JP3576245B2 - Plunger pump - Google Patents

Plunger pump Download PDF

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Publication number
JP3576245B2
JP3576245B2 JP03047995A JP3047995A JP3576245B2 JP 3576245 B2 JP3576245 B2 JP 3576245B2 JP 03047995 A JP03047995 A JP 03047995A JP 3047995 A JP3047995 A JP 3047995A JP 3576245 B2 JP3576245 B2 JP 3576245B2
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JP
Japan
Prior art keywords
plunger
cylinder
fluid
suction
discharge
Prior art date
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Expired - Lifetime
Application number
JP03047995A
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Japanese (ja)
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JPH08226378A (en
Inventor
裕司 唐土
兼嗣 山本
敏朗 成相
Original Assignee
株式会社フジキン
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Priority to JP03047995A priority Critical patent/JP3576245B2/en
Publication of JPH08226378A publication Critical patent/JPH08226378A/en
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Description

[0001]
[Industrial applications]
The present invention relates to a plunger pump incorporated in a pipeline for handling a high-purity fluid such as ultrapure water, which is mainly used in a semiconductor manufacturing plant or a manufacturing plant for pharmaceuticals and chemical products, and relates to a cylinder and a plunger. The present invention relates to a plunger pump which discharges particles generated in a sliding portion together with a part of a fluid to the outside to prevent the particles from being mixed into a transport fluid.
[0002]
[Prior art]
Generally, in a plunger pump, particles may be generated in a cylinder due to sliding between the cylinder and the plunger, and may be mixed into a transport fluid.
[0003]
For this reason, plunger pumps that have the risk of particles being mixed in fluids should be used in piping that handles high-purity fluids, such as semiconductor manufacturing plants and pharmaceutical and chemical product manufacturing plants. Not. For example, in the semiconductor cleaning process, the use of a plunger pump that generates particles is extremely problematic because the purity of the cleaning liquid (ultra pure water) greatly affects the semiconductor yield.
Therefore, a plunger pump capable of preventing particles from being mixed in a transport fluid is used in a pipe line handling a high-purity fluid.
[0004]
Conventionally, as this type of plunger pump, for example, one having a structure disclosed in Japanese Patent Application Laid-Open No. 63-266176 is known.
That is, as shown in FIG. 4, the plunger pump has a sliding portion 20a and a non-sliding portion 20b (between the cylinder 20 and the plunger 21) between the inner peripheral surface of the cylinder 20 and the outer peripheral surface of the plunger 21. (A small gap formed therebetween) is formed adjacently, an annular manifold groove 22 is formed in a non-sliding portion of the inner peripheral surface of the cylinder 20, and a discharge pipe 23 and a check valve 24 are formed in the manifold groove 22. And a sub-pump 25 connected thereto.
In FIG. 4, reference numeral 26 denotes a suction chamber, 27 denotes a crankshaft, 28 denotes a suction pipe, 29 denotes a delivery pipe, 30 denotes a discharge pipe from the sub pump 25, and 31 denotes a check valve.
[0005]
In this plunger pump, when the plunger 21 moves in the suction direction (downward in FIG. 4), the fluid is sucked from the suction pipe 28 into the suction chamber 26, and the sub pump 25 is also sucked. Thus, a part of the fluid flowing into the suction chamber 26 is sucked by the sub pump 25 through the small gap of the non-slidable portion 20b, the manifold groove 22, and the drain pipe 23.
On the other hand, when the plunger 21 moves in the discharge direction (upward in FIG. 4), the fluid in the suction chamber 26 is discharged from the delivery pipe 29, and the fluid sucked by the sub pump 25 is also discharged to the outside via the discharge pipe 30. Is done.
[0006]
As described above, in the plunger pump, the fluid near the sliding portion 20a, which may be mixed with particles generated in the sliding portion 20a, is discharged to the outside by the sub-pump 25. A decrease in the purity of the fluid can be prevented.
[0007]
[Problems to be solved by the invention]
However, in the plunger pump, since the drain pipe 23 is connected to a part of the annular manifold groove 22, a part of the manifold groove 22 opposite to the part where the drain pipe 23 is connected (shown in FIG. 4). Fluid in the right side of the manifold groove 22) is difficult to discharge. As a result, there is a problem that a part of the fluid in which the particles may be mixed into the fluid in the suction chamber 26 is mixed, and the purity of the transport fluid is reduced.
Further, since the sub-pump 25 and the like are required to discharge the fluid mixed with particles, various problems occur, such as a complicated structure, a rise in cost, and a large installation space.
[0008]
