JP3622947B2 - Clean room floor structure - Google Patents

Description

[0001]
[Technical field to which the invention belongs]
The present invention relates to a floor structure in a clean room, and more particularly to a floor structure in which the rigidity and mass of the floor surface are increased.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a clean room for manufacturing a semiconductor needs to increase the rigidity and mass of a floor in response to an increase in the size of a manufacturing apparatus, changes in vibration conditions, and the like. In order to meet these requirements, existing factories are renovating the floor to remove existing flooring or replacing foundation materials such as joists to switch to stronger materials.
[0003]
In addition, the above renovation work is a large-scale work and removes existing members, so that dust is scattered or vibration is generated in the process of the work. The operation was completely stopped and construction was being carried out.
[0004]
[Problems to be solved by the invention]
As described above, the suspension of operation of each device in the clean room during the renovation period was a big pain in profit.
In addition, in order to avoid a decrease in revenues, when construction is performed with the production equipment in operation, dust scattering and vibration occur as a result of the construction as described above, and in clean rooms for semiconductors, etc. It was not allowed to create the environment.
[0005]
In addition, if a material with high rigidity and mass is used, the member itself is heavy, and construction may take time, and there may be dangers due to bringing in and operating various heavy machinery. There were many. Further, these members are expensive, and there is a drawback that they are extremely expensive as a whole, such as an increase in labor costs in construction.
Moreover, the connection part of the floor surface and wall surface in a corner part had to be repaired also by the wall surface side depending on the structure of the accommodation.
[0006]
[Means for Solving the Problems]
The present invention has been made to solve the above-described problems, and can be performed in a state in which the manufacturing apparatus is operated without causing scattering or vibration of dust or the like accompanying the renovation work. It is intended to provide a clean room floor structure that can also be applied in the renovation work of the factory or in a new factory.
[0007]
As concrete means, under-floor structural materials such as beams made of steel or overdrawing, I-beams supported by the under-floor structural materials, joists made of H-beams or angle irons, steel plates laid on the joists In order to integrate the steel floor panel, the steel floor panel and the underfloor structural material and the joist, a spliced reinforcing steel material made of groove steel or angle steel, etc. disposed under the joist and the underfloor structural material , A cleaning bolt comprising: a fastening bolt for connecting a steel plate floor panel and an attachment reinforcing steel material; a steel plate laid on the steel plate floor panel; and a connecting metal fitting for connecting the steel plate floor panel and the steel plate. Provides an underfloor structure of the floor.
[0008]
Further, the above-mentioned welded reinforcing steel material is arranged so as to be orthogonal to the joist, and the welded reinforcing steel material is arranged so as to be orthogonal to the underfloor structural material intersected by the welded reinforcing steel material. Is.
[0009]
Furthermore, a fastening bolt for connecting the steel plate floor panel and the attachment reinforcing steel material is formed so that one end is flush with the surface of the steel plate floor panel, and the other end is formed on the lower flange of the attachment reinforcement steel material. It is characterized by being fastened and fixed with a nut so as to abut .
[0010]
Further, the steel plate floor panel and the steel plate laid on the panel are integrated by being tightened and fixed with a countersunk bolt.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 2 is a cross-sectional view showing an embodiment of the present invention, and the floor structure of the clean room of the present invention is an underfloor structural material such as a beam made of a steel frame such as I-shaped steel or H-shaped steel, or overdrawing. 1, a joist made of I-shaped steel, H-shaped steel or angle steel supported by the underfloor structural material 1, a steel plate floor panel laid on the joist 2, the steel plate floor panel 3 and the above-mentioned underfloor A joint reinforcement steel material made of grooved steel or angle steel for integrating the structural material 1 and the joist 2, a fastening bolt 5 for connecting the steel plate floor panel 3 and the joint reinforcement steel material 4, the steel plate It is formed of a steel plate 6 laid on the floor panel 3 and a connecting fitting 7 for connecting the steel plate floor panel 3 and the steel plate 6.
[0012]
[Example 1]
As a building constituting the clean room, a steel structure is adopted as shown in FIG. 6 in order to prevent dust and the like from being emitted from the housing during daily operation. The underfloor structural material shown in the sectional views of FIGS. 4 and 5 shows an H-shaped steel beam 8 supported by a column or the like.
[0013]
A joist 2 such as a grooved steel or an angle steel is connected to the beam 8 by an appropriate means in the perpendicular direction. In the embodiment, the upper edge of the joist is connected to the upper flange of the beam 8 so as to be placed thereon. A steel sheet floor panel 3 is supported on a joist 2 disposed at an appropriate interval according to the size of the floor panel and the load applied to the floor surface, with a plate 9 appropriately. The plate 9 adjusts the level of the floor surface.
[0014]
At the lower part of the joist 2, an attachment reinforcing steel material 4 such as channel steel or angle steel is attached to the lower flange 10 by a fixing bracket 12 so as to support the upper flange 11. The splicing reinforcing steel material 4 is a long member extending in a direction orthogonal to the joist 2.
[0015]
The splicing reinforcement steel material 4 is a long one in which a grooved steel or the like is joined together, and a long fastening bolt 5 made of a hexagonal bolt is arranged between opposing webs of the grooved steel or the like to form a groove. Steels are connected to each other from their webs by connecting tools 13 such as bolts and nuts.
[0016]
One end side of the long fastening bolt 5 extends to almost the surface of the steel plate floor panel 3, and the surface is flush with the floor panel 3 by a head 14 such as a bolt so as to be flush with the floor panel 3. Fix it.
[0017]
Further, the other end side is fastened and fixed with a nut so as to contact the lower flange of the attachment reinforcing steel material 4. By means of the tightening bolt 5, the attachment reinforcing steel material 4 and the steel plate floor panel 3 are firmly connected.
[0018]
In the above-described embodiment, the connection between the splicing reinforcement steel material 4 fixed to the lower flange of the joists 2 and the steel plate floor panel 3 has been described. Is also performed in the same manner as described above.
[0019]
As shown in the cross-sectional view of FIG. 2, the reinforcing steel material 4 is fixed to the lower flange of the underfloor structural material 1 in the orthogonal direction, and one end side of the fastening bolt 5 fixed to the auxiliary reinforcing steel material 4 is made of a steel plate. Fix to the floor panel 3. By providing the attachment reinforcing steel material 4, the connection with the steel plate floor panel 3 can be strengthened even in the gap portion between the joists 2 of the underfloor structural material 1.
[0020]
A steel plate 6 is laid on the upper surface of the steel plate floor panel 3. The steel plate floor panel 3 and the steel plate 6 are fixed by a connecting metal fitting 7 from the surface side as shown in the plan view of FIG. As for the connecting metal fitting 7, a plate bolt or the like is employed so that the surface of the steel plate 6 is flush with the surface of the steel plate 6, similarly to the floor panel 3.
[0021]
A method for constructing the floor structure of the clean room will be described.
FIG. 6 is a cross-sectional view showing the existing state of the floor structure of the clean room. As shown in FIG. The reinforcing steel material 4 is attached in the orthogonal direction.
[0022]
A through-hole through which the fastening bolt 5 passes is formed in the steel plate panel 3 corresponding to the fastening bolt 5 fixed to the attachment reinforcing steel material 4. The head 14 of the tightening bolt 5 is disposed in the through hole so as to be flush with the floor surface, and the other end is disposed between opposing webs such as channel steel of the attachment reinforcing steel material 4, Fix from the side.
[0023]
Thereafter, the nuts of the fastening bolts 5 are fastened to firmly connect the attachment reinforcing steel material 4 and the steel plate floor panel 3.
After that, as shown in FIG. 2, the steel plate 6 is laid on the steel plate floor panel 3, and the steel plate floor panel 3 and the steel plate 6 are firmly fixed by the connecting metal fitting 7.
[0024]
Since the floor structure of the clean room of the present invention can be laid with the steel plate integrated on the upper surface of the floor panel, a floor structure having a predetermined rigidity and mass can be obtained.
In addition, there will be no dust scattering due to the removal work of flooring, etc., and due to the nature of the clean room, it can be a good renovation environment, so renovation work should be carried out while continuing the operation of the equipment. Became possible.
[0025]
Furthermore, the construction period can be greatly shortened because the steel plate is simply laid on the upper surface of the floor panel.
Moreover, since the floor panel and the structural material can be firmly connected by using the welded reinforcing steel material, it is possible to obtain a floor structure effective in strength.
[0026]
Furthermore, since the weight of the member itself can be reduced, it is possible to perform construction with only a few people without bringing in heavy machinery during construction. It has become possible to achieve significant cost savings.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a state in which a reinforcing steel material is disposed on a floor structure of a clean room according to the present invention.
FIG. 2 is a cross-sectional view showing a state in which steel plates are disposed on the floor structure of the clean room of the present invention.
FIG. 3 is a plan view showing a state in which steel plates are disposed on the floor structure of the clean room of the present invention.
FIG. 4 is an enlarged sectional view showing a state in which a steel plate is disposed on the floor structure of the clean room of the present invention.
FIG. 5 is an enlarged sectional view showing a state in which a steel plate is disposed on the floor structure of the clean room of the present invention.
FIG. 6 is a sectional view showing an existing state of a floor structure of a clean room.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Underfloor structural material 2 joist 3 Steel plate floor panel 4 Reinforcement reinforcement steel material 5 Clamping bolt 6 Steel plate 7 Connecting bracket 8 Beam 9 Plate 10 Flange 11 Flange 12 Fixing bracket 13 Connecting tool 14 Head

