JP3519278B2 - LASER PROCESSING METHOD, LASER PROCESSING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM FOR EXECUTING THE METHOD - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing method, a laser processing apparatus, and a computer-readable recording medium in which a program for executing the method is recorded, and more particularly, a laser beam is applied to a workpiece by a galvanometer scanner. Laser processing method for performing processing by aligning each predetermined position by repeatedly moving and stationary for a large number of predetermined positions, a laser processing apparatus, and a computer-readable program recording a program for executing the method. Recording medium.

[0002]

2. Description of the Related Art Conventionally, a galvanometer scanner is generally used as a laser beam alignment means in a laser processing apparatus for processing a laser beam on a large number of predetermined positions on a workpiece.

FIG. 10 shows an example of a block diagram of a conventional laser processing apparatus. This laser processing apparatus 300 uses a galvanometer scanner for two axes of an X axis and a Y axis so that the laser beam can be processed on a plane of a workpiece H. It is configured so that the laser beam can be irradiated to a predetermined position. In the figure, the data conversion unit 50 of the computer 41 converts position coordinates 101 of a predetermined position on the workpiece H into command coordinates 102 of the galvanometer scanner. Based on the command coordinates 102, the command data generator 51 generates command data that moves between the command coordinates at the scanning speed V ′ and remains stationary for the settling time Ts. The scanning speed V ′ and the settling time Ts are preset by the command data generator 51 of the computer 41, and the scanning time Tm is determined according to the distance between the command coordinates.

The interface 24 sends this command data to the X-axis D / A converter 25 and the Y-axis D / A converter 26. The X-axis D / A converter 25 converts the command data into an X command signal 201 that is an analog voltage and sends it to the X-axis scanner drive circuit 27. The Y-axis D / A converter 26 converts the command data into the Y command signal 2 which is an analog voltage.
It is converted to 02 and sent to the Y-axis scanner drive circuit 28.

Next, the X-axis scanner drive circuit 27
Converts the X command signal 201 into an X drive current and sends it to the X galvanometer scanner 11, and the Y-axis scanner drive circuit 28 converts the Y command signal 202 into a Y drive current and sends it to the Y galvanometer scanner 12. The X galvanometer scanner 11 rotates the X rotation shaft 13 by the X drive current, and thereby the scan mirror 15 attached to the tip of the X rotation shaft 13 rotates. The Y galvanometer scanner 12 rotates the Y rotary shaft 14 by the Y drive current,
As a result, the scan mirror 16 attached to the tip of the Y rotation shaft 14 rotates.

Further, the computer 41 outputs a laser oscillation trigger signal 203 synchronized with the X command signal 201 and the Y command signal 202 to the laser oscillator 2 via the interface 24. When the laser oscillator 2 receives the laser oscillation trigger signal 203, the laser beam L
To irradiate the scan mirror 16. As a result, the laser beam L is applied to a predetermined position on the workpiece H that is determined by the angles of the scan mirrors 16 and 15, and laser processing is performed.

FIG. 11 shows an X command signal 201 which is an analog voltage sent from the X-axis D / A converter 25. The operation cycle T of one movement of the X command signal 201 is set to the scanning time Tm. It becomes the sum of time Ts, and its operation cycle T
The reciprocal 1 / T of 1 corresponds to the operating frequency f of the X galvanometer scanner 11. In the latter half of the settling time Ts, the laser oscillation trigger signal 203 is emitted at a timing with which the laser beam is aligned with sufficient accuracy, so that the laser beam is irradiated to a predetermined position and processing is performed.

The same applies to the case of the Y command signal 202, and a description thereof will be omitted. As described above, since the scanning time Tm is determined according to the distance between the command coordinates, the operating frequency f of the galvanometer scanner changes depending on the distance from one predetermined position to the next predetermined position.

