JP3687441B2 - Surface flaw marking device and method of manufacturing metal band with marking - Google Patents

Description

【００５６】
同様に、図２３で、点Ａから出射した光８が、法線角度ξの微小面素で光検出器１６の方向に反射された光の偏光状態は、入射面が偏光板１５及び検光子１７と直交しているとすれば、
Ｅ _A ＝Ｒ( ξ)・Ｔ・ Ｒ(-ξ)・Ｅ _in （３）
ただし、Ｒは角度ξの２次元の回転行列であり、その成分Ｒ_mnは次のようになる。
Ｒ₁₁= Ｒ₂₂= cos ξ，Ｒ₁₂=-Ｒ₂₁=-sin ξ
【００５７】
なお、Ｒ (ξ) の行列表現は数２のようになる。
【００５８】
【数２】

【００５９】
式（２） は、式（３） においてξ＝０とおいた特別の場合であり、鏡面反射成分についても鏡面拡散反射成分についても（式３） を用いて統一的に考えることができる。
【００６０】
式（３）を計算し、法線角度ξの微小面素からの反射光の楕円偏光状態を図示すると、図２４ のようになる。ただし、ここで入射偏光の方位角αは４５度、入射角θは60度、鋼板の反射特性としてΨ＝28°、Δ＝120 °とした。図より、ξ＝０すなわち鏡面反射の場合の楕円に対し、ξの値が変化するに従って、楕円が傾いていくのがわかる。従って、例えば光検出器の前に検光子を挿入し、その検光角を設定することによって、どの法線角度の微小面素からの反射光をより多く抽出するかを選択することができる。
【００６１】
このことを定量化するために、式（３）で表される偏光状態の反射光に検光角βの検光子を挿入した後の偏光状態Ｅ _D を求めると、

となる。ただし、Ａ= （Ａ_mn）は検光子を表す行列であり、Ａ₁₁= １、他の成
分は０である。なお、Ａの行列表現は数３のようになる。
【００６２】
【数３】

【００６３】
である。式（４）から、光検出器１６（図２３）で検出する法線角度ξの微小面素からの反射光の光強度Ｌを計算すると、その微小面素の面積率をＳ( ξ) として、

となる。ここで、Ｉ( ξ, β) は前述したように、法線角度ξの微小面素からの反射光をどの程度抽出できるかを表す重み関数で、光学系及び被検体の偏光特性に依存する。そして、それに鋼板の反射率r _s ² 、入射光光量Ep² 、面積率Ｓ( ξ) を乗じたものが検出される光強度になる。表面処理鋼板などのように、鋼板表面の材質が均一な対象を考える場合はr _s ² の値は一定と考えられる。また、Ep² は入射光量が光源の位置によらず均一ならば同じく一定の値としてよい。従って、光検出器が検出する光強度を求めるには、法線角度ξの微小面素の面積率Ｓ( ξ) と抽出特性Ｉ( ξ, β) を考えればよい。
【００６４】
ここでまず、抽出特性Ｉ( ξ, β) について考える。法線角度ξ₀ の微小面素からの寄与が最も大きくなるような検光角β₀ を選定しようとした場合、その候補は次の式をβについて解くことによって与えられる。
［∂Ｉ( ξ, β) ／∂ξ］ξ₌ ξ₀ ＝０ （６）
【００６５】
この式の通常の数式表現を数４に示す。
【００６６】
【数４】

