JP3787254B2 - Method for producing titanium oxide fine particles - Google Patents
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Description
【０００１】
【発明の属する技術分野】
本発明は、優れた分散性を有し、電子材料、紫外線遮蔽材料あるいは光触媒等汎用的に利用しうる球状でかつ高純度の酸化チタン微粒子の製造方法に関するものである。
【０００２】
【従来の技術】
酸化チタン微粒子は、白色顔料として古くから利用されており、近年はコンデンサ、サーミスタの構成材料またチタン酸バリウムの原料等電子材料に用いられる焼結材料に広く利用されている。また、酸化チタンは可視光付近の波長領域において大きな屈折率を示すため、可視光領域では殆ど光吸収は起こらない。このことから、最近化粧料、医薬あるいは塗料等の紫外線遮蔽が要求されるような材料にも広く使用されている。さらに、酸化チタンにそのバンドギャップ以上のエネルギーを持つ光を照射することによって酸化チタンが励起されて、伝導帯に電子また価電帯に正孔が生じるが、この電子による還元力また正孔による酸化力を利用した光触媒反応の用途開発が盛んに行われている。この酸化チタン光触媒の用途は非常に多岐に渡っており、水の分解による水素の発生、排ガス処理、空気清浄、防臭、殺菌、抗菌、水処理、照明機器等の汚れ防止等、数多くの用途開発が行われている。
【０００３】
このように酸化チタンの用途は多岐に渡るが、顔料、塗料あるいは焼結材料などに酸化チタン微粒子を利用する場合、水あるいは有機溶剤等に懸濁し分散させて使用する場合が多く、その場合酸化チタン微粒子の溶媒への分散性が問題となる。
【０００４】
特に電子材料用酸化チタンにおいて、例えば誘電体物質であるチタン酸バリウムは、酸化チタンと炭酸バリウム等のバリウム化合物を原料として調製されるが、この際、酸化チタンは溶媒中に懸濁し分散し、バリウム化合物と混合した後、焼結する。調製されるチタン酸バリウムの粒度は、原料である酸化チタンの粒度に主に依存するため、より微粒子のものを調製するためには、より微粒子の原料である酸化チタンを用いなければならず、近年の電子材料の超小型化に対応するため、１μm 以下の超微粒子の酸化チタンが要求されている。しかしながら、酸化チタンを微粒化するにともない、溶媒への分散性が悪くなり、溶媒に懸濁した際、微粒子同士の凝集が起こり、上記のようにチタン酸バリウムを調製した際、微粒子の酸化チタンを用いたにも拘らず、逆に粒径が大きくなってしまったり、さらに焼結した際、均一に反応せず、生成物を分子レベルで見たときにチタンとバリウムの分散が不均一であり、結果として電子材料としての特性に悪影響を与えてしまう。
【０００５】
また、紫外線遮蔽材においては、酸化チタン粒子の凝集により紫外線の遮蔽特性が悪くなるという問題が生じる。
【０００６】
従来酸化チタンの製法のうち気相酸化法と呼ばれる方法として、四塩化チタンを気相中で酸素と接触させ酸化させる方法、あるいは燃焼して水を生成する水素ガス等の可燃性ガスと酸素を燃焼バーナーに供給し火炎を形成し、この中に四塩化チタンを導入する所謂火炎加水分解法などがある。例えば、ルチル化率が高く、一次粒子の粒径が０．１μm 以下の酸化チタン微粒子を製造しうる方法として、特開平６−３４０４２３号公報には、四塩化チタン、水素及び酸素の混合ガスを気相において燃焼させて四塩化チタンの加水分解により酸化チタンを製造する火炎加水分解方法において、該混合ガス中の四塩化チタン、水素及び酸素を特定のモル比で反応させる方法が開示されている。
【０００７】
また、特開平８−２１７６５４号公報には、チタン化合物を火炎加水分解法において、水素含有ガス中にチタン化合物を、二酸化チタン換算で５０〜３００g/m3供給し、３００〜１５００℃の温度で火炎加水分解した平均粒径０．０４〜０．１５μm の結晶質の紫外線遮蔽化粧料用酸化チタン微粒子が開示されている。
【０００８】
一方、球状の形状を有する酸化チタンの製法としては、一般的には、例えばチタンテトラアルコキシド等の有機チタン化合物を加水分解する方法、硫酸チタニル水溶液を加水分解させ、得られた含水酸化チタンを焼成する方法などがある。例えば特開平５−１６３０２２号公報には、硫酸チタニルを１７０℃以上の温度下、かつ、該温度の飽和蒸気圧以上の圧力下で加水分解して含水二酸化チタンを得、次いで、該含水二酸化チタンを４００〜９００℃の温度で焼成し球状アナタース型二酸化チタンの製造方法が開示されている。さらに、特開平８−３３３１１７号公報には、ＴｉＯ2に換算して５．０〜１００ g/lの硫酸チタニルとチタンに対するモル比１．０〜３．０の過剰硫酸とを含む硫酸チタニル水溶液に、この水溶液中の全硫酸根に対し等モル以上の尿素を加えて、８５℃以上、沸点以下に加熱し、析出したメタチタン酸粒子を回収して６５０〜８５０℃で焼成することを特徴とする、粒度が均一で比表面積の大きい多孔質球状アナターゼ型酸化チタン粒子の製造方法が開示されている。
【０００９】
さらに、分散性の問題を解決するために、シリカ、アルミナのような元来分散性の高い疎水性物質を、酸化チタンの粒子表面にコーティングすることが試みられており、例えば特開平５−２８１７２６号公報では、アルミニウム塩基性塩水溶液を酸でｐＨを１０．５〜１２．０に調節し、これに二酸化チタンスラリーを混合し、次いでこれを酸にて中和し二酸化チタン粒子表面に酸化アルミニウム水和物を均一に析出させる方法が開示されている。
【００１０】
【発明が解決しようとする課題】
しかしながら、上記のような従来の気相酸化法あるいは火炎加水分解法で得られる酸化チタン粒子の形状は不定形であり、粒子径に対して比表面積が大きいものであった。そのため、チタン酸バリウムのような電子材料を調製するため溶媒に懸濁させた際、分散性が非常に悪く、微粒子の酸化チタンを使用しても、逆に凝集してしまうという問題があった。
【００１１】
また、球状の形状を有する酸化チタンの製法として、チタンテトラアルコキシド等の有機チタン化合物を加水分解する方法では、原料としてのチタンテトラアルコキシドが四塩化チタンから製造されるもので非常に高価であり、結果として得られる酸化チタンのコストも高くなるという問題があった。硫酸チタニルを加水分解して含水二酸化チタンを得、次いで焼成して酸化チタンを製造する方法は、液相で得られる含水二酸化チタンを分離、乾燥してさらに焼成が必要で工程が非常に煩雑であり、同様にコストアップになる。さらに硫酸チタニルを原料に用いた場合、最終的に得られる酸化チタン粒子中に硫酸根が残留し、焼結材料、紫外線遮蔽材料あるいは光触媒など特に電子材料に使用する場合、その特性に悪影響を及ぼす。