FIG. 12 shows frequency characteristics of the galvanometer scanner. The galvanometer scanner has an inherent resonance frequency f _{0 due} to its structure. When the operating frequency f of the galvanometer scanner is within the resonance frequency band Delta] f ₀ near ₀ the resonance frequency f, scan mirror uncontrollable vibration to the rotary shaft resonates galvanometer scanner is generated, attached to the rotary shaft Since the camera shakes, it becomes impossible to accurately irradiate the predetermined position with the laser beam.

Further, there are various ways of arranging the predetermined position, and the operating frequency f of the galvanometer scanner changes according to the distance between the command coordinates, so that the operating frequency f is just within the resonance frequency band Δf ₀ . It may end up.
In order to avoid this, in the conventional laser processing device 300,
The scanning speed V'is set to be slow so that the operating frequency f does not fall within the resonance frequency band Δf ₀ , and the machining position accuracy is ensured.

[0011]

In the conventional laser processing apparatus 300, since the scanning speed is set to be slow, the time required for aligning the laser beam at a predetermined position becomes long and the workpiece to be processed becomes long. There has been a problem that productivity is lowered when the above-mentioned many predetermined positions are sequentially processed.

The present invention has been made in view of the above, and a laser processing method capable of setting the scanning speed to a high speed without worrying about the resonance of the galvanometer scanner, and the laser processing method thereof. It is an object of the present invention to obtain a computer-readable recording medium in which a program for executing the laser processing method and a laser processing apparatus capable of suitably implementing the above are recorded.

[0013]

In order to achieve the above object, in the laser processing method according to the present invention, a laser beam is sequentially moved by a galvanometer scanner to a number of predetermined positions on a workpiece. , In the laser processing method in which processing is performed by aligning each predetermined position by repeating stationary, the operating frequency of the galvanometer scanner calculated from the moving time and settling time of the laser beam falls within the resonance frequency band specific to the galvanometer scanner. In this case, the settling time at the predetermined position is adjusted so that the operating frequency at the predetermined position does not fall within the resonance frequency band.

In the laser processing method according to the present invention, the settling time is adjusted (eg, slowed) when the operating frequency of the galvanometer scanner falls within the resonance frequency band, so that the galvanometer scanner does not resonate.

In the laser processing method according to the next invention, the laser beam is aligned with each predetermined position by sequentially moving and stopping the laser beam with respect to a large number of predetermined positions on the workpiece by the galvanometer scanner. In the laser processing method to be performed, when the operating frequency of the galvanometer scanner calculated from the moving time of the laser beam and the settling time sequentially falls within the resonance frequency band specific to the galvanometer scanner at the three predetermined positions, So that the operating frequency of does not fall within the resonance frequency band
The settling time at the th predetermined position is adjusted.

In the laser processing method according to the present invention, since the settling time at the third predetermined position is adjusted (eg, slowed) when the operating frequencies at the three predetermined positions sequentially fall within the resonance frequency band, the galvanometer is used. Scanner no longer resonates. As a result of research conducted by the present inventor, it has been clarified that the galvanometer scanner does not vibrate unless the operating frequency of the galvanometer scanner continuously falls within the resonance frequency band three times or more.

In the laser processing method according to the next invention, the laser beam is sequentially moved and stopped at a plurality of predetermined positions on the workpiece by the galvanometer scanner so that the laser beam is aligned with each predetermined position for processing. In the laser processing method to be performed, the rotation angle of the galvanometer mirror of the galvanometer scanner is detected, and the settling time at the predetermined position is extended until the position deviation signal becomes less than a preset deviation amount.

In the laser processing method according to the present invention, the settling time is delayed until the position deviation signal becomes less than the preset deviation amount. Therefore, even if the galvanometer scanner resonates, the laser processing is performed when the vibration is small. Will be possible.

Further, in order to achieve the above object, the laser processing apparatus according to the present invention sequentially moves and stops the laser beam with respect to a large number of predetermined positions on the workpiece by the galvanometer scanner. In a laser processing apparatus that performs processing by aligning at a predetermined position, an operating frequency calculating means for calculating an operating frequency of a galvanometer scanner from a moving time and a settling time of a laser beam, and the operating frequency within a resonance frequency band specific to the galvanometer scanner. And a time adjusting means for adjusting the settling time at the predetermined position so that the operating frequency at the predetermined position does not fall within the resonance frequency band.