【００６７】
上式（６）により、ξ＝０すなわち鏡面反射成分の寄与が最も大きくなるような検光角を求めると、βはおよそ−４５度となる。ただし、ここでも、鋼板の反射特性としてΨ＝２８°、Δ＝１２０°、偏光子の方位角α＝４５°とした。図２５に、検光角βが−４５度の場合、微小面素の法線が鉛直方向に対してなす角ξと抽出特性、即ち重み関数Ｉ( ξ，−４５）の関係を示す。ただし、見やすさのために最大値を１に規格化してある。
【００６８】
この図２５より、ξ＝０すなわち鏡面反射成分が最も支配的で（抽出されやすく）、逆に法線角度ξ＝±３５度付近の微小面素からの鏡面拡散反射光が最も抽出されないことがわかる。また、逆にξ＝±３５度の反射光を最もよく抽出するような検光角βを式（５）（６）より求めると、およそβ＝４５度となる。検光角β＝４５度に対する法線角度ξと抽出特性Ｉ( ξ，４５）の関係を図２６に載せた。ここで、β＝４５度の曲線が左右対称でないのは、入射面（微小面素に対する入射光と反射光により張られる平面）を基準に考えると、ξが正の場合、見かけ上入射偏光の方位角αが小さくなる（ｐ偏光に近づく）ことと、鋼板のｐ偏光反射率がｓ偏光反射率より小さいことによる。また、β＝−４５°と４５°の中間の特性となるβ＝９０°についても同図に載せた。
【００６９】
式（５）で示したように、法線角度ξの微小面素からの反射光強度Ｌは、抽出特性（重み関数）Ｉ( ξ, β) と面積率Ｓ( ξ) の積により与えられるから、最終的に光検出器１６で受光する光強度はＳ( ξ) ・Ｉ( ξ, β) をξについて積分したものになる。例えば、図２７に示すような反射特性を有する鋼板からの反射光を、検光角βが−４５度の検光子を通して受光した場合、図２７で示される面積率Ｓ( ξ) を図２５のような抽出特性Ｉ( ξ, β) の重みをつけて積分したものが、受光光量となる。
【００７０】
鋼板表面に、図１６に示されるような特性の模様状ヘゲ疵があった場合を考える。その場合の面積率Ｓ( ξ) は、それぞれ図１７ （ａ）、（ｂ）、（ｃ）のようになっている。
【００７１】
まず、図１６（ｂ）、図１７（ｂ）のように鏡面反射成分のみに違いがある場合を考える。このような疵を検光角β＝−４５度の検光子を通して受光したときの光強度は、図１７（ｂ）を図２５ で表される重み関数Ｉ( ξ, β) をかけて積分したものに相当するから、母材部とヘゲ部の反射光量の違いを検出することができる。また、検光角β＝４５度については、図１７ （ｂ）に示すように、鏡面拡散反射成分に違いがなく、違いがあるのはξ＝０゜付近のみのため、図２６に示したβ＝４５゜の重み関数Ｉ( ξ, β) がξ＝０゜付近で低い値であることを考えると、その積はξの全領域で低い値となり、積分により違いが打ち消されることになる。従って、母材部とヘゲ部の違いを検出することができない。
【００７２】
また、図１６（ｃ）、図１７（ｃ）のように鏡面拡散反射成分のみに違いがある場合には、逆に、−４５度の検光子を通したのでは検出できない。この場合は、ξ＝０゜より離れたところで重み関数Ｉ( ξ, β) が高い値を示す４５度の検光子を通すことにより、検出できる。
【００７３】
ところで、母材部とヘゲ部の鏡面拡散反射成分の違いがなくなっている法線角度ξは、図１７ （ｃ）ではξ＝±２０度付近であったが、もし、その法線角度ξがたまたま±３０数度付近となる疵があると、４５度の検光子を通しても検出できなくなる。その場合は、別の抽出特性となるような検光角（例えばβ＝９０°）の検光子をもう一つ別に用意し、３つめの光検出器で受光するようにすればよい。
【００７４】
一般に、鋼板表面の母材部とヘゲ部の反射特性は図１０（ａ）、（ｂ）、（ｃ）のいずれかであることがほとんどであるから、いずれか２つの光学条件（この例では検光角）を用いることにより、大部分の場合、検出ができる。但し、上述のような特別の場合、見落としをなくすためには、３つの異なる検光角の検光子を用い、対応する３つの法線角度の微小面素からの反射光を抽出して受光するようにすることが望ましい。
【００７５】
なお、図１６（ａ）、図１７ （ａ）のように鏡面反射成分、鏡面拡散反射成分ともに違いがある場合には、基本的には、１つの検光子を通した反射光だけでも、母材部とヘゲ部の違いを検出できる。
【００７６】
本発明では線状拡散光源の全面に入射偏光板を配置し、その偏光の方位角はｐ偏光、ｓ偏光をともに含む角度にする。そして、正反射光のうち、鏡面反射成分をより透過する偏光角の偏光子を通して撮影するカメラと、鏡面拡散反射成分をより透過する偏光角の偏光子を通して撮影するカメラを使用する。
【００７７】
このような光学系により、正反射方向からの共通な光軸での測定であるため、鋼板距離変動や速度変化に影響されることなく、鏡面反射・鏡面拡散反射それぞれに対応した２つの信号を得ることが可能になり、顕著な凹凸性を持たない模様状ヘゲ疵を未検出を生じることなく検出可能な表面疵検査装置が実現する。そして、どの角度の鏡面拡散反射成分を検出するかは、検光角を設定することにより容易に変更可能となる。
【００７８】
また、このように鏡面反射と鏡面拡散反射の強度あるいは比率を測定することにより、上記模様状ヘゲ疵以外でも、鏡面反射あるいは鏡面拡散反射に影響を及ぼす表面性状の変化を検出できる。例えば、ダル仕上げやヘアライン仕上げ等の金属帯の表面仕上げについても、微小な反射面の分布に変化があれば、原理的には検出可能であり、これらの表面性状の検査への適用も期待できる。
【００７９】
なお、表面疵の検出および判定には、この発明の装置とともに、公知の方法および手段を併用してもよいことは言うまでもない。これについては、詳細を後述する。
【００８０】
このようにして、表面疵が有ると判定された被検査面については、その位置がトラッキング手段によりトラッキングされる。トラッキングは、金属帯の搬送速度から表面疵の位置がマーキング手段に到達する時刻を算出することにより実施できる。マーキング手段は、トラッキング手段からのマーキング指示に基づき、金属帯表面にマーキングを行う。
【００８１】
マーキングは、目的や用途に応じて種々の方法で行うことができる。これは、次の工程で検出しやすいマーキング方法であれば何でもよく、例えば、インクや塗料による印字、打刻機等による刻印、穿孔機による穿孔、グラインダ等による表面粗度の改変、あるいは金属帯が強磁性体の場合は磁気的マーキング等の所定の方法で行う。
【００８２】
また、マーキングの位置は、表面疵の位置に一致させてもよいが、幅方向で一致させずに長手方向のみ位置を一致させてもよい。例えば、プレスライン等に材料として自動装入する場合は、マーキングの位置をむしろ幅方向に対して一定の位置とした方が、マーキングを検出しやすい場合もある。
【００８３】
第３の発明は、金属帯の被検査面に線状拡散光源からの光を、偏光板を透過させ、ｐ偏光およびｓ偏光ともに含んだ直線偏光として照射し、前記被検査面の正反射方向に反射した反射光から、鏡面反射成分をより透過する偏光角に設定された偏光子を通して鏡面反射成分をより多く含む成分を受光する受光部と、該受光部と同一光軸上に配置された、非テンパ部の微小面素のうち、テンパ部の法線方向に対する前記微小面素の法線方向がなす角度により定義される法線角度が、所定の角度となる微小面素からの鏡面拡散反射成分をより多く透過する偏光角に設定された偏光子を通して鏡面拡散反射成分をより多く含む成分を受光する受光部とによって鏡面反射成分と鏡面拡散反射成分とを抽出し、前記抽出した反射光の鏡面反射成分と多数の微小鏡面反射面による鏡面拡散反射成分の組合せに基づき被検査面の表面疵の有無を判定する検査工程と、
金属帯の表面にその疵の種類や程度に関する情報を示すマーキングを施すマーキング工程とを有することを特徴とするマーキング付き金属帯の製造方法である。
第４の発明は、金属帯の被検査面に線状拡散光源からの光を、偏光板を透過させ、ｐ偏光およびｓ偏光ともに含んだ直線偏光として照射し、前記被検査面の正反射方向に反射した反射光から、鏡面反射成分をより透過する偏光角に設定された偏光子を通して鏡面反射成分をより多く含む成分を受光する受光部と、該受光部と同一光軸上に配置された、非テンパ部の微小面素のうち、テンパ部の法線方向に対する前記微小面素の法線方向がなす角度により定義される法線角度が、所定の角度となる微小面素からの鏡面拡散反射成分をより多く透過する偏光角に設定された偏光子を通して鏡面拡散反射成分をより多く含む成分を受光する受光部とによって鏡面反射成分と鏡面拡散反射成分とを抽出し、前記抽出した反射光の鏡面反射成分と多数の微小鏡面反射面による鏡面拡散反射成分の組合せに基づき被検査面の表面疵の有無を判定する検査工程と、
表面疵の位置をトラッキングするトラッキング工程と、
金属帯の表面にその疵の種類や程度に関する情報を示すマーキングを施すマーキング工程とを有することを特徴とするマーキング付き金属帯の製造方法である。
第５の発明は、マーキング工程においては、表面疵の位置にその表面疵の種類や程度に関する情報を示すマーキングを施すことを特徴とする請求項３または４に記載のマーキング付き金属帯の製造方法である。
第６の発明は、マーキング工程においては、金属帯の幅方向に対して一定の位置にその表面疵の種類や程度に関する情報を示すマーキングを施すことを特徴とする請求項３乃至５のうちいずれか１項に記載のマーキング付き金属帯の製造方法である。
【００８４】
第３乃至６の発明により、前述の表面疵判定方法により表面疵が有ると判定された箇所には、金属帯表面にマーキングが施される。このように表面疵の存在を示すマーキングが施されているので、その後の工程、あるいは需要家において、表面疵の部分を取り除くことが可能となり、製品に紛れ込むことを防止できる。また、この製造方法により、金属帯の製造後、表面疵の部分を取り除くためのコイル分割等の作業を大幅に簡略化あるいは省略できるので、生産効率が向上する。
【００８５】
第７の発明は、金属帯の被検査面に線状拡散光源からの光を、偏光板を透過させ、ｐ偏光およびｓ偏光ともに含んだ直線偏光として照射し、前記被検査面の正反射方向に反射した反射光から、鏡面反射成分をより透過する偏光角に設定された偏光子を通して鏡面反射成分をより多く含む成分を受光する受光部と、該受光部と同一光軸上に配置された、非テンパ部の微小面素のうち、テンパ部の法線方向に対する前記微小面素の法線方向がなす角度により定義される法線角度が、所定の角度となる微小面素からの鏡面拡散反射成分をより多く透過する偏光角に設定された偏光子を通して鏡面拡散反射成分をより多く含む成分を受光する受光部とによって鏡面反射成分と鏡面拡散反射成分とを抽出して、前記反射光の鏡面反射成分と多数の微小鏡面反射面による鏡面拡散反射成分の組合せに基づき被検査面の表面疵の有無を判定する工程と、
金属帯の表面にその疵の種類や程度に関する情報を示すマーキングを施す工程と、
このマーキングを施された金属帯を巻き取ってコイルとする工程と、
このコイルを巻き戻してマーキングを検出してそのマーキングが示す情報に基づき金属帯の所定の範囲を指定する工程と、
この指定された範囲を回避または除去した金属帯の残りの部分について所定の加工を行う工程と、を有することを特徴とする金属帯の加工方法である。
【００８６】
この発明は、第３の発明と同様に金属帯表面にマーキングを施した後、金属帯をコイル状に巻き取る。巻き取ったコイルは、工場等に運搬して薄板の成形加工を行う。成形加工の際は、事前にコイルを巻き戻して、目視あるいは簡単な検出器等によりマーキングを検出する。マーキングが検出された場合、その示す情報から金属帯における疵を含む不良部分を回避または除去する。
【００８７】
ここで、不良部分の範囲は、例えば、疵の位置に一致させてマーキングが施されている場合は、マーキングが施された部分であり、マーキングが疵の種類や程度等の情報を有する場合は、その成形加工で不良となる疵の種類や程度に基づき決定する。また、金属帯の所定の範囲を回避または除去するというのは、金属帯の不良部分を切断して除去し、あるいは、加工の工程への金属帯の送り量（フィード）を調節して金属帯の不良部分を通過（パス）させる等、不良部分が加工されないように加工の工程への金属帯の供給を制御することである。
【００９２】
第８の発明は、前記金属帯の被検査面に線状拡散光源からの光を、偏光板を透過させ、ｐ偏光およびｓ偏光ともに含んだ直線偏光として照射し、前記被検査面の正反射方向に反射した反射光から鏡面反射成分と鏡面拡散反射成分とを抽出するように、鏡面反射成分をより透過する偏光角に設定された偏光子を通して鏡面反射成分をより多く含む成分を受光する受光部と、該受光部と同一光軸上に配置された、非テンパ部の微小面素のうち、テンパ部の法線方向に対する前記微小面素の法線方向がなす角度により定義される法線角度が、所定の角度となる微小面素からの鏡面拡散反射成分をより多く透過する偏光角に設定された偏光子を通して鏡面拡散反射成分をより多く含む成分を受光する受光部とからなる複数の受光部とを有する表面疵検査手段を含む複数の表面疵検査手段と、それらの金属帯表面の検査結果を総合的に判定し、金属帯表面の疵の種類や程度に加えて、疵や汚れ等の寸法・形状あるいは照射光の反射率等に基づく表面検査結果あるいは種々の表面性状に関するマーキング情報を作成するマーキング情報作成手段とを備えていることを特徴とする請求項１または２に記載の金属帯の表面疵マーキング装置である。
【００９３】
この発明は、第１または２の発明における受光部と信号処理部とを有する表面疵検査手段に加えて、疵や汚れ等の寸法・形状あるいは照射光の反射率等を検出して、疵や汚れ等の表面性状の異常を検査する通常の表面検査手段を組み合わせて、表面疵その他の異常部の種類や程度を分類する。これにより、鏡面拡散反射の異常を含む種々の表面性状の異常について、総合的な判定を行い、それら異常部に関する情報をマーキングすることが可能となる。