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to quickly and reliably transfer particles generated in a sliding portion between a cylinder and a plunger to the outside together with a part of a fluid. Another object of the present invention is to provide a plunger pump which discharges water to prevent particles from being mixed in a transport fluid.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, a plunger pump according to the present invention comprises a cylinder 1 having a suction port 1a and a discharge port 1b, a suction valve 2 provided at the suction port 1a, and a discharge valve 3 provided at the discharge port 1b. And a plunger 4 that reciprocates in the cylinder 1 to draw fluid from a suction port into a suction chamber S formed between the cylinder 1 and the tip of the plunger 4 and discharge the fluid from a discharge port 1b. In the plunger pump, an annular recess 4a is formed on the outer peripheral surface of the tip of the plunger 4, and the outer diameter of the tip of the plunger 4 below the recess 4a is changed to the inner diameter of the cylinder 1. A smaller gap G is formed between the tip outer peripheral surface of the plunger 4 and the inner peripheral surface of the cylinder 1 as a slightly smaller diameter, and the suction chamber S communicates with the annular recess 4a through the gap G. A shaft in the plunger 4 A plurality of drain holes 4b are formed in the direction, and the base end side thereof is connected to a drain pipe, and the distal end of the plunger 4 is connected to the distal end of the drain hole 4b and the annular recess 4a. The communication holes 4c are formed radially.
[0010]
[Action]
The plunger pump is incorporated in a piping for handling a high-purity fluid such as ultrapure water, and a fluid transport pipe is provided on a suction port side and a discharge port side, and a drain pipe is provided on one end of a drain hole. It is connected.
When the plunger moves in the suction direction, the suction chamber is evacuated to open the suction valve, and the fluid is sucked from the transport pipe into the suction chamber via the suction valve.
On the other hand, when the plunger moves in the discharge direction, the suction chamber is pressurized to close the suction valve, the discharge valve is opened, and the fluid in the suction chamber is discharged to the transport pipe via the discharge valve. Further, when the plunger moves in the discharge direction, the fluid in the recess and near the tip of the plunger flows from the drain pipe to the outside through the communication hole and the drain hole, in combination with the fact that the suction chamber is pressurized. Is discharged.
[0011]
As described above, the plunger pump of the present invention transfers the fluid near the tip of the plunger, which may be mixed with particles generated in the sliding portion between the cylinder and the plunger, from the communication hole and the drain hole to the outside. Since the fluid is discharged, particles are not mixed in the fluid being transported, and the fluid is transported while maintaining a predetermined purity. In particular, since the recess and the drain hole communicate with each other through the radial communication hole, the fluid mixed with the particles is quickly and reliably discharged to the drain hole, and the mixing of the particles into the fluid is more reliably performed. Can be prevented.
[0012]
【Example】
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 shows a plunger pump according to an embodiment of the present invention. The plunger pump includes a cylinder 1, a suction valve 2, a discharge valve 3, a plunger 4, and a driving device 5 for the plunger 4. It is configured and incorporated into a pipeline for handling ultrapure water used in semiconductor manufacturing plants and used to transport ultrapure water.
[0013]
The cylinder 1 is formed in a bottomed cylindrical shape whose lower end is closed by a metal material such as stainless steel (SUS316), and has a cylindrical cylinder tube 1 ′ having a flange 6 attached to an upper end thereof; ′ Is fixed to a lower end portion of the cylinder tube 1 ′ via a plurality of columns 7 and nuts 8 and the like, and closes a lower end of the cylinder tube 1 ′. A suction port 1a and a discharge port 1b are formed on the side face), and these are in communication with the inside of the cylinder tube 1 'via a fluid passage 1c formed in the end cap 1 ".
[0014]
The suction valve 2 is provided at a suction port 1 a of the cylinder 1, and is opened in a suction step (up step) of the plunger 4.
In the present embodiment, as shown in FIG. 2, the suction valve 2 includes a cylindrical holder 2a attached to the suction port 1a of the cylinder 1 via a connector 9, and a valve seat fitted to one end of the holder 2a. 2b, a disc 2c movably inserted into the holder 2a and abutting on and off the valve seat 2b, and a spring 2d for urging the disc 2c toward the valve seat 2b. When the inside of the cylinder 1 is evacuated in the process, the disk 2c is separated from the valve seat 2b against the urging force of the spring 2d.
[0015]
The discharge valve 3 is provided at a discharge port 1b of the cylinder 1, and is opened in a discharge step (down step) of the plunger 4.
In this embodiment, as shown in FIG. 2, the discharge valve 3 includes a cylindrical holder 3a attached to the discharge port 1b of the cylinder 1 via a connector 10, and a valve seat fitted to one end of the holder 3a. 3b, a disc 3c that is movably inserted into the holder 3a, and comes into contact with and separates from the valve seat 3b, and a spring 3d that urges the disc 3c toward the valve seat 3b. When the inside of the cylinder 1 is pressurized in the process, the disk 2c separates from the valve seat 2b against the urging force of the spring 2d.