In the laser processing apparatus according to the present invention, the time adjusting means adjusts (eg, delays) the settling time when the operating frequency of the galvanometer scanner falls within the resonance frequency band, so that the galvanometer scanner does not resonate.

In the laser processing apparatus according to the next invention, the laser beam is sequentially moved and stopped at a large number of predetermined positions on the workpiece by the galvanometer scanner, and the laser beam is aligned to each predetermined position for processing. In the laser processing apparatus to perform, operating frequency calculating means for calculating the operating frequency of the galvanometer scanner from the movement time and settling time of the laser beam, and when the operating frequency falls within the resonance frequency band specific to the galvanometer scanner, at the predetermined position A time adjusting means for adjusting the settling time at the predetermined position so that the operating frequency does not fall within the resonance frequency band.

In the laser processing apparatus according to the present invention, the time adjusting means adjusts (eg, delays) the settling time at the third predetermined position when the operating frequencies at the three predetermined positions sequentially fall within the resonance frequency band. Therefore, the galvanometer scanner does not resonate.

In the laser processing apparatus according to the next invention, the laser beam is sequentially moved and stopped with respect to a large number of predetermined positions on the workpiece by the galvanometer scanner so that the laser beam is aligned with each predetermined position for processing. In the laser processing apparatus, the angle detecting means for detecting the rotation angle of the galvanometer mirror of the galvanometer scanner, the position deviation calculating means for obtaining the position deviation signal at each predetermined position based on the command signal and the rotation angle, and the position deviation. And a time adjusting means for extending the settling time at the predetermined position until the signal becomes less than a preset deviation amount.

In the laser adding apparatus according to the present invention, the time adjusting means delays the settling time until the position deviation signal becomes less than the preset deviation amount. Therefore, even if the galvanometer scanner resonates, its vibration is small. A laser beam is generated.

In order to achieve the above object, the recording medium according to the present invention records a program for executing the above laser processing method on a computer.

With the recording medium of the present invention, the laser processing method of the present invention can be easily executed using a computer.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a laser processing method, a laser processing apparatus, and a computer-readable recording medium recording a program for executing the method according to the present invention will be described below with reference to the drawings. The details will be described. In the embodiments of the present invention described below, parts having the same configurations as those of the above-described conventional example are designated by the same reference numerals as those of the above-described conventional example, and description thereof will be omitted.

Embodiment 1. FIG. 1 shows a block diagram of a laser processing apparatus according to Embodiment 1 of the present invention. The laser processing apparatus 100 is configured to be capable of irradiating a laser beam on an arbitrary predetermined position on the plane of the workpiece H by using a galvanometer scanner for two axes of X axis and Y axis.

In this laser processing apparatus 100, the data conversion section 50 of the computer 21 converts the position coordinates (X, Y) of a predetermined position on the workpiece H into command coordinates (x, y) of the galvanometer scanner. Command data generator 51
Generates command data that moves between the command coordinates at the scanning speed V (faster than the conventional scanning speed V ′) and stands still for the settling time Ts based on the command coordinates 101. The scanning speed V and the settling time Ts are preset by the command data generator 51 of the computer 21, and the scanning time Tm is determined according to the distance between the command coordinates.

The settling time adjusting unit 52 operates at an operating frequency f (scanning time Tm) of the galvanometer scanner at a predetermined position.
When the reciprocal 1 / T of the operating period T that results in the settling time T s falls within the resonance frequency band Δf ₀ peculiar to the galvanometer scanner, the operating frequency f is deviated from the resonance frequency band Δf ₀ at the predetermined position. The settling time Ts of is adjusted.

The interface 24 sends this command data to the X-axis D / A converter 25 and the Y-axis D / A converter 26. The X-axis D / A converter 25 converts the command data into an X command signal 201 that is an analog voltage and sends it to the X-axis scanner drive circuit 27. The Y-axis D / A converter 26 converts the command data into the Y command signal 2 which is an analog voltage.
It is converted to 02 and sent to the Y-axis scanner drive circuit 28.