【００９４】
第９の発明は、前記金属帯の被検査面に線状拡散光源からの光を、偏光板を透過させ、ｐ偏光およびｓ偏光ともに含んだ直線偏光として照射し、前記被検査面の正反射方向に反射した反射光から、鏡面反射成分をより透過する偏光角に設定された偏光子を通して鏡面反射成分をより多く含む成分を受光する受光部と、該受光部と同一光軸上に配置された、非テンパ部の微小面素のうち、テンパ部の法線方向に対する前記微小面素の法線方向がなす角度により定義される法線角度が、所定の角度となる微小面素からの鏡面拡散反射成分をより多く透過する偏光角に設定された偏光子を通して鏡面拡散反射成分をより多く含む成分を受光する受光部とによって鏡面反射成分と鏡面拡散反射成分とを抽出し、前記抽出した反射光の鏡面反射成分と多数の微小鏡面反射面による鏡面拡散反射成分の組合せに基づき被検査面の検査を行う表面疵の検査方法を含む複数の表面疵検査方法による検査結果を総合的に判定し、金属帯表面の疵の種類や程度に加えて、疵や汚れ等の寸法・形状あるいは照射光の反射率等に基づく表面検査結果あるいは種々の表面性状に関するマーキング情報を作成するマーキング情報作成工程を備えたことを特徴とする請求項３乃至６のうちいずれか１項に記載のマーキング付き金属帯の製造方法である。
【００９５】
この発明は、第３ないし６の発明における表面疵の検査方法に加えて、通常の表面検査方法を組み合わせて、表面疵の種類や程度を分類する。ここで通常の表面疵検査方法とは、例えば、疵の寸法・形状あるいは照射光の反射率等を検出して疵や汚れ等の表面性状の異常を検査する表面検査方法である。このように、鏡面拡散反射の異常を含む種々の表面性状の異常について総合的な判定を行い、それらの異常部に関する情報をマーキングする。
【０１００】
以上の発明により、鏡面拡散反射の異常を含む種々の表面疵あるいは表面性状の異常部について、その情報を示すマーキングが金属帯の表面に施されているので、後工程あるいは需要家において、表面疵の種類や程度を知ることが可能となり、種々の用途、使用目的に対応することができる。
【０１０１】
また、このように、金属帯の表面にマーキングを施すことにより、表面疵等の部分を切断除去せずに金属帯を巻き取ることができるので、切断除去によりコイルの個数が増加するのを防止することができる。このように、コイルの個数が増加しないので、コイルのハンドリングにおいては、巻き取りの手間の増加が防止される。さらに、コイルの運搬、巻き戻し、および加工においても、コイルの処理個数が増加しないのでハンドリングの手間が軽減される。
【０１０２】
【発明の実施の形態】
図１は、この発明の実施の形態の１例を示すブロック図である。表面疵の検出装置４１は、金属帯４の被検査面からの反射光を互いに異なる２種以上の光学条件で抽出し、信号処理部３０で、これら反射成分の組合せに基づき被検査面の表面疵の有無を判定する。
【０１０３】
トラッキング手段４３は、表面疵の位置がマーキング手段に到達する時刻を算出する。これは、搬送ロール４５に取り付けられた回転計４６で測定された回転速度に基づき、板長算出手段４７により表面疵の位置を板長に換算し、マーキング手段４４に到達するのに要する時間に換算して得られる。トラッキング手段４３は、その時刻になると、マーキング手段４４にマーキングを指示する信号を発信する。マーキング手段４４は、金属帯表面に印字・穿孔等その位置を示すマーキングを行う。
【０１０４】
マーキングされた金属帯の例を図２に示す。この例では、マーキング４９の位置を、長手方向では表面疵１１の位置に一致させており、幅方向ではエッジから一定の位置としている。これにより、プレスライン等で使用する場合、表面疵１１の位置によらず、エッジから一定の位置でマーキング４９を検出することができ、表面疵１１のある部分のリジェクト等の処置をとることが可能となり、不良品の製造を防止することができる。
【０１０５】
表面疵の検出装置４１については、図３および図４にその１例を示す。線状拡散光源２２として一部に拡散反射塗料を塗布した透明導光棒を使用し、その両端からメタルハライド光源の光を入射する。光源２２の導光棒から拡散的に出射した光は、シリンドリカルレンズ２５と４５°偏光の偏光板２６を透過した後、６０゜の入射角で鋼板２１の全幅に一直線上に集光されて入射する。反射光２７は鋼板正反射方向に配置されたミラー２８でさらに反射され、受光部を構成するカメラユニット２９ａ〜ｄに入射する。
【０１０６】
これらのカメラユニット２９ａ〜ｄは、図５に示すように板幅方向に配置されている。なお、このようにミラー２８を用いることにより、装置をコンパクトにすることができる。また、ミラー２８を鋼板２１から適当に離して設置すると、図５のようにミラー２８上に全カメラの視野から外れる領域（全カメラ視野外）が生じ、そこでミラーを分割して構成することができる。このようにミラーを分割することにより製作費を低く抑えることができる。
【０１０７】
受光部のカメラユニット２９ａ〜ｄは、図６に示すように、レンズの前に検光角−４５°、４５°、９０°の検光子３３ａ〜ｃをもつ３台のリニアアレイカメラ３２ａ〜ｃから構成され、その光軸は平行に保たれている。３台のカメラの視野のずれは、信号処理部３０で補正している。このように光軸が平行に保たれていると、３台のカメラ３２ａ〜ｃの各画素は同一視野サイズで一対一に対応する。また、ビームスプリッタを用いて１つの反射光を分割するのに比べて、光量のロスがなくなり、効率的な測定が可能となる。
【０１０８】
各カメラユニット２９ａ〜２９ｄ内の各受光カメラ３２ａ〜３２ｃ単体の受光範囲Ａは、前掲の図５に示すように、両側に隣接する他のカメラユニット２９ａ〜２９ｄ内の対応する受光カメラ３２ａ〜３２ｃの受光範囲Ａと一部重複するように配置されている。言い換えれば，鋼板２１上の幅方向の任意の位置からの反射光は、それぞれ少なくとも１つのカメラユニット２９ａ〜２９ｄ内の３種類の受光カメラ３２ａ〜３２ｃで受光される．
ここで、受光部において、リニアアレイカメラの替わりに２次元ＣＣＤカメラを使用することもできる。また、投光部において、線状拡散光源２２として、蛍光灯を使用することもできる。また、バンドルファイバの出射端を直線上に整列させたファイバ光源を使用することもできる。各ファイバからの出射光はファイバのN/A に対応して充分な広がり角を持つため、これを整列させたファイバ光源は実質的に拡散光源となるためである。
【０１０９】
ここで、複数のカメラの配置について、図５を用いてその詳細を説明する。各カメラユニット２９ａ〜２９ｄは、一定間隔で複数ユニットが配置されている。一つのカメラユニット２９ａ〜２９ｄは，異なる条件（-45 ，45，90度偏光）で受光する３つのカメラ３２ａ〜３２ｃから構成される。それぞれのカメラは，一定間隔離ごとに並べて平行に設置されている。従って、それぞれの視野も、カメラ間隔と同じだけずれることになる。
【０１１０】
各カメラユニット内のカメラの並び順序は同一である。例えば向かって左から45度，90度，-45 度の順とする。測定範囲（有効領域）は、例えば、光学条件が３条件で観察されている範囲とし、１条件のみ、あるいは２条件のみでしか観察されていない領域（両端部の領域）は無効とし、使用しない。カメラ間隔およびユニット間隔は、鋼板最大幅が測定範囲（有効領域）に入るような寸法として決定する。
【０１１１】
各ユニットの３台のカメラは同一視野にするための調整は行わず、各カメラで疵候補領域を決定した後、その疵候補領域単位で、各カメラの対応をとる。前述のように、各カメラのそれぞれの視野は、ずれているので、ある疵候補領域を視野に納めるカメラが３台揃わない（光学条件が３条件揃わない）場合もある。その場合は、隣のユニットのカメラの結果を用いて光学条件を３条件に揃える。この考え方は、３偏光を受光する場合に限らず、検査体全幅を複数視野に分割し、任意の２条件以上で観察する場合に適用可能である。
【０１１２】
これらの複数の受光部と信号処理部とをまとめて、疵検査手段と呼ぶことにすると、図１に示した表面疵マーキング装置は、図７に示すようになる。疵検査手段４０は、受光部３２ａ〜３２ｃ（図５と図６のカメラに相当）と信号処理部３０を有している。信号処理部３０は、異なる光学条件で抽出された反射光の強度に基づき、信号処理により前述の拡散鏡面反射成分を検出し、異常部の有無の判定を行う。その後は図１と同様、トラッキング手段４３および板長算出手段４７により表面疵の位置を算出し、マーキング手段４４で異常部の位置にマーキングを行う。
【０１１３】
信号処理部分については、図８に１例をブロック図で示す。受光カメラ３２ａ〜ｃからの光強度信号ａ〜ｃは、平均値間引き部３４ａ〜ｃに入力され、平均値が算出される。次いで、被検査体の長手方向の所定距離の移動に伴い入力されるパルス信号により、幅方向の１ライン分の信号として出力される。この間引き処理により、長手方向の分解能を一定とする。また、平均値の算出頻度を、被検査体の長手方向の移動距離が受光カメラ３２ａ〜ｃの視野よりも大きくならないようにすれば、見落としをなくすことができる。
【０１１４】
次いで、前処理部３５ａ〜ｃでは、信号について輝度ムラを補正する。ここで、輝度ムラには、光学系に起因するもの、被検査体の反射率に起因するもの等を含む。また、前処理部３５ａ〜ｃでは、金属帯のエッジの位置を検出し、エッジ部における急激な信号変化を疵と誤認識しないための処理を行う。
【０１１５】
前処理済みの信号は、２値化処理部３６ａ〜ｃに入力され、予め設定されているしきい値との比較により、疵候補点が抽出される。抽出された疵候補点は、特徴量演算部３７ａ〜ｃに入力され、疵判定のための信号処理が行われる。ここでは、疵候補点が一続きとなっている場合は１つの疵候補領域として、例えば、スタートアドレス、エンドアドレス等の位置特徴量や、そのピーク値その他の濃度特徴量などを算出する。
【０１１６】
算出されたこれらの特徴量については、元の信号ａ〜ｃの光学条件（検光角β）により、鏡面性疵判定部３８ａかあるいは鏡面拡散性疵判定部３８ｂに入力される。特徴量演算部３７ａの出力は、元の信号ａの光学条件が−４５度検光（β＝−４５゜）である。そこで、この場合は鏡面性疵判定部３８ａに入力され、前述のように鏡面反射成分による母材部とヘゲ部の反射光量の違いが検出される。一方、特徴量演算部３７ｂ，ｃの出力は、元の信号ｂ，ｃの光学条件が４５度，９０度検光（β＝４５゜９０゜）であり、鏡面拡散反射成分のみに違いがある。そこで、鏡面拡散性疵判定部３８ｂに入力され鏡面拡散反射成分による疵判定が行われる。
【０１１７】
最後に、疵総合判定部３９では、鏡面性疵判定部３８ａおよび鏡面拡散性疵判定部３８ｂの出力に基づき、金属帯の被検査面については最終的な疵種およびその程度を判定する。また、その際、各カメラ３２ａ〜ｄ間およびカメラユニット２９ａ〜２９ｄ間の視野の重複（図５）を考慮し、隣のカメラユニットのカメラからの信号に基づく疵判定結果を適宜利用することが望ましい。
【０１１８】
このような鏡面拡散反射成分の異常を検出して疵判定を行う表面疵検査手段と、その他の方式による表面疵検査手段を組み合わせた例を、図９に示す。ここで、表面疵検査手段４０ａは、図７に示した物と同じであり、複数の受光部３２ａ〜ｃで反射光を異なる光学条件で抽出し、信号処理部３０で鏡面拡散反射成分の異常を検出して疵判定を行う。
【０１１９】
その他の方式の表面検査手段４０ｂとしては、通常の表面疵検査手段、即ち疵の寸法・形状から表面疵を検出して判定する方式の装置、あるいは照射光の反射率等から表面の汚れや付着物を検出する方式の装置を用いることができる。表面検査手段４０ｂでは、通常の表面疵や表面性状の異常について、その種類や程度を分類する。マーキング情報作成手段４２では、検査手段４０ａ，４０ｂの検査結果に基づき、鏡面拡散反射の異常を含む種々の表面疵や表面性状の異常について、総合的な分類やランク付けを行い、マーキングのための情報を作成する。
【０１２０】
その後は図１と同様、トラッキング手段４３および板長算出手段４７により表面疵の位置を算出する。マーキング手段４４では、マーキング情報に基づき、異常部の位置にマーキングを行うが、その際、表面疵の種類や程度に関する情報を示すことが望ましい。これは、マーキングの模様・形状・帯の幅等、検出可能な形態であればよい。また、バーコードあるいはＯＣＲ（光学式文字読取り）を併用すれば、さらに詳細な情報をマーキングすることが可能となる。
【０１２１】
このように、金属帯の表面にマーキングを施すことにより、コイルの個数の増加が抑制されるため、コイルの巻き取り、コイルの運搬、および巻き戻し等のハンドリングにおいても、作業の効率が向上する。また、金属帯の加工においても、金属帯が疵の部分で途切れることなく連続して供給されるので、作業の効率化が期待できる。
【０１２２】
【実施例】
図３の実施形態による合金化亜鉛鍍金鋼板の測定結果を、図１０、１１に示す。図１０は、前述の図１７（ｂ）に、図１１は図１７（ｃ）に対応しており、測定した疵は、図１０に示されるような、テンパ部面積率がヘゲ部では母材部より大きいが、非テンパ部の拡散性は変わらないもの（図１７ｂ）と、図１１に示されるような、テンパ部面積率には差はないが、拡散性に差がある疵（図１７ｃ）である。図１１のタイプの疵については、一般に拡散反射方向に検出不能となる角度が存在するが、その角度が異なる２種類の疵について測定を行った。なお、比較のため、従来技術で、入射角６０°で光を入射し、正反射方向（６０°）と入射方向から２０°ずれた受光角（−４０゜）方向から無偏光で測定した結果も同図に載せた。以上の結果を、表１にまとめて示す。
【０１２３】
【表１】