【００１２】
さらに酸化チタン粒子表面の異物質によるコーティングというような酸化チタン以外の成分を用いるため、酸化チタン本来の特性が変化したり、特に電子材料にはその特性に悪影響を及ぼすということで適用は難しい。
【００１３】
従って、本発明の目的は、四塩化チタンの気相反応において、特定の条件で反応することにより分散性の優れた、球状でかつ高純度の酸化チタン微粒子でまた低コストのものを製造する方法を提供することにある。
【００１４】
【課題を解決するための手段】
かかる実情において、本発明者は鋭意検討を行った結果、四塩化チタンの気相反応法という、低コストで酸化チタンの製造が可能な方法について鋭意研究を重ねた結果、球状でかつ高純度の電子材料のような焼結材料、紫外線遮蔽材料あるいは光触媒などに好適な酸化チタン微粒子が製造し得ることを見出し、本発明を完成するに至った。
【００１５】
すなわち、本発明は、四塩化チタンの気相反応において、標準状態であると仮定したとき、四塩化チタンガス１ｌに対し、酸素２〜２０ｌ及び水素０．１〜１０ｌの割合で反応させ、且つ、反応部における四塩化チタンガス濃度が２０容量％以下であることを特徴とする酸化チタン微粒子の製造方法を提供するものである。
【００１６】
【発明の実施の形態】
以下、本発明をさらに詳しく説明する。本発明の酸化チタン微粒子の製造方法は、原料として四塩化チタン、酸素及び水素の３成分を接触させ、四塩化チタンを気相において酸化反応させ、酸化チタンを生成させる。これらの原料の他、水蒸気あるいは燃焼して水を生成するプロパン等の可燃性ガスも併用し得る。
【００１７】
上記各成分を接触し反応させる際、上記各成分の反応部への供給量比は、各供給ガスが標準状態であると仮定したとき、四塩化チタンガス１l に対し、酸素が１〜３０l 、好ましくは２〜２０l 、特に好ましくは４〜１０l であり、水素が０．１〜１０l 、好ましくは０．２〜５l 、特に好ましくは０．３〜１．０l である。さらに本発明では上記成分以外に必要に応じて水蒸気を供給し酸化チタン微粒子を製造させることも可能であり、その際の水蒸気の供給量比は、標準状態であると仮定したとき、四塩化チタンガス１l に対し、０．０５〜１．０l 、好ましくは０．１〜０．５l である。
【００１８】
上記各原料ガスの供給量は、反応スケールあるいは各ガスを供給するノズル径等により異なるので適宜設定するが、反応部での各ガス、特に四塩化チタンガスの供給速度は乱流域になるように設定することが望ましい。
【００１９】
本発明は、上記の四塩化チタンガス、水素及び酸素、また必要に応じて水蒸気を反応炉に供給し、気相で接触させ反応させる。その供給方法としては、種々の方法が採用し得るが、具体的には、以下の方法が好ましい；
１）四塩化チタンガスと水素ガスの混合ガスと、酸素ガスの供給管をそれぞれ独立に設置し、かつ両者を隣接させ独立に反応炉に供給する方法、
２）四塩化チタンガス、水素ガス及び酸素ガスの供給管をそれぞれ独立に設置し、かつ両者を隣接させ独立に反応炉に供給する方法、
３）四塩化チタンガス、酸素ガス及び水素と水蒸気の混合ガス供給管をそれぞれ独立に設置し、かつ両者を隣接させ独立に反応炉に供給する方法、
４）四塩化チタンガスと水素ガスの混合ガスと、酸素ガス及び水蒸気の混合ガスの供給管をそれぞれ独立に設置し、かつ両者を隣接させ独立に反応炉に供給する方法。
【００２０】
また、前記四塩化チタンの気相酸化反応において、反応部で生成する酸化チタン微粒子の濃度が高いと、粒子同士の衝突により粒子が成長し凝集してしまい、また形状も不定形となってしまう。従って、反応部で生成する酸化チタン微粒子の反応部の容積に対する濃度はできるだけ低くし、従来の気相反応法における反応条件に比べより稀薄状態で反応することが好ましい。そのために供給する上記の各成分をアルゴンや窒素のごとき不活性ガスで希釈し反応部に供給し反応させる。特に反応部、具体的には四塩化チタンと酸素が反応し酸化チタンが生成する火炎、における四塩化チタンガス濃度や反応部における各成分の分圧は重要であり、これらの成分が稀薄になるように供給する。このときの四塩化チタンガスの濃度は、反応部に供給される全ガス量のうち通常２０容量％以下であることが望ましく、特に望ましくは３〜１６容量％である。また、反応部に供給される全ガス量のうち、酸素は、８０容量％以下、好ましくは４０〜７０容量％であり、水素は、２０容量％以下、好ましくは３〜１０容量％である。さらに、これらのガス成分を希釈する窒素ガス等の不活性ガス成分の反応部に供給される全ガス量における濃度（分圧）は、通常０〜５０容量％、好ましくは１０〜３０容量％である。
【００２１】
上記各成分のうち特に四塩化チタンガスおよび酸素は窒素等の不活性ガスで希釈し反応部に供給することが望ましく、その希釈率は、四塩化チタンは、標準状態であると仮定したとき四塩化チタンガス１l に対し、不活性ガス０．１〜１０l 、好ましくは０．３〜１l である。また酸素の希釈率は、標準状態であると仮定したとき酸素ガス１l に対し、不活性ガス０．１〜１０l 、好ましくは０．３〜１l である。
【００２２】
上記のように、各成分あるいは混合ガスの供給管をそれぞれ独立に設置し、かつ両者を隣接させる手段としては、種々の方法が採用し得るが、その供給管を内管と外管とが同軸的に配された多重管とすることが好ましい。
【００２３】
この多重管の供給管によって、上記の各成分あるいは混合ガスを供給するが、特に、最も内側の管から四塩化チタンガス、その外側の管から酸素ガスを供給させることにより、反応が均一となり、球状で粒子性状の良好な酸化チタン微粒子が生成される。
【００２４】
さらに本発明の酸化チタン微粒子の製造方法において用いられる反応炉としては、各成分の供給管、例えば上述したような多重管が上部に設けられた、縦型反応炉が好ましく用いられる。
【００２５】
また、反応炉内に供給される各成分あるいは混合ガスは、反応炉内に供給する前に予め余熱し供給することが好ましい。この余熱は後述する反応炉内での反応反応の温度範囲で行うことが望ましい。
【００２６】
