JP3854031B2 - Thin film magnetic head and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a thin film magnetic head for recording used for, for example, a floating magnetic head, and more particularly to a thin film magnetic head capable of appropriately reducing side fringing and capable of being manufactured with high reproducibility, and the manufacturing thereof. Regarding the method.
[0002]
[Prior art]
FIG. 24 is a partial front view showing the structure of a conventional thin film magnetic head (inductive head), and FIG. 25 is a partial sectional view of the thin film magnetic head of FIG.
[0003]
Reference numeral 1 shown in FIGS. 24 and 25 denotes a lower core layer made of a magnetic material such as permalloy, and insulating layers 3 are formed on both sides of the lower core layer 1.
[0004]
As shown in FIG. 24, a gap layer 4 and an upper magnetic pole layer 5 are formed on the lower core layer 1 with a track width Tw and exposed on the surface facing the recording medium. As shown in FIG. 25, the gap layer 4 is formed to extend long on the lower core layer 1 to a position where a base end portion 10b of the upper core layer 10 to be described later and the lower core layer 1 are in contact with each other. The upper magnetic pole layer 5 is formed to extend to the Gd determining insulating layer 6 formed on the gap layer 4. The gap layer 4 is made of, for example, SiO.₂It is made of a non-metal insulating material such as.
[0005]
As shown in FIGS. 24 and 25, insulating layers 7 are formed on both sides of the upper magnetic pole layer 5 in the track width direction (X direction in the drawing) and on the height side (Y direction in the drawing).
[0006]
A coil layer 13 is spirally formed on the insulating layer 7, and the coil layer 13 is filled with an insulating layer 9 made of an organic insulating material.
[0007]
An upper core layer 10 formed by frame plating, for example, is formed on the insulating layer 9, and a tip portion 10 a of the upper core layer 10 is magnetically connected to the upper magnetic pole layer 5, and recording is performed. It is exposed on the surface facing the medium. The base end portion 10 b of the upper core layer 10 is magnetically connected to the lower core layer 1.
[0008]
As shown in FIG. 24, the entire front end surface 10c of the upper core layer 10 is exposed on the surface facing the recording medium.
[0009]
Next, a method of manufacturing the thin film magnetic head shown in FIGS. 24 and 25 will be described with reference to FIGS.
[0010]
As shown in FIG. 26, for example, SiO 2 is formed on the entire surface of the lower core layer 1.₂A gap layer 4 made of an insulating material such as an insulating material is formed, and a resist layer 11 having a groove 11 a having a track width Tw is formed on the gap layer 4. The groove 11a is formed with a predetermined length in the height direction (Y direction in the drawing) from the surface facing the recording medium. Then, the upper magnetic pole layer 5 made of, for example, a NiFe alloy is plated in the groove 11a, and the resist layer 11 is removed.
[0011]
As shown in FIG. 27, the upper magnetic pole layer 5 is formed with a width dimension, that is, a track width Tw of 0.45 μm and a height dimension h1 of about 3.5 to 3.8 μm, for example.
[0012]
In FIG. 27, both sides of the upper magnetic pole layer 5 in the track width direction (X direction in the drawing) are etched by ion milling (trimming process). As shown in FIG. 28, the portion of the gap layer 4 protruding from the width dimension of the upper magnetic pole layer 5 in the track width direction is scraped off by the ion milling, and the upper surfaces on both sides of the lower core layer 1 are scraped. A protrusion 1b and an inclined surface 1a are formed on the upper surface of 1.
[0013]
In FIG. 29, Al is formed on the lower core layer 1 on both sides of the upper magnetic pole layer 5 and on the upper magnetic pole layer 5.₂O_ThreeThe insulating layer 7 is filled with an insulating layer 7, and the insulating layer 7 is further polished from the A-A line using a CMP technique or the like. This state is shown in FIG.
[0014]
Next, after forming the coil layer 13 and the insulating layer 9 shown in FIG. 25 on the insulating layer 7, as shown in FIG. 31 (partial plan view), the insulating layers 7 and 9 and the top pole layer 5 are formed. Then, a resist layer 12 is formed. Then, the pattern 12a portion of the resist layer 12 is exposed and further developed to remove the pattern 12a portion.
[0015]
When the magnetic material is plated in the pattern 12a and the resist layer 12 is removed, the upper core layer 10 is completed, and the shape near the tip of the thin film magnetic head has the structure shown in FIG.
[0016]
The trimming process described above is normally performed twice, and in the first trimming process, ion irradiation is performed with an inclination closer to perpendicular to the film surface direction of the lower core layer 1. By this step, the gap layer 4 extending on both sides of the lower surface of the upper magnetic pole layer 5 is cut, and further, a part of the lower core layer 1 below the gap layer 4 is also cut, and the protruding portion 1b is formed on the lower core layer 1. It is formed. In this process, there is a problem that the scraped magnetic particles of the gap layer 4 and the lower core layer 1 are reattached to the side surface of the upper magnetic pole layer 5, and therefore, the second trimming process is compared with the first trimming process. As a result, ion irradiation is performed from an oblique direction, and at the same time as the magnetic powder is removed, inclined surfaces 1 a and 1 a are formed on the upper surfaces on both sides of the lower core layer 1.
[0017]
[Problems to be solved by the invention]
However, in the structure of the thin film magnetic head shown in FIG. 24 and FIG. 25, the tip surface 10c of the upper core layer 10 having a width dimension larger than the track width Tw is exposed on the surface facing the recording medium. Side fringing occurs due to magnetic leakage between the core layer 10 and the upper magnetic pole layer 5, and when the side fringing occurs, the surface recording density is lowered.
[0018]
Therefore, in order to manufacture a thin film magnetic head that can cope with future high recording density, it is necessary to reduce the occurrence of side fringing simultaneously with the narrowing of the track width Tw.
[0019]
The thin film magnetic head manufacturing method shown in FIGS. 24 and 25 performs a trimming process. Due to this trimming process, variations in track width Tw and shape are generated, and the height of the top pole layer 5 is reduced. Problems such as severeness occur.
[0020]
The reason for performing the trimming step is that, in the state shown in FIG. 27, the gap layer 4 and the lower core layer 1 are formed to extend on both sides of the lower surface of the upper magnetic pole layer 5. This is because side fringing is likely to occur between the gaps 1, and the gap layer 4 spreading on both sides of the lower surface of the upper magnetic pole layer 5 is shaved by the trimming process as shown in FIG. It has been considered that by forming the portion 1b and the inclined surface 1a, the distance between the upper magnetic pole layer 5 and the lower core layer 1 can be increased, and the occurrence of side fringing can be appropriately reduced.
[0021]
However, in the case of performing the milling process, the variation in the amount of magnetic particles adhering to both sides of the upper magnetic pole layer 5 and the variation in removing the magnetic particles, and further, the first trimming process is performed in the film surface direction of the lower core layer 1 as described above. On the other hand, when the ion irradiation is performed from a direction closer to the vertical, the height of the upper magnetic pole layer 5 is significantly reduced. As a result, the track width Tw and the shape of the upper magnetic pole layer 5 are likely to vary. In addition, the height dimension of the upper magnetic pole layer 5 is significantly reduced and the height dimension varies.
[0022]
Therefore, when the trimming process is performed, the reproducibility in manufacturing the thin film magnetic head is deteriorated, and the volume of the upper magnetic pole layer 5 is reduced due to the reduction in the height dimension of the upper magnetic pole layer 5. However, the magnetic saturation is easily reached and the recording characteristics are deteriorated.
[0023]
The present invention is intended to solve the above-described conventional problems, and particularly to provide a thin-film magnetic head that can appropriately prevent side fringing and can be manufactured with good reproducibility, and a method for manufacturing the same. It is aimed.
[0024]
[Means for Solving the Problems]
  A lower core layer,
  A lower magnetic pole layer, a gap layer, and an upper magnetic pole layer are sequentially laminated on the lower core layer, or a gap core and an upper magnetic pole layer are laminated in this order, and a recording core exposed on a surface facing the recording medium;
  An upper core layer magnetically bonded onto the upper pole layer of the recording core;
  In the thin film magnetic head having the lower core layer, the recording core, and a coil for inducing a magnetic field for recording in the upper core layer,
  The recording core has a front end region having a constant width in the track width direction from the surface facing the recording medium in the height direction, and a width in the track width direction in the height direction starting from a height side end of the front end region. A rear end region that gradually widens,
  The front end surface of the upper core layer facing the recording medium is in a position retracted in the height direction from the front surface facing the recording medium, and the front end surfaceWholeIs an inclined surface or curved surface that gradually deepens in the height direction from the lower core layer side toward the upper core layer side.And is formed in a curved shape that gradually deepens in the height direction as it goes to both sides in the track width direction,
  The shortest receding distance L3 from the surface facing the recording medium to the tip surface of the upper core layer is not more than the longest length dimension in the height direction from the facing surface of the recording core, and the recording core Formed shorter than the length dimension of the tip region,
  The width dimension in the track width direction of the upper core layer at the end joined on the upper pole layer is larger than the width dimension in the track width direction of the upper pole layer, and the upper core layer A thin film magnetic head, wherein the thin film magnetic head is bonded to the entire surface of the rear end region of the core.
[0025]
  As described above, in the present invention, the tip surface of the upper core layer is formed so as to recede in the height direction from the surface facing the recording medium, and further, the inclined surface deepens in the height direction from the lower core layer side to the upper core layer side. Alternatively, since it is formed with a curved surface, the tip surface of the upper core layer is not exposed as in the prior art. Therefore, according to the present invention, side fringing can be prevented appropriately. Thus, it is possible to efficiently flow the magnetic flux from the upper core layer to the upper magnetic pole layer, and it is possible to manufacture a thin film magnetic head that can cope with future higher recording density.
  In the present invention, it is preferable that the front end surface of the upper core layer facing the recording medium has a curved shape that gradually recedes in the height direction toward both sides in the track width direction. With this configuration, the occurrence of side fringing can be further suppressed.
  In addition, since the tip surface of the upper core layer is formed in a curved shape, when the upper core layer is patterned on the upper magnetic pole layer, the formation position of the upper core layer is relative to the upper magnetic pole layer. Even if it is formed slightly deviated from the predetermined position, the occurrence of side fringing can be reduced as compared with the conventional case.
[0026]
In the present invention,The receding distance L3 is preferably 0 μm <L3 ≦ 0.8 μm.
[0027]
In the present invention, the upper core layer is formed with a back surface positioned on the height side of the tip surface, and the back surface is directed in the height direction from the lower core layer side toward the upper core layer side. It is a curved surface or inclined surface that gradually deepens,
The inclination angle with respect to the height direction of the inclined surface formed on the back surface, or the inclination angle with respect to the height direction of the tangent line at the midpoint between the lower core layer end and the upper core layer end of the curved surface is θ1,
The inclination angle of the inclined surface formed on the tip surface of the upper core layer with respect to the height direction, or the height direction of the tangent line at the midpoint between the lower core layer end and the upper core layer end of the curved surface When the tilt angle is θ2,
The θ2 is preferably larger than the θ1.