【０１２４】
従来技術では、２つの受光角で受光しノイズ除去のために論理和をとっているが、これらの疵については、２つの受光角同時に検出することは不可能である。さらに言うと、どちらの受光角でも検出できない疵も存在する。
【０１２５】
それに対し、本願実施例では、３つの異なる受光角に対応する反射光成分を、検光子を用いることにより正反射方向から抽出しているから、いずれかのリニアアレイカメラで検出することが可能である。また、検出する必要がある疵の反射特性に合わせて、検光角の最適に設定することも容易である。
【０１２６】
【発明の効果】
本発明は以上説明したように、鋼板表面での反射が鏡面反射成分と鏡面拡散反射成分とから成るという知見をもとに、それぞれの成分を抽出して捉える方法として、線状拡散光源を使用し、ｐ偏光およびｓ偏光をともに有する偏光を被検査面に入射し、鋼板正反射方向から、検光角を適当に設定することにより、鏡面反射成分をより多く含む成分と、鏡面拡散反射成分をより多く含む成分を抽出する方法を採用した。
【０１２７】
この方法により鏡面反射成分からは疵が観察できない疵も検出可能となり、従来検出できなかった顕著な凹凸性を持たない模様状ヘゲ疵を未検出することなく検出することが可能になった。また、鋼板正反射方向からの同一光軸上の測定で両成分が捉えられるため、鋼板距離変動や速度変化の影響を受けない測定が実現した。また、検光角を設定することにより、どの角度の鏡面拡散反射成分を抽出するかを選択できるようになった。
【０１２８】
品質保証の観点からは、こういった表面検査装置は未検出がないことが絶対条件である。本発明により初めて表面処理鋼板等へ広く適用可能な未検出のない表面疵検査装置を用いた表面疵マーキング装置とマーキング付き金属帯の製造が実現できるので、従来検査員による目視の検査に頼っていた表面疵検査を自動化できるとともに、簡単な手段でその情報を後工程やユーザ側に知らせることが可能となり、その産業上の利用効果は大きい。
【図面の簡単な説明】
【図１】 本発明の装置の１例を示すブロック図。
【図２】 本発明の金属帯の１例を示す平面図。
【図３】 本発明の装置の表面疵検査装置の概略構成の１例を示す模式図。
【図４】 同表面疵検査装置の断面模式図。
【図５】 同表面疵検査装置に組込まれたカメラユニットの金属帯幅方向の配列を示す図。
【図６】 １つのカメラユニットに組込まれたカメラの配置を示す図。
【図７】 本発明の装置の別の１例を示すブロック図。
【図８】 本発明の装置の信号処理部の１例を示すブロック図。
【図９】 本発明の装置のさらに別の１例を示すブロック図。
【図１０】 本発明の装置で測定された光強度信号の１例を示す図。
【図１１】 本発明の装置で測定された光強度信号の別の１例を示す図。
【図１２】 合金亜鉛メッキ鋼板の製造方法およびその詳細断面を示す図。
【図１３】 調質圧延後の金属帯表面のテンパ部と非テンパ部における入射光と反射光の関係を示す断面模式図。
【図１４】 同テンパ部と非テンパ部における反射光の角度分布図。
【図１５】 合金亜鉛メッキ鋼板におけるヘゲ部の生成過程を説明するための断面図。
【図１６】 ヘゲ部と母材部における鏡面反射成分と鏡面拡散反射成分の角度分布図。
【図１７】 被検査面のヘゲ部と母材部における微小面素の法線角度と面積率の関係を示す図。
【図１８】 被検査面の微小面素における入射光と反射光等の角度の関係を示す図。
【図１９】 微小面素の法線角度と重み関数の関係を示す図。
【図２０】 線状拡散光源の各位置からの各入射光と被検査面の入射位置の関係を示す図。
【図２１】 線状拡散光源の各入射光が偏光されている場合の微小面素からの反射光の偏光状態を示す図。
【図２２】 線状拡散光源の中央部からの入射光が偏光されている場合の微小面素からの反射光を示す図。
【図２３】 線状拡散光源の中央部以外の部分からの入射光が偏光されている場合の微小面素からの反射光を示す図。
【図２４】 微小面素の法線角度と反射光の楕円偏光状態の関係を示す図。
【図２５】 微小面素の法線角度と重み関数の関係を示す図（検光角:-45゜）。
【図２６】 種々の検光角における微小面素の法線角度と重み関数の関係を示す図。
【図２７】 被検査面の微小面素の法線角度と面積率の関係を示す図。
【符号の説明】
４ 金属帯
６ テンパ部
７ 非テンパ部
８、２４ 入射光
１０ 鏡面拡散反射光
１１ 異常部（ヘゲ部）
１２ 母材部
１４、２２ 線状拡散光源
１５、２６ 偏光板
１６、３２ａ〜ｃ 受光カメラ
１７、３３ａ〜ｄ 検光子
２１ 鋼板
２３ 遮光ケース
２４ 入射光
２５ シリンドリカルレンズ
２６ ４５°偏光の偏光板２６
２７ 反射光
２８ ミラー
２９ａ〜ｄ カメラユニット
３０ 信号処理部
４０ａ 表面疵検査手段
４０ｂ 表面検査手段
４１ 表面疵検出装置
４３ トラッキング手段
４４ マーキング手段
４５ 搬送ロール
４６ 回転計
４７ 板長算出手段
４９ マーキング[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a surface wrinkle marking device that optically detects a surface wrinkle of a metal strip such as a thin steel plate and marks the position thereof, and a method for manufacturing a metal strip with marking.
[0002]
[Prior art]
Japanese Laid-Open Patent Publication No. 58-204353 discloses a surface flaw detection method for metal objects by entering light from the outside and capturing regular reflection light and diffuse reflection light with a camera. This technology uses two cameras with light incident on the surface of the subject at an angle of 35 to 75 degrees and the reflected light in the specular reflection direction and an angle direction within 20 degrees from the incident direction or specular reflection direction. It is receiving light. Then, by comparing the signals of the two cameras and taking the logical sum of them, for example, only when both cameras are detected, the inspection method that is not affected by noise is realized.
[0003]
As a method for inspecting the surface of a subject by receiving backscattered light from the subject, there is a technique described in Japanese Patent Application Laid-Open No. 60-228943. In the present technology, light is incident on a stainless steel plate at a large incident angle, and the reflected light returning to the incident side is detected, thereby detecting the baldness on the surface of the stainless steel plate.
[0004]
As a flaw detection apparatus that detects a plurality of backscattered reflected lights, there is a technique described in Japanese Patent Application Laid-Open No. 8-178867. This is to detect pruritus on hot rolled flat steel. According to this specification, the heel slope angle of pruritus is 10 to 40 degrees, and a plurality of cameras are prepared in the backward diffuse reflection direction so as to cover all specular reflection light from the heel slope in this range. Yes.
[0005]
Moreover, as a surface inspection apparatus using polarized light, the technique described in Japanese Patent Application Laid-Open No. 57-166533 makes 45-degree polarized light incident on a measurement object and receives the light with a proposed polarization camera. The polarization camera splits the reflected light into three using a beam splitter inside the camera, and receives the light through the polarizing filters with different azimuth angles. A technique is disclosed in which three signals from a polarization camera are displayed on a monitor by signal processing similar to that of a color TV system, and the polarization state is visualized. This technique uses an ellipsometry technique, and the light source is preferably parallel light, and in the embodiment, laser light is used.
[0006]
Similarly, Japanese Patent Application Laid-Open No. 9-166552 discloses a steel sheet surface wrinkle inspection apparatus using ellipsometry.
[0007]
[Problems to be solved by the invention]
All of the above prior arts are intended to detect wrinkles with remarkable unevenness, or to detect wrinkles with foreign matters such as oxide films. I couldn't catch all the traps.
[0008]
For example, the technology described in Japanese Patent Application Laid-Open No. 58-204353 has two cameras that receive specular reflection light and scattered reflection light. The purpose of this is to reduce noise caused by the logical sum of the signals of the two cameras. It is an effect removal, and it can be applied to wrinkles with remarkable unevenness, that is, wrinkles that are cracked, wrinkled, or turned up on the surface, because the signals of wrinkles can be captured by both cameras. In the case of a wrinkle such as a pattern-like bald wrinkle that does not have a remarkable unevenness that can only be captured by either camera, it is impossible to detect all the wrinkles.
[0009]
The technology described in Japanese Patent Application Laid-Open No. 60-228943 is intended for lifted bald ridges that appear on a stainless steel plate having a small surface roughness. It is impossible to apply to a steel plate having a rough surface that reflects light returning to the incident side even in a portion where no light is present. The technique described in Japanese Patent Application Laid-Open No. 8-178867 is directed to scraping wrinkles, and is based on capturing specularly reflected light on the heel slope. In the case of a kite, there are some that cannot be detected by backscattered reflected light, and there is a problem that undetection occurs.
[0010]
Further, once the camera is installed and it is determined which angle of reflection component is received, there is a problem that it cannot be easily changed.
[0011]
The technique described in JP-A-57-166533 uses an ellipsometry technique, and can detect “thickness and refractive index of a thin transparent layer” and “unevenness of physical property values”. However, even if the collar part originally had a physical property value different from that of the base material part, such as a surface-treated steel sheet, for an object covered with the same physical property value from above There was a problem that the effectiveness was reduced.
[0012]
In ellipsometry, the reflected light from the same point must be received by the corresponding pixel of each CCD, and the ellipsometric parameters must be calculated for each pixel. For this reason, the technique described in Japanese Patent Application Laid-Open No. 57-166533 has a problem that the reflected light is split into three by a beam splitter and detected by three CCDs, which reduces the amount of light and makes it difficult to align pixels between CCDs. was there.
[0013]
In the embodiment of Japanese Patent Laid-Open No. 966552, three cameras are arranged in the traveling direction of the steel plate (specification FIG. 6), or the same area is set by changing the inclination of the three cameras arranged vertically or horizontally. As shown in FIG. 7 and FIG. 8, in the case of FIG. 6 in the specification, there is a problem that the processing when the speed of the steel plate is changed is complicated. Further, in FIGS. 7 and 8, there are problems that the optical conditions are not the same because the angles of the cameras are different, and that it is difficult to align pixels.
[0014]
Further, in the technique described in Japanese Patent Laid-Open No. 58-204353 and the technique described in Japanese Patent Laid-Open No. 8-178867, since the optical axes of a plurality of cameras are not common and the emission angles are different, the two obtained images correspond to each other. In addition to the difference in the field of view of the pixels, there is a problem that the field of view is misaligned if there is a variation in the distance due to the flickering of the surface to be inspected or the thickness of the object. In particular, the technique described in Japanese Patent Application Laid-Open No. 58-204353 is problematic because two cameras are required to perform a logical sum for the same field of view.
[0015]
From the viewpoint of quality assurance, it is an absolute requirement that these surface inspection devices have no undetected surface, and surface flaw inspection devices that can withstand conventional applications are widely applicable to surface-treated steel sheets as inspection targets. It was not realized.
[0016]
Further, the surface flaw inspection result is generally determined only as good or bad as the whole metal band, and the user cannot know a slight flaw. Even if information about the surface defects is notified to the user side, it can be said that there was no appropriate method other than the method described in the mill sheet or the like.
[0017]
The present invention has been made in order to solve the above-mentioned problems of the prior art, and a pattern-like bald wrinkle having no remarkable unevenness such as surface cracking, curling, and turning-up has not been detected. It is an object of the present invention to provide a surface flaw marking device, a marking-attached metal strip, and a method of manufacturing the same that can be detected without any problem and inform the user of the information by simple means.
[0018]
[Means for Solving the Problems]
The above problems are solved by the following invention.
[0019]
According to a first aspect of the present invention, light from a linear diffused light source is transmitted through a polarizing plate to a surface to be inspected of a metal strip as a linearly polarized light including both p-polarized light and s-polarized light, and the regular reflection direction of the surface to be inspected A light receiving unit that receives a component containing more specular reflection component through a polarizer set to a polarization angle that transmits the specular reflection component more so as to extract a specular reflection component and a specular diffuse reflection component from the reflected light And, among the micro surface elements of the non-tempered portion arranged on the same optical axis as the light receiving portion,The normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the temper portion is a predetermined angle.A plurality of light-receiving units composed of a light-receiving unit that receives a component containing more specular diffuse reflection components through a polarizer set to a polarization angle that transmits more specular diffuse reflection components from a minute surface element;
A wrinkle inspection means having a signal processing unit for determining the presence or absence of surface wrinkles on the surface to be inspected based on a combination of the specular reflection component of the extracted reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces,
Marking means for marking on the surface of the metal strip indicating information on the type and extent of the wrinkles;
It is provided with the surface flaw marking device of the metal strip characterized by comprising.
  According to a second aspect of the present invention, light from a linear diffused light source is transmitted through a polarizing plate to a surface to be inspected of a metal band as a linearly polarized light including both p-polarized light and s-polarized light, and the surface to be inspected is positive In order to extract the specular reflection component and the specular diffuse reflection component from the reflected light reflected in the reflection direction, a component containing a larger amount of specular reflection component is received through a polarizer set to a polarization angle that further transmits the specular reflection component. Among the microscopic surface elements of the non-tempered portion disposed on the same optical axis as the light receiving portion and the light receiving portion,The normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the temper portion is a predetermined angle.A plurality of light-receiving units composed of a light-receiving unit that receives a component containing more specular diffuse reflection components through a polarizer set to a polarization angle that transmits more specular diffuse reflection components from a minute surface element;
A wrinkle inspection means having a signal processing unit for determining the presence or absence of surface wrinkles on the surface to be inspected based on a combination of the specular reflection component of the extracted reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces,
Tracking means for tracking the position of surface defects;
Marking means for marking on the surface of the metal strip indicating information on the type and extent of the wrinkles;
It is provided with the surface flaw marking device of the metal strip characterized by comprising.
[0020]
1st and 2ndInventionEquipmentFirst, the light reflected from the surface of the metal strip at the light receiving part of the wrinkle inspection meansSpecular reflection component and Specular diffuse reflection component are extractedThe optical properties are analyzed from the results. Next, the signal processing unit of the wrinkle inspection means discriminates the normal portion and the abnormal portion, that is, the surface wrinkle, from the obtained optical properties on the surface of the metal strip. A portion determined to be a surface flaw is marked by a marking method by a predetermined method such as printing, marking, or punching.Furthermore, in the apparatus of the second invention,The marking position can be determined by tracking the position of the surface defect or the vicinity thereof by tracking means or the like.
[0021]
Next, the form of optical reflection on the steel sheet surface to be inspected by the surface flaw inspection apparatus of the present invention will be described in relation to the micro uneven shape on the steel sheet surface. In general, the micro unevenness on the surface of the steel sheet is tempered (tempered), so that originally high undulations are strongly rolled by the roll and the flatness is improved, and other points are not affected by the temper rolling roll. The shape remains intact.
[0022]
For example, in the case of an alloyed galvanized steel sheet, the underlying cold-rolled steel sheet 1 is hot-dip galvanized as shown in FIG. 12 (a) and then passes through an alloying furnace. During this time, the iron element of the underlying steel sheet diffuses into the zinc of the plating layer, and usually forms an alloy crystal 3 such as a columnar shape as shown in FIG. When this steel plate is then temper-rolled as shown in FIG. 12 (b), the particularly protruding portion of the columnar crystal 3 is flattened as shown in FIG. 12 (d) (tempered portion 6), and the others. This portion (non-tempered portion 7) remains the original columnar crystal shape.
[0023]
FIG. 13 shows a model of what kind of optical reflection occurs on the steel plate surface. The light 8 incident on the portion (tempered portion 6) crushed by temper rolling is specularly reflected in the steel sheet regular reflection direction. On the other hand, the light incident on the portion (non-tempered portion 7) that remains the original columnar crystal structure without being crushed by temper rolling is specularly reflected by each micro-surface element on the columnar crystal surface when viewed microscopically. However, the direction of reflection does not necessarily coincide with the regular reflection direction of the steel sheet.
[0024]
Accordingly, the angle distributions of the reflected light of the tempered portion and the non-tempered portion are as shown in FIGS. 14A and 14B, respectively, when viewed macroscopically. That is, (a) tempered portion 6 has specular reflection 9 having a sharp distribution in the regular reflection direction of the steel sheet, and (b) non-tempered portion 7 has a spread corresponding to the angular distribution of the minute surface elements on the columnar crystal surface. The reflection 10 is held. Hereinafter, the former is called specular reflection, and the latter is called specular diffuse reflection. As shown in FIG. 14C, the actually observed angular distribution of reflection is obtained by adding the angular distributions of specular reflection and specular diffuse reflection in accordance with the area ratios of the tempered portion and the non-tempered portion.
[0025]
The above description has been made by taking the galvannealed steel plate as an example, but it is also generally applicable to other steel plates in which a flat portion is generated by temper rolling.
[0026]
Next, the optical reflection characteristics of the eyelids called pattern-like beards that do not have significant unevenness, which are detection targets of the present invention, will be described. For example, as shown in FIG. 15, the bulge 11 seen in the alloyed hot-dip galvanized steel sheet 4 has the bulge 11 on the cold-rolled steel sheet 1 before plating, and the plating layer 2 is placed thereon. Furthermore, alloying by diffusion of the underlying iron has progressed.
[0027]
In general, for example, there is a difference in plating thickness or a degree of alloying in the shaving portion compared to the base material. As a result, for example, in the case where the plating thickness is thick and convex with respect to the base material, temper rolling is applied, so that the area of the temper portion becomes larger than that of the non-temper portion. On the other hand, when the beveled portion is concave as compared with the base material, the beveled portion is not subjected to the temper rolling roll, and the non-tempered portion occupies the majority. In addition, when the alloying is shallow, the angle distribution of the micro surface elements is strong in the direction of the steel plate direction, and the diffusibility is small.
[0028]
A description will be given of how the pattern-like lashes look due to the difference in surface properties between the ledge and the base material. Based on the deformation model of the plating surface in the temper rolling described above, the difference between the shaving portion and the base material portion is classified into the following three types as shown in FIG.
[0029]
(A): The area ratio of the tempered portion in the shaving portion (solid line) and the angular distribution of the micro surface elements in the non-tempered portion are different from those of the base material portion (broken line). Here, the temper portion corresponds to the normal angle ξ = 0, and shows a peak in the figure. This peak height (area ratio) is different between the shaving portion and the base material portion. Further, the non-tempered portion corresponds to the other portion (slope), and in the figure, the distribution of the area ratios of the beveled portion and the base material portion are different. This slope portion reflects the angular distribution of the small surface elements of the non-tempered portion.
[0030]
(B): The area ratio of the tempered portion is different between the beveled portion and the base material portion, but the angular distribution of the minute surface elements of the non-tempered portion does not change. In the figure, the peak height is different between the bald portion and the base material portion, but the slope shapes are the same.
[0031]
(C): Although the angular distribution of the minute surface elements in the non-tempered portion is different between the bald portion and the base material portion, the area ratio of the tempered portion is not changed. In the figure, the peak height is the same in the beveled portion and the base metal portion, but the shape of the slope is different.
[0032]
Such a difference in the area ratio of the temper portion and the angular distribution of the minute surface elements is observed as a difference in the angular distribution of the reflected light amount as shown in FIG.
[0033]
When there is a difference in the area ratio of the temper portion (in the case of a and b above), as shown in FIGS. 16A and 16B, the angle distribution of the reflected light amount is similar to that of the bald portion 11a and the base material portion 12a. become. The difference is observed from the direction in which the angular distribution peaks, that is, from the regular reflection direction. When the area ratio of the tempered portion of the shaving portion is larger than that of the base material portion (corresponding to FIGS. 16a, b, 17a, and b), the bulge looks bright from the specular reflection direction. When it is smaller than the base material portion, it is observed dark from the regular reflection direction.
[0034]
When there is no difference in the area ratio of the temper portion (in the case of (c) above), it is not possible to see the baldness by observation from the steel sheet regular reflection direction. Nevertheless, when there is a difference in the diffusivity of the specular diffuse reflection component, wrinkles are observed from the diffusion direction deviating from the peak of the angular distribution as shown in FIG. For example, when the diffusivity of the specular diffuse reflection component is small, generally the beard is observed brightly from the diffusion direction relatively close to regular reflection, and the brightness decreases as the distance from the regular reflection direction increases. The difference in the base material part disappears and the observation becomes impossible at the front and rear angles. If you move further away from the specular reflection, the baldness will be observed darkly.
[0035]
In order to discriminate and detect such a pattern-like hairbrush from the base material part, it is necessary to consider what angle the reflected light from the minute surface element is extracted in FIG. For example, as in the example of FIGS. 16A and 16B, detecting the difference between the bald part and the base material part in the regular reflection direction means that the angular distribution of the micro surface elements shown in FIG. Therefore, ξ = 0 is extracted, and the difference between the beveled portion and the base material portion is detected.
[0036]
Here, when mathematically expressing that ξ = 0 is extracted, each of the functions S (ξ) in FIG. 17 represents an extraction characteristic represented by the delta function δ (ξ) shown in FIG. This corresponds to integration by multiplying by a function (hereinafter referred to as a weight function). Also, for example, measuring at a position of 40 degrees shifted by 20 degrees from regular reflection at an incident angle of 60 detects reflections from a surface (small surface element) whose normal angle ξ is shifted by 10 degrees. . This corresponds to using a weighting function δ (ξ + 10) as shown in FIG. The relationship between the reflection angle and the normal angle ξ of the small surface element is calculated from FIG.
[0037]
In view of this, it can be understood that what angle the reflected light from the minute surface element is extracted corresponds to what weight function is designed. The weight function is not necessarily a delta function and may have a certain width.
[0038]
From this point of view, considering a weight function for discriminating and detecting a bald ridge having an area ratio distribution as shown in FIGS. 17A, 17B, and 17C from a base material portion. The δ function δ (ξ) shown in FIG. 19 is an example. However, since the cameras are installed at different light receiving angles, the field sizes of the two optical systems cannot be made the same. Also, once a camera is installed to measure diffusely reflected light, it is not easy to change the weight function because it is necessary to change the installation position of the camera.
[0039]
For the former problem, measurement on the same optical axis is required. Therefore, it is desirable to capture both the specular reflection component and the specular diffuse reflection component by measurement from the regular reflection direction of the steel sheet, instead of capturing diffuse reflection light. For the latter, it is desirable that the weight function can be set with a certain degree of freedom with respect to the change of the installation position of the camera.
[0040]
For this purpose, in the present invention, a linear light source having diffusion characteristics is used as a light source instead of a parallel light source such as a laser. Further, the specular reflection component and the specular diffuse reflection component are separated and extracted by using polarized light from the regular reflection direction of the steel sheet.
[0041]
In order to explain the action and effect of this linear diffused light source, as shown in FIG. 20, first, the linear diffused light source 14 is arranged in parallel to the steel plate 4 and is in a plane perpendicular to the light source, and the incident angle. Let us consider the reflection characteristics when one point on the steel plate 4 is observed from a direction (hereinafter referred to as a steel plate regular reflection direction) that coincides with the emission angle.
[0042]
Now, as shown in FIG. 20A, in the case of light emitted from the central portion of the linear light source 14, the light incident on the temper portion is specularly reflected and captured entirely in the regular reflection direction of the steel plate. On the other hand, the light incident on the non-tempered portion is reflected in a specularly diffuse manner, and only the portion reflected by the minute surface element that happens to be in the same direction as the normal direction of the steel plate is captured. Since such micro-surface elements are very few stochastically, specular reflection from the temper portion is dominant in the reflected light captured in the regular reflection direction of the steel sheet.
[0043]
On the other hand, as shown in FIG. 20 (b), in the case of light emitted from other than the central portion of the linear light source, the light incident on the temper portion is specularly reflected and is different from the steel plate regular reflection direction. It cannot be detected in the direction of regular reflection of the steel sheet. On the other hand, the light incident on the non-tempered portion is reflected in a specular diffusion manner, and the portion reflected in the regular reflection direction of the steel sheet is captured. Therefore, all the reflected light captured in the regular reflection direction of the steel sheet becomes specular diffuse reflected light reflected by the non-tempered portion.
[0044]
Combining the above two cases, the light radiated from the entire linear light source is captured by the observation from the regular reflection direction of the steel sheet, and the specular reflection light from the tempered part and the specular diffuse reflection light from the non-tempered part. Become sum.
[0045]
Next, how the polarization characteristics change when the surface to be inspected is observed from the regular reflection direction using the linear light source will be described.
[0046]
In general, in the reflection on a mirror-like metal surface, the polarization characteristic is preserved by reflection for light whose direction of the electric field is parallel to the incident surface (p-polarized light) or light perpendicular to the incident surface (s-polarized light). The light is output as polarized light or s-polarized light. In addition, arbitrary linearly polarized light having a p-polarized component and an s-polarized component at the same time is emitted as elliptically polarized light according to the reflectance ratio and phase difference of p- and s-polarized light.
[0047]
Hereinafter, the case where light is irradiated to a galvannealed steel plate from a linear diffused light source is considered. As shown in FIG. 21A, the light emitted from the central portion of the linear light source 14 is specularly reflected by the temper portion of the steel plate 4 and observed in the regular reflection direction of the steel plate. In this regard, the reflection on the general mirror-like metal surface is established as it is, and p-polarized light is emitted as p-polarized light.
[0048]
On the other hand, as shown in FIG. 21B, the light emitted from a portion other than the central portion of the linear light source is specularly reflected by the tilted micro surface element of the crystal surface of the non-tempered portion and observed in the regular reflection direction of the steel plate. There is something to be done. At this time, even if p-polarized light parallel to the incident surface of the steel sheet is incident, the tilted minute surface element that is actually reflected is not parallel to the incident surface. It becomes the linearly polarized light. As a result, this incident light is emitted as elliptically polarized light from the minute surface element. The same applies when s-polarized light is incident instead of p-polarized light.
[0049]
Further, regarding linearly polarized light having an arbitrary polarization angle having both p and s polarization components, the polarization angle is inclined with respect to a minute surface element inclined for the same reason as described above, with respect to the incident surface. Therefore, the shape of the elliptically polarized light emitted in the regular reflection direction of the steel sheet is different from the light that is incident from the center of the linear light source and is specularly reflected by the temper portion.
[0050]
Hereinafter, a case where linearly polarized light having both p and s components is incident will be described in more detail.
[0051]
First, as shown in FIG. 22, the light 8 from the linear diffused light source 14 is linearly polarized by the polarizing plate 15 having the azimuth angle α, and then incident on the steel plate 4 placed horizontally, and the specularly reflected light is converted into light. Consider receiving light with the detector 16.
[0052]
As described above, with respect to the light 8 emitted from the point C on the light source, the component that is specularly reflected by the temper portion and the specular diffusion from the minute surface element that happens to have a normal normal to the vertical direction in the non-temper portion. The reflected component contributes to the light reflected from the point O on the steel plate (and consequently the surrounding region 13) toward the photodetector 16.
[0053]
On the other hand, as shown in FIG. 23, for the light 8 from the point A shifted from the point O by the angle φ, the specular reflection component is reflected in a direction different from that of the photodetector 16, so the normal angle Only the specular diffuse reflection component due to the minute surface element of ξ (the angle of the normal to the vertical direction is ξ) contributes. Here, the relationship between φ and ξ is given by the following equation based on simple geometric considerations.
cos ξ = 2cos θ ・ cos²(φ / 2) / [sin²φ + 4 ・ {cos²θ ・ cos^Four(φ / 2) + sin²θ ・ sin^Four(φ / 2)}]^1/2    (1)
However, (theta) is an incident angle to a steel plate.
[0054]
Next, the polarization state of the light reflected in this way will be considered. In FIG. 22, the polarization state after the light 8 emitted from the point C passes through the polarizing plate 15 with the azimuth angle α and is specularly reflected at the point O uses a Jones matrix generally used in polarization optics.
E _c =T・E _in        (2)
It is expressed. However,E _inIs the linear polarization vector (column vector) with azimuth α,TRepresents the reflection characteristic matrix of the steel sheet. Each component is as follows.
E _in= Ep^t(cosα, sin α)T= R_s (T_mn); T₁₁= Tan Ψ ・ exp (j Δ), T_{twenty two}= 1, T₁₂= T_{twenty one}= 0
[0055]
here,^t() Is a column vector, tan Ψ is an amplitude reflectance ratio of p · s polarized light, Δ is a phase difference caused by the reflectance of p · s polarized light, r_sRepresents the s-polarized reflectance. These matrix expressions are as shown in Equation 1.
[Expression 1]