Claims (4)

Underfloor structural material such as beams or large-drawings made of steel frames, I-shaped steel supported by the underfloor structural material, joists made of H-shaped steel or angle steel, steel plate floor panels laid on the joists, the steel plates In order to integrate the floor panel, the underfloor structural material and the joist, an additional reinforcing steel material, such as a grooved steel or an angle steel , disposed at the lower part of the joist and the underfloor structural material, A floor of a clean room comprising: a fastening bolt for connecting a steel plate to a contact reinforcing steel, a steel plate laid on the steel plate floor panel, and a connecting metal fitting for connecting the steel plate floor panel and the steel plate. Construction. The said reinforcement steel material is arrange | positioned so that it may orthogonally cross with respect to a joist, and it may arrange | position an attachment reinforcement steel material so that it may orthogonally cross the underfloor structural material which this intersection reinforcement steel material crosses. The floor structure of the clean room according to 1. The fastening bolt that connects the steel plate floor panel and the attachment reinforcing steel material is formed so that one end is flush with the surface of the steel plate floor panel, and the other end abuts the lower flange of the attachment reinforcement steel material. 3. The floor structure of the clean room according to claim 1, wherein the floor structure is fastened and fixed by a nut as described above. 4. The clean room according to claim 1, wherein the steel plate floor panel and the steel plate laid on the panel are integrated by tightening and fixing with a flat head bolt. Floor structure.

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