The X-axis scanner drive circuit 27 converts the X command signal 201 into an X drive current and sends it to the X galvanometer scanner 11. Scanner drive circuit for Y-axis 28
Converts the Y command signal 202 into a Y drive current and sends it to the Y galvanometer scanner 12. The X galvanometer scanner 11 rotates the X rotary shaft 13 by the X drive current,
As a result, the scan mirror 15 attached to the tip of the X rotation shaft 13 rotates. Y galvanometer scanner 1
2 rotates the Y rotary shaft 14 by the Y drive current, and the scan mirror 16 attached to the tip of the Y rotary shaft 14 rotates.

Further, the computer 21 outputs a laser oscillation trigger signal 203 synchronized with the X command signal 201 and the Y command signal 202 to the laser oscillator 2 via the interface 24. When the laser oscillator 2 receives the laser oscillation trigger signal 203, the laser beam L
To irradiate the scan mirror 16. As a result, the laser beam L is applied to a predetermined position on the workpiece H that is determined by the angles of the scan mirrors 16 and 15, and laser processing is performed.

Next, the operation of the laser processing apparatus 100 will be described with reference to the flowcharts of FIGS. 2 and 3. In step S1, the coordinates x ₀ = 0, y ₀ = 0, the predetermined position counter i = 1, and the counter n = 0 are set.

At step S2, the coordinates x _i ,
Read y _i . In step S3, X is calculated based on the following equation.
The movement amount Δx in the axial direction and the movement amount Δy in the Y-axis direction are calculated. Δx = x _i −x ₀ Δy = y _i −y ₀

In step S4, the scanning time Tmx in the X-axis direction and the scanning time Tmy in the Y-axis direction are calculated based on the following equations. Tmx = Δx / V Tmy = Δy / V

At step S5, Tmx + Ts and T
my + Ts is obtained, and the larger value is determined as the operation cycle T. In step S6, the operating frequency f (= 1 / T) is obtained from the operating cycle T.

In step S7, it is determined whether the operating frequency f falls within the resonance frequency band Δf ₀ peculiar to the galvanometer scanner. The operating frequency f is the resonance frequency band Δf
If it does not fall within ₀ , the process proceeds to step S8 and the operating frequency f
Is within the resonance frequency band Δf ₀ , step S10
move on.

In step S8, the counter n = 0 is set, and in the next step S9, the settling time Ts' is set as the settling time Ts set in the command data generator 51, and the process proceeds to step S14 in FIG.

In step S10, the counter n is incremented. In step S11, it is determined whether the counter n = 3. If the counter n = 3 is not satisfied, the process proceeds to step S9. If the counter n = 3, the process proceeds to step S12. In step S12, it is assumed that the settling time Ts ′ is the settling time Ts plus the extension time ΔTs. In step S13, the counter n = 0 is set and the process proceeds to step S14 in FIG.

In step S14, the interface 2
4 outputs the X command signal 201 and the Y command signal 202 as the settling time Ts ′, and the laser oscillator 2 outputs the laser oscillation trigger signal 203 from the interface 24.
To oscillate the laser beam L. Step S15
Then, the laser processing is performed by aligning with the coordinates x _i and y _i of the predetermined position.

In step S16, the predetermined position counter i
It is equal to or has reached the M. When the predetermined position counter i reaches M, the operation ends. If the predetermined position counter i has not reached M, the process proceeds to step S17. In addition, M
Is the number of predetermined positions, and when the predetermined position counter i reaches M, it means that the laser processing is completed for all the predetermined positions.

In step S17, the settling time Ts' is set to the settling time Ts. In step S18, the coordinates x ₀ , y ₀ are updated. In step S19, the predetermined position counter i is incremented and the operation is returned to step S2 in FIG. As a result, the operation from step S2 to step S19 is repeated for each predetermined position.