[0028]
With this configuration, the magnetic flux from the upper core layer can be efficiently flowed to the upper magnetic pole layer, and the recording characteristics can be improved.
[0029]
  The inclination angle θ2 is preferably 60 ° ≦ θ2 <90.
[0031]
In the case of the above configuration, when the tangent line that contacts the terminal end of the curved surface shape in the track width direction is a virtual line, the inclination of the virtual line with respect to the track width direction is 30 ° or more and 60 ° or less. preferable.
[0032]
Further, in the present invention, the upper core layer has a height starting from a tip end region extending in a height direction from a curved end portion of the tip end surface and having a constant width in the track width direction, and a height end of the tip end region. It is preferable to have a rear end region in which the width dimension in the track width direction gradually increases toward the direction.
[0033]
  In the present inventionThe width dimension in the track width direction of the upper core layer at the end joined on the upper pole layer is larger than the width dimension in the track width direction of the upper pole layer..With this configuration, the magnetic flux from the upper core layer can be efficiently passed through the upper magnetic pole layer, and the recording characteristics can be improved.
[0034]
  Further, in the present invention, the recording core has a track width in the height direction starting from a tip region having a constant width in the track width direction from the surface facing the recording medium in the height direction and a height side end of the tip region. And a rear end region whose width dimension in the direction gradually increases..When the rear end region having the wide track width Tw is thus formed, the contact area between the recording core and the upper core layer can be increased.The upper core layer is formed so as to overlap the rear end portion of the recording core.
[0035]
In the case of the above configuration, it is preferable that the upper core layer is formed so as to overlap at least the rear end portion of the recording core.
[0036]
In the present invention, the gap layer is preferably formed of a nonmagnetic metal material that can be plated, and the nonmagnetic metal material is NiP, NiPd, NiW, NiMo, Au, Pt, Rh, Pd, It is preferable that it is selected from one or more of Ru and Cr.
[0037]
  The method of manufacturing the thin film magnetic head in the present invention is as follows.
(A) On the lower core layer, the lower magnetic pole layer, the gap layer, and the upper magnetic pole layer are laminated in this order, and the dimensions of the lower magnetic pole layer and the upper magnetic pole layer in the track width direction are determined on the surface facing the recording medium; Alternatively, the gap layer and the upper magnetic pole layer are sequentially laminated, and the width dimension in the track width direction of the upper magnetic pole layer is determined on the surface facing the recording medium, and the track width direction in the height direction from the surface facing the recording medium is determined. Forming a recording core having a leading end region having a constant width dimension and a trailing end region in which the width dimension in the track width direction gradually increases in the height direction starting from the height-side end of the leading end region;
(B) forming an insulating layer around the recording core before the step (a) or after the step (a), and making the upper surface of the recording core and the insulating layer flush with each other; ,
(C) forming a resist layer on the recording core and the insulating layer;
(D) forming a blanking pattern for forming an upper core layer in the resist layer, and exposing the region other than the pattern of the resist layer, and developing the resist layer thereafter; The surface to be the tip of the core layerWholeAre inclined surfaces or curved surfaces that recede in the height direction as they rise from the lower core layer side.And a curved surface shape that gradually recedes in the height direction toward both sides of the track width direction,At this time, the surface to be the tip surface is formed at a position retreated in the height direction from the formation position of the surface facing the recording medium, and from the surface facing the recording medium to the surface to be the tip surface of the upper core layer. The shortest receding distance L3 is formed to be shorter than the longest length dimension in the height direction from the facing surface of the recording core and shorter than the length dimension of the tip region of the recording core, and further on the upper magnetic pole layer The width dimension in the track width direction of the upper core layer at the end joined to the recording medium is larger than the width dimension in the track width direction of the upper magnetic pole layer, and the upper core layer has the rear end region of the recording core. A step of defining a width dimension of the pattern so as to be bonded to the entire surface of
(E) The magnetic material is plated in the pattern, and the tip surface is in a position retracted in the height direction from the surface facing the recording medium according to the pattern, and the tip surfaceWholeBecomes an inclined surface or curved surface that gradually becomes deeper in the height direction as it moves away from the lower core layer sideIn addition, the curved surface shape gradually recedes in the height direction as it goes to both sides in the track width direction.Forming an upper core layer;
  It is characterized by having.
[0039]
In the present invention, the gap layer is preferably formed of a nonmagnetic metal material that can be plated. Specifically, the nonmagnetic metal material may be NiP, NiPd, NiW, NiMo, Au, Pt, Rh. , Pd, Ru, Cr are preferably selected from one or more.
[0040]
According to the manufacturing method of the present invention, there is provided a thin film magnetic head capable of manufacturing a thin film magnetic head with good reproducibility without variation in track width Tw and height of the recording core and capable of suppressing the occurrence of side fringing. It can be formed easily.
[0041]
Further, when the resist layer used for pattern formation of the upper core layer is exposed and developed, a region other than the pattern is exposed and developed, so that the lower core layer side is formed on the tip surface of the patterned upper core layer. It is possible to form an inclined surface or a curved surface that becomes deeper in the height direction from to the upper core layer side.
[0042]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a partial front view showing the structure of a thin film magnetic head according to the present invention, FIG. 2 is a partial sectional view of the thin film magnetic head shown in FIG. 1 is an example of a partial plan view of a thin film magnetic head in the present invention.
[0043]
The thin film magnetic head shown in FIG. 1 is an inductive head for recording. In the present invention, a reproducing head (MR head) using a magnetoresistive effect may be laminated below the inductive head.
[0044]
Reference numeral 20 shown in FIGS. 1 and 2 denotes a lower core layer formed of a magnetic material such as permalloy, for example. When a reproducing head is stacked below the lower core layer 20, a shield layer that protects the magnetoresistive element from noise may be provided separately from the lower core layer 20, or The lower core layer 20 may function as an upper shield layer of the reproducing head without providing the shield layer.
[0045]
As shown in FIG. 1, insulating layers 23 are formed on both sides of the lower core layer 20. As shown in FIG. 1, the upper surface 20a of the lower core layer 20 extending from the base end of the lower magnetic pole layer 21 to be described later may be formed extending in a direction parallel to the track width direction (X direction in the drawing). In addition, inclined surfaces 20b, 20b that are inclined in a direction away from the upper core layer 26 may be formed. By forming the inclined surfaces 20b, 20b on the upper surface of the lower core layer 20, the occurrence of side fringing can be more appropriately reduced.
[0046]
As shown in FIGS. 1 and 2, a recording core 24 is formed on the lower core layer 20, and the recording core 24 is exposed on the surface facing the recording medium. In this embodiment, the recording core 24 is a so-called track width restricting portion formed with a track width Tw. The track width Tw is preferably 0.7 μm or less, and more preferably 0.5 μm or less.
[0047]
In the embodiment shown in FIGS. 1 and 2, the recording core 24 has a laminated structure of a three-layer film of a lower magnetic pole layer 21, a gap layer 22, and an upper magnetic pole layer 35. Hereinafter, the magnetic pole layers 21 and 35 and the gap layer 22 will be described.
[0048]
As shown in FIGS. 1 and 2, a lower magnetic pole layer 21 that is the lowest layer of the recording core 24 is formed on the lower core layer 20 by plating. The lower magnetic pole layer 21 is magnetically connected to the lower core layer 20, and the lower magnetic pole layer 21 may be formed of the same material as or different from the lower core layer 20. Either a single layer film or a multilayer film may be used. The height of the lower magnetic pole layer 21 is, for example, about 0.3 μm.
[0049]
As shown in FIGS. 1 and 2, a nonmagnetic gap layer 22 is laminated on the lower magnetic pole layer 21.
[0050]
In the present invention, the gap layer 22 is preferably formed of a nonmagnetic metal material and plated on the lower magnetic pole layer 21. In the present invention, it is preferable to select one or more of NiP, NiPd, NiW, NiMo, NiRh, Au, Pt, Rh, Pd, Ru, and Cr as the nonmagnetic metal material. The layer 22 may be formed of a single layer film or a multilayer film. The height of the gap layer 22 is, for example, about 0.2 μm.
[0051]
Next, an upper magnetic pole layer 35 that is magnetically connected to an upper core layer 26 described later is plated on the gap layer 22. The upper magnetic pole layer 35 may be formed of the same material as the upper core layer 26 or may be formed of a different material. Either a single layer film or a multilayer film may be used. The height of the upper magnetic pole layer 35 is, for example, about 2.4 μm to 2.7 μm.
[0052]
As described above, if the gap layer 22 is formed of a nonmagnetic metal material, the lower magnetic pole layer 21, the gap layer 22, and the upper magnetic pole layer 35 can be continuously formed by plating.
[0053]
In the present invention, the recording core 24 is not limited to the laminated structure of the three-layer film. The recording core 24 may be formed of a two-layer film including a gap layer 22 and an upper magnetic pole layer 35.
[0054]
As described above, the lower magnetic pole layer 21 and the upper magnetic pole layer 35 constituting the recording core 24 may be formed of the same material or different materials from the core layer to which each magnetic pole layer is magnetically connected. However, in order to improve the recording density, the lower magnetic pole layer 21 and the upper magnetic pole layer 35 facing the gap layer 22 have a saturation magnetic flux higher than the saturation magnetic flux density of the core layer to which each magnetic pole layer is magnetically connected. It preferably has a density. Thus, since the lower magnetic pole layer 21 and the upper magnetic pole layer 35 have a high saturation magnetic flux density, it is possible to concentrate the recording magnetic field in the vicinity of the gap and improve the recording density.
[0055]
As shown in FIG. 2, a plating base layer 25 is formed between the lower magnetic pole layer 21 and the lower core layer 20.
[0056]
As shown in FIG. 2, the recording core 24 is formed with a length L1 from the surface facing the recording medium (ABS surface) to the height direction (Y direction in the drawing).
[0057]
As shown in FIG. 2, a Gd determining insulating layer 27 formed of, for example, a resist is formed on the lower core layer 20, and the surface of the Gd determining insulating layer 27 is formed in a curved shape, for example. Yes. As shown in FIG. 2, an upper magnetic pole layer 35 is formed to extend on the curved surface.
[0058]
As shown in FIG. 2, the height h2 of the upper magnetic pole layer 35 on the Gd determining insulating layer 27 is, for example, about 1.4 μm to 1.7 μm. In the prior art, it was formed smaller than the height dimension h2, and the volume of the upper magnetic pole layer could not be obtained. However, in the present invention, the height dimension h2 of the upper magnetic pole layer 35 is increased. The volume of the upper magnetic pole layer 35 can be increased.
[0059]
The reason for this is that, in the present invention, a trimming process from the direction perpendicular to the film surface of the lower core layer 20 is not required, as will be described in the manufacturing method described later.