[0056]
Similarly, in FIG. 23, the polarization state of the light 8 emitted from the point A and reflected in the direction of the photodetector 16 by the micro-surface element having the normal angle ξ is that the incident surface is the polarizing plate 15 and the analyzer. If it is orthogonal to 17,
E _A  =R(ξ) ・T・R(-ξ) ・E _in      (3)
However,RIs a two-dimensional rotation matrix of angle ξ and its component R_mnIs as follows.
R₁₁= R_{twenty two}= cos ξ, R₁₂= -R_{twenty one}= -sin ξ
[0057]
In addition,R The matrix representation of (ξ) is as follows:
[0058]
[Expression 2]

[0059]
Equation (2) is a special case where ξ = 0 in Equation (3), and both the specular reflection component and the specular diffuse reflection component can be considered uniformly using (Equation 3).
[0060]
FIG. 24 shows the elliptical polarization state of the reflected light from the micro-surface element having the normal angle ξ by calculating Equation (3). Here, the azimuth angle α of incident polarized light is 45 degrees, the incident angle θ is 60 degrees, and the reflection characteristics of the steel sheet are Ψ = 28 ° and Δ = 120 °. From the figure, it can be seen that the ellipse inclines as the value of ξ changes with respect to the ellipse in the case of ξ = 0, that is, specular reflection. Therefore, for example, by inserting an analyzer in front of the photodetector and setting the detection angle, it is possible to select which normal angle to extract more reflected light from the micro-surface element.
[0061]
In order to quantify this, the polarization state after inserting the analyzer having the detection angle β into the reflected light in the polarization state represented by the equation (3)E _DAsk for

It becomes. However,A= (A_mn) Is a matrix representing the analyzer, and A₁₁= 1, other success
The minute is zero. In addition,AThe matrix representation of is
[0062]
[Equation 3]

[0063]
It is. When the light intensity L of the reflected light from the minute surface element having the normal angle ξ detected by the photodetector 16 (FIG. 23) is calculated from the equation (4), the area ratio of the minute surface element is defined as S (ξ). ,

It becomes. Here, as described above, I (ξ, β) is a weighting function representing how much the reflected light from the minute surface element having the normal angle ξ can be extracted, and depends on the polarization characteristics of the optical system and the subject. . And the steel sheet reflectivity r_s ², Incident light intensity Ep²The product of the area ratio S (ξ) is the detected light intensity. R When considering an object with a uniform surface material, such as a surface-treated steel plate_s ²The value of is considered constant. Also, Ep²If the amount of incident light is uniform regardless of the position of the light source, it may be a constant value. Therefore, in order to obtain the light intensity detected by the photodetector, the area ratio S (ξ) and the extraction characteristics I (ξ, β) of the minute surface element having the normal angle ξ may be considered.
[0064]
First, the extraction characteristic I (ξ, β) will be considered. Normal angle ξ₀Analysis angle β that makes the largest contribution from small surface elements₀The candidate is given by solving the following equation for β:
[∂I (ξ, β) / ∂ξ] ξ₌ξ₀  = 0 (6)
[0065]
The usual mathematical expression of this equation is shown in Equation 4.
[0066]
[Expression 4]