[0016]
The discs 2c and 3c of the suction valve 2 and the discharge valve 3 are made of PCTFE, and the other members are made of stainless steel (SUS316).
[0017]
As shown in FIG. 1, the plunger 4 is threadedly fitted to a cylindrical main body 4 'made of a metal material such as stainless steel (SUS316) or the like and a tip of the main body 4'. SUS316) or the like, and a head portion 4 ″ formed into a piston shape by a metal material such as SUS316), is slidably inserted into the cylinder 1, and forms a suction chamber S between the head portion 4 ″ and the cylinder 1. It has become.
The plunger 4 is reciprocated (moves up and down) in the cylinder 1 by a driving device 5 fixed to the flange 6. In this embodiment, an air cylinder is used for the driving device 5, and the air cylinder is fixed to the flange 6 via a plurality of columns 11 and nuts 12, and the rod 5 a is connected via a joint 13. It is connected to the upper end of the plunger 4.
[0018]
In the plunger pump of the present invention, an annular recess 4 a communicating with the suction chamber S is formed on the outer peripheral surface of the tip of the plunger 4. That is, in the present embodiment, as shown in FIG. 2, a head part 4 ″ having an annular groove formed on the outer peripheral surface is screwed into the tip of the main body part 4 ′, so that the tip of the plunger 4 is annularly fitted. The outer diameter of the head portion 4 ″ on the tip side (the tip side than the recess 4a) is slightly smaller than the inner diameter of the cylinder tube 1 ′. Accordingly, a small annular gap G is formed between the outer peripheral surface on the distal end side of the head portion 4 ″ and the inner peripheral surface of the cylinder tube 1 ′, and the gap G is formed between the suction chamber S and the recess 4a. Will communicate with each other.
[0019]
The plunger 4 is formed with a drain hole 4b extending in the axial direction. In this embodiment, as shown in FIG. 2, the drain hole 4b is located at the axis of the main body 4 'and the head 4 "and at a portion other than the upper end of the main body 4' and the lower end of the head 4". The upper end of the drain hole 4b is connected to a joint 14 connected to the upper end of the main body 4 '.
[0020]
Further, a radial communication hole 4c is formed at the tip of the plunger 4 to make the recess 4a communicate with the tip of the drain hole 4b. In this embodiment, as shown in FIGS. 2 and 3, the communication holes 4c are formed at intervals of 90 degrees in a groove portion of the head portion 4 ″ so as to be orthogonal to the drain holes 4b.
[0021]
1 and 2, 15 is an O-ring, 16 is an omni seal, and 17 is a disk packing.
[0022]
Next, the operation of the plunger pump will be described.
The plunger pump is incorporated in a piping for handling ultrapure water used in a semiconductor manufacturing plant, and is used to transport ultrapure water. That is, a transport pipe (not shown) for transporting ultrapure water is connected to the connector 9 on the suction valve 2 side and the connector 10 on the discharge valve 3 side of the plunger pump, and communicates with the upper end of the drain hole 4b. Drain pipes (not shown) for draining ultrapure water mixed with particles are connected to the joints 14.
[0023]
In the plunger pump, when the plunger 4 moves in the suction direction (upward in FIG. 2) by the air cylinder, the suction chamber S is evacuated, the suction valve 2 is opened, and the plunger 4 is moved from the transport pipe. Ultrapure water flows into the suction chamber S through the fluid passage 1c (see the thin arrow in FIG. 2).
[0024]
On the other hand, when the plunger 4 moves in the discharge direction (downward in FIG. 2), the suction chamber S is pressurized, the suction valve 2 is closed, and the discharge valve 3 is opened, so that the ultrapure water in the suction chamber S The gas is discharged to the transport pipe via the passage 1c and the discharge valve 3 (see a broken line arrow in FIG. 2). Further, when the plunger 4 moves in the discharge direction, the ultrapure water flowing into the recess 4a and the gap G and the vicinity of the head portion 4 ″ are coupled with the fact that the suction chamber S is pressurized. Is discharged from the drain pipe through the communication hole 4c and the drain hole 4b (see the dashed line arrow in FIG. 2), so that the particles generated in the sliding portion between the cylinder 1 and the plunger 4 are removed. The ultrapure water in the vicinity of the head portion 4 ″ which may be mixed is discharged to the outside via the communication hole 4c and the drain hole 4b.
[0025]
In this way, by repeating the above suction step and discharge step, ultrapure water can be transported while particles generated in the cylinder 1 are discharged to the outside together with a part of the ultrapure water. .
[0026]