[0060]
Further, by forming the upper magnetic pole layer 35 on the Gd determining insulating layer 27, the length L1 of the upper magnetic pole layer 35 can be formed longer, so that the volume of the upper magnetic pole layer 35 can be further increased and high recording can be achieved. Also in the density increase, the magnetic saturation of the upper magnetic pole layer 35 can be reduced, and the recording characteristics can be improved.
[0061]
Further, as shown in FIG. 2, the length dimension L2 from the front surface of the Gd determining insulating layer 27 to the surface facing the recording medium is regulated as a gap depth Gd, and the gap depth Gd is the thickness of the thin film magnetic head. Since the electric characteristics are greatly affected, the length is set in advance.
[0062]
In the embodiment of FIG. 2, the gap depth Gd is regulated by the formation position of the Gd determining insulating layer 27 formed on the lower core layer 20.
[0063]
As shown in FIG. 2, a coil layer 29 is spirally wound on the lower core layer 20 via an insulating base layer 28 behind the recording core 24 in the height direction (Y direction in the drawing). Yes. The insulating underlayer 28 is made of, for example, AlO, Al₂O_Three, SiO₂, Ta₂O_Five, TiO, AlN, AlSiN, TiN, SiN, Si_ThreeN_Four, NiO, WO, WO_Three, BN, CrN, and SiON are preferably formed of an insulating material made of at least one kind.
[0064]
Further, the pitch between the conductor portions of the coil layer 29 is filled with an insulating layer 30. The insulating layer 30 is made of AlO, Al₂O_Three, SiO₂, Ta₂O_Five, TiO, AlN, AlSiN, TiN, SiN, Si_ThreeN_Four, NiO, WO, WO_Three, BN, CrN, or SiON.
[0065]
As shown in FIG. 1, the insulating layer 30 is formed on both sides of the recording core 24 in the track width direction (X direction in the drawing), and the insulating layer 30 is exposed on the surface facing the recording medium.
[0066]
As shown in FIG. 2, an insulating layer 31 made of an organic insulating material such as resist or polyimide is formed on the insulating layer 30, and a second coil layer 33 is spirally formed on the insulating layer 31. It is wound in a shape.
[0067]
As shown in FIG. 2, the second coil layer 33 is covered with an insulating layer 32 formed of an organic material such as resist or polyimide, and an upper portion formed of NiFe alloy or the like is formed on the insulating layer 32. The core layer 26 is patterned by, for example, a frame plating method.
[0068]
As shown in FIG. 2, the distal end portion 26 a of the upper core layer 26 is formed by being magnetically connected to the upper magnetic pole layer 35, and the proximal end portion 26 b of the upper core layer 26 is formed of the lower core layer 20. A magnetic layer is formed on the lifting layer 36 made of a magnetic material such as a NiFe alloy. The lifting layer 36 may not be formed. In this case, the base end portion 26 b of the upper core layer 26 is directly connected to the lower core layer 20.
[0069]
In the thin film magnetic head shown in FIG. 2, two coil layers are laminated, but may be formed of one layer. In this case, for example, on the lower core layer 20 and behind the recording core 24 in the height direction is filled with the insulating layer 30, and a coil layer is formed on the insulating layer 30. Alternatively, the second coil layer 33 shown in FIG. 2 is not formed, and the upper core layer 26 is formed along the insulating layer 31.
[0070]
By the way, in the present invention, as shown in FIGS. 1 and 2, the front end surface 26c of the upper core layer 26 is not exposed on the surface facing the recording medium, but in the height direction (Y in the drawing) from the surface facing the recording medium. Direction).
[0071]
As described above, in the present invention, the front end surface 26c of the upper core layer 26 is formed so as to recede in the height direction from the surface facing the recording medium, so that the occurrence of side fringing can be appropriately reduced. It has become.
[0072]
As shown in FIG. 1, the width dimension in the track width direction (X direction in the drawing) of the tip surface 26c of the upper core layer 26 is T1, and this width dimension T1 is formed larger than the track width Tw. For this reason, when the front end surface 26c of the upper core layer 26 is exposed on the surface facing the recording medium, side fringing is likely to occur due to leakage magnetic flux between the upper core layer 26 and the upper magnetic pole layer 35. Thus, it is impossible to manufacture a thin film magnetic head that can cope with a higher recording density.
[0073]
Therefore, in the present invention, as described above, the front end surface 26c of the upper core layer 26 is retracted in the height direction from the surface facing the recording medium so that the front end surface 26c is not exposed to the surface facing the recording medium. ing.
[0074]
As a result, side fringing can be appropriately prevented between the upper magnetic pole layer 35 exposed on the surface facing the recording medium and the upper core layer 26, and the thin film magnetic film can be used for future increases in recording density. A head can be manufactured.
[0075]
2 and 3, the shortest receding distance L3 from the surface facing the recording medium to the tip surface 26c of the upper core layer 26 is the longest length dimension in the height direction from the facing surface of the recording core. (= L1) or less, and preferably 0 μm <L3 ≦ 0.8 μm.
[0076]
By setting the receding distance L3 to 0.8 μm or less, the magnetic flux of the upper core layer 26 can be caused to flow into the upper magnetic pole layer 35 with relatively no loss.
[0077]
Further, as shown in FIG. 2, the tip surface 26c of the upper core layer 26 is an inclined surface that gradually becomes deeper in the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side (the Z direction in the drawing). It is formed with. Alternatively, the tip surface 26c may be formed as a curved surface that gradually becomes deeper in the height direction from the lower core layer side to the upper core layer side.
[0078]
That is, when the tip surface 26c is inclined at an angle θ2 with respect to the height direction (Y direction in the figure), or when the tip surface 26c is formed as a curved surface, the lower core layer side end and the upper core layer side end of the curved surface. The inclination angle θ2 with respect to the height direction of the tangent at the midpoint is formed at least smaller than 90 °.
[0079]
The advantage of making the tilt angle θ2 smaller than 90 ° is as follows. That is, as shown in FIG. 2, the upper core layer 26 has, for example, Al.₂O_ThreeIs covered with a protective layer 34 formed of an insulating material such as the above, but by making the inclination angle θ2 smaller than 90 °, the distance B between the front end portion 26a of the upper core layer 26 and the recording medium is This is because the protective layer 34 can be completely filled without forming a cavity.
[0080]
As described above, the inclination angle θ2 of the front end surface 26c of the upper core layer 26 is preferably smaller than 90 °. However, it may not be formed as small as possible. In the present invention, the upper core layer 26 includes the A back surface 26d with respect to the front end surface 26c is formed of a curved surface or an inclined surface that deepens in the height direction from the lower core layer side to the upper core layer side, and the inclination angle of the inclined surface with respect to the height direction or the lower core layer side of the curved surface When the inclination angle with respect to the height direction of the tangent at the middle point between the terminal end and the terminal end on the upper core layer is θ1, the inclination angle θ2 is preferably larger than the inclination angle θ1.
[0081]
Thus, by making the inclination angle θ2 of the tip surface 26c larger than the inclination angle θ1 of the back surface 26d, it is possible to prevent the tip portion 26a of the upper core layer 26 from being tapered, and the magnetic flux from the upper core layer 26 can be prevented. Can be efficiently passed through the upper magnetic pole layer 35, and the recording characteristics can be improved.
[0082]
Furthermore, in the present invention, the inclination angle θ2 of the tip surface 26c is preferably in the range of 60 ° ≦ θ2 <90 °. When the inclination angle θ2 of the tip surface 26c is formed to be smaller than 60 °, the above-described taper of the tip portion 26a of the upper core layer 26 becomes conspicuous, and the volume of the tip portion 26a is reduced. This is because the efficiency of transmission of magnetic flux flowing from the upper core layer 26 to the upper magnetic pole layer 35 is likely to deteriorate.
[0083]
When the tip surface 26c is formed as a curved surface that gradually becomes deeper in the height direction from the lower core layer side to the upper core layer side, the curved surface may be formed in a convex shape or a concave shape. It may be.
[0084]
Next, as shown in FIG. 3, the front end surface 26c of the upper core layer 26 is formed in a curved shape that gradually recedes in the height direction as it goes in the track width direction.
[0085]
As described above, the tip surface 26c of the upper core layer 26 is not formed in a planar shape in the track width direction as in the prior art, but is formed in a curved shape, so that there is no corner between the tip surface 26c and the side surface. Magnetic flux leakage between the upper core layer 26 and the upper magnetic pole layer 35 can be further reduced, and the occurrence of side fringing can be further reduced.
[0086]
Further, by forming the front end surface 26c of the upper core layer 26 in a curved shape in the track width direction, even if the formation position of the upper core layer 26 with respect to the upper magnetic pole layer 35 is slightly shifted in the track width direction (X direction in the drawing). The influence of side fringing can be reduced as compared with the case where the tip surface 26c is formed in a planar shape in the track width direction. Therefore, it is possible to manufacture a thin film magnetic head that can appropriately reduce the occurrence of side fringing even if the alignment accuracy of the upper core layer 26 with respect to the upper magnetic pole layer 35 is somewhat lowered.
[0087]
In the present invention, when the tangent line in contact with the end portion 26e in the track width direction of the curved surface is defined as a virtual line E, the inclination θ4 of the virtual line E with respect to the track width direction (X direction in the drawing) is 30 °. The angle is preferably 60 ° or less.
[0088]
By setting the inclination θ4 to 30 ° or more and 60 ° or less, the magnetic flux transmission efficiency flowing from the upper core layer 26 to the upper magnetic pole layer 35 is not lowered, and the front end surface 26c of the upper core layer 26 faces the recording medium. The side fringing from the tip surface 26c can be suppressed to substantially zero.
[0089]
Further, as shown in FIG. 3, the upper core layer 26 extends from the curved end portions 26e, 26e of the tip end surface 26c in the height direction and has a tip end region F having a constant width in the track width direction, and the tip end. Although it is configured with the rear end region G in which the width dimension in the track width direction gradually increases in the height direction (Y direction in the drawing) starting from the height side end of the region F, the shape is not limited to this.
[0090]
For example, the tip region F may be formed so that the width dimension extends in the height direction by the imaginary line E described above.
[0091]
As described above, in the thin film magnetic head shown in FIGS. 1 and 2, the tip end portion 26a of the upper core layer 26 is formed so as to recede in the height direction (Y direction in the drawing) from the surface facing the recording medium. The front end surface 26c of the core layer 26 is formed as an inclined surface or a curved surface that gradually becomes deeper in the height direction from the lower core layer side to the upper core layer side (Z direction in the drawing), and the front end surface 26c has both sides in the track width direction. It is formed in a curved surface shape that gradually recedes in the height direction as it goes to.
[0092]
Next, as shown in FIG. 3, the width dimension of the upper core layer 26 at the end joined on the upper magnetic pole layer 35 is larger than the width dimension of the upper magnetic pole layer 35 in the track width direction. I understand that. As a result, the magnetic flux from the upper core layer 26 can be efficiently passed through the upper magnetic pole layer 35, and the recording characteristics can be improved.