As a result of the research conducted by the inventor of the present invention, it was found that the galvanometer scanner does not vibrate unless the operating frequency of the galvanometer scanner falls within the resonance frequency band three times or more consecutively. Based on this, step S7 to step 13 will be described in detail. When it is determined in step S7 that the operating frequency f does not fall within the resonance frequency band Δf ₀ , when the process reaches step S14 in FIG. 3, the counter n is initialized to zero (step S
8) The settling time Ts' becomes the settling time Ts (step S9).

When it is determined in step S7 that the operating frequency f falls within the resonance frequency band Δf ₀ , the counter n is increased (step S10), and the counter n is incremented in step S11.
Even when it is determined that ≠ 3, the settling time Ts ′ becomes the settling time Ts as in the above. However, when it is determined in step S11 that the counter n = 3, when step S14 in FIG. 3 is reached, the settling time Ts ′ is the settling time Ts plus the extension time ΔTs (step S1
2), the counter n is initialized to zero (step S1)
3).

That is, steps S7 to S11
Then, as shown in FIG. 4, the operating frequency f at three consecutive predetermined positions Ai, Ai + 1, Ai + 2 on the movement route
It is checked whether i, fi + 1, fi + 2 are within the resonance frequency band Δf ₀ .
As shown in, the settling time of the third predetermined position Ai + 2 is lengthened by the extension time ΔTs. The oscillation of the laser oscillation trigger signal 203 is also delayed by the extension time ΔTs. Figure 5
Tmi, Tmi + 1, and Tmi + 2 in the middle are predetermined positions A
Scanning time at i, Ai + 1, Ai + 2.

On the other hand, the operating frequency f is the resonance frequency band Δf.
_{If the} number of times of entering within ₀ (the number of predetermined positions) is less than 2, the settling time is the settling time Ts.

Next, a method of calculating the extension time ΔTs will be described with reference to FIG. When the lower limit frequency of the resonance frequency band Δf ₀ is fl and the upper limit frequency is fh, the extension time ΔTs
Can be calculated as follows. ΔTs = (fl−fh) / (fh × fl) (or ΔTs = 1 / (f−fl))

When the extension time ΔTs is obtained in this way, when the settling time Ts ′ = Ts + ΔTs is set, the new operating frequency f ′ (= 1 / Ts ′) becomes the resonance frequency band Δ.
It does not fall within f ₀ . Therefore, even if the operating frequency of the galvanometer scanner falls within the resonance frequency band due to the arrangement of the predetermined position, the operating frequency is adjusted outside the resonance frequency band before the galvanometer scanner rotation axis vibrates due to resonance. Therefore, the vibration of the rotary shaft due to resonance is suppressed, and the reduction of the processing speed is minimized.

In the laser processing apparatus 100, the settling time adjusting unit 52 causes the operating frequency to resonate for the settling time at the third predetermined position when the operating frequencies at the three predetermined positions sequentially fall within the resonance frequency band. The galvanometer scanner does not resonate because it is extended so that it does not enter the frequency band. As described above, since it is not necessary to care about the resonance of the galvanometer scanner, the scanning speed of the galvanometer scanner can be set to a high speed, and highly accurate alignment can be performed at a high speed, thus improving the productivity.

In the first embodiment described above, when the operating frequencies at the three predetermined positions sequentially fall within the resonance frequency band, three
Although the settling time at the second predetermined position is adjusted, the settling time at all the predetermined positions where the operating frequency falls within the resonance frequency band may be adjusted.

Further, in the above-mentioned first embodiment, when the settling time is adjusted, it is explained that the settling time Ts '= Ts + ΔTs is delayed, but the settling time Ts' = Ts-.
You may make it short like (DELTA) Ts. The extension time ΔTs in this case is ΔTs = (fl−fh) / (fh × fl) (or ΔTs = 1 / (fh−f) (see FIG. 6).

Embodiment 2. FIG. 7 shows a block diagram of a laser processing apparatus according to Embodiment 2 of the present invention. The laser processing apparatus 200 includes a computer 21, a D / A converter 25, an A / D converter 30, a scanner drive circuit 27, a galvanometer scanner 11, a rotary shaft 13 and a rotary shaft 13.
And a scan mirror 15. The galvanometer scanner 11 has a built-in angle detector 11 a that detects the rotation angle of the rotation shaft 13.