[0067]
According to the above equation (6), when ξ = 0, that is, the detection angle that maximizes the contribution of the specular reflection component, β is approximately −45 degrees. Here, however, the reflection characteristics of the steel sheet were set to Ψ = 28 °, Δ = 120 °, and the azimuth angle α of the polarizer = 45 °. FIG. 25 shows the relationship between the angle ξ formed by the normal of the small surface element with respect to the vertical direction and the extraction function, that is, the weighting function I (ξ, −45) when the detection angle β is −45 degrees. However, the maximum value is normalized to 1 for ease of viewing.
[0068]
From FIG. 25, it can be seen that ξ = 0, that is, the specular reflection component is the most dominant (easy to be extracted), and conversely, the specular diffuse reflection light from the minute surface element around the normal angle ξ = ± 35 degrees is the least extracted. Understand. Conversely, when the detection angle β that best extracts the reflected light of ξ = ± 35 degrees is obtained from the equations (5) and (6), it becomes approximately β = 45 degrees. FIG. 26 shows the relationship between the normal angle ξ and the extraction characteristic I (ξ, 45) with respect to the detection angle β = 45 degrees. Here, the reason why the curve of β = 45 degrees is not bilaterally symmetrical is that the incident plane (the plane stretched by the incident light and the reflected light with respect to the minute surface element) is considered as a reference. This is because the azimuth angle α is small (approaching p-polarized light) and the p-polarized light reflectance of the steel sheet is smaller than the s-polarized light reflectance. Further, β = 90 °, which is an intermediate characteristic between β = −45 ° and 45 °, is also shown in FIG.
[0069]
As shown in the equation (5), the reflected light intensity L from the small surface element having the normal angle ξ is given by the product of the extraction characteristic (weight function) I (ξ, β) and the area ratio S (ξ). Therefore, the light intensity finally received by the photodetector 16 is obtained by integrating S (ξ) · I (ξ, β) with respect to ξ. For example, when reflected light from a steel plate having reflection characteristics as shown in FIG. 27 is received through an analyzer having a detection angle β of −45 degrees, the area ratio S (ξ) shown in FIG. The amount of light received is obtained by integrating the extraction characteristics I (ξ, β) with such weights.
[0070]
Let us consider a case where there is a pattern-like ridge having characteristics as shown in FIG. The area ratio S (ξ) in that case is as shown in FIGS. 17 (a), 17 (b), and 17 (c), respectively.
[0071]
First, let us consider a case where only the specular reflection component is different as shown in FIGS. 16B and 17B. The light intensity when such an eyelid is received through an analyzer having an analysis angle β = −45 degrees is integrated by applying the weight function I (ξ, β) shown in FIG. Since it corresponds to the object, it is possible to detect the difference in the amount of reflected light between the base material portion and the shaving portion. In addition, as shown in FIG. 17 (b), the specular diffuse reflection component is not different for the detection angle β = 45 degrees, and there is a difference only in the vicinity of ξ = 0 °, and therefore, it is shown in FIG. Considering that the weight function I (ξ, β) of β = 45 ° is a low value in the vicinity of ξ = 0 °, the product is a low value in the entire region of ξ, and the difference is canceled by the integration. . Therefore, the difference between the base material portion and the shaving portion cannot be detected.
[0072]
Further, when there is a difference only in the specular diffuse reflection component as shown in FIGS. 16C and 17C, it cannot be detected by passing through an analyzer of −45 degrees. In this case, it can be detected by passing a 45 degree analyzer showing a high value of the weighting function I (ξ, β) away from ξ = 0 °.
[0073]
By the way, the normal angle ξ at which the difference in specular diffuse reflection component between the base material portion and the shaving portion disappears was around ξ = ± 20 degrees in FIG. 17C, but if the normal angle ξ If there is a wrinkle that happens to be around ± 30 degrees, it will not be detected through a 45 degree analyzer. In that case, another analyzer having an analysis angle (for example, β = 90 °) that has another extraction characteristic may be prepared separately and received by the third photodetector.
[0074]
In general, the reflection characteristics of the base material portion and the shaving portion on the surface of the steel plate are almost any one of FIGS. 10A, 10B, and 10C, so that any two optical conditions (this example) In most cases, detection is possible by using the detection angle. However, in the special case as described above, in order to eliminate an oversight, analyzers having three different detection angles are used to extract and receive reflected light from minute surface elements having three corresponding normal angles. It is desirable to do so.
[0075]
When there is a difference in both the specular reflection component and the specular diffuse reflection component as shown in FIGS. 16A and 17A, basically only the reflected light passing through one analyzer is the mother. The difference between the material part and the shaving part can be detected.
[0076]
In the present invention, an incident polarizing plate is arranged on the entire surface of the linear diffused light source, and the azimuth angle of the polarized light is an angle including both p-polarized light and s-polarized light. Of the regular reflection light, a camera that takes a picture through a polarizer having a polarization angle that further transmits a specular reflection component and a camera that takes a picture through a polarizer having a polarization angle that further transmits a specular diffuse reflection component are used.
[0077]
With such an optical system, measurement is performed on a common optical axis from the regular reflection direction, so two signals corresponding to specular reflection and specular diffuse reflection can be obtained without being affected by fluctuations in the steel plate distance or speed changes. It is possible to obtain a surface wrinkle inspection apparatus that can detect a pattern-like bald wrinkle having no remarkable unevenness without causing undetected. The angle at which the specular diffuse reflection component is detected can be easily changed by setting the detection angle.
[0078]
In addition, by measuring the intensity or ratio of the specular reflection and the specular diffuse reflection in this way, it is possible to detect a change in the surface property that affects the specular reflection or the specular diffuse reflection other than the pattern-like shavings. For example, surface finishing of metal bands such as dull finishing and hairline finishing can be detected in principle if there is a change in the distribution of minute reflecting surfaces, and application to inspection of these surface properties can also be expected. .
[0079]
Needless to say, known methods and means may be used in combination with the apparatus of the present invention for detecting and determining surface defects. Details will be described later.
[0080]
In this manner, the position of the surface to be inspected determined to have surface defects is tracked by the tracking unit. Tracking can be performed by calculating the time at which the position of the surface defect reaches the marking means from the conveyance speed of the metal strip. The marking means performs marking on the surface of the metal strip based on a marking instruction from the tracking means.
[0081]
Marking can be performed by various methods depending on the purpose and application. This can be any marking method that is easy to detect in the next step, for example, printing with ink or paint, marking with a stamping machine, punching with a punching machine, modification of surface roughness with a grinder, or metal band. When is a ferromagnetic material, it is performed by a predetermined method such as magnetic marking.
[0082]
Further, the marking position may be matched with the position of the surface defect, but the position may be matched only in the longitudinal direction without matching in the width direction. For example, when automatically loading a press line or the like as a material, it may be easier to detect the marking if the marking position is rather fixed in the width direction.
[0083]
According to a third aspect of the present invention, the light from the linear diffused light source is transmitted as a linearly polarized light including both p-polarized light and s-polarized light to the surface to be inspected of the metal strip, and the specular reflection direction of the surface to be inspected. A light receiving unit for receiving a component including more specular reflection component through a polarizer set to a polarization angle that further transmits the specular reflection component from the reflected light, and disposed on the same optical axis as the light receiving unit Of the non-tempered micro surface elements,The normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the temper portion is a predetermined angle.Extraction of specular reflection component and specular diffuse reflection component by light receiving unit that receives component containing more specular diffuse reflection component through polarizer set to polarization angle that transmits more specular diffuse reflection component from minute surface element And an inspection step of determining the presence or absence of surface defects on the surface to be inspected based on a combination of the specular reflection component of the extracted reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces,
And a marking step of marking on the surface of the metal strip indicating information on the type and degree of the wrinkles.
According to a fourth aspect of the present invention, the light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal strip as a linearly polarized light including both p-polarized light and s-polarized light, and the specular reflection direction of the surface to be inspected. A light receiving unit for receiving a component including more specular reflection component through a polarizer set to a polarization angle that further transmits the specular reflection component from the reflected light, and disposed on the same optical axis as the light receiving unit Of the non-tempered micro surface elements,The normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the temper portion is a predetermined angle.Extraction of specular reflection component and specular diffuse reflection component by light receiving unit that receives component containing more specular diffuse reflection component through polarizer set to polarization angle that transmits more specular diffuse reflection component from minute surface element And an inspection step of determining the presence or absence of surface defects on the surface to be inspected based on a combination of the specular reflection component of the extracted reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces,
A tracking process for tracking the position of surface defects;
And a marking step of marking on the surface of the metal strip indicating information on the type and degree of the wrinkles.
  The fifth invention is characterized in that, in the marking step, the marking indicating the information about the type and degree of the surface defect is applied to the position of the surface defect. It is.
  The sixth invention is characterized in that in the marking step, marking indicating information on the type and degree of surface defects is applied at a fixed position with respect to the width direction of the metal strip. It is a manufacturing method of the metal band with a marking of any one item.
[0084]
3rd to 6thAccording to the present invention, the surface of the metal strip is marked at the location determined to have surface flaws by the surface flaw determination method described above. Since the marking indicating the presence of surface flaws is applied in this way, it is possible to remove the surface flaw portion in the subsequent process or at the customer, and it is possible to prevent the surface flaws from being mixed. Also, with this manufacturing method, after the metal strip is manufactured, work such as coil division for removing the surface flaw portion can be greatly simplified or omitted, so that the production efficiency is improved.
[0085]
According to a seventh aspect of the present invention, the light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal band as a linearly polarized light including both p-polarized light and s-polarized light, and the regular reflection direction of the surface to be inspected A light receiving unit for receiving a component including more specular reflection component through a polarizer set to a polarization angle that further transmits the specular reflection component from the reflected light, and disposed on the same optical axis as the light receiving unit Of the non-tempered micro surface elements,The normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the temper portion is a predetermined angle.Extraction of specular reflection component and specular diffuse reflection component by light receiving unit that receives component containing more specular diffuse reflection component through polarizer set to polarization angle that transmits more specular diffuse reflection component from minute surface element And determining the presence or absence of surface flaws on the surface to be inspected based on the combination of the specular reflection component of the reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces;
A step of marking on the surface of the metal strip indicating information on the type and degree of the wrinkles;
Winding the metal band with this marking into a coil;
Rewinding the coil to detect the marking and designating a predetermined range of the metal strip based on the information indicated by the marking;
And a step of performing a predetermined process on the remaining part of the metal band that avoids or removes the specified range.
[0086]
This invention is the first3After marking the surface of the metal strip in the same manner as in the invention, the metal strip is wound into a coil. The wound coil is transported to a factory or the like to form a thin plate. At the time of molding, the coil is rewound in advance, and the marking is detected visually or by a simple detector. When the marking is detected, a defective portion including a flaw in the metal band is avoided or removed from the information indicated by the marking.
[0087]
Here, the range of the defective part is, for example, when the marking is made in accordance with the position of the heel, and when the marking has information such as the kind and degree of the heel. It is determined based on the type and degree of wrinkles that become defective in the molding process. Further, avoiding or removing a predetermined range of the metal band means cutting and removing a defective portion of the metal band, or adjusting the feed amount of the metal band to the processing step (feed). In other words, the supply of the metal band to the processing step is controlled so that the defective portion is not processed, such as passing the defective portion.
[0092]
In an eighth aspect of the invention, the light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal strip as a linearly polarized light including both p-polarized light and s-polarized light, and the specular reflection of the surface to be inspected. Receives a component that contains more specular reflection components through a polarizer that is set to a polarization angle that allows the specular reflection component to be transmitted more so that the specular reflection component and the specular diffuse reflection component are extracted from the reflected light in the direction. Of the non-tempered micro-area element disposed on the same optical axis as the light receiving portion,The normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the temper portion is a predetermined angle.Surface flaw inspection having a plurality of light receiving portions including a light receiving portion that receives a component containing more specular diffuse reflection components through a polarizer set to a polarization angle that transmits more specular diffuse reflection components from a minute surface element A comprehensive evaluation of the inspection results on the surface of the metal strip and the surface of the metal strip, including the means, in addition to the type and degree of the surface of the metal strip, the size / shape of the strip and dirt, or the irradiation light A marking device for marking the surface of a metal band according to claim 1 or 2, further comprising marking information creating means for creating marking information relating to surface inspection results or various surface properties based on the reflectance of the metal strip. is there.
[0093]
This invention is the firstOr 2In addition to the surface wrinkle inspection means having the light receiving portion and the signal processing portion in the invention of the present invention, the surface shape abnormality such as wrinkles and dirt is detected by detecting the size and shape of wrinkles and dirt or the reflectance of irradiated light. In combination with the normal surface inspection means to inspect, the type and degree of surface defects and other abnormal parts are classified. Thereby, it is possible to comprehensively determine various surface property abnormalities including abnormalities of specular diffuse reflection and to mark information related to the abnormal parts.
[0094]
According to a ninth aspect of the invention, the light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal strip as a linearly polarized light including both p-polarized light and s-polarized light, and is regularly reflected by the surface to be inspected. A light receiving unit that receives a component including more specular reflection components from a reflected light reflected in a direction through a polarizer set to a polarization angle that further transmits the specular reflection component, and is disposed on the same optical axis as the light receiving unit. Of the small surface elements of the non-tempered part,The normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the temper portion is a predetermined angle.Extraction of specular reflection component and specular diffuse reflection component by light receiving unit that receives component containing more specular diffuse reflection component through polarizer set to polarization angle that transmits more specular diffuse reflection component from minute surface element And inspection results by a plurality of surface flaw inspection methods, including a surface flaw inspection method for inspecting the surface to be inspected based on a combination of the specular reflection component of the extracted reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces In addition to the type and degree of wrinkles on the surface of the metal band, marking information on surface inspection results or various surface properties based on the size and shape of wrinkles and dirt, reflectance of irradiated light, etc. The manufacturing method of the metal band with a marking of any one of Claims 3 thru | or 6 provided with the marking information preparation process to perform.
[0095]
This invention is the first3 to 6In addition to the method for inspecting surface defects in the invention, the type and degree of surface defects are classified by combining ordinary surface inspection methods. Here, the normal surface wrinkle inspection method is, for example, a surface inspection method for inspecting abnormalities in surface properties such as wrinkles and dirt by detecting the size / shape of the wrinkles or the reflectance of irradiated light. In this way, comprehensive determination is made for various surface property abnormalities including abnormalities of specular diffuse reflection, and information on those abnormal parts is marked.
[0100]
According to the above invention, since the marking indicating the information is provided on the surface of the metal strip for various surface defects including abnormalities of specular diffuse reflection or surface texture abnormalities, the surface defects are displayed in the post-process or the customer. It is possible to know the type and degree of the image, and it is possible to cope with various uses and purposes of use.
[0101]
In addition, by marking the surface of the metal band in this way, the metal band can be wound up without cutting and removing portions such as surface flaws, thereby preventing an increase in the number of coils by cutting and removing. can do. Thus, since the number of coils does not increase, an increase in winding time is prevented in handling the coils. Furthermore, handling, rewinding, and processing of the coil do not increase the number of processed coils, so that handling is reduced.
[0102]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a block diagram showing an example of an embodiment of the present invention. The surface flaw detection device 41 extracts reflected light from the surface to be inspected of the metal strip 4 under two or more different optical conditions, and the signal processing unit 30 determines the surface of the surface to be inspected based on the combination of these reflection components. Determine the presence of wrinkles.
[0103]
The tracking unit 43 calculates the time when the position of the surface defect reaches the marking unit. This is based on the time required to reach the marking means 44 by converting the position of the surface defect into the plate length by the plate length calculation means 47 based on the rotation speed measured by the tachometer 46 attached to the transport roll 45. Obtained by conversion. When the time comes, the tracking unit 43 sends a signal for instructing the marking unit 44 to perform marking. The marking means 44 performs marking indicating the position such as printing or punching on the surface of the metal band.
[0104]
An example of a marked metal band is shown in FIG. In this example, the position of the marking 49 is made to coincide with the position of the surface flaw 11 in the longitudinal direction, and is set to a constant position from the edge in the width direction. As a result, when used in a press line or the like, the marking 49 can be detected at a certain position from the edge regardless of the position of the surface flaw 11, and it is possible to take measures such as rejecting a part of the surface flaw 11. This makes it possible to prevent the production of defective products.
[0105]
An example of the surface flaw detection device 41 is shown in FIGS. A transparent light guide rod partially coated with a diffuse reflection paint is used as the linear diffuse light source 22, and light from a metal halide light source is incident from both ends thereof. Light diffusely emitted from the light guide rod of the light source 22 is transmitted through the cylindrical lens 25 and the 45 ° -polarized polarizing plate 26, and then condensed and incident on the entire width of the steel plate 21 at an incident angle of 60 °. To do. The reflected light 27 is further reflected by the mirror 28 arranged in the regular reflection direction of the steel sheet, and enters the camera units 29a to 29d constituting the light receiving unit.
[0106]
These camera units 29a to 29d are arranged in the plate width direction as shown in FIG. By using the mirror 28 in this way, the apparatus can be made compact. Further, when the mirror 28 is installed at an appropriate distance from the steel plate 21, a region deviating from the field of view of all cameras (outside the field of view of all cameras) is generated on the mirror 28 as shown in FIG. it can. By dividing the mirror in this way, the production cost can be kept low.
[0107]
As shown in FIG. 6, the camera units 29 a to 29 d of the light receiving unit include three linear array cameras 32 a to 32 c having analyzers 33 a to 33 c having an analysis angle of −45 °, 45 °, and 90 ° in front of the lens. The optical axis is kept parallel. The signal processing unit 30 corrects the visual field shift of the three cameras. When the optical axes are kept parallel in this way, the pixels of the three cameras 32a to 32c correspond one-to-one with the same visual field size. Further, as compared with the case where one reflected light is divided using a beam splitter, there is no loss of light amount, and efficient measurement is possible.
[0108]
The light receiving range A of each of the light receiving cameras 32a to 32c in each camera unit 29a to 29d corresponds to the corresponding light receiving camera 32a to 32c in the other camera units 29a to 29d adjacent to both sides as shown in FIG. Are arranged so as to partially overlap the light receiving range A. In other words, the reflected light from an arbitrary position in the width direction on the steel plate 21 is received by three types of light receiving cameras 32a to 32c in at least one camera unit 29a to 29d, respectively.
Here, in the light receiving unit, a two-dimensional CCD camera can be used instead of the linear array camera. Further, in the light projecting unit, a fluorescent lamp can be used as the linear diffused light source 22. A fiber light source in which the exit ends of the bundle fiber are aligned on a straight line can also be used. This is because the light emitted from each fiber has a sufficient divergence angle corresponding to the N / A of the fiber, and the fiber light source in which the light is aligned substantially becomes a diffuse light source.
[0109]
Here, the arrangement of the plurality of cameras will be described in detail with reference to FIG. Each camera unit 29a to 29d has a plurality of units arranged at regular intervals. One camera unit 29a to 29d is composed of three cameras 32a to 32c that receive light under different conditions (-45, 45, 90 degree polarized light). Each camera is placed in parallel with a certain interval. Therefore, each field of view is also shifted by the same distance as the camera interval.
[0110]
The order of cameras in each camera unit is the same. For example, 45 degrees, 90 degrees, and -45 degrees from the left. The measurement range (effective region) is, for example, a range where the optical conditions are observed under three conditions, and a region where only one condition or only two conditions are observed (regions at both ends) is invalid and is not used. . The camera interval and the unit interval are determined as dimensions such that the maximum width of the steel sheet falls within the measurement range (effective area).
[0111]
The three cameras in each unit are not adjusted to make the same field of view, and after determining a wrinkle candidate area with each camera, each camera takes correspondence in units of the wrinkle candidate area. As described above, since the fields of view of the respective cameras are shifted, there are cases where three cameras that fit a certain eyelid candidate region in the field of view are not aligned (the optical conditions are not equal for three conditions). In that case, the optical conditions are adjusted to three conditions using the result of the camera of the adjacent unit. This idea is not limited to the case of receiving three polarized lights, but can be applied to the case where the entire width of the inspection object is divided into a plurality of fields of view and observed under two or more arbitrary conditions.
[0112]
When the plurality of light receiving units and the signal processing unit are collectively referred to as wrinkle inspection means, the surface wrinkle marking device shown in FIG. 1 is as shown in FIG. The eyelid inspection means 40 includes light receiving units 32 a to 32 c (corresponding to the cameras in FIGS. 5 and 6) and a signal processing unit 30. Based on the intensity of the reflected light extracted under different optical conditions, the signal processing unit 30 detects the aforementioned diffuse specular reflection component by signal processing and determines the presence or absence of an abnormal part. Thereafter, as in FIG. 1, the position of the surface defect is calculated by the tracking means 43 and the plate length calculation means 47, and marking is performed at the position of the abnormal portion by the marking means 44.
[0113]
An example of the signal processing portion is shown in a block diagram in FIG. The light intensity signals a to c from the light receiving cameras 32a to 32c are input to the average value thinning units 34a to 34c, and the average value is calculated. Next, a pulse signal that is input as the object to be inspected moves a predetermined distance in the longitudinal direction is output as a signal for one line in the width direction. This thinning process makes the resolution in the longitudinal direction constant. Further, if the average value calculation frequency is set so that the moving distance in the longitudinal direction of the object to be inspected does not become larger than the visual field of the light receiving cameras 32a to 32c, oversight can be eliminated.
[0114]
Next, the preprocessing units 35a to 35c correct luminance unevenness for the signal. Here, the luminance unevenness includes those caused by the optical system, those caused by the reflectance of the object to be inspected, and the like. Further, the pre-processing units 35a to 35c detect the position of the edge of the metal band, and perform processing to prevent a sudden signal change at the edge portion from being erroneously recognized as a wrinkle.
[0115]
The preprocessed signal is input to the binarization processing units 36a to 36c, and a wrinkle candidate point is extracted by comparison with a preset threshold value. The extracted wrinkle candidate points are input to the feature amount calculation units 37a to 37c, and signal processing for wrinkle determination is performed. Here, when the wrinkle candidate points are continuous, for example, a position feature amount such as a start address and an end address, its peak value, and other density feature amounts are calculated as one wrinkle candidate region.
[0116]
These calculated feature quantities are input to the specular wrinkle determining unit 38a or the specular diffusive wrinkle determining unit 38b depending on the optical conditions (the detection angle β) of the original signals a to c. The output of the feature amount calculation unit 37a is that the optical condition of the original signal a is -45 degree detection (β = -45 °). Therefore, in this case, the difference is input to the specular wrinkle determination unit 38a and the difference in the amount of reflected light between the base material portion and the shaving portion due to the specular reflection component is detected as described above. On the other hand, the output of the feature amount calculation units 37b and 37c is that the optical conditions of the original signals b and c are 45 degrees and 90 degrees (β = 45 ° 90 °), and only the specular diffuse reflection component is different. . Accordingly, the specular diffusive wrinkle determination unit 38b inputs the wrinkle determination based on the specular diffuse reflection component.
[0117]
Finally, the wrinkle comprehensive determination unit 39 determines the final wrinkle type and the degree of the surface to be inspected of the metal strip based on the outputs of the specular wrinkle determination unit 38a and the specular diffusive wrinkle determination unit 38b. At that time, it is possible to appropriately use the eyelid determination result based on the signal from the camera of the adjacent camera unit in consideration of the overlap of the visual field between the cameras 32a to 32d and between the camera units 29a to 29d (FIG. 5). desirable.
[0118]
FIG. 9 shows an example in which such a surface wrinkle inspection unit that detects wrinkles by detecting an abnormality in the specular diffuse reflection component and a surface wrinkle inspection unit using other methods are combined. Here, the surface wrinkle inspection means 40a is the same as that shown in FIG. 7, and the reflected light is extracted under different optical conditions by the plurality of light receiving portions 32a to 32c, and the specular diffuse reflection component is abnormal in the signal processing portion 30. Is detected to make a heel judgment.
[0119]
As other types of surface inspection means 40b, normal surface wrinkle inspection means, that is, a device of a method of detecting and determining surface wrinkles from the size and shape of wrinkles, or surface contamination and attachment from the reflectance of irradiated light, etc. A device for detecting a kimono can be used. The surface inspection means 40b classifies types and degrees of normal surface defects and surface property abnormalities. The marking information creation means 42 performs a comprehensive classification and ranking for various surface defects and surface property abnormalities including abnormalities of specular diffuse reflection based on the inspection results of the inspection means 40a and 40b, for marking. Create information.
[0120]
After that, as in FIG. 1, the position of the surface defect is calculated by the tracking means 43 and the plate length calculation means 47. The marking means 44 performs marking at the position of the abnormal portion based on the marking information, and at this time, it is desirable to indicate information on the type and degree of surface defects. This may be a detectable form such as a marking pattern / shape / band width. Further, if bar code or OCR (optical character reading) is used in combination, more detailed information can be marked.
[0121]
In this way, by marking the surface of the metal strip, the increase in the number of coils is suppressed, so that the efficiency of work is improved in handling such as coil winding, coil transport, and rewinding. . Further, in the processing of the metal band, the metal band is continuously supplied without being interrupted at the ridge portion, so that the work efficiency can be expected.
[0122]
【Example】
The measurement results of the galvannealed steel sheet according to the embodiment of FIG. 3 are shown in FIGS. 10 corresponds to FIG. 17 (b) and FIG. 11 corresponds to FIG. 17 (c), and the measured wrinkles are as shown in FIG. Although it is larger than the material part, the diffusibility of the non-tempered part does not change (FIG. 17b) and the tempered part area ratio as shown in FIG. 17c). For the type of wrinkle of FIG. 11, there are generally undetectable angles in the diffuse reflection direction, but two types of wrinkles with different angles were measured. For comparison, a result obtained by measuring light incident at an incident angle of 60 ° and non-polarized light from a regular reflection direction (60 °) and a light receiving angle (−40 °) direction shifted by 20 ° from the incident direction is used for comparison. Is also shown in the figure. The above results are summarized in Table 1.
[0123]
[Table 1]