上記のように各成分を反応させ酸化チタン微粒子を生成させるが、反応部において生成した酸化チタン微粒子は、反応温度による粒子同士の凝集を防ぐため、冷却することが望ましい。通常、反応部の後工程に冷却工程を設けることにより、生成酸化チタン微粒子を冷却する。具体的には反応部のあとに冷却ジャケットを具備した冷却部を設ける。また、この冷却部では不十分な場合、空気または窒素等の不活性ガスを冷却ガスとして、反応部（火炎）のあとに挿入し、生成した酸化チタン微粒子を急冷することが望ましい。このとき挿入する空気あるいは窒素等の冷却ガスは、標準状態であると仮定したとき、供給する四塩化チタンガス１l に対して、１l 以上、好ましくは３l 以上、特に好ましくは５l 以上である。
【００２７】
以下本発明の酸化チタン微粒子の具体的な製法プロセスの一例を示す。先ず、液状の四塩化チタンを予め加熱し、気化させ、必要に応じて窒素ガスで希釈し反応炉に導入する。このとき水素ガスを四塩化チタンと予め混合するかあるいは四塩化チタンとは別に水素ガスを同時に反応炉に導入する。四塩化チタンの導入と同時に、酸素ガス及び／又は水蒸気を必要に応じて窒素ガスで希釈して反応炉に導入し、酸化反応を行うが反応温度は通常５００〜１２００℃、好ましくは８００〜１１００℃である。本発明の球状酸化チタン微粒子を得るためにはこのように比較的高温で酸化反応を行うことが望ましい。
【００２８】
上記の酸化反応により酸化チタン微粒子を生成させ、その後該酸化チタン微粒子を冷却する。通常冷却ジャケットを具備した冷却槽等が用いられ、同時に空気あるいは窒素ガス等の不活性ガスを生成酸化チタン微粒子と接触させ急冷する。
【００２９】
その後生成した酸化チタン微粒子を捕集し、酸化チタン微粒子中に残留する塩素ガスを、真空加熱、空気あるいは窒素ガス雰囲気中での加熱あるいはスチーム処理等の加熱処理あるいはアルコールとの接触処理により除去し、本発明の球状酸化チタン微粒子を得ることができる。
【００３０】
以上のようにして得られた酸化チタン微粒子は表面が平滑で略球状であり、ＳＥＭ写真より測定した平均粒径をＤ1 、ＢＥＴ比表面積より求めた平均粒径をＤ2 としたときのＤ1 ／Ｄ2 が、通常１．０〜１．２５、好ましくは１．０〜１．２３、さらに好ましくは１．０〜１．２０である。
【００３１】
上記の式においてＢＥＴ比表面積より求めた平均粒径Ｄ2 は、粒子を真球と仮定した場合の平均粒径であり、Ｄ1 ／Ｄ2 の値が１に近いほど粒子の形状が真球状であることを表しており、さらに、粒子表面が平滑で、粒子内部の細孔容積が小さいことを意味するものである。従って、本発明の方法で得られた酸化チタン微粒子は、従来の気相法で得られたものよりも球状であり、表面が平滑でさらに細孔容積が小さい。これによって、同じ粒径でも比表面積が小さいので、粒子同士の凝集力が小さく、溶媒に懸濁させた際の分散性に優れている。さらに、細孔容積が小さいため、焼結した際、収縮が小さく焼結特性にすぐれている。
【００３２】
なお、一般的に、気相法において反応後の酸化チタン粒子表面あるいは粒子内部には、塩素及び塩化水素の塩素分が付着あるいは吸着している。この酸化チタン中の塩素分は、特に電子材料に使用する場合、その特性に悪影響を与えるので、できる限り除去する必要があり、通常酸化チタン微粒子が生成した後、スチーム処理や加熱処理あるいはアルコール処理などによって、この塩素分を除去している。従来の気相法による酸化チタンは、より微粒化すればするほど、粒子の比表面積が大きくなり、その結果粒子に吸着する塩素分も多くなり、許容しうるレベルまで塩素分を除去することは困難であった。これに対し、本発明の球状酸化チタン微粒子は、粒子表面が比較的平滑でかつ細孔容積が小さいため、従来の酸化チタン粒子に比べ、従来と同じ方法によっても容易に塩素分を除去することができ、結果としてより塩素分の少ない高純度の酸化チタン微粒子の製造が可能となった。
【００３３】
また本発明の方法で得られた球状酸化チタン微粒子は必ずしも真球状である必要はなく、略球状であり、楕円あるいは粒子表面に凹凸があってもよく、その円形度係数が０．７〜１．０である。該円形度係数は、ＳＥＭ写真の画像解析により下記式（１）から求められるものである。
円形度係数＝４πＬ1 ／（Ｌ2 ）2 （１）
（式中、Ｌ1 は粒子の投影面積、Ｌ2 は粒子の投影の輪郭長を示す。）
【００３４】
本発明の方法で得られた球状酸化チタン微粒子の粒径、比表面積などの粒子性状については、Ｄ1 ／Ｄ2 及び円形度係数が上記特定範囲内にあればよく、その用途により異なり一概には特定できないが、平均粒径Ｄ1 は、好ましくは０．０１〜５μm 、より好ましくは０．０５〜２μm 、さらに好ましくは０．１〜１μm であり、比表面積は、好ましくは０．５〜１００m2/g、より好ましくは１〜５０m2/g、さらに好ましくは２〜３０m2/gである。また、結晶型についても一概に特定はできず、その用途により調整すればよいが、例えば焼結材料、顔料あるいは紫外線遮蔽材料用ではルチル型のほうが好ましく、通常ルチル化率は１０〜１００％であり、一方光触媒用としてはアナターゼ型のほうが好ましい。
【００３５】
さらに、本発明の方法で得られた酸化チタン微粒子は、不純物として酸化チタン微粒子中に含まれるＦｅ、Ａl 、ＳｉおよびＮａがそれぞれ２０ppm 未満であり、かつＣl が２００ppm 未満である。望ましくは酸化チタン微粒子に含まれるＦｅ、Ａl 、ＳｉおよびＮａがそれぞれ１０ppm 未満であり、Ｃl が１００ppm 未満、さらに望ましくは５０ppm 未満である。このように本発明の方法で得られる酸化チタン微粒子は、気相法によって製造されるので、液相法で得られる酸化チタンのような不純物元素が混入また残留することがなく、従来技術に見られるようなシリカあるいはアルミナのごとき疎水性物質を表面コーティングするなどの他成分による処理を施しておらず、酸化チタン以外の他成分を殆ど含有していない高純度の酸化チタン微粒子であるので、電子材料、紫外線遮蔽材料あるいは光触媒に利用した際、酸化チタン本来の特性が変化せず優れた効果を得ることができる。
【００３６】
従って、本発明の方法により製造される酸化チタン微粒子は、焼結材料、顔料、紫外線遮蔽材料あるいは光触媒など 溶媒に分散して使用するあらゆる用途に利用可能であり、特にコンデンサなどの電子材料用として有効である。
【００３７】
【実施例】