As described above, the plunger pump of the present invention uses the communication hole 4c and the ultrapure water in the vicinity of the head portion 4 ″ where particles generated in the sliding portion between the cylinder 1 and the plunger 4 may be mixed. Since the water is discharged from the drain hole 4b to the outside, particles are not mixed in the ultrapure water being transported, and the ultrapure water is transported while being maintained at a predetermined purity. And the drain hole 4b are communicated with each other through the radial communication hole 4c, so that ultrapure water containing particles can be quickly and reliably discharged to the drain hole 4b. Since the inside is communicated with the inside by a small annular gap G, particles generated in the sliding portion between the cylinder 1 and the plunger 4 are less likely to flow into the suction chamber S, and the particles are mixed into the ultrapure water. More reliably Door can be.
[0027]
The number of the communication holes 4c and the inner diameters of the drain holes 4b and the communication holes 4c are determined by the tip of the plunger 4 at which the plunger pump can sufficiently function as a pump and there is a possibility that particles may be mixed. Of course, it is set so that ultrapure water in the vicinity of the part can be reliably discharged.
[0028]
In the above-described embodiment, the suction port 1a and the discharge port 1b are formed on the left and right side surfaces of the end cap 1 ″, and these are communicated with the suction chamber S through the fluid passage 1c. In this case, the suction port 1a and the discharge port 1b may be formed on the lower surface of the end cap 1 ″, and these may be connected to the suction chamber S via the fluid passage 1c.
[0029]
In the above embodiment, the suction valve 2 and the discharge valve 3 are constituted by the holders 2a and 3a, the valve seats 2b and 3b, the disks 2c and 3c, and the springs 2d and 3d. The configuration of the discharge valve 3 is not limited to that of the above-described embodiment. The suction valve 2 is opened during the suction step of the plunger 4, and the discharge valve 3 is opened during the discharge step of the plunger 4. Any structure may be used.
[0030]
In the above embodiment, the plunger 4 is composed of the main body 4 'and the head 4 ". In other embodiments, the main body 4' and the head 4" are integrated. May be formed.
[0031]
In the above embodiment, four communication holes 4c are formed at the tip of the plunger 4, but in other embodiments, two or three communication holes 4c are formed at the tip of the plunger 4. Alternatively, five or more may be formed.
[0032]
In the above embodiment, the plunger 4 is reciprocated by the driving device 5 composed of an air cylinder. In other embodiments, the plunger 4 is driven by a driving mechanism composed of a crank mechanism, an electric motor, and the like. The device 5 may be reciprocated.
[0033]
In the above embodiment, the ultrapure water is transported by the plunger pump. However, in other embodiments, the high purity gas used in the semiconductor manufacturing plant is supplied by the plunger pump. Good to transport.
[0034]
【The invention's effect】
As described above, the plunger pump of the present invention is to form a recess annular communicating with the suction chamber to the distal end outer peripheral surface of the plunger to form a drainage hole in the plunger along the axial direction, the plan Since a radial communication hole communicating the recess and the drain hole tip is formed at the tip of the jar, particles generated in the sliding portion between the cylinder and the plunger during the discharge process of the plunger. Fluid near the tip of the plunger, which may be mixed, can be sequentially discharged to the outside from the recess, the communication hole, and the drain hole. As a result, particles in the cylinder are not mixed in the transport fluid, and the fluid is transported while maintaining the predetermined purity.
In particular, since the plunger pump communicates the recess and the drain hole with a radial communication hole, the fluid mixed with particles can be quickly and reliably discharged to the drain hole, and the particle to the fluid can be discharged. Mixing can be more reliably prevented.
Further, since the annular recess 4a and the inside of the suction chamber S are communicated with each other by the small annular gap G, particles generated in the sliding portion between the cylinder 1 and the plunger 4 flow into the suction chamber S. This makes it more difficult to prevent particles from being mixed into ultrapure water.
Further, in this plunger pump, the fluid containing particles is discharged to the outside by using the pressure in the cylinder in the discharge process of the plunger, so that the plunger pump is different from the conventional plunger pump described at the beginning. This eliminates the need for a sub-pump or the like, thereby simplifying the structure and reducing the cost, and reducing the installation space.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a plunger pump according to an embodiment of the present invention.
FIG. 2 is an enlarged longitudinal sectional view of a main part of the plunger pump.
FIG. 3 is a sectional view taken along line AA of FIG. 2;
FIG. 4 is a schematic longitudinal sectional view of a conventional plunger pump.
[Explanation of symbols]
1 is a cylinder, 1a is a suction port, 1b is a discharge port, 2 is a suction valve, 3 is a discharge valve, 4 is a plunger, 4a is a recess, 4b is a drain hole, 4c is a communication hole, and S is a suction chamber.