[0093]
In the present invention, in the portion where the upper core layer 26 and the recording core 24 overlap, the width dimension of the upper core layer 26 in the track width direction is twice to 2.5 times the width dimension of the recording core 24 in the track width direction. It is preferable that it is about twice. Within this range, when the upper core layer 26 is formed on the recording core 24, the upper surface of the recording core 24 is easily and reliably stacked within the width dimension of the upper core layer 26. In the upper magnetic pole layer 35.
[0094]
Further, as shown in FIG. 3, the recording core 24 is formed by a three-layer film of the lower magnetic pole layer 21, the gap layer 22 and the upper magnetic pole layer 35, or is formed by a two-layer film of the gap layer 22 and the upper magnetic pole layer 35. The recording core 24 has a leading end region C formed with a track width Tw in the height direction (Y direction in the drawing) from the surface facing the recording medium, and a height direction end of the leading end region C in the height direction. The rear end region D gradually increases in width.
[0095]
As described above, since the recording core 24 has the rear end region D formed with a width dimension wider than the track width Tw, the contact area with the upper core layer 26 can be increased, and the upper core layer 26 can be increased. Thus, it is possible to efficiently flow the magnetic flux from the upper magnetic pole layer 35.
[0096]
For this reason, the upper core layer 26 formed on the recording core 24 is joined to at least the rear end region D of the recording core 24 to increase the contact area between the upper core layer 26 and the recording core 24. Is preferable.
[0097]
In the present invention, the length dimension L4 of the tip region C formed with the track width Tw is preferably formed within the range of 0.2 μm <L4 ≦ 3.0 μm.
[0098]
If formed smaller than the above range, the length dimension of the tip region C of the recording core 24 becomes too short, and the width dimension of the recording core 24 exposed from the surface facing the recording medium is set to a predetermined track. It becomes difficult to regulate by the width Tw.
[0099]
On the other hand, if the upper core layer 26 is formed longer than the above range, the upper core layer 26 hardly overlaps on the rear end region D of the upper magnetic pole layer 35, and the upper magnetic layer 35 overlaps more in the front end region C. As a result, the advantage of increasing the contact area between the upper core layer 26 and the upper magnetic pole layer 35 cannot be utilized.
[0100]
FIG. 4 is a partial plan view of the thin film magnetic head of the present invention showing another shape of the recording core 24.
[0101]
As shown in FIG. 4, the recording core 24 is formed with a track length Tw and a predetermined length L5 from the surface facing the recording medium in the height direction (Y direction in the drawing). That is, in the embodiment shown in FIG. 4, the rear end region D having a width dimension larger than the track width Tw is not formed in the recording core 24 as in the embodiment shown in FIG.
[0102]
The shape of the recording core 24 shown in FIG. 4 has the advantage that the track width Tw can be appropriately regulated, although the contact area with the upper core layer 26 is smaller than the shape of the recording core 24 shown in FIG.
[0103]
The length L5 of the recording core 24 is preferably formed within a range of 0.8 μm ≦ L5 ≦ 6.0 μm. When the length L5 is 0.8 μm or more, the magnetic flux transmission efficiency flowing from the upper core layer 26 to the upper magnetic pole layer 35 is increased in order to obtain a sufficient contact area between the upper core layer 26 and the upper magnetic pole layer 35. There is no drop. If the length L5 is larger than 6.0 μm, when the recording core 24 is grown by plating, each layer cannot be formed uniformly, and the film thickness is tapered or curved at the inner end. Variations in the magnetic gap and gap depth Gd are undesirably large.
[0104]
In the embodiment shown in FIG. 4 as well, as in the embodiment shown in FIG. 3, the width dimension in the track width direction of the upper core layer 26 at the end joined on the upper magnetic pole layer 35 is the same as that of the upper magnetic pole layer 35. Thus, the magnetic flux from the upper core layer 26 can be efficiently passed through the upper magnetic pole layer 35.
[0105]
Further, the size ratio of the overlapping portion of the upper core layer 26 and the recording core 24 shown in FIG. 4 and the shape of the upper core layer 26 are the same as those described with reference to FIG.
[0106]
5 and 6 are partial plan views of a thin film magnetic head according to another embodiment.
In the embodiment shown in FIG. 5, similarly to FIG. 3, the upper core layer 26 is formed so as to recede in the height direction (Y direction in the drawing) from the surface facing the recording medium, and the front end surface 26c of the upper core layer 26 is formed. Is not exposed from the surface facing the recording medium, and a protective layer 34 shown in FIG. 2 is buried between the surface facing the recording medium and the front end surface 26 c of the upper core layer 26.
[0107]
In the thin film magnetic head shown in FIG. 5, as in the thin film magnetic head shown in FIG. 2, the tip surface 26c of the upper core layer 26 extends in the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side. It is formed with an inclined surface or curved surface that gradually becomes deeper.
[0108]
Thus, the upper core layer 26 is formed so as to recede in the height direction from the surface facing the recording medium, and the tip surface 26c is inclined so as to gradually deepen in the height direction from the lower core layer side to the upper core layer side. By forming the surface or curved surface, the occurrence of side fringing can be appropriately reduced between the upper core layer 26 and the upper magnetic pole layer 35, and the magnetic flux from the upper core layer 26 is applied to the upper magnetic pole layer 35. It is possible to flow efficiently, and the gap between the front end surface 26c of the upper core layer 26 and the recording medium can be completely filled with the protective layer 34 without forming a cavity.
[0109]
In the embodiment shown in FIG. 5, like the embodiment shown in FIGS. 3 and 4, the tip surface 26c of the upper core layer 26 has a curved surface shape that becomes deeper in the height direction as it goes to both sides in the track width direction. The tip end surface 26c is not formed, but has a planar shape extending in a direction parallel to the track width direction (X direction in the drawing).
[0110]
As described above, in the embodiment shown in FIG. 5, the front end surface 26c of the upper core layer 26 is formed in a planar shape in the track width direction, but the front end surface 26c extends in the height direction from the surface facing the recording medium. Since the front end surface 26c is not exposed from the surface facing the recording medium by being formed so as to recede in the Y direction (illustrated in the drawing), the structure is effective in suppressing the occurrence of side fringing. Yes.
[0111]
In the embodiment shown in FIG. 5, the shape of the recording core 24 formed below the upper core layer 26 is the same as the shape of the recording core 24 shown in FIG.
[0112]
That is, the recording core 24 has a leading end region C formed with a track width Tw from the surface facing the recording medium in the height direction (Y direction in the figure), and the height of the recording region 24 in the height direction starting from the end of the leading end region C on the height side. The rear end region D gradually increases in the width dimension in the direction. By forming the rear end region D whose width dimension is larger than the track width Tw in this way, the contact area between the upper magnetic pole layer 35 and the upper core layer 26 can be increased.
[0113]
As shown in FIG. 5, the width dimension in the track width direction of the upper core layer at the end bonded to the upper magnetic pole layer 35 is larger than the width dimension in the track width direction of the upper magnetic pole layer 35. The magnetic flux from the upper core layer 26 can be efficiently passed through the upper magnetic pole layer 35, and the recording characteristics can be improved.
[0114]
FIG. 6 is a partial plan view showing the structure of a thin film magnetic head according to another embodiment.
In the embodiment shown in FIG. 6, similarly to the embodiment shown in FIG. 5, the upper core layer 26 is formed so as to recede in the height direction (Y direction shown in the drawing) from the surface facing the recording medium. The front end surface 26c is formed as an inclined surface or curved surface that gradually becomes deeper in the height direction from the lower core layer side to the upper core layer side (Z direction in the drawing) of the upper core layer 26.
[0115]
Therefore, the occurrence of side fringing can be reduced as compared with the conventional case, and at the same time, the space between the front end surface 26c of the upper core layer 26 from the surface facing the recording medium can be appropriately filled with the protective layer 34. The magnetic flux from the upper core layer 26 can be efficiently passed through the upper magnetic pole layer 35.
[0116]
Also in this embodiment, as in the embodiment shown in FIG. 5, the tip surface 26c of the upper core layer 26 is formed in a plane in a direction parallel to the track width direction (X direction in the drawing). Even in such a shape, the upper core layer 26 is formed so as to recede in the height direction from the surface facing the recording medium, so that the occurrence of side fringing can be reduced as compared with the conventional case.
[0117]
In the embodiment shown in FIG. 6, the recording core 24 is formed with a predetermined length dimension L5 in the height direction from the surface facing the recording medium with a track width. Thus, when the width dimension of the recording core 24 is formed only with the track width Tw, the track width Tw is easily regulated within a predetermined dimension.
[0118]
Also in this embodiment, as shown in FIG. 6, the width dimension in the track width direction of the upper core layer at the end joined on the upper magnetic pole layer 35 is the track width of the upper magnetic pole layer 35. It is larger than the width dimension in the direction, and the magnetic flux from the upper core layer 26 can be efficiently passed through the upper magnetic pole layer 35, so that the recording characteristics can be improved.
[0119]
As shown in FIGS. 5 and 6, the upper core layer 26 includes a tip region F having a constant width dimension, and a width dimension in the track width direction from the height side end of the tip region F toward the height direction. Is composed of a rear end region G that gradually widens, but other shapes may also be used. For example, the tip region F may be formed so that the width dimension gradually increases in the height direction.
[0120]
7 is a partial front view showing the structure of a thin film magnetic head according to another embodiment of the present invention. FIG. 8 is a partial cross-sectional view of the cross section taken along line 8-8 shown in FIG. 10 is a partial plan view of the thin film magnetic head.
[0121]
The thin film magnetic head in FIGS. 7 to 10 is the same as the thin film magnetic head shown in FIGS. 1 to 6 except for the shape of the upper core layer 26, except for the other portions.
[0122]
That is, as shown in FIG. 8, on the lower core layer 20, a recording core 24 having a predetermined length L1 is formed in the height direction from the surface facing the recording medium. From the bottom, the lower magnetic pole layer 21, the gap layer 22, and the upper magnetic pole layer 35 are composed of a three-layer film, or the gap layer 22 and the upper magnetic pole layer 35 are formed of a two-layer film. Further, a Gd determining insulating layer 27 is formed between the lower core layer 20 and the recording core 24, and a length dimension L2 from the surface facing the recording medium to the front surface of the Gd determining insulating layer 27 is a gap depth ( Gd).
[0123]
As shown in FIG. 8, a coil layer 29 is spirally formed on the lower core layer 20 and behind the recording core 24 in the height direction with an insulating base layer 28 interposed therebetween. Further, the pitch between the conductor portions of the coil layer 29 is covered with an insulating layer 30 formed of an inorganic insulating material or the like, and the insulating layer 30 is exposed on the surface facing the recording medium as shown in FIG. ing.
[0124]
An insulating layer 31 made of an organic insulating material or the like is formed on the coil layer 29, and a second coil layer 33 is spirally wound on the insulating layer 31.
