JP3753108B2 - 直線案内装置及びそれを用いたマスク検査装置 - Google Patents

直線案内装置及びそれを用いたマスク検査装置 Download PDF

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Publication number
JP3753108B2
JP3753108B2 JP2002229724A JP2002229724A JP3753108B2 JP 3753108 B2 JP3753108 B2 JP 3753108B2 JP 2002229724 A JP2002229724 A JP 2002229724A JP 2002229724 A JP2002229724 A JP 2002229724A JP 3753108 B2 JP3753108 B2 JP 3753108B2
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mask
air
prism
linear guide
stage
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Japanese (ja)
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JP2004068940A5 (https=
JP2004068940A (ja
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米澤　　良
琢己 平川
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Lasertec Corp
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Lasertec Corp
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JP2002229724A 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置 Expired - Lifetime JP3753108B2 (ja)

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JP2002229724A JP3753108B2 (ja) 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置

Applications Claiming Priority (1)

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JP2002229724A JP3753108B2 (ja) 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置

Related Child Applications (1)

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JP2005249754A Division JP4318185B2 (ja) 2005-08-30 2005-08-30 マスク検査装置

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JP2004068940A JP2004068940A (ja) 2004-03-04
JP2004068940A5 JP2004068940A5 (https=) 2005-06-30
JP3753108B2 true JP3753108B2 (ja) 2006-03-08

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JP2002229724A Expired - Lifetime JP3753108B2 (ja) 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547562B2 (ja) * 2005-01-17 2010-09-22 レーザーテック株式会社 検査装置
JP4592445B2 (ja) * 2005-02-25 2010-12-01 黒田精工株式会社 薄板の表面形状測定装置
JP4755429B2 (ja) * 2005-03-04 2011-08-24 株式会社ミツトヨ 検出器駆動装置
JP5269332B2 (ja) * 2007-03-22 2013-08-21 株式会社ミツトヨ 垂直直動装置
JP4590572B2 (ja) * 2007-12-14 2010-12-01 レーザーテック株式会社 基板保持装置、基板検査装置、及び基板の検査方法
JP6669481B2 (ja) * 2015-12-04 2020-03-18 株式会社ブイ・テクノロジー 検査装置

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