The computer 21 sends the command data to the D / A.
Send to the converter 25. The D / A converter 25 converts the command data into a command signal 201 which is an analog voltage and sends it to the scanner drive circuit 27. Scanner drive circuit 27
Converts the command signal 201 into a drive current and sends it to the galvanometer scanner 11. Galvanometer scanner 11
Rotates the rotating shaft 13 by the drive current. As a result, the scan mirror 15 attached to the tip of the rotary shaft 13 rotates.

Further, the computer 21 uses the command signal 20
A laser oscillation trigger signal synchronized with 1 is output to a laser oscillator (not shown). When receiving the laser oscillation trigger signal, the laser oscillator oscillates a laser beam to irradiate the scan mirror 15. As a result, the laser beam is applied to a predetermined position on the workpiece determined by the angle of the scan mirror 15 to perform laser processing.

The angle detector 11a of the galvanometer scanner 11 detects the rotation angle of the rotary shaft 13 and sends it to the scanner drive circuit 27. The scanner drive circuit 27
From the difference between the command signal 201 and the rotation angle of the rotary shaft 13, a position deviation signal 206 corresponding to the deviation with respect to a predetermined position on the workpiece is taken out and sent to the computer 21 via the A / D converter 30.

When the operating frequency f becomes equal to the resonance frequency f ₀ and the galvanometer scanner 11 resonates,
Due to the vibration, the position deviation signal 206 gradually becomes oscillatory as shown in FIG. For this reason, a large position deviation occurs (galvanometer scanner 11
Since the laser oscillation trigger signal is generated at the timing, the processing position accuracy deteriorates. Therefore, in the second embodiment, the deviation amount ΔX is set in the computer 21 in advance, and when the position deviation signal 206 is equal to or larger than the deviation amount ΔX, the settling time Ts at the predetermined position is adjusted.

FIG. 8 shows a flowchart of the operation of the laser processing apparatus 200. In step S31, the predetermined position counter i = 1. In step S32, the computer 21 outputs the command data, the D / A converter 25 outputs the command signal 201, the scan drive circuit 27 outputs the drive current, and the galvanometer scanner 11 outputs the rotary shaft 1
Rotate 3. In step S33, the angle detector 11a of the galvanometer scanner 11 detects the rotation angle of the rotary shaft 13, and the scanner drive circuit 27 outputs the command signal 20.
A position deviation signal 206 corresponding to a deviation with respect to a predetermined position on the workpiece is taken out from the difference between 1 and the rotation angle of the rotary shaft 13 and sent to the computer 21 via the A / D converter 30.

In step S34, the computer 21
Determines whether the position deviation signal 206 is less than the deviation amount ΔX. If the position deviation signal 206 is less than the deviation amount ΔX, the process proceeds to step S36. If the position deviation signal 206 is not less than the deviation amount ΔX, the process proceeds to step S35. In step S35, the settling time Ts is slightly delayed and the process returns to step S33. As a result, steps S33 to S35 are repeated until the position deviation signal 206 becomes less than the deviation amount ΔX.

Thus, in step S35, the settling time T
galvanometer scanner 11 by slowing s
Even if the position deviation signal 206 becomes oscillatory due to the vibration due to the resonance of the position deviation signal 206, as shown in FIG.
The laser oscillation trigger signal is generated at the timing when 6 becomes less than the deviation amount ΔX (the vibration of the galvanometer scanner 11 is small). T'in the figure is an operation cycle after adjustment of the settling time Ts.

In step S36, the computer 21 outputs a laser oscillation trigger signal synchronized with the command signal 201 to the laser oscillator. In step S37, the laser oscillator oscillates a laser beam to irradiate the scan mirror 15 and performs laser processing at a predetermined position on the workpiece determined by the angle of the scan mirror 15.