[0125]
The second coil layer 33 is covered with an insulating layer 32 formed of an organic insulating material or the like, and the upper core layer 26 is patterned on the insulating layer 32 by frame plating or the like, for example. . The front end portion 26a of the upper core layer 26 is formed so as to overlap the upper magnetic pole layer 35, and the upper core layer 26 and the upper magnetic pole layer 35 are magnetically connected. The base end portion 26 b of the upper core layer 26 is magnetically connected to a lifting layer 36 made of a magnetic material formed on the lower core layer 20.
[0126]
In this embodiment, unlike the embodiment shown in FIGS. 1 to 6, the upper core layer 26 is not formed to recede in the height direction from the surface facing the recording medium. The top end surface 26c of the upper core layer 26 is formed to extend to the surface facing the recording medium, and a part thereof is located on the surface facing the recording medium.
[0127]
As shown in FIG. 8, the front end surface 26c of the upper core layer 26 gradually deepens in the height direction (Y direction shown) from the lower core layer side to the upper core layer side (Z direction shown) of the upper core layer 26. It is formed with an inclined surface or curved surface.
[0128]
Further, as shown in FIG. 8, the back surface 26d located on the height side of the tip surface 26c is an inclined surface or curved surface that gradually becomes deeper in the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side. The inclination of the back surface 26d with respect to the height direction is θ1 (in the case where the back surface 26d is formed with a curved surface, the midpoint between the end of the curved surface on the lower core layer side and the end of the upper core layer side) It is preferable that the inclination angle θ2 is larger than the inclination angle θ1 when the inclination angle θ1) with respect to the height direction of the tangent line is set to θ2 with respect to the height direction of the tip surface 26c.
[0129]
Thus, by making the inclination angle θ2 of the tip surface 26c larger than the inclination angle θ1 of the back surface 26d, the tip portion 26a of the upper core layer 26 can be prevented from being tapered, and the volume of the tip portion 26a can be reduced. It is possible to effectively increase the magnetic flux from the upper core layer 26, and to efficiently flow the magnetic flux from the upper magnetic pole layer 35, so that the recording characteristics can be improved.
[0130]
In the present invention, in addition to the above conditions, the inclination angle θ2 of the tip surface 26c is preferably in the range of 60 ° ≦ θ2 <90 °. When the inclination angle θ2 of the distal end surface 26c is formed to be smaller than 60 °, the shape of the distal end portion 26a of the upper core layer 26 is likely to be tapered, and thus the volume of the distal end portion 26a is reduced. This is because the efficiency of the magnetic flux flowing from the upper core layer 26 to the upper magnetic pole layer 35 tends to deteriorate.
[0131]
Further, the tip surface 26c of the upper core layer 26 is formed as an inclined surface or a curved surface that becomes deeper in the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side. Combined with the curved surface shape in the track width direction (X direction in the drawing), the occurrence of side fringing can be appropriately suppressed.
[0132]
In the present invention, as shown in FIG. 9, the front end surface 26c of the upper core layer 26 is formed in a curved surface shape that gradually recedes in the height direction (Y direction in the drawing) toward the both sides in the track width direction. Yes.
[0133]
As described above, the tip surface 26c of the upper core layer 26 is formed in a curved shape that recedes in the height direction in the track width direction (X direction in the drawing), so that the upper core layer exposed on the surface facing the recording medium. As shown in FIG. 7, the front end surface 26c of 26 is only a portion indicated by reference numeral 26h, and the front end surface 26c of the upper core layer 26 is slightly exposed to the surface facing the recording medium.
[0134]
That is, in the present invention, the tip surface 26c of the upper core layer 26 is formed in a curved shape that recedes in the height direction as it goes to both sides in the track width direction, and the tip surface 26c is formed from the lower core layer side to the upper core layer side. The tip surface 26c of the upper core layer 26 is only slightly exposed on the surface facing the recording medium, and is formed between the upper core layer 26 and the upper magnetic pole layer 35. Thus, the leakage of magnetic flux can be reduced, and the occurrence of side fringing can be further reduced.
[0135]
In addition, it is preferable that the part of the front end surface 26c of the upper core layer 26 exposed on the surface facing the recording medium has a width dimension smaller than the track width Tw. Thereby, it is possible to more appropriately prevent the occurrence of side fringing.
[0136]
Further, by forming the tip surface 26c of the upper core layer 26 in a curved shape in the track width direction (X direction in the drawing), the formation position of the upper core layer 26 with respect to the upper magnetic pole layer 35 is somewhat in the track width direction (X in the drawing). Even if the tip end face 26c is formed in a planar shape in the track width direction, the influence of side fringing can be reduced. Therefore, it is possible to manufacture a thin film magnetic head that can appropriately reduce the occurrence of side fringing even if the alignment accuracy of the upper core layer 26 with respect to the upper magnetic pole layer 35 is somewhat lowered.
[0137]
In the present invention, when the tangent line in contact with the end portions 26e and 26e in the track width direction of the tip surface 26c is defined as the virtual line E, the inclination θ4 of the virtual line E with respect to the track width direction (X direction in the drawing) is The angle is preferably 30 ° or more and 60 ° or less.
[0138]
By setting the inclination θ4 to 30 ° or more and 60 ° or less, the magnetic flux transmission efficiency flowing from the upper core layer 26 to the upper magnetic pole layer 35 is maintained, and the front end surface 26c of the upper core layer 26 is almost the surface facing the recording medium. Even if they are formed at the same position, occurrence of side fringing can be appropriately suppressed.
[0139]
Also in the embodiment shown in FIG. 10, as in the embodiment shown in FIG. 9, the tip surface 26 c of the upper core layer 26 is inclined deeper in the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side. The tip surface 26c is formed in a curved surface shape that becomes deeper in the height direction (Y direction in the figure) toward both sides in the track width direction.
[0140]
The difference between FIG. 9 and FIG. 10 is the shape of the recording core 24 formed below the upper core layer 26. In FIG. 9, the recording core 24 tracks in the height direction from the surface facing the recording medium. A tip region C formed with a width Tw and a height side of the tip region C
In contrast to the rear end region D whose width in the track width direction gradually increases from the end to the height direction, the recording core 24 in FIG. 10 has a track width Tw and a surface facing the recording medium. Is formed with a predetermined length L5 in the height direction, and the rear end region D is not formed.
[0141]
In the shape of the recording core 24 shown in FIG. 9, if the length dimension L4 of the tip region C formed with the track width Tw is too short, due to processing on the surface facing the recording medium at the time of manufacturing the thin film magnetic head, Although the track width Tw may be larger than a predetermined dimension, the presence of the rear end region D has the advantage that the contact area with the upper core layer 26 can be increased, while the recording core shown in FIG. In the shape of 24, the contact area with the upper core layer 26 is smaller than that of the embodiment shown in FIG. 9, but there is an advantage that the track width Tw can be easily regulated within a predetermined dimension.
[0142]
Note that the length dimension L4 of the tip region C of the recording core 24 in FIG. 9 is preferably in the range of 0 μm <L4 ≦ 3.0 μm, and the length dimension L5 of the recording core 24 shown in FIG. It is preferable that the range is 8 μm ≦ L5 ≦ 6.0 μm. The reason is as described above.
[0143]
As shown in FIGS. 9 and 10, the width dimension in the track width direction of the upper core layer 26 at the end joined on the upper magnetic pole layer 35 is the width in the track width direction of the upper magnetic pole layer 35. Therefore, the magnetic flux from the upper core layer 26 can be efficiently passed through the upper magnetic pole layer 35. The width dimension in the track width direction of the upper core layer 26 is preferably about 2 to 2.5 times the width dimension in the track width direction of the recording core 24 at the overlapped portion. The reason is as described above.
[0144]
Further, as shown in FIGS. 9 and 10, the upper core layer 26 includes a tip region F formed with a constant width dimension in the height direction (Y direction in the drawing) from the surface facing the recording medium, and the tip region F. The rear end region G gradually increases in the width direction in the track width direction starting from the end on the height side, but is not limited to this shape and is formed in other shapes in the present invention. It doesn't matter. For example, the width dimension of the tip region F of the upper core layer 26 may be formed so as to gradually expand along the virtual line E shown in FIG.
[0145]
11 is a partial front view showing another embodiment of the thin film magnetic head of the present invention. FIG. 12 is a partial cross-sectional view of the thin film magnetic head taken along line 12-12 shown in FIG. 13 and 14 are partial plan views of the thin film magnetic head.
[0146]
The thin film magnetic head shown in FIGS. 11 to 14 is the same as the thin film magnetic head shown in FIGS. 1 to 6 except for the shape of the upper core layer 26, except for the other parts.
[0147]
That is, as shown in FIG. 12, a recording core 24 is formed on the lower core layer 20 with a predetermined length L1 in the height direction (Y direction in the drawing) from the surface facing the recording medium. The recording core 24 is composed of a three-layer film of the lower magnetic pole layer 21, the gap layer 22, and the upper magnetic pole layer 35 from the bottom, or a two-layer film of the gap layer 22 and the upper magnetic pole layer 35. Further, a Gd determining insulating layer 27 is formed between the lower core layer 20 and the recording core 24, and a length dimension L2 from the surface facing the recording medium to the front surface of the Gd determining insulating layer 27 is a gap depth ( Gd).
[0148]
As shown in FIG. 12, a coil layer 29 is spirally wound on the lower core layer 20 and behind the recording core 24 in the height direction with an insulating base layer 28 interposed therebetween. Further, the pitch between the conductor portions of the coil layer 29 is covered with an insulating layer 30 formed of an inorganic insulating material or the like, and the insulating layer 30 is exposed on the surface facing the recording medium as shown in FIG. ing. As shown in FIG. 1, inclined surfaces 20 b and 20 b may be formed on the upper surface of the lower core layer 20. Thereby, generation | occurrence | production of side fringing can be prevented more appropriately.
[0149]
An insulating layer 31 made of an organic insulating material or the like is formed on the coil layer 29, and a second coil layer 33 is spirally wound on the insulating layer 31.
[0150]
The second coil layer 33 is covered with an insulating layer 32 formed of an organic insulating material or the like, and the upper core layer 26 is patterned on the insulating layer 32 by frame plating or the like, for example. . The front end portion 26a of the upper core layer 26 is formed so as to overlap the upper magnetic pole layer 35, and the upper core layer 26 and the upper magnetic pole layer 35 are magnetically connected. The base end portion 26 b of the upper core layer 26 is magnetically connected to a lifting layer 36 made of a magnetic material formed on the lower core layer 20.
[0151]
In this embodiment, unlike the embodiment shown in FIGS. 1 to 6, the upper core layer 26 is not formed to recede in the height direction from the surface facing the recording medium. The top end surface 26c of the upper core layer 26 is formed to extend to the surface facing the recording medium, and a part thereof is located on the surface facing the recording medium.
