JP3837212B2 - 平板状被検査体のための検査用ヘッド - Google Patents

平板状被検査体のための検査用ヘッド Download PDF

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Publication number
JP3837212B2
JP3837212B2 JP25409197A JP25409197A JP3837212B2 JP 3837212 B2 JP3837212 B2 JP 3837212B2 JP 25409197 A JP25409197 A JP 25409197A JP 25409197 A JP25409197 A JP 25409197A JP 3837212 B2 JP3837212 B2 JP 3837212B2
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Japan
Prior art keywords
wiring
substrate
probe
support
inspection head
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Expired - Fee Related
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JP25409197A
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English (en)
Japanese (ja)
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JPH1183899A5 (enrdf_load_stackoverflow
JPH1183899A (ja
Inventor
紀之 中村
昌志 長谷川
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Priority to JP25409197A priority Critical patent/JP3837212B2/ja
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Publication of JPH1183899A5 publication Critical patent/JPH1183899A5/ja
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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP25409197A 1997-09-04 1997-09-04 平板状被検査体のための検査用ヘッド Expired - Fee Related JP3837212B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25409197A JP3837212B2 (ja) 1997-09-04 1997-09-04 平板状被検査体のための検査用ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25409197A JP3837212B2 (ja) 1997-09-04 1997-09-04 平板状被検査体のための検査用ヘッド

Publications (3)

Publication Number Publication Date
JPH1183899A JPH1183899A (ja) 1999-03-26
JPH1183899A5 JPH1183899A5 (enrdf_load_stackoverflow) 2005-05-26
JP3837212B2 true JP3837212B2 (ja) 2006-10-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP25409197A Expired - Fee Related JP3837212B2 (ja) 1997-09-04 1997-09-04 平板状被検査体のための検査用ヘッド

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JP (1) JP3837212B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115662915B (zh) * 2022-12-07 2023-06-02 四川富美达微电子有限公司 一种引线框架矫形检测组件及装置

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Publication number Publication date
JPH1183899A (ja) 1999-03-26

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