship between the distance between each point of each lever of Example 1, and a moving amount | distance. It is a figure which shows the structure of Example 2, and the relationship between the distance between each point of each lever, and movement amount. It is a figure which shows the structure of the conventional fine coarse motion apparatus.

Explanation of symbols

1,10 ... base,
3, 14 ... moving table, 4 ... lever,
5, 12 ... Coarse motion micrometer,
6, 24 ... Micrometer for fine movement,
5B, 6B, 12C, 24C, 25C ... rotating balls,
7, 19 ... spring (biasing member),
12A, 24A ... operation unit,
21 ... 1st lever, 22 ... 2nd lever,
25, 28 ... fixing rod,
27: Intermediate lever,
Z ₁ , Z ₂ , Z ₃ , Z ₁₀ ... rotation axis.

Claims (2)

A base provided with a coarse operation member for coarse feed;
A movable body provided with a fine movement operation member for fine movement feeding, and mounted to move in one direction on the base;
An urging member for urging the moving body in the reverse direction of the fine coarse feed;
A first lever that is pivotally supported at one end side by a rotating shaft with respect to the moving body, and the feed portion of the coarse operation member is disposed in contact with the outside of the one end rotating shaft;
A second lever that is pivotally supported on the other end side of the first lever by a rotary shaft, and the feeding portion of the fine movement operating member is disposed in contact with the other end side;
Fixing means for fixing the outer side of the rotating shaft at one end of the second lever to the movable body,
A fine coarse motion apparatus configured to move the movable body by a one-to-one operation with the coarse motion operation member and to move the movable body with a high precision motion by the fine motion operation member. An intermediate lever and intermediate fixing means are provided between the first lever and the second lever,
The intermediate lever has one end pivotally supported on the other end of the first lever by a rotating shaft, and the other end pivotally supported on the one end of the second lever by a rotating shaft,
2. The fine coarse movement apparatus according to claim 1, wherein the intermediate fixing means is arranged so that the outer side of the rotation shaft at one end of the intermediate lever is fixed to the moving body.

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