[0152]
In the present invention, as shown in FIG. 13, the front end surface 26c of the upper core layer 26 is formed in a curved surface shape that recedes in the height direction (Y direction in the drawing) toward the both end portions.
[0153]
In this embodiment, as shown in the embodiment shown in FIGS. 1 to 6 and the embodiment shown in FIGS. 7 to 10, the front end surface 26c of the upper core layer 26 has a height from the lower core layer side to the upper core layer side. It is not formed with an inclined surface or a curved surface that gradually becomes deeper in the direction, and the tip surface 26c is formed along the surface facing the recording medium.
[0154]
For this reason, as shown in FIG. 11, the tip surface 26c of the upper core layer 26 has a portion 26i having a constant width dimension from the lower core layer side to the upper core layer side on the surface facing the recording medium. Exposed.
[0155]
As described above, the front end surface 26c of the upper core layer 26 is formed in a curved shape that recedes in the height direction as it goes to both sides in the track width direction, so that the front end surface 26c is a surface facing the recording medium. Even if it is positioned, the exposed portion from the surface facing the recording medium is only the portion 26i shown in FIG. 11, and the tip surface 26c of the upper core layer 26 is slightly exposed to the surface facing the recording medium. It becomes composition.
[0156]
Therefore, magnetic flux leakage between the upper core layer 26 and the upper magnetic pole layer 35 can be reduced, and the occurrence of side fringing can be further reduced.
[0157]
In addition, it is preferable that the part of the front end surface 26c of the upper core layer 26 exposed on the surface facing the recording medium has a width dimension smaller than the track width Tw. Thereby, it is possible to more appropriately prevent the occurrence of side fringing.
[0158]
Further, by forming the front end surface 26c of the upper core layer 26 in a curved shape in the track width direction, even if the formation position of the upper core layer 26 with respect to the upper magnetic pole layer 35 is slightly shifted in the track width direction (X direction in the drawing). The influence of side fringing can be reduced as compared with the case where the tip surface 26c is formed in a planar shape in the track width direction. Therefore, it is possible to manufacture a thin film magnetic head that can appropriately reduce the occurrence of side fringing even if the alignment accuracy of the upper core layer 26 with respect to the upper magnetic pole layer 35 is somewhat lowered.
[0159]
In the present invention, when the tangent line in contact with the end portion 26e of the tip surface 26c is defined as the virtual line E, the inclination θ4 of the virtual line E with respect to the track width direction (X direction in the drawing) is 30 ° or more and 60 ° or less. It is preferable that
[0160]
By setting the inclination θ4 to 30 ° or more and 60 ° or less, the magnetic flux transmission efficiency flowing from the upper core layer 26 to the upper magnetic pole layer 35 is maintained, and the front end surface 26c of the upper core layer 26 is almost the surface facing the recording medium. Even if they are formed at the same position, occurrence of side fringing can be appropriately suppressed.
[0161]
Also in the embodiment shown in FIG. 14, as in the embodiment shown in FIG. 13, the tip surface 26c of the upper core layer 26 has a curved surface shape that recedes in the height direction (Y direction shown in the drawing) toward both sides in the track width direction. However, as in the embodiment shown in FIGS. 1 to 6 and the embodiment shown in FIGS. 7 to 10, the tip surface 26c has a height from the lower core layer side to the upper core layer side. An inclined surface or curved surface that is deep in the direction is not formed.
[0162]
The difference between FIG. 13 and FIG. 14 is the shape of the recording core 24 formed below the upper core layer 26. In FIG. 13, the recording core 24 tracks in the height direction from the surface facing the recording medium. In contrast to the front end region C formed with the width Tw and the rear end region D in which the width dimension in the track width direction gradually increases from the height-side end to the height direction of the front end region C, in FIG. The recording core 24 is formed with a track width Tw and a predetermined length L5 in the height direction from the surface facing the recording medium, and the rear end region D is not formed.
[0163]
In the shape of the recording core 24 shown in FIG. 13, if the length dimension L4 of the tip region C formed with the track width Tw is too short, due to processing on the surface facing the recording medium at the time of manufacturing the thin film magnetic head, Although the track width Tw may be larger than a predetermined dimension, the presence of the rear end region D has the advantage that the contact area with the upper core layer 26 can be increased, while the recording core shown in FIG. In the shape of 24, the contact area with the upper core layer 26 is smaller than that of the embodiment shown in FIG. 9, but there is an advantage that the track width Tw can be easily regulated within a predetermined dimension.
[0164]
The length dimension L4 of the tip region C of the recording core 24 shown in FIG. 13 is preferably in the range of 0.2 μm <L4 ≦ 3.0 μm, and the length dimension L5 of the recording core 24 shown in FIG. Is preferably in the range of 0.8 μm ≦ L5 ≦ 6.0 μm. The reason is as described above.
[0165]
As shown in FIGS. 13 and 14, the width dimension in the track width direction of the upper core layer 26 at the end joined on the upper magnetic pole layer 35 is larger than the width dimension in the track width direction of the upper magnetic pole layer 35. Therefore, the magnetic flux from the upper core layer 26 can be efficiently passed through the upper magnetic pole layer 35. The width dimension in the track width direction of the upper core layer 26 with respect to the width dimension in the track width direction of the recording core 24 in the overlapped portion is preferably about 2 to 2.5 times. The reason is as described above.
[0166]
As shown in FIGS. 13 and 14, the upper core layer 26 includes a tip region F formed with a constant width in the height direction from the surface facing the recording medium, and a height from the end of the tip region F on the height side. Although the rear end region G gradually increases in the track width direction in the direction, the present invention is not limited to this shape and may be formed in other shapes.
[0167]
For example, the width dimension of the tip region F of the upper core layer 26 may be formed so as to gradually widen along the virtual line E shown in FIG.
[0168]
As described above, according to the thin film magnetic head of the present invention, the upper core layer 26 is retracted in the height direction from the surface facing the recording medium, and the front end surface 26c of the upper core layer 26 is moved to the lower core layer side. Forming an inclined surface or curved surface deepening in the height direction from the upper core layer side, and further forming the tip end surface 26c in a curved shape that recedes in the height direction toward both sides in the track width direction, or The upper core layer 26 is retracted in the height direction from the surface facing the recording medium, and the tip surface 26c of the upper core layer 26 is inclined or deepened in the height direction from the lower core layer side to the upper core layer side. By forming a curved surface, the tip surface 26c of the upper core layer 26 is deepened in the height direction from the lower core layer side to the upper core layer side. The tip surface 26c is formed with an inclined surface or a curved surface, and the tip surface 26c is formed in a curved shape that recedes in the height direction toward both sides in the track width direction, or the tip surface 26c of the upper core layer 26 is formed with a track width. By forming it in a curved shape that recedes in the height direction as it goes to both sides of the direction, it is possible to suppress the occurrence of side fringing as compared with the conventional case, and further, the magnetic flux from the upper core layer 26 is transferred to the upper magnetic pole layer 35. It is possible to manufacture a thin-film magnetic head that can be efficiently flowed to the future and can cope with future higher recording densities.
[0169]
Next, a method for manufacturing a thin film magnetic head according to the present invention will be described with reference to the drawings.
[0170]
FIGS. 15 to 21 are process diagrams showing a method of manufacturing the thin film magnetic head shown in FIGS. 15 to 18, a partial front view of the thin film magnetic head is shown on the left side, and a partial sectional view thereof is shown on the right side.
[0171]
In FIG. 15, after the Gd determining insulating layer 27 is formed on the lower core layer 20 as shown in the right figure, a resist layer 40 having a height dimension h3 is formed on the lower core layer 20. The height dimension h3 is, for example, about 4.0 μm.
[0172]
Next, a groove 40a having a predetermined length L6 is formed in the height direction (Y direction in the figure) from the surface facing the recording medium by exposure and development on the resist layer 40. A width dimension t2 of the groove 40a is, for example, about 0.45 μm. Since the width dimension t2 is a width regulated as the track width Tw, the width dimension t2 is preferably formed as small as possible. For example, the width dimension is formed with a limit value of i-line used for exposure. It is preferable.
[0173]
Next, as shown in the left diagram of FIG. 15, the lower magnetic pole layer 21, the gap layer 22, and the upper magnetic pole layer 35 are continuously plated and laminated in the groove 40a from the bottom. In order to perform continuous plating in this manner, the gap layer 22 must be formed of a nonmagnetic metal material that can be plated. Specifically, the nonmagnetic metal material is preferably selected from one or more of NiP, NiPd, NiW, NiMo, Au, Pt, Rh, Pd, Ru, and Cr.
[0174]
The recording core 24 is constituted by the three-layer film formed in the groove 40a. The recording core 24 is not limited to a three-layer film. For example, the recording core 24 may be composed of the gap layer 22 and the upper magnetic pole layer 35.
[0175]
Then, the resist layer 40 is removed. FIG. 16 shows this state. The width dimension of the recording core 24 formed in the lower core layer 20 is regulated as a track width Tw, and the track width Tw is preferably 0.7 μm or less, more preferably 0.5 μm or less.
[0176]
The height h4 of the recording core 24 is preferably in the range of 1 μm ≦ h4 ≦ 4 μm. For example, the bottom pole layer 21 is formed with a height of about 0.3 μm, the gap layer 22 is formed with a height of about 0.2 μm, and the top pole layer 35 has a height of 3.0 μm. It is formed with about 3.3 μm.
[0177]
Next, as shown in FIG. 17, the lower core layer 20 and further the recording core 24 are filled with an insulating layer 30. The insulating material forming the insulating layer 30 is preferably an inorganic insulating material. Specifically, AlO, Al₂O_Three, SiO₂, Ta₂O_Five, TiO, AlN, AlSiN, TiN, SiN, Si_ThreeN_Four, NiO, WO, WO_Three, BN, CrN, or SiON.
[0178]
The reason why the insulating layer 30 is formed of an inorganic insulating material in this way is to make it easy to polish the surface of the insulating layer 30 by the CMP technique to be performed next.
[0179]
As shown in FIG. 17, the insulating layer 30 is polished from the H-H line using a CMP technique. As a result, the surface of the insulating layer 30 is planarized, and the surface of the top pole layer 35 is exposed from the surface of the insulating layer 30. This state is shown in FIG.
[0180]
In FIG. 17, the surface of the recording core 24 is scraped by the CMP technique, so that the height dimension of the recording core 24 is h5 as shown in FIG. It becomes about 4 μm to 2.7 μm. 18, the height dimension of the upper magnetic pole layer 35 on the Gd determining insulating layer 27 is h6, and the height dimension h6 is about 1.4 μm to 1.7 μm.
[0181]
By the way, according to the manufacturing method of the present invention, the height dimension h5 of the recording core 24 and the height dimension h6 of the upper magnetic pole layer 35 on the Gd determining insulating layer 27 can be easily formed within the predetermined dimensions, and the reproducibility is high. Thin film magnetic heads can be manufactured.