[0124]
In the prior art, light is received at two light receiving angles and ORed for noise removal, but it is impossible to detect these traps simultaneously at two light receiving angles. Furthermore, there are some defects that cannot be detected at either acceptance angle.
[0125]
On the other hand, in this embodiment, reflected light components corresponding to three different light receiving angles are extracted from the regular reflection direction by using an analyzer, and therefore can be detected by any linear array camera. is there. It is also easy to set the optimal detection angle in accordance with the reflection characteristics of the soot that needs to be detected.
[0126]
【The invention's effect】
As described above, the present invention uses a linear diffused light source as a method for extracting and capturing each component based on the knowledge that the reflection on the steel sheet surface consists of a specular reflection component and a specular diffuse reflection component. A component containing more specular reflection components and a specular diffuse reflection component by making polarized light having both p-polarized light and s-polarized light incident on the surface to be inspected, and appropriately setting the detection angle from the normal reflection direction of the steel sheet. The method of extracting the component containing more is adopted.
[0127]
By this method, it is possible to detect wrinkles in which no wrinkles can be observed from the specular reflection component, and it is possible to detect a pattern-like bald wrinkle having no remarkable unevenness that could not be detected without being detected. Moreover, since both components can be captured by measurement on the same optical axis from the regular reflection direction of the steel plate, measurement that is not affected by variations in the steel plate distance or speed changes has been realized. In addition, it is possible to select which angle of specular diffuse reflection component to be extracted by setting the analysis angle.
[0128]
From the viewpoint of quality assurance, it is an absolute condition that such a surface inspection apparatus is not detected. According to the present invention, it is possible to produce a surface flaw marking device and a metal strip with a marking using an undetected surface flaw inspection device that can be widely applied to a surface-treated steel sheet for the first time. In addition, the surface flaw inspection can be automated, and the information can be notified to the post-process and the user by a simple means.
[Brief description of the drawings]
FIG. 1 is a block diagram showing an example of an apparatus according to the present invention.
FIG. 2 is a plan view showing an example of a metal strip according to the present invention.
FIG. 3 is a schematic diagram showing an example of a schematic configuration of a surface flaw inspection apparatus of the apparatus of the present invention.
FIG. 4 is a schematic sectional view of the surface flaw inspection apparatus.
FIG. 5 is a view showing an arrangement in a metal band width direction of a camera unit incorporated in the surface flaw inspection apparatus.
FIG. 6 is a diagram showing an arrangement of cameras incorporated in one camera unit.
FIG. 7 is a block diagram showing another example of the apparatus of the present invention.
FIG. 8 is a block diagram showing an example of a signal processing unit of the apparatus of the present invention.
FIG. 9 is a block diagram showing still another example of the apparatus of the present invention.
FIG. 10 is a diagram showing an example of a light intensity signal measured by the apparatus of the present invention.
FIG. 11 is a diagram showing another example of the light intensity signal measured by the apparatus of the present invention.
FIG. 12 is a view showing a method for producing an alloy galvanized steel sheet and a detailed cross section thereof.
FIG. 13 is a schematic cross-sectional view showing the relationship between incident light and reflected light at a tempered portion and a non-tempered portion on the surface of a metal strip after temper rolling.
FIG. 14 is an angle distribution diagram of reflected light in the temper portion and the non-temper portion.
FIG. 15 is a cross-sectional view for explaining a process of forming a shaving portion in an alloy galvanized steel sheet.
FIG. 16 is an angle distribution diagram of a specular reflection component and a specular diffuse reflection component in a bald portion and a base material portion.
FIG. 17 is a diagram showing a relationship between a normal angle of a minute surface element and an area ratio in a shaving portion and a base material portion of a surface to be inspected.
FIG. 18 is a diagram showing a relationship between angles of incident light, reflected light, and the like in a micro surface element on a surface to be inspected.
FIG. 19 is a diagram illustrating a relationship between a normal angle of a micro surface element and a weighting function.
FIG. 20 is a diagram showing the relationship between each incident light from each position of the linear diffused light source and the incident position on the surface to be inspected.
FIG. 21 is a diagram showing a polarization state of reflected light from a micro-surface element when each incident light of a linear diffusion light source is polarized.
FIG. 22 is a diagram showing reflected light from a micro-surface element when incident light from the central portion of the linear diffused light source is polarized.
FIG. 23 is a diagram showing reflected light from a micro surface element when incident light from a portion other than the central portion of the linear diffuse light source is polarized.
FIG. 24 is a diagram showing the relationship between the normal angle of a micro surface element and the elliptical polarization state of reflected light.
FIG. 25 is a diagram showing the relationship between the normal angle of a micro surface element and a weight function (analysis angle: −45 °).
FIG. 26 is a diagram showing a relationship between a normal angle of a micro surface element and a weight function at various analysis angles.
FIG. 27 is a diagram showing a relationship between a normal angle of a micro surface element on a surface to be inspected and an area ratio.
[Explanation of symbols]
4 Metal strip
6 Tempering part
7 Non-tempered part
8, 24 Incident light
10 Specular diffuse reflection
11 Abnormal part (Hege part)
12 Base material part
14, 22 Linear diffused light source
15, 26 Polarizing plate
16, 32a-c Light receiving camera
17, 33a-d Analyzer
21 Steel plate
23 Shading case
24 Incident light
25 Cylindrical lens
26 45 ° polarization polarizing plate 26
27 Reflected light
28 Mirror
29a-d Camera unit
30 Signal processor
40a Surface wrinkle inspection means
40b Surface inspection means
41 Surface flaw detector
43 Tracking means
44 Marking means
45 Transport roll
46 Tachometer
47 Plate length calculation means
49 Marking