Claims (1)

  1. A cylinder (1) having a suction port (1a) and a discharge port (1b), a suction valve (2) provided at the suction port (1a), and a discharge valve (3) provided at the discharge port (1b); The fluid reciprocates in the cylinder (1) to suck the fluid from the suction port (1a) into the suction chamber (S) formed between the cylinder (1) and the tip of the plunger (4), and discharges the fluid ( 1b), the plunger pump is provided with a plunger (4) discharged from the plunger (4). 4a) The outer diameter of the tip of the plunger (4) below the tip is slightly smaller than the inner diameter of the cylinder (1), and between the outer peripheral surface of the tip of the plunger (4) and the inner peripheral surface of the cylinder (1). A small gap (G) is formed, and the suction chamber (S) and the annular recess are formed through the gap (G). 4a) and is direct and further with connecting the base end portion side to form a discharge water holes (4b) in the axial direction on the plunger (4) in the drainage pipe, the distal end portion of the plunger (4) A plurality of communication holes (4c) communicating radially between the distal end of the drain hole (4b) and the annular recess (4a).
JP03047995A 1995-02-20 1995-02-20 Plunger pump Expired - Lifetime JP3576245B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03047995A JP3576245B2 (en) 1995-02-20 1995-02-20 Plunger pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03047995A JP3576245B2 (en) 1995-02-20 1995-02-20 Plunger pump

Publications (2)

Publication Number Publication Date
JPH08226378A JPH08226378A (en) 1996-09-03
JP3576245B2 true JP3576245B2 (en) 2004-10-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP03047995A Expired - Lifetime JP3576245B2 (en) 1995-02-20 1995-02-20 Plunger pump

Country Status (1)

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100394023C (en) * 2006-08-07 2008-06-11 华中科技大学 Radial valve orificing axial hydraulic pressure plunger pump
JP5107651B2 (en) * 2007-10-02 2012-12-26 タクボエンジニアリング株式会社 Syringe for paint supply
TWI470152B (en) * 2011-09-29 2015-01-21 Kun Wang Wang Pumping device for sucking or draining fluid
CN106194710B (en) * 2016-08-29 2018-01-05 重庆水泵厂有限责任公司 Membrane pump multifunctional exhaust valve

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