[0182]
This is because the trimming process from the direction near the perpendicular to the film surface of the lower core layer 20 is not performed as in the prior art. Conventionally, the trimming process is an indispensable process in order to suppress the occurrence of side fringing. However, the trimming process significantly reduces the height dimension of the top pole layer 35 and causes variations in the track width Tw. The reproducibility at the time of manufacture was very low.
[0183]
On the other hand, in the present invention, by forming the gap layer 22 constituting the recording core 24 with a nonmagnetic metal material that can be plated, the lower magnetic pole layer 21 is sequentially formed in the groove 40a of the resist layer 40 shown in FIG. The gap layer 22 and the top pole layer 35 can be continuously formed by plating.
[0184]
Therefore, in the present invention, the lower magnetic pole layer 21 projecting from the lower core layer 20 with the track width Tw and the gap layer 22 having the track width Tw thereon are arranged in a direction almost perpendicular to the film surface of the lower core layer 20. Therefore, it is possible to form a thin film magnetic head having a structure in which side fringing hardly occurs between the upper magnetic pole layer 35 and the lower core layer 20 without performing the trimming process. .
[0185]
However, in the present invention, a trimming step may be performed during the step shown in FIG. However, in the trimming step, the film surface of the lower core layer 20 is irradiated with ions from an oblique direction, and the ion irradiation angle is 45 ° to 75 °, more preferably 60 ° with respect to the vertical direction of the film surface. It is preferable to be within a range of ˜75 °.
[0186]
In the trimming process having the ion irradiation angle described above, the magnetic powder shaved by ion irradiation does not adhere to both sides of the recording core 24 as in the prior art, and in the present invention, the film surface of the lower core layer 20 is not affected. In the present invention, the shape of the recording core 24 is obtained even when the film surface of the lower core layer 20 is subjected to a trimming step from an oblique direction. It is difficult to cause variations and the like, and the problem that the height dimension of the recording core 24 is remarkably reduced does not occur.
[0187]
In the present invention, a thin film magnetic head capable of further reducing the track width Tw of the recording core 24 and adapting to future narrowing of the track can be manufactured by the trimming process, and the lower core extends from both sides of the lower surface of the recording core 24. Inclined surfaces 20b and 20b (see FIG. 1) can be formed on the upper surfaces on both sides of the layer 20, and a thin film magnetic head capable of suppressing the occurrence of side fringing can be manufactured.
[0188]
Next, a coil layer and an insulating layer 32 that covers the coil layer are formed on the insulating layer 30. Then, a resist layer 41 shown in FIG. 19 is formed on the surface of the upper magnetic pole layer 35, the insulating layer 30, and the insulating layer 32. FIG. 19 is a partial plan view of the thin film magnetic head.
[0189]
As shown in FIG. 19, a pattern 41 a of the upper core layer 26 is formed on the resist layer 41.
[0190]
As shown in FIG. 19, the front end surface 41b of the pattern 41a is formed so as to recede in the height direction (Y direction in the drawing) from the surface facing the recording medium, and the front end surface 41b extends in the track width direction. It is formed in a curved surface shape that recedes in the height direction as it goes toward both end portions 41c and 41c.
[0191]
In order to form the pattern 41a, the present invention is devised as follows. That is, in the present invention, the portion irradiated with light at the time of exposure is the portion 41d other than the pattern 41a in the resist layer 41, and the portion of the resist layer 41d irradiated with light is developed, leaving the resist layer 41d. Then, the resist layer 41 of the pattern 41a is removed (image reverse).
[0192]
This is a reverse exposure and development method, and conventionally, light is applied to the portion 41a that becomes the pattern of the upper core layer 26.
[0193]
In the present invention, the reason why the resist layer 41d other than the pattern 41a is irradiated with light and developed to remove the portion of the pattern 41a not irradiated with light is related to the shape of the remaining resist layer 41d.
[0194]
FIG. 20 is a partial sectional view of a thin film magnetic head according to the present invention. In FIG. 20, only the shape near the tip of the thin film magnetic head is shown.
[0195]
As shown in FIG. 20, the resist layer 41 d is left on the insulating layer 30 and the top pole layer 35. Among these, the resist layer 41d1 left in the height direction from the surface facing the recording medium has a back surface 41d2 extending from the lower core layer side to the upper core layer side (Z direction in the drawing) in the height direction ( It is left as an inclined surface or curved surface inclined in the Y direction in the figure.
[0196]
The reason why the resist layer 41d1 is left in the shape as described above is that light is applied to the resist layer 41d left by exposure and development, and conversely, light is applied to the portion of the pattern 41a to be removed. When the resist layer 41d is not exposed to light, the remaining resist layer 41d1 has a back surface 41d2 in the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side, as shown in FIG. It is left as an inclined surface or curved surface inclined in the opposite direction.
[0197]
As shown in FIG. 20, the height from the surface facing the recording medium to the back surface 41d2 of the resist layer 41d1 remaining in the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side. When the inclined surface or curved surface inclined in the direction is formed, the tip of the upper core layer 26 is formed by plating a magnetic material as the material of the upper core layer 26 in the pattern 41a as shown in FIG. An inclined surface or curved surface that deepens in the height direction from the lower core layer side to the upper core layer side can be formed on the surface 26c.
[0198]
As shown in FIG. 22, an inclined surface or mirror surface is formed on the back surface 41d2 of the remaining resist layer 41d1 so as to incline in a direction opposite to the height direction (Y direction in the drawing) from the lower core layer side to the upper core layer side. When the magnetic material as the material of the upper core layer 26 is plated in the pattern 41a, as shown in FIG. 23, the tip surface 26c of the upper core layer 26 is on the upper core layer side from the lower core layer side. As a result, an inclined surface or curved surface opposite to the height direction is formed.
[0199]
In the case of the thin film magnetic head shown in FIG. 23, Al is formed between the front end surface 26c of the upper core layer 26 and the portion B between the opposed surfaces of the recording medium.₂O_ThreeWhen the protective layer 34 is formed, it is difficult to completely fill the portion B with the protective layer 34, and a cavity is easily formed in the portion B.
[0200]
For this reason, in the present invention, the tip surface 26c of the upper core layer 26 is formed with an inclined surface or a curved surface that deepens in the height direction from the lower core layer side to the upper core layer side, as shown in FIG. Then, the resist layer 41d of the portion other than the pattern 41a of the upper core layer 26 is irradiated with light and then developed, and the tip surface of the pattern 41a removed by this is receded in the height direction as it rises from the lower core layer side. It is an inclined surface or curved surface.
[0201]
In the process diagrams shown in FIGS. 15 to 21, as described above, the upper core layer 26 recedes in the height direction from the surface facing the recording medium, and the front end surface 26c of the upper core layer 26 A thin film formed with an inclined surface or curved surface that becomes deeper in the height direction from the core layer side to the upper core layer side, and the tip surface 26c is formed in a curved surface shape that recedes in the height direction toward both sides in the track width direction. Although the manufacturing method of the magnetic head has been described, the manufacturing process of the thin film magnetic head of another embodiment is as follows.
[0202]
In the embodiment shown in FIGS. 5 and 6, the upper core layer 26 is formed so as to recede in the height direction (Y direction in the drawing) from the surface facing the recording medium, and the front end surface 26c of the upper core layer 26 is the lower part thereof. The tip surface 26c is not formed in a curved shape in the track width direction (X direction in the figure), but is formed in an inclined surface or curved surface that becomes deep in the height direction from the core layer side to the upper core layer side. The surface 26c is formed in a planar shape in the track width direction.
[0203]
In the case of the above configuration, in the step shown in FIG. 19, in order to form a pattern having the same shape as the upper core layer 26 shown in FIG. Irradiation and subsequent development allow the tip surface of the part of the pattern to be removed to be an inclined surface or curved surface that recedes in the height direction as it rises from the lower core layer side. It is formed at a position retracted in the height direction from the formation position of the opposite surface. Then, by plating a magnetic material as the material of the upper core layer 26 in the pattern, the upper core layer 26 having the shape shown in FIG. 5 or 6 can be formed.
[0204]
Next, in the embodiment shown in FIGS. 7 to 10, the front end surface 26c of the upper core layer 26 is located on the surface facing the recording medium, and the front end surface 26c extends from the lower core layer side to the upper core layer side. The tip surface 26c is formed in a curved surface shape that recedes in the height direction toward the both sides in the track width direction.
[0205]
In the case of the above configuration, in the process shown in FIG. 19, in order to form a pattern having the same shape as the upper core layer 26 shown in FIG. 9 or FIG. , And after that, the tip surface of the portion of the pattern to be removed is an inclined surface or curved surface that recedes in the height direction as it rises from the lower core layer side. At this time, the tip surface is a recording medium And the same position as the formation position of the facing surface. Then, by plating a magnetic material as the material of the upper core layer 26 in the pattern, the upper core layer 26 having the shape shown in FIG. 9 or 10 can be formed.
[0206]
Next, in the embodiment shown in FIGS. 11 to 14, the front end surface 26c of the upper core layer 26 is located on the surface facing the recording medium, and the front end surface 26c increases in height toward the both sides in the track width direction. The tip end surface 26c is not formed with an inclined surface or a curved surface deepening in the height direction from the lower core layer side to the upper core layer side, and is formed with a recording medium. It is formed along the opposing surface.
[0207]
In the case of the above configuration, a pattern having the same shape as that of the upper core layer 26 shown in FIG. 13 or 14 is formed on the resist layer 41 by exposure and development in the step shown in FIG.
[0208]
During the exposure and development, the pattern portion may be irradiated with light, or the portion other than the pattern may be irradiated with light. In the case of the above configuration, the tip end surface 26c is not formed with an inclined surface or a curved surface that deepens in the height direction from the lower core layer side to the upper core layer side. The portion of the pattern 26 may be used, or any portion other than the pattern may be used.
[0209]
After the pattern of the upper core layer 26 is formed by exposure and development, the upper core layer 26 having the shape shown in FIG. 13 or 14 is formed by plating a magnetic material as the material of the upper core layer 26 in the pattern. Can do.
[0210]
As described above, according to the manufacturing method of the present invention, the track composed of the three-layer film of the lower magnetic pole layer 21, the gap layer 22, and the upper magnetic pole layer 35, or the two-layer film of the gap layer 22 and the upper magnetic pole layer 35. The recording core 24 that regulates the width Tw can be formed by continuous plating, and therefore, it is necessary to perform a trimming process having an ion irradiation angle from a direction close to the vertical direction with respect to the film surface of the lower core layer 20 as in the past And a thin film magnetic head with high reproducibility can be manufactured.
[0211]
Further, according to the method of manufacturing a thin film magnetic head in the present invention, the resist layer used when patterning the upper core layer 26 is irradiated with light on the resist layer other than the pattern of the upper core layer 26 and then developed. By doing so, the front end surface of the pattern can be an inclined surface or a curved surface that recedes in the height direction as it rises from the lower core layer side, so that the lower core layer is formed on the front end surface 26c of the upper core layer 26. It is possible to form an inclined surface or a curved surface that deepens in the height direction from the side to the upper core layer side.