Claims (9)

The light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal band, irradiated as linearly polarized light including both p-polarized light and s-polarized light, and reflected light reflected in the regular reflection direction of the surface to be inspected. A light receiving unit that receives a component that includes more specular reflection components through a polarizer set to a polarization angle that further transmits the specular reflection component so as to extract a specular reflection component and a specular diffuse reflection component;
The normal angle defined by the angle formed by the normal direction of the micro surface element with respect to the normal direction of the temper portion among the micro surface elements of the non-temper portion arranged on the same optical axis as the light receiving portion , A plurality of light-receiving units each including a light-receiving unit configured to receive a component containing more specular diffuse reflection components through a polarizer set to a polarization angle that transmits more specular diffuse reflection components from a microscopic surface element having a predetermined angle ; ,
A wrinkle inspection means having a signal processing unit for determining the presence or absence of surface wrinkles on the surface to be inspected based on a combination of the specular reflection component of the extracted reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces,
A metal band surface wrinkle marking device comprising marking means for marking on the surface of the metal band indicating information on the type and degree of the wrinkles. The light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal band, irradiated as linearly polarized light including both p-polarized light and s-polarized light, and reflected light reflected in the regular reflection direction of the surface to be inspected. A light receiving unit that receives a component that includes more specular reflection components through a polarizer set to a polarization angle that further transmits the specular reflection component so as to extract a specular reflection component and a specular diffuse reflection component;
The normal angle defined by the angle formed by the normal direction of the micro surface element with respect to the normal direction of the temper portion among the micro surface elements of the non-temper portion arranged on the same optical axis as the light receiving portion , A plurality of light-receiving units each including a light-receiving unit configured to receive a component containing more specular diffuse reflection components through a polarizer set to a polarization angle that transmits more specular diffuse reflection components from a microscopic surface element having a predetermined angle ; ,
A wrinkle inspection means having a signal processing unit for determining the presence or absence of surface wrinkles on the surface to be inspected based on a combination of the specular reflection component of the extracted reflected light and the specular diffuse reflection component by a number of micro specular reflection surfaces,
Tracking means for tracking the position of surface defects;
A metal band surface wrinkle marking device comprising marking means for marking on the surface of the metal band indicating information on the type and degree of the wrinkles. The light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal band, irradiated as linearly polarized light including both p-polarized light and s-polarized light, and reflected light reflected in the regular reflection direction of the surface to be inspected. A light-receiving unit that receives a component that includes more specular reflection component through a polarizer set to a polarization angle that transmits the specular reflection component more and a non-tempered portion disposed on the same optical axis as the light-receiving unit Of the surface elements, the normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the tempered portion transmits more specular diffuse reflection components from the minute surface element having a predetermined angle. A specular reflection component and a specular diffuse reflection component are extracted by a light receiving unit that receives a component containing a larger amount of specular diffuse reflection component through a polarizer set to a polarization angle, and the specular reflection component and many of the extracted reflected light are extracted. Mirror reflection surface of An inspection step of determining the presence or absence of surface defects of the inspected surface based on a combination of specular diffuse reflection component by,
And a marking step of marking on the surface of the metal strip indicating information on the type and degree of the wrinkles. The light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal band, irradiated as linearly polarized light including both p-polarized light and s-polarized light, and reflected light reflected in the regular reflection direction of the surface to be inspected. A light-receiving unit that receives a component that includes more specular reflection component through a polarizer set to a polarization angle that transmits the specular reflection component more and a non-tempered portion disposed on the same optical axis as the light-receiving unit Of the surface elements, the normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the tempered portion transmits more specular diffuse reflection components from the minute surface element having a predetermined angle. A specular reflection component and a specular diffuse reflection component are extracted by a light receiving unit that receives a component containing a larger amount of specular diffuse reflection component through a polarizer set to a polarization angle, and the specular reflection component and many of the extracted reflected light are extracted. Mirror reflection surface of An inspection step of determining the presence or absence of surface defects of the inspected surface based on a combination of specular diffuse reflection component by,
A tracking process for tracking the position of surface defects;
And a marking step of marking on the surface of the metal strip indicating information on the type and degree of the wrinkles. The method for producing a metal strip with a marking according to claim 3 or 4, wherein in the marking step, a marking indicating information on a type and a degree of the surface defect is applied to the position of the surface defect. 6. The marking process according to claim 3, wherein in the marking step, marking indicating information on a type and a degree of the surface flaw is performed at a certain position with respect to the width direction of the metal strip. A method for producing a metal strip with marking. The light from the linear diffused light source is transmitted through the polarizing plate to the surface to be inspected of the metal band, irradiated as linearly polarized light including both p-polarized light and s-polarized light, and reflected light reflected in the regular reflection direction of the surface to be inspected. A light-receiving unit that receives a component that includes more specular reflection component through a polarizer set to a polarization angle that transmits the specular reflection component more and a non-tempered portion disposed on the same optical axis as the light-receiving unit Of the surface elements, the normal angle defined by the angle formed by the normal direction of the minute surface element with respect to the normal direction of the tempered portion transmits more specular diffuse reflection components from the minute surface element having a predetermined angle. A specular reflection component and a specular diffuse reflection component are extracted by a light receiving unit that receives a component containing more specular diffuse reflection components through a polarizer set to a polarization angle to obtain a specular reflection component of the reflected light and a large number of reflection components By micro-reflecting surface And determining the presence or absence of surface defects of the inspected surface based on a combination of surface diffuse reflection component,
A step of marking on the surface of the metal strip indicating information on the type and degree of the wrinkles;
Winding the metal band with this marking into a coil;
Rewinding the coil to detect the marking and designating a predetermined range of the metal strip based on the information indicated by the marking;
And a step of performing predetermined processing on the remaining portion of the metal band that avoids or removes the specified range. Reflected light that is reflected in the specular reflection direction of the surface to be inspected by irradiating the inspection surface of the metal band with light from a linear diffused light source as linearly polarized light that passes through the polarizing plate and includes both p-polarized light and s-polarized light. A light receiving unit that receives a component containing more specular reflection component through a polarizer set to a polarization angle that transmits the specular reflection component more so as to extract a specular reflection component and a specular diffuse reflection component from the light receiving unit, and the light receiving unit The normal angle defined by the angle formed by the normal direction of the micro surface element with respect to the normal direction of the temper portion among the micro surface elements of the non-temper portion arranged on the same optical axis is a predetermined angle surface having a plurality of light receiving portions comprising a light receiving portion for receiving the components containing more specular diffuse reflection component through a polarizer set to polarization angle of more transparent specular diffuse reflection component from a small-area element to be複 Including multiple inspection methods In addition to the type and degree of wrinkles on the surface of the metal band, the size and shape of wrinkles and dirt, the reflectance of the irradiated light, etc. 3. A surface marking device for a metal strip according to claim 1 or 2, further comprising marking information creating means for creating marking information relating to surface inspection results or various surface properties. Reflected light that is reflected in the specular reflection direction of the surface to be inspected by irradiating the inspection surface of the metal band with light from a linear diffused light source as linearly polarized light that passes through the polarizing plate and includes both p-polarized light and s-polarized light. A light receiving unit that receives a component containing more specular reflection component through a polarizer set to a polarization angle that transmits the specular reflection component more, and a non-tempered unit disposed on the same optical axis as the light receiving unit. Of the micro-surface elements, the normal angle defined by the angle formed by the normal direction of the micro-surface element with respect to the normal direction of the temper portion has more specular diffuse reflection components from the micro-surface element having a predetermined angle. A specular reflection component and a specular diffuse reflection component are extracted by a light receiving unit that receives a component including a larger amount of specular diffuse reflection component through a polarizer set to a transmission polarization angle, and the specular reflection component of the extracted reflected light Numerous micro mirror surfaces Based on the combination of specular diffuse reflection components by the surface, comprehensively determine the inspection results by multiple surface defect inspection methods including the surface defect inspection method that inspects the surface to be inspected. In addition, the method further comprises a marking information creating step for creating marking information related to surface inspection results or various surface properties based on dimensions and shapes of wrinkles and dirt, reflectance of irradiated light, and the like. The manufacturing method of the metal strip with a marking of any one of 6.

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