In step S38, the predetermined position counter i
It is equal to or has reached the M. When the predetermined position counter i reaches M, the operation ends. If the predetermined position counter i has not reached M, the process proceeds to step S39. In addition, M
Is the number of predetermined positions, and when the predetermined position counter i reaches M, it means that the laser processing is completed for all the predetermined positions. In step S39, the adjusted settling time T
s to return to the original. In step S40, the predetermined position counter i is incremented and the operation is returned to step S32. As a result, the operation from step S32 to step S40 is repeated for each predetermined position.

In the laser processing apparatus 200, the computer delays the settling time until the position deviation signal 206 becomes less than the deviation amount ΔX. Therefore, even if the galvanometer scanner resonates, laser processing is performed when the vibration is small. As described above, even if the galvanometer scanner resonates, it is less affected by the vibration, so that the scanning speed can be set to a high speed, and highly accurate alignment can be performed at a high speed, so that the productivity is improved. .

[0064]

As can be understood from the above description, according to the laser processing method of the present invention, when the operating frequency of the galvanometer scanner falls within the resonance frequency band, the settling time is adjusted (for example, slowed) so that the galvanometer scanner is adjusted. Since it can be prevented from resonating, the scanning time can be set at a high speed, and highly accurate alignment can be performed at a high speed, thus improving the productivity.

According to the laser processing method of the next invention, when the operating frequencies at the three predetermined positions sequentially fall within the resonance frequency band, the galvanometer is adjusted by adjusting (eg, slowing) the settling time at the third predetermined position. Since it is possible to prevent the scanner from resonating, the scanning time can be set at a high speed, and highly accurate alignment can be performed at a high speed, thus improving the productivity. Further, since the settling time of all the predetermined positions where the operating frequency falls within the resonance frequency band is not adjusted, it is possible to minimize the extension of the processing time.

According to the laser processing method of the following invention, the laser processing is performed when the galvanometer scanner resonates even when the vibration is small by delaying the settling time until the position deviation signal becomes less than the preset deviation amount. since it is possible, to set the scan time at high speed
Since it is possible to perform high-accuracy alignment at high speed, productivity is improved.

According to the laser adding device of the next invention,
When the operating frequency of the galvanometer scanner falls within the resonance frequency band, the settling time can be adjusted (for example, slow) to prevent the galvanometer scanner from resonating, so that the scanning time can be set to high speed. Since highly accurate alignment can be performed at high speed, productivity is improved.

According to the laser processing apparatus of the next invention, the galvanometer is adjusted by adjusting (eg, delaying) the settling time at the third predetermined position when the operating frequencies at the three predetermined positions sequentially fall within the resonance frequency band. Since it is possible to prevent the scanner from resonating, the scanning time can be set at a high speed, and highly accurate alignment can be performed at a high speed, thus improving the productivity. Further, since the settling time of all the predetermined positions where the operating frequency falls within the resonance frequency band is not adjusted, it is possible to minimize the extension of the processing time.

According to the laser processing apparatus of the next invention, the laser processing is performed when the galvanometer scanner resonates even when the vibration is small by delaying the settling time until the position deviation signal becomes less than the preset deviation amount. since it is possible, to set the scan time at high speed
Since it is possible to perform high-accuracy alignment at high speed, productivity is improved.

According to the computer-readable recording medium of the following invention, the laser processing method of this invention can be easily executed by using a computer.

[Brief description of drawings]

FIG. 1 is a block diagram showing a schematic configuration of a laser processing apparatus according to a first embodiment.

FIG. 2 is a flowchart showing an operation of the laser processing apparatus shown in FIG.

FIG. 3 is a flowchart showing an operation of the laser processing apparatus shown in FIG.

FIG. 4 is an explanatory diagram showing continuous predetermined positions according to the first embodiment.

FIG. 5 is an explanatory diagram showing an example of a command signal according to the present invention.

FIG. 6 is an explanatory diagram showing a method of calculating an extension time according to the first embodiment.

FIG. 7 is a block diagram showing a schematic configuration of a laser processing device according to a second embodiment.

8 is a flowchart showing an operation of the laser processing apparatus shown in FIG.