[0212]
In the present invention, as shown in FIGS. 15 to 18, the recording core 24 is first formed on the lower core layer 20, and then the periphery of the recording core 24 is filled with the insulating layer 30. It is not limited.
[0213]
For example, the insulating layer 30 may be first formed on the lower core layer 20, a groove may be formed in the insulating layer 30, and then the recording core 24 may be formed in the groove.
[0214]
【The invention's effect】
As described above, according to the present invention described in detail, the tip surface of the upper core layer is formed at a position retreated from the height direction, and the inclined surface deepens in the height direction from the lower core layer side to the upper core layer side or By forming it with a curved surface, the occurrence of side fringing can be suppressed, and at the same time, the magnetic flux from the upper core layer can be efficiently flowed to the upper magnetic pole layer, and this thin film can be used for higher recording densities in the future. A magnetic head can be manufactured.
[0215]
In addition, it is the most preferable form that the front end surface of the upper core layer is formed in a curved shape that recedes in the height direction as it goes to both sides in the track width direction, thereby further suppressing the occurrence of side fringing. .
[0216]
In addition, according to the manufacturing method of the present invention, a thin film magnetic head suitable for suppressing the occurrence of side fringing can be manufactured without requiring a trimming step having an ion irradiation angle in a direction close to the vertical direction with respect to the lower core layer. Therefore, a thin film magnetic head can be manufactured with good reproducibility.
[0217]
Further, when the resist layer necessary for forming the upper core layer is exposed and developed, the resist layer other than the pattern portion of the upper core layer is irradiated with light so that the pattern of the upper core layer to be patterned is formed. An inclined surface or a curved surface that deepens in the height direction from the lower core layer side to the upper core layer side can be easily formed on the front end surface.
[Brief description of the drawings]
FIG. 1 is a partial front view showing the structure of a thin film magnetic head according to an embodiment of the present invention;
2 is a partial cross-sectional view of a thin film magnetic head cut along line 2-2 shown in FIG.
3 is a partial plan view of the thin film magnetic head shown in FIGS. 1 and 2. FIG.
4 is a partial plan view showing another shape of the thin film magnetic head shown in FIGS. 1 and 2. FIG.
5 is a partial plan view showing another shape of the thin film magnetic head shown in FIGS. 1 and 2. FIG.
6 is a partial plan view showing another shape of the thin film magnetic head shown in FIGS. 1 and 2. FIG.
FIG. 7 is a partial front view showing the structure of a thin film magnetic head according to another embodiment of the present invention;
8 is a partial cross-sectional view of the thin film magnetic head taken along line 8-8 shown in FIG.
9 is a partial plan view of the thin film magnetic head shown in FIGS. 7 and 8. FIG.
10 is a partial plan view showing another shape of the thin film magnetic head shown in FIGS. 7 and 8. FIG.
FIG. 11 is a partial front view showing the structure of a thin film magnetic head according to another embodiment of the present invention;
12 is a partial cross-sectional view of the thin film magnetic head taken along line 12-12 shown in FIG.
13 is a partial plan view of the thin film magnetic head shown in FIGS. 11 and 12. FIG.
14 is a partial plan view of the thin film magnetic head shown in FIGS. 11 and 12. FIG.
FIGS. 15A and 15B are a partial plan view and a partial cross-sectional view showing a method of manufacturing a thin film magnetic head according to the invention. FIGS.
FIG. 16 is a partial front view and a partial cross-sectional view showing a process performed next to the process in FIG. 15;
FIG. 17 is a partial front view and a partial cross-sectional view showing a process performed next to the process in FIG. 16;
FIG. 18 is a partial front view and a partial cross-sectional view showing a process performed after the process in FIG. 17;
FIG. 19 is a partial plan view showing a process performed after the process in FIG. 18;
FIG. 20 is a partial cross-sectional view showing a process performed after the process in FIG. 19;
FIG. 21 is a partial cross-sectional view showing a process performed after the process in FIG. 20;
22 is a partial cross-sectional view showing another embodiment performed after the step of FIG. 19;
FIG. 23 is a partial cross-sectional view showing a process performed after the process in FIG. 22;
FIG. 24 is a partial front view showing the structure of a conventional thin film magnetic head;
25 is a partial cross-sectional view of the thin film magnetic head shown in FIG. 24;
FIG. 26 is a partial front view showing a conventional method for manufacturing a thin film magnetic head;
FIG. 27 is a partial front view performed next to the step in FIG. 26;
FIG. 28 is a partial front view performed after the step of FIG. 27;
29 is a partial front view performed next to the step in FIG. 28;
FIG. 30 is a partial front view performed after the step in FIG. 29;
FIG. 31 is a partial plan view performed after the step of FIG. 30;
32 is a partial cross-sectional view performed after the step in FIG. 31;
[Explanation of symbols]
20 Lower core layer
21 Bottom pole layer
22 Gap layer
24 recording cores
26 Upper core layer
26a Tip
26b Base end
26c Tip surface
26d back
26e termination
27 Gd determined insulating layer
34 Protective layer

Claims (11)

A lower core layer,
A lower magnetic pole layer, a gap layer, and an upper magnetic pole layer are sequentially laminated on the lower core layer, or a gap core and an upper magnetic pole layer are laminated in this order, and a recording core exposed on a surface facing the recording medium;
An upper core layer magnetically bonded onto the upper pole layer of the recording core;
In the thin film magnetic head having the lower core layer, the recording core, and a coil for inducing a magnetic field for recording in the upper core layer,
The recording core has a front end region having a constant width in the track width direction from the surface facing the recording medium in the height direction, and a width in the track width direction in the height direction starting from a height side end of the front end region. A rear end region that gradually widens,
The tip surface of the upper core layer facing the recording medium is in a position retracted in the height direction from the surface facing the recording medium, and the entire tip surface is from the lower core layer side to the upper core layer side. formed by gradually deeper becomes curved in the height direction in accordance toward progressively deeper becomes inclined or curved der Rutotomoni the height direction, on both sides of the track width direction toward the,
The shortest receding distance L3 from the surface facing the recording medium to the tip surface of the upper core layer is not more than the longest length dimension in the height direction from the facing surface of the recording core, and the recording core Formed shorter than the length dimension of the tip region,
The width dimension in the track width direction of the upper core layer at the end joined on the upper pole layer is larger than the width dimension in the track width direction of the upper pole layer, and the upper core layer A thin film magnetic head, wherein the thin film magnetic head is bonded to the entire surface of the rear end region of the core. The recession distance L3 is, 0 .mu.m <L3 ≦ 0.8 [mu] m in a claim 1 Symbol placement thin film magnetic head. The upper core layer is formed with a back surface positioned on the height side of the front end surface, and the back surface is a curved surface that gradually becomes deeper in the height direction from the lower core layer side toward the upper core layer side. Or an inclined surface,
The inclination angle with respect to the height direction of the inclined surface formed on the back surface, or the inclination angle with respect to the height direction of the tangent line at the midpoint between the lower core layer end and the upper core layer end of the curved surface is θ1,
The inclination angle of the inclined surface formed on the tip surface of the upper core layer with respect to the height direction, or the height direction of the tangent line at the midpoint between the lower core layer end and the upper core layer end of the curved surface When the tilt angle is θ2,
The thin film magnetic head according to claim 1, wherein the θ2 is larger than the θ1.   4. The thin film magnetic head according to claim 3, wherein the tilt angle [theta] 2 is 60 [deg.] ≤ [theta] 2 <90. 5. The inclination of the virtual line with respect to the track width direction is not less than 30 ° and not more than 60 °, when a tangent line that contacts the terminal portion of the curved surface shape in the track width direction is a virtual line . the thin-film magnetic head according to. The upper core layer extends in the height direction from the curved end portion of the tip surface and has a constant width dimension in the track width direction, and tracks in the height direction starting from the height side end of the tip region. the thin-film magnetic head according to any one of claims 1 to 5 and a rear end region in which the width dimension of the width direction is widened gradually. The gap layer, a thin film magnetic head according to any one of claims 1 to 6 is formed by plating capable of forming a non-magnetic metal material. 8. The thin film magnetic head according to claim 7, wherein the nonmagnetic metal material is selected from one or more of NiP, NiPd, NiW, NiMo, Au, Pt, Rh, Pd, Ru, and Cr. (A) On the lower core layer, the lower magnetic pole layer, the gap layer, and the upper magnetic pole layer are laminated in this order, and the dimensions of the lower magnetic pole layer and the upper magnetic pole layer in the track width direction are determined on the surface facing the recording medium; Alternatively, the gap layer and the upper magnetic pole layer are sequentially laminated, and the width dimension in the track width direction of the upper magnetic pole layer is determined on the surface facing the recording medium, and the track width direction in the height direction from the surface facing the recording medium is determined. Forming a recording core having a leading end region having a constant width dimension and a trailing end region in which the width dimension in the track width direction gradually increases in the height direction starting from the height-side end of the leading end region;
(B) forming an insulating layer around the recording core before the step (a) or after the step (a), and making the upper surface of the recording core and the insulating layer flush with each other; ,
(C) forming a resist layer on the recording core and the insulating layer;
(D) forming a blanking pattern for forming an upper core layer in the resist layer, and exposing the region other than the pattern of the resist layer, and developing the resist layer thereafter; The entire surface that becomes the tip surface of the core layer is an inclined surface or curved surface that recedes in the height direction as it rises from the lower core layer side, and gradually recedes in the height direction as it goes to both sides in the track width direction. And forming a surface that becomes the tip surface at a position retracted in the height direction from the formation position of the surface facing the recording medium, and the tip surface of the upper core layer from the surface facing the recording medium. The minimum receding distance L3 to the surface to be equal to or less than the longest length dimension in the height direction from the facing surface of the recording core, and the length dimension of the tip region of the recording core And the width dimension in the track width direction of the upper core layer at the end joined to the upper magnetic pole layer is larger than the width dimension in the track width direction of the upper magnetic pole layer. Defining a width dimension of the pattern such that a core layer is bonded to the entire surface of the rear end region of the recording core;
(E) A magnetic material is plated in the pattern, and according to the pattern, the front end surface is in a position retracted in the height direction from the surface facing the recording medium, and the entire front end surface is on the lower core layer side. A step of forming an upper core layer having an inclined surface or a curved surface that gradually becomes deeper in the height direction as it is away from and a curved surface shape that gradually recedes in the height direction toward both sides in the track width direction ;
A method of manufacturing a thin film magnetic head, comprising: 10. The method of manufacturing a thin film magnetic head according to claim 9 , wherein the gap layer is formed of a nonmagnetic metal material that can be plated. 11. The method of manufacturing a thin film magnetic head according to claim 10, wherein the nonmagnetic metal material is selected from one or more of NiP, NiPd, NiW, NiMo, Au, Pt, Rh, Pd, Ru, and Cr.

Images