以下、本発明を実施例および比較例によりさらに具体的に説明する。なお、これは単に例示であって、本発明を制限するものではない。
【００３８】
本明細書において、酸化チタン微粒子の平均粒径（ＳＥＭ径）、円形度係数、比表面積および不純物は以下の方法により測定した。
１）平均粒径Ｄ1 ：電子顕微鏡（ＳＥＭ）により微粒子を観察し、そのＳＥＭ画像を画像解析装置（東洋紡（株）製 画像解析システム Image Analyzer V10）に取り込み、画像を円と仮定し面積より換算した円相当径を測定した（解析粒子数：約２００個。）
２）円形度係数：上記ＳＥＭ画像より東洋紡績（株）製 画像解析装置 Ｖ１０型により測定した。
３）ＢＥＴ比表面積：ＢＥＴ法により測定した。
４）平均粒径Ｄ2 ：ＢＥＴ比表面積及び酸化チタンの真比重から平均粒径を算出した。
５）不純物の定量：酸化チタン中のＦｅ，Ａl ，ＳｉおよびＮａ成分：原子吸光法により測定した。酸化チタン中のＣl 成分：吸光光度法により測定した。
【００３９】
実施例１
四塩化チタンを気相中で酸素及び水素と接触させ酸化させる気相法により酸化チタン微粒子を調製した。
まず、内径４００mmの多重管バーナーを上部に具備した気相反応管において、多重管バーナーに、約８００℃に予熱し気化させた四塩化チタン及び水素ガスの混合ガスを供給し、一方別の供給ノズルより８００℃に予熱した酸素ガスを供給し、気相反応管内で約１０００℃にて酸化反応させ、酸化チタン微粒子を生成させた。このとき四塩化チタンは６０l/分、水素ガスは４０l/分、酸素ガスは３８０l/分でそれぞれ供給した。その後、気相反応管の底部から空気を４００l/分で挿入し、生成した酸化チタン微粒子を冷却した。その後、得られた酸化チタン微粒子窒素雰囲気中で３５０℃〜４００℃で２時間加熱処理した。
このようにして得られた球状酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。
【００４０】
実施例２
まず、内径４００mmの多重管バーナーを上部に具備した気相反応管において、多重管バーナーに、約８００℃に予熱し気化させた四塩化チタン、水素ガス及び窒素ガスの混合ガスを供給し、一方別の供給ノズルより８００℃に予熱した酸素ガス及び窒素ガスの混合ガスを供給し、気相反応管内で約１０００℃にて酸化反応させ、酸化チタン微粒子を生成させた。このとき四塩化チタン混合ガスは、四塩化チタン６０l/分、水素ガス４０l/分、窒素ガス２０l/分、酸素３８０l/分と窒素ガス１２０l/分とからなる酸素混合ガス５００l/分をそれぞれ供給した。その後、気相反応管の底部から冷却ガスとして空気を４００l/分で挿入し、生成した酸化チタン微粒子を冷却した。その後、得られた酸化チタン微粒子窒素雰囲気中で３５０℃〜４００℃で２時間加熱処理した。
このようにして得られた球状酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。
【００４１】
実施例３
冷却ガスとして空気を５００l/分で挿入した以外は、実施例２と同様にして酸化チタン微粒子を調製した。得られた球状酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。また、得られた球状酸化チタン微粒子のＳＥＭ写真を図１に示す。
【００４２】
実施例４
冷却ガスとして空気を８００l/分で挿入した以外は、実施例２と同様にして酸化チタン微粒子を調製した。得られた球状酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。
【００４３】
実施例５
酸素混合ガス５００l/分に代えて、酸素ガス２４０l/分と窒素ガス１２０l/分とからなる酸素混合ガス３６０l/分を用いた以外は、実施例４と同様にして酸化チタン微粒子を調製した。得られた球状酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。
【００４４】
実施例６
四塩化チタンの供給量を１００l/分とし四塩化チタンを窒素ガスで希釈しなかった以外は実施例４と同様にして酸化チタン微粒子を調製した。得られた球状酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。
【００４５】
比較例１
水素ガスを使用しなかった以外は実施例２と同様にして酸化チタン微粒子を調製した。得られた酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。また、得られた酸化チタン微粒子のＳＥＭ写真を図２に示す。
【００４６】
比較例２
まず、内径４００mmの多重管バーナーを上部に具備した気相反応管において、多重管バーナーに、約８００℃に予熱し気化させた四塩化チタンガスを供給し、一方別の供給ノズルより８００℃に予熱した酸素ガス及び水蒸気を供給し、気相反応管内で約１０００℃にて酸化反応させ、酸化チタン微粒子を生成させた。このとき四塩化チタンは２００l/分、酸素ガスは３８０l/分、水蒸気は１７０l/分でそれぞれ供給した。その後、気相反応管の底部から空気を１００l/分で挿入し、生成した酸化チタン微粒子を冷却した。その後、得られた酸化チタン微粒子窒素雰囲気中で３５０℃〜４００℃で２時間加熱処理した。
このようにして得られた酸化チタン微粒子の平均粒径Ｄ1 、円形度係数、比表面積、平均粒径Ｄ2 、Ｄ1 ／Ｄ2 及び不純物の含量を表１に示す。
【００４７】
【表１】
【発明の効果】
以上説明したように、本発明の製造方法によって得られた酸化チタン微粒子は、従来の気相法による酸化チタンとは異なり、形状が球状で、溶媒に懸濁した際に優れた分散性を示す。
【図面の簡単な説明】
【図１】実施例３で調製された酸化チタン微粒子のＳＥＭ写真である。
【図２】比較例１で調製された酸化チタン微粒子のＳＥＭ写真である。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for producing spherical and high-purity titanium oxide fine particles that have excellent dispersibility and can be used for general purposes such as electronic materials, ultraviolet shielding materials or photocatalysts.
[0002]
[Prior art]
Titanium oxide fine particles have been used for a long time as white pigments, and in recent years, they have been widely used as sintering materials used for electronic materials such as capacitors and thermistors and barium titanate materials. Further, since titanium oxide exhibits a large refractive index in the wavelength region near visible light, light absorption hardly occurs in the visible light region. For this reason, it has been widely used for materials that require UV shielding such as cosmetics, medicines, and paints. Furthermore, by irradiating titanium oxide with light having energy greater than its band gap, the titanium oxide is excited, generating electrons in the conduction band and holes in the valence band. Development of applications for photocatalytic reactions using oxidizing power has been actively conducted. This titanium oxide photocatalyst has a wide variety of uses. Development of many applications such as generation of hydrogen by decomposition of water, exhaust gas treatment, air purification, deodorization, sterilization, antibacterial, water treatment, and prevention of contamination of lighting equipment, etc. Has been done.
[0003]
As described above, titanium oxide has a wide variety of uses. When titanium oxide fine particles are used in pigments, paints or sintered materials, it is often suspended and dispersed in water or an organic solvent. Dispersibility of titanium fine particles in a solvent is a problem.
[0004]
In particular, in titanium oxide for electronic materials, for example, barium titanate, which is a dielectric substance, is prepared using barium compounds such as titanium oxide and barium carbonate as raw materials. At this time, titanium oxide is suspended and dispersed in a solvent, After mixing with the barium compound, it is sintered. Since the particle size of the barium titanate to be prepared mainly depends on the particle size of the titanium oxide that is the raw material, in order to prepare more fine particles, the titanium oxide that is the raw material of the fine particles must be used, In order to cope with the recent miniaturization of electronic materials, ultrafine particles of titanium oxide of 1 μm or less are required. However, as the titanium oxide is atomized, the dispersibility in the solvent becomes worse, and when suspended in the solvent, the fine particles agglomerate with each other. When preparing barium titanate as described above, the fine titanium oxide In spite of the use of, the particle size becomes larger, or when it is further sintered, it does not react uniformly, and when the product is viewed at the molecular level, the dispersion of titanium and barium is uneven. As a result, the characteristics as an electronic material are adversely affected.
[0005]
Further, in the ultraviolet shielding material, there arises a problem that the ultraviolet shielding properties deteriorate due to aggregation of the titanium oxide particles.
[0006]
Among conventional titanium oxide production methods, a method called a vapor phase oxidation method is a method in which titanium tetrachloride is brought into contact with oxygen in the gas phase to oxidize it, or a combustible gas such as hydrogen gas that burns to produce water and oxygen. There is a so-called flame hydrolysis method in which a flame is formed by supplying a combustion burner and titanium tetrachloride is introduced into the flame. For example, as a method for producing titanium oxide fine particles having a high rutile ratio and a primary particle size of 0.1 μm or less, JP-A-6-340423 discloses a mixed gas of titanium tetrachloride, hydrogen and oxygen. In a flame hydrolysis method in which titanium oxide is produced by hydrolysis of titanium tetrachloride by burning in the gas phase, a method of reacting titanium tetrachloride, hydrogen and oxygen in the mixed gas at a specific molar ratio is disclosed. .
[0007]
JP-A-8-217654 discloses that a titanium compound is supplied into a hydrogen-containing gas at a temperature of 300 to 1500 ° C. by supplying 50 to 300 g / m 3 in terms of titanium dioxide in a flame hydrolysis method. Disclosed is a titanium oxide fine particle for crystalline UV shielding cosmetics having an average particle size of 0.04 to 0.15 μm which has been subjected to flame hydrolysis.
[0008]
On the other hand, as a method for producing a titanium oxide having a spherical shape, generally, for example, a method of hydrolyzing an organic titanium compound such as titanium tetraalkoxide, a hydrolyzed titanyl sulfate aqueous solution, and calcining the resulting hydrous titanium oxide There are ways to do it. For example, JP-A-5-163022 discloses that hydrous titanium dioxide is obtained by hydrolysis of titanyl sulfate at a temperature of 170 ° C. or higher and a pressure equal to or higher than the saturated vapor pressure of the temperature, and then the hydrous titanium dioxide. Is manufactured at a temperature of 400 to 900 ° C. to produce spherical anatase-type titanium dioxide. Further, JP-A-8-333117 discloses a titanyl sulfate aqueous solution containing 5.0 to 100 g / l of titanyl sulfate converted to TiO 2 and excess sulfuric acid having a molar ratio of 1.0 to 3.0 with respect to titanium. In addition, an equimolar amount or more of urea is added to the total sulfate radical in the aqueous solution, and the mixture is heated to 85 ° C. or more and the boiling point or less, and the precipitated metatitanic acid particles are collected and fired at 650 to 850 ° C. A method for producing porous spherical anatase-type titanium oxide particles having a uniform particle size and a large specific surface area is disclosed.
[0009]
Further, in order to solve the problem of dispersibility, it has been attempted to coat the surface of titanium oxide particles with a hydrophobic material that is originally highly dispersible, such as silica and alumina. For example, JP-A-5-281726. In this publication, the pH of an aluminum basic salt aqueous solution is adjusted to 10.5 to 12.0 with an acid, and a titanium dioxide slurry is mixed therewith, and then this is neutralized with an acid to form aluminum oxide on the surface of titanium dioxide particles. A method for uniformly depositing hydrates is disclosed.
[0010]
[Problems to be solved by the invention]
However, the shape of the titanium oxide particles obtained by the conventional gas phase oxidation method or flame hydrolysis method as described above is indefinite, and has a large specific surface area with respect to the particle diameter. Therefore, when suspended in a solvent to prepare an electronic material such as barium titanate, there was a problem that the dispersibility was very poor, and even if fine titanium oxide was used, it would aggregate on the contrary. .
[0011]
In addition, as a method for producing titanium oxide having a spherical shape, in a method of hydrolyzing an organic titanium compound such as titanium tetraalkoxide, titanium tetraalkoxide as a raw material is produced from titanium tetrachloride, which is very expensive. There was a problem that the cost of the resulting titanium oxide also increased. The method of hydrolyzing titanyl sulfate to obtain hydrous titanium dioxide, followed by calcination to produce titanium oxide is a complicated process requiring separation and drying of the hydrous titanium dioxide obtained in the liquid phase and further calcination. Yes, as well as an increase in cost. Furthermore, when titanyl sulfate is used as a raw material, sulfate radicals remain in the finally obtained titanium oxide particles, which adversely affects its properties when used for electronic materials such as sintered materials, ultraviolet shielding materials or photocatalysts. .
[0012]
Furthermore, since components other than titanium oxide, such as coating with a foreign substance on the surface of titanium oxide particles, are used, it is difficult to apply because the original properties of titanium oxide change or particularly the electronic materials are adversely affected.
[0013]
Accordingly, an object of the present invention is a method for producing spherical and high-purity titanium oxide fine particles having excellent dispersibility and low cost by reacting under specific conditions in a gas phase reaction of titanium tetrachloride. Is to provide.
[0014]
[Means for Solving the Problems]
In this situation, the present inventor conducted intensive studies, and as a result of intensive studies on a titanium tetrachloride gas phase reaction method capable of producing titanium oxide at a low cost, the present inventors obtained a spherical and high purity. The inventors have found that titanium oxide fine particles suitable for a sintered material such as an electronic material, an ultraviolet shielding material or a photocatalyst can be produced, and have completed the present invention.
[0015]
That is, in the gas phase reaction of titanium tetrachloride, the present invention is made to react at a ratio of oxygen 2 to 20 l and hydrogen 0.1 to 10 l with respect to 1 l of titanium tetrachloride gas, and The present invention provides a method for producing fine titanium oxide particles, wherein the titanium tetrachloride gas concentration in the reaction part is 20% by volume or less.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in more detail. In the method for producing fine titanium oxide particles of the present invention, three components of titanium tetrachloride, oxygen and hydrogen are brought into contact as raw materials, and titanium tetrachloride is oxidized in the gas phase to produce titanium oxide. In addition to these raw materials, steam or flammable gas such as propane that generates water by combustion can be used in combination.
[0017]
When the components are brought into contact with each other and reacted, the ratio of the supply amounts of the components to the reaction section is such that when each supply gas is in a standard state, 1 to 30 l of oxygen with respect to 1 l of titanium tetrachloride gas, It is preferably 2 to 20 l, particularly preferably 4 to 10 l, and hydrogen is 0.1 to 10 l, preferably 0.2 to 5 l, particularly preferably 0.3 to 1.0 l. Furthermore, in the present invention, it is possible to produce fine titanium oxide particles by supplying water vapor as necessary in addition to the above components, and when the supply amount ratio of water vapor is assumed to be in a standard state, titanium tetrachloride is obtained. It is 0.05 to 1.0 l, preferably 0.1 to 0.5 l for 1 l of gas.
[0018]
The supply amount of each source gas varies depending on the reaction scale or the nozzle diameter for supplying each gas, etc., and is set as appropriate. It is desirable to set.
[0019]
In the present invention, the above-described titanium tetrachloride gas, hydrogen and oxygen, and, if necessary, water vapor are supplied to a reaction furnace and brought into contact with each other in the gas phase for reaction. As the supply method, various methods can be adopted, and specifically, the following method is preferable;
1) A method in which a mixed gas of titanium tetrachloride gas and hydrogen gas and an oxygen gas supply pipe are installed independently, and both are adjacent to each other and supplied to the reactor independently.
2) A method in which titanium tetrachloride gas, hydrogen gas and oxygen gas supply pipes are installed independently, and both are adjacent to each other and supplied to the reactor independently.
3) A method in which titanium tetrachloride gas, oxygen gas, and a mixed gas supply pipe of hydrogen and water vapor are independently installed, and both are adjacent to each other and supplied independently to the reactor,
4) A method in which a supply pipe of a mixed gas of titanium tetrachloride gas and hydrogen gas and a mixed gas of oxygen gas and water vapor is installed independently, and both are adjacent to each other and supplied to the reactor independently.
[0020]
In addition, in the gas phase oxidation reaction of titanium tetrachloride, if the concentration of titanium oxide fine particles generated in the reaction part is high, the particles grow and aggregate due to collision between the particles, and the shape becomes indefinite. . Therefore, it is preferable that the concentration of the titanium oxide fine particles produced in the reaction part is as low as possible with respect to the volume of the reaction part, and that the reaction be performed in a more dilute state than the reaction conditions in the conventional gas phase reaction method. For this purpose, the above-mentioned components to be supplied are diluted with an inert gas such as argon or nitrogen, and supplied to the reaction section for reaction. In particular, the titanium tetrachloride gas concentration in the reaction zone, specifically the flame in which titanium tetrachloride reacts with oxygen to produce titanium oxide, and the partial pressure of each component in the reaction zone are important, and these components become dilute. To supply. The concentration of the titanium tetrachloride gas at this time is preferably 20% by volume or less, particularly preferably 3 to 16% by volume, out of the total amount of gas supplied to the reaction section. Further, in the total amount of gas supplied to the reaction section, oxygen is 80% by volume or less, preferably 40 to 70% by volume, and hydrogen is 20% by volume or less, preferably 3 to 10% by volume. Furthermore, the concentration (partial pressure) in the total gas amount supplied to the reaction part of an inert gas component such as nitrogen gas for diluting these gas components is usually 0 to 50% by volume, preferably 10 to 30% by volume. is there.
[0021]
Of the above components, particularly, titanium tetrachloride gas and oxygen are desirably diluted with an inert gas such as nitrogen and supplied to the reaction section, and the dilution rate is four when titanium tetrachloride is assumed to be in a standard state. The amount of inert gas is 0.1 to 10 l, preferably 0.3 to 1 l, per 1 l of titanium chloride gas. The oxygen dilution rate is 0.1 to 10 l, preferably 0.3 to 1 l, of inert gas with respect to 1 l of oxygen gas when it is assumed to be in a standard state.
[0022]
As described above, various methods can be adopted as means for installing the supply pipes for each component or mixed gas independently and adjoining the supply pipes, but the inner pipe and the outer pipe are coaxial. It is preferable to use a multi-tube arranged in a line.
[0023]
Each of the above components or mixed gas is supplied by the supply pipe of this multiple pipe. In particular, by supplying titanium tetrachloride gas from the innermost pipe and oxygen gas from the outer pipe, the reaction becomes uniform, Titanium oxide fine particles having a spherical shape and good particle properties are produced.
[0024]
Furthermore, as a reaction furnace used in the method for producing titanium oxide fine particles of the present invention, a vertical reaction furnace in which a supply pipe for each component, for example, a multiple pipe as described above is provided at the top is preferably used.
[0025]
In addition, each component or mixed gas supplied into the reaction furnace is preferably preheated before being supplied into the reaction furnace. This preheating is desirably performed within a temperature range of a reaction reaction in a reaction furnace described later.
[0026]
As described above, titanium oxide fine particles are produced by reacting each component, and the titanium oxide fine particles produced in the reaction part are desirably cooled in order to prevent aggregation of particles due to the reaction temperature. Usually, the produced titanium oxide fine particles are cooled by providing a cooling step after the reaction section. Specifically, a cooling part equipped with a cooling jacket is provided after the reaction part. If this cooling part is insufficient, it is desirable to insert an inert gas such as air or nitrogen as a cooling gas after the reaction part (flame) and quench the generated titanium oxide fine particles. The cooling gas such as air or nitrogen to be inserted at this time is 1 l or more, preferably 3 l or more, particularly preferably 5 l or more with respect to 1 l of the titanium tetrachloride gas supplied, assuming that it is in a standard state.
[0027]
Hereinafter, an example of a specific manufacturing process of the titanium oxide fine particles of the present invention will be shown. First, liquid titanium tetrachloride is preheated and vaporized, diluted with nitrogen gas as necessary, and introduced into the reactor. At this time, hydrogen gas is mixed with titanium tetrachloride in advance, or hydrogen gas is simultaneously introduced into the reactor separately from titanium tetrachloride. Simultaneously with the introduction of titanium tetrachloride, oxygen gas and / or water vapor is diluted with nitrogen gas as necessary and introduced into a reaction furnace to carry out an oxidation reaction. The reaction temperature is usually 500 to 1200 ° C., preferably 800 to 1100. ° C. In order to obtain the spherical titanium oxide fine particles of the present invention, it is desirable to carry out the oxidation reaction at such a relatively high temperature.
[0028]
Titanium oxide fine particles are generated by the above oxidation reaction, and then the titanium oxide fine particles are cooled. Usually, a cooling tank equipped with a cooling jacket or the like is used, and at the same time, an inert gas such as air or nitrogen gas is brought into contact with the produced titanium oxide fine particles to rapidly cool.
[0029]
Thereafter, the generated titanium oxide fine particles are collected, and the chlorine gas remaining in the titanium oxide fine particles is removed by vacuum heating, heating in air or nitrogen gas atmosphere, heat treatment such as steam treatment, or contact treatment with alcohol. The spherical titanium oxide fine particles of the present invention can be obtained.
[0030]
The titanium oxide fine particles obtained as described above have a smooth surface and a substantially spherical shape. The average particle diameter measured from the SEM photograph is D 1 , and the average particle diameter obtained from the BET specific surface area is D 2. 1 / D 2 is usually 1.0 to 1.25, preferably 1.0 to 1.23, more preferably 1.0 to 1.20.
[0031]
The average particle diameter D 2 obtained from the BET specific surface area in the above formula is an average particle diameter when the particle is assumed to be a true sphere, and the closer the value of D 1 / D 2 is to 1, the more the shape of the particle is a true sphere. Further, it means that the particle surface is smooth and the pore volume inside the particle is small. Accordingly, the titanium oxide fine particles obtained by the method of the present invention are more spherical than those obtained by the conventional gas phase method, have a smooth surface and a smaller pore volume. Thereby, since the specific surface area is small even with the same particle size, the cohesive force between the particles is small, and the dispersibility when suspended in a solvent is excellent. Furthermore, since the pore volume is small, the shrinkage is small when sintered, and the sintering characteristics are excellent.
[0032]
In general, the chlorine content of chlorine and hydrogen chloride is attached or adsorbed on the surface or inside of the titanium oxide particles after the reaction in the vapor phase method. This chlorine content in titanium oxide has an adverse effect on its properties, especially when used in electronic materials, so it is necessary to remove it as much as possible. Usually, after titanium oxide fine particles are formed, steam treatment, heat treatment or alcohol treatment This chlorine content is removed. The more the titanium oxide produced by the conventional vapor phase method is made finer, the larger the specific surface area of the particles. As a result, the amount of chlorine adsorbed on the particles also increases, and the chlorine content can be removed to an acceptable level. It was difficult. In contrast, the spherical titanium oxide fine particles of the present invention have a relatively smooth particle surface and a small pore volume, so that chlorine can be easily removed by the same method as conventional titanium oxide particles. As a result, high purity titanium oxide fine particles with less chlorine content can be produced.
[0033]
Further, the spherical titanium oxide fine particles obtained by the method of the present invention are not necessarily spherical, but are substantially spherical, and may have an ellipse or irregularities on the particle surface, and the circularity coefficient is 0.7 to 1. .0. The circularity coefficient is obtained from the following formula (1) by image analysis of SEM photographs.
Circularity coefficient = 4πL 1 / (L 2 ) 2 (1)
(In the formula, L 1 represents the projected area of the particle, and L 2 represents the contour length of the projected particle.)
[0034]
As for the particle properties such as the particle diameter and specific surface area of the spherical titanium oxide fine particles obtained by the method of the present invention, it is sufficient that D 1 / D 2 and the circularity coefficient are within the above-mentioned specific ranges. The average particle diameter D 1 is preferably 0.01 to 5 μm, more preferably 0.05 to 2 μm, still more preferably 0.1 to 1 μm, and the specific surface area is preferably 0.5 to 100 m 2 / g, more preferably 1 to 50 m 2 / g, more preferably from 2~30m 2 / g. In addition, the crystal type cannot be generally specified, and may be adjusted depending on the application. For example, the rutile type is preferable for a sintered material, pigment, or ultraviolet shielding material, and the rutile ratio is usually 10 to 100%. On the other hand, the anatase type is preferred for the photocatalyst.
[0035]
Further, the fine titanium oxide particles obtained by the method of the present invention contain less than 20 ppm of Fe, Al, Si and Na contained in the fine titanium oxide particles as impurities, and less than 200 ppm of Cl. Desirably, Fe, Al, Si, and Na contained in the titanium oxide fine particles are each less than 10 ppm, Cl is less than 100 ppm, and more preferably less than 50 ppm. As described above, since the titanium oxide fine particles obtained by the method of the present invention are produced by a vapor phase method, impurity elements such as titanium oxide obtained by a liquid phase method are not mixed in or remain, and are seen in the prior art. Because it is a high-purity titanium oxide fine particle that is not treated with other components such as surface coating with a hydrophobic material such as silica or alumina, and contains almost no other components other than titanium oxide. When used as a material, an ultraviolet shielding material, or a photocatalyst, an excellent effect can be obtained without changing the original characteristics of titanium oxide.
[0036]
Therefore, the titanium oxide fine particles produced by the method of the present invention can be used for any application that is dispersed in a solvent such as a sintered material, a pigment, an ultraviolet shielding material, or a photocatalyst, and particularly for electronic materials such as capacitors. It is valid.
[0037]
【Example】
Hereinafter, the present invention will be described more specifically with reference to Examples and Comparative Examples. This is merely an example and does not limit the present invention.
[0038]
In this specification, the average particle diameter (SEM diameter), circularity coefficient, specific surface area, and impurities of the titanium oxide fine particles were measured by the following methods.
1) Average particle diameter D 1 : Fine particles are observed with an electron microscope (SEM), and the SEM image is taken into an image analyzer (Image Analyzer V10, manufactured by Toyobo Co., Ltd.). The converted equivalent circle diameter was measured (number of analyzed particles: about 200).
2) Circularity coefficient: Measured from the above SEM image by Toyobo Co., Ltd. image analyzer V10 type.
3) BET specific surface area: measured by the BET method.
4) Average particle diameter D 2 : The average particle diameter was calculated from the BET specific surface area and the true specific gravity of titanium oxide.
5) Determination of impurities: Fe, Al, Si and Na components in titanium oxide: Measured by atomic absorption method. Cl component in titanium oxide: measured by absorptiometry.
[0039]
Example 1
Titanium oxide fine particles were prepared by a vapor phase method in which titanium tetrachloride was contacted with oxygen and hydrogen in the gas phase and oxidized.
First, in a gas phase reaction tube equipped with a multi-tube burner having an inner diameter of 400 mm at the top, a mixed gas of titanium tetrachloride and hydrogen gas preheated and vaporized to about 800 ° C. is supplied to the multi-tube burner. Oxygen gas preheated to 800 ° C. was supplied from a nozzle and subjected to an oxidation reaction at about 1000 ° C. in a gas phase reaction tube to produce titanium oxide fine particles. At this time, titanium tetrachloride was supplied at 60 l / min, hydrogen gas at 40 l / min, and oxygen gas at 380 l / min. Thereafter, air was inserted from the bottom of the gas phase reaction tube at 400 l / min to cool the produced titanium oxide fine particles. Thereafter, the resulting titanium oxide fine particles were heat-treated at 350 ° C. to 400 ° C. for 2 hours in a nitrogen atmosphere.
Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2, and impurity content of the spherical titanium oxide fine particles thus obtained.
[0040]
Example 2
First, in a gas phase reaction tube equipped with a multi-tube burner having an inner diameter of 400 mm, a mixed gas of titanium tetrachloride, hydrogen gas and nitrogen gas preheated to about 800 ° C. and vaporized is supplied to the multi-tube burner. A mixed gas of oxygen gas and nitrogen gas preheated to 800 ° C. was supplied from another supply nozzle, and an oxidation reaction was performed at about 1000 ° C. in a gas phase reaction tube to generate titanium oxide fine particles. At this time, titanium tetrachloride mixed gas is supplied as titanium tetrachloride 60 l / min, hydrogen gas 40 l / min, nitrogen gas 20 l / min, oxygen mixed gas 500 l / min consisting of oxygen 380 l / min and nitrogen gas 120 l / min. did. Thereafter, air was inserted as a cooling gas from the bottom of the gas phase reaction tube at 400 l / min, and the produced titanium oxide fine particles were cooled. Thereafter, the resulting titanium oxide fine particles were heat-treated at 350 ° C. to 400 ° C. for 2 hours in a nitrogen atmosphere.
Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2, and impurity content of the spherical titanium oxide fine particles thus obtained.
[0041]
Example 3
Titanium oxide fine particles were prepared in the same manner as in Example 2 except that air was inserted as a cooling gas at 500 l / min. Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2 and impurity content of the obtained spherical titanium oxide fine particles. Moreover, the SEM photograph of the obtained spherical titanium oxide fine particles is shown in FIG.
[0042]
Example 4
Titanium oxide fine particles were prepared in the same manner as in Example 2 except that air was inserted as a cooling gas at 800 l / min. Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2 and impurity content of the obtained spherical titanium oxide fine particles.
[0043]
Example 5
Titanium oxide fine particles were prepared in the same manner as in Example 4 except that instead of the oxygen mixed gas 500 l / min, an oxygen mixed gas 360 l / min consisting of oxygen gas 240 l / min and nitrogen gas 120 l / min was used. Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2 and impurity content of the obtained spherical titanium oxide fine particles.
[0044]
Example 6
Titanium oxide fine particles were prepared in the same manner as in Example 4 except that the supply rate of titanium tetrachloride was 100 l / min and titanium tetrachloride was not diluted with nitrogen gas. Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2 and impurity content of the obtained spherical titanium oxide fine particles.
[0045]
Comparative Example 1
Titanium oxide fine particles were prepared in the same manner as in Example 2 except that hydrogen gas was not used. Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2 and impurity content of the obtained titanium oxide fine particles. Moreover, the SEM photograph of the obtained titanium oxide fine particles is shown in FIG.
[0046]
Comparative Example 2
First, in a gas phase reaction tube equipped with a multi-tube burner having an inner diameter of 400 mm at the top, titanium tetrachloride gas preheated and vaporized to about 800 ° C. is supplied to the multi-tube burner, and at 800 ° C. from another supply nozzle. Preheated oxygen gas and water vapor were supplied, and an oxidation reaction was performed at about 1000 ° C. in a gas phase reaction tube to produce titanium oxide fine particles. At this time, titanium tetrachloride was supplied at 200 l / min, oxygen gas at 380 l / min, and water vapor at 170 l / min. Thereafter, air was inserted at 100 L / min from the bottom of the gas phase reaction tube, and the produced titanium oxide fine particles were cooled. Thereafter, the resulting titanium oxide fine particles were heat-treated at 350 ° C. to 400 ° C. for 2 hours in a nitrogen atmosphere.
Table 1 shows the average particle diameter D 1 , circularity coefficient, specific surface area, average particle diameter D 2 , D 1 / D 2 and impurity content of the titanium oxide fine particles thus obtained.
[0047]
[Table 1]
【The invention's effect】
As described above, the titanium oxide fine particles obtained by the production method of the present invention have a spherical shape and show excellent dispersibility when suspended in a solvent, unlike titanium oxide produced by the conventional vapor phase method. .
[Brief description of the drawings]
1 is an SEM photograph of titanium oxide fine particles prepared in Example 3. FIG.
2 is a SEM photograph of titanium oxide fine particles prepared in Comparative Example 1. FIG.
Claims (5)
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| EP1728765A4 (en) | 2004-03-26 | 2011-03-30 | Toho Titanium Co Ltd | Anatase-type titanium oxide powder and method for producing same |
| JP2007112689A (en) * | 2005-10-24 | 2007-05-10 | Tdk Corp | Method of manufacturing dielectronic powder, composite electronic component, and method of manufacturing the same |
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