FIG. 9 is an explanatory diagram showing an example of a position deviation signal according to the second embodiment.

FIG. 10 is a block diagram showing a schematic configuration of a conventional laser processing apparatus.

FIG. 11 is an explanatory diagram showing an example of a conventional command signal.

FIG. 12 is an explanatory diagram showing frequency characteristics of the galvanometer scanner.

[Explanation of reference numerals] 100 laser processing device, 21 computer, 52
Settling time adjustment unit, 25, 26 D / A converter, 27, 2
8 scan drive circuit, 11 and 12 galvanometer scanner, 13 and 14 rotation axis, 15 and 16 scan mirror, H work piece.

Claims (7)

(57) [Claims] 1. A laser processing method for performing processing by aligning each laser beam to a predetermined number of predetermined positions by a galvanometer scanner by sequentially moving and stopping the laser beam at each predetermined position. When the operating frequency of the galvanometer scanner calculated from the movement time and settling time of the galvanometer scanner falls within the resonance frequency band peculiar to the galvanometer scanner, the operating frequency at that predetermined position should be adjusted so that it does not fall within the resonance frequency band. A laser processing method characterized by adjusting the set time in. 2. A laser processing method in which a laser beam is moved to a plurality of predetermined positions on a workpiece by a galvanometer scanner, and the laser beam is aligned to each predetermined position by repeating the stationary process to perform processing. When the operating frequency of the galvanometer scanner, which is calculated from the moving time and the settling time of the galvanometer scanner, sequentially falls within the resonance frequency band specific to the galvanometer scanner at three predetermined positions, the operating frequency at the third predetermined position falls within the resonance frequency band. The laser processing method is characterized in that the set time at the third predetermined position is adjusted so as not to fall into the range. 3. A laser processing method in which a laser beam is moved to a plurality of predetermined positions on a workpiece by a galvanometer scanner, and the laser beam is aligned at each predetermined position by repeating the movement to stop the laser beam. Detecting the rotation angle of the galvanometer mirror, obtain a position deviation signal at a predetermined position based on the command signal and the rotation angle, and settling time at the predetermined position until the position deviation signal becomes less than a preset deviation amount. A laser processing method, characterized in that 4. A laser processing apparatus for performing processing by aligning each laser beam to a predetermined number of predetermined positions on a workpiece by a galvanometer scanner and repeating the movement and stopping at each predetermined position. Operating frequency calculation means for calculating the operating frequency of the galvanometer scanner from the moving time and settling time of the galvanometer scanner; and when the operating frequency falls within the resonance frequency band specific to the galvanometer scanner, the operating frequency at the predetermined position is within the resonance frequency band. A laser processing apparatus comprising: a time adjusting unit that adjusts a settling time at a predetermined position so that the laser processing apparatus does not enter the position. 5. A laser processing apparatus for performing processing by aligning each laser beam to a predetermined number of predetermined positions by a galvanometer scanner by sequentially moving and stopping the laser beam at each predetermined position. Operating frequency calculating means for calculating the operating frequency of the galvanometer scanner from the movement time and settling time of the galvanometer scanner, and when the operating frequencies at the three predetermined positions sequentially fall within the resonance frequency band peculiar to the galvanometer scanner, at the third predetermined position. A laser processing apparatus comprising: a time adjusting unit that adjusts a settling time at a third predetermined position so that an operating frequency does not fall within the resonance frequency band. 6. A laser processing apparatus for positioning a laser beam to a plurality of predetermined positions on a workpiece by a galvanometer scanner and sequentially positioning the laser beam at each predetermined position to process the laser beam. Angle detecting means for detecting the rotation angle of the galvanometer mirror, position deviation calculating means for obtaining a position deviation signal at each predetermined position based on the command signal and the rotation angle, and the position deviation signal is less than a preset deviation amount. And a time adjusting means for extending the settling time at the predetermined position until it becomes 7. A computer-readable recording medium having recorded thereon a program for causing a computer to execute the laser processing method according to claim 1. Description: