JP3776913B2 - レーザによって材料を除去するための方法 - Google Patents
レーザによって材料を除去するための方法 Download PDFInfo
- Publication number
- JP3776913B2 JP3776913B2 JP2004059693A JP2004059693A JP3776913B2 JP 3776913 B2 JP3776913 B2 JP 3776913B2 JP 2004059693 A JP2004059693 A JP 2004059693A JP 2004059693 A JP2004059693 A JP 2004059693A JP 3776913 B2 JP3776913 B2 JP 3776913B2
- Authority
- JP
- Japan
- Prior art keywords
- laser pulse
- pulse
- laser
- fluence
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/02—Iron or ferrous alloys
- B23K2103/04—Steel or steel alloys
- B23K2103/05—Stainless steel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/12—Copper or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
- B23K2103/26—Alloys of Nickel and Cobalt and Chromium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Description
13 ドリル材
15 底部
19 フィラメント
23 空間プロファイル
Claims (11)
- チャネルの形成を低減するようにレーザによって材料を除去するための方法であって、
パルスエネルギー、パルス幅、およびフルエンスを有してなるレーザパルスをドリル材の表面に向けて放射するステップを有してなり、前記フルエンスは、側壁と底部を有する穴を形成し且つ前記表面で前記ドリル材へのチャネル形成を回避するために十分な値であり、
前記レーザパルスの空間プロファイルを、前記フルエンスが前記空間プロファイルにわたって実質的に均一になるように、整形するステップを有してなり、
パルスエネルギー、パルス幅、および前記穴の前記底部におけるチャネル形成を回避するのに十分なフルエンスを有する少なくとも1つの後続のレーザパルスを放射するステップを有してなる、方法。 - 前記レーザパルスの前記空間プロファイルを整形するステップが、前記空間プロファイルがトップハット状に形成されるように整形することを有してなる、ことを特徴とする請求項1記載の方法。
- 前記ドリル材が、ステンレススチール、アルミニウム、ニッケルベース超合金、ニッケルベースの単結晶合金、および銅からなるグループから選択されたものである、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスが放射される際の前記フルエンスが2から30J/cm2の間である、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスが放射される際の前記フルエンスが5J/cm2以下である、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスの空間プロファイルを整形するステップが、前記後続のレーザパルスの少なくとも1つの空間プロファイルを、前記フルエンスが前記穴の前記底部にわたって実質的に均一になるように整形することを有してなる、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスが放射される間のパルス幅が10ピコ秒以下である、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスが放射される間のパルス幅が1ピコ秒以下である、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスを放射するステップが、1から1.06μmの間の波長で、前記レーザパルスを放射することを有してなる、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスを放射するステップが、約1.03μmの波長で、前記レーザパルスを放射することを有してなる、ことを特徴とする請求項1記載の方法。
- 前記レーザパルスを放射するステップが、チャープパルス増幅された超短レーザから前記レーザパルスを放射することを有してなる、ことを特徴とする請求項1記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/377,902 US6784400B1 (en) | 2003-03-03 | 2003-03-03 | Method of short pulse hole drilling without a resultant pilot hole and backwall damage |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004261872A JP2004261872A (ja) | 2004-09-24 |
JP3776913B2 true JP3776913B2 (ja) | 2006-05-24 |
Family
ID=32824748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004059693A Expired - Fee Related JP3776913B2 (ja) | 2003-03-03 | 2004-03-03 | レーザによって材料を除去するための方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6784400B1 (ja) |
EP (1) | EP1454704B1 (ja) |
JP (1) | JP3776913B2 (ja) |
DE (1) | DE602004032402D1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7173212B1 (en) | 2004-02-13 | 2007-02-06 | Semak Vladimir V | Method and apparatus for laser cutting and drilling of semiconductor materials and glass |
WO2011123205A1 (en) | 2010-03-30 | 2011-10-06 | Imra America, Inc. | Laser-based material processing apparatus and methods |
US20060207976A1 (en) * | 2005-01-21 | 2006-09-21 | Bovatsek James M | Laser material micromachining with green femtosecond pulses |
WO2009117451A1 (en) | 2008-03-21 | 2009-09-24 | Imra America, Inc. | Laser-based material processing methods and systems |
JP5383342B2 (ja) * | 2008-08-01 | 2014-01-08 | キヤノン株式会社 | 加工方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69232671T2 (de) * | 1991-10-22 | 2003-02-06 | Canon K.K., Tokio/Tokyo | Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes |
JP3175005B2 (ja) * | 1997-05-28 | 2001-06-11 | 住友重機械工業株式会社 | レーザ加工装置 |
US6268586B1 (en) * | 1998-04-30 | 2001-07-31 | The Regents Of The University Of California | Method and apparatus for improving the quality and efficiency of ultrashort-pulse laser machining |
TW482705B (en) * | 1999-05-28 | 2002-04-11 | Electro Scient Ind Inc | Beam shaping and projection imaging with solid state UV Gaussian beam to form blind vias |
JP2001269789A (ja) * | 2000-01-20 | 2001-10-02 | Komatsu Ltd | レーザ加工装置 |
US6552301B2 (en) * | 2000-01-25 | 2003-04-22 | Peter R. Herman | Burst-ultrafast laser machining method |
US6483074B2 (en) * | 2001-03-07 | 2002-11-19 | International Business Machines Corporation | Laser beam system for micro via formation |
US7642484B2 (en) * | 2001-06-13 | 2010-01-05 | Orbotech Ltd | Multiple beam micro-machining system and method |
-
2003
- 2003-03-03 US US10/377,902 patent/US6784400B1/en not_active Expired - Lifetime
-
2004
- 2004-03-02 EP EP04251193A patent/EP1454704B1/en not_active Expired - Lifetime
- 2004-03-02 DE DE602004032402T patent/DE602004032402D1/de not_active Expired - Lifetime
- 2004-03-03 JP JP2004059693A patent/JP3776913B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1454704B1 (en) | 2011-04-27 |
EP1454704A3 (en) | 2007-05-02 |
JP2004261872A (ja) | 2004-09-24 |
EP1454704A2 (en) | 2004-09-08 |
US6784400B1 (en) | 2004-08-31 |
DE602004032402D1 (de) | 2011-06-09 |
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