JP3393664B2 - Nozzle body for cleaning workpieces such as IC molds - Google Patents

Nozzle body for cleaning workpieces such as IC molds

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Publication number
JP3393664B2
JP3393664B2 JP27622692A JP27622692A JP3393664B2 JP 3393664 B2 JP3393664 B2 JP 3393664B2 JP 27622692 A JP27622692 A JP 27622692A JP 27622692 A JP27622692 A JP 27622692A JP 3393664 B2 JP3393664 B2 JP 3393664B2
Authority
JP
Japan
Prior art keywords
space
nozzle
abrasive grains
pressurized water
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27622692A
Other languages
Japanese (ja)
Other versions
JPH06126628A (en
Inventor
亨 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Macoho Co Ltd
Original Assignee
Macoho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macoho Co Ltd filed Critical Macoho Co Ltd
Priority to JP27622692A priority Critical patent/JP3393664B2/en
Publication of JPH06126628A publication Critical patent/JPH06126628A/en
Application granted granted Critical
Publication of JP3393664B2 publication Critical patent/JP3393664B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ICモールド等のワー
クを洗浄する際に使用するICモールド等のワーク洗浄
用のノズル体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nozzle body for cleaning a work such as an IC mold used when cleaning a work such as an IC mold.

【0002】[0002]

【従来の技術】リードを外周縁に突出せしめたICパッ
ケージをフレーム内に並設して成るICモールドに、砥
粒を混入した加圧水を噴射し、ICモールド、特にリー
ドとICパッケージとの連設部を洗浄(バリを取る)す
るワーク洗浄装置が提案されている(このような洗浄方
法を一般にはウェットブラスト法,ショットブラスト法
という。)。
2. Description of the Related Art Pressurized water mixed with abrasive grains is jetted to an IC mold formed by arranging IC packages with leads protruding to the outer peripheral edge side by side in a frame, and the IC mold, particularly the leads and the IC package, are continuously installed. A work cleaning device for cleaning (burring) a part has been proposed (such a cleaning method is generally called a wet blast method or a shot blast method).

【0003】ところで、このような洗浄装置に使用する
ノズル即ち、砥粒を混入した加圧水を噴射せしめるノズ
ルは種々のタイプが提案されている。
By the way, various types of nozzles used in such a cleaning apparatus, that is, nozzles for injecting pressurized water mixed with abrasive grains have been proposed.

【0004】例えば、特開平4−82668号に開示さ
れているようなノズルが存在する。このノズルは、図1
に図示したように、先端にノズル部31を有するノズル管
35を設けた本体32内にエア供給管33を挿入し、一方本体
32の側部に砥粒を混入した加圧水を該本体32内に導入す
る導入管34を連設した構造で、導入管34から本体32内に
導入された砥粒を混入した加圧水は、エア供給管33から
の加圧エアにより加速されて本体32のノズル部31から噴
射され、この砥粒を混入した加圧水によりICモールド
の洗浄を行うものである。
For example, there is a nozzle as disclosed in JP-A-4-82668. This nozzle is
As shown in Fig. 3, a nozzle tube having a nozzle portion 31 at the tip.
Insert the air supply pipe 33 into the main body 32 provided with 35,
With a structure in which an introduction pipe 34 for introducing pressurized water mixed with abrasive grains into the main body 32 is connected to the side portion of 32, the pressurized water mixed with abrasive grains introduced into the main body 32 from the introduction pipe 34 is supplied by air. It is accelerated by pressurized air from the tube 33 and jetted from the nozzle portion 31 of the main body 32, and the IC mold is cleaned by pressurized water mixed with the abrasive grains.

【0005】[0005]

【発明が解決しようとする課題】出願人は種々検討した
ところ、この従来例には次の欠点があることを確認し
た。
As a result of various studies, the applicant has confirmed that this conventional example has the following drawbacks.

【0006】エア供給管33からのエアの導入と,導入管
34からの砥粒を混入した加圧水の導入とのバランスを良
好に保つことは非常に厄介で、該バランスが崩れ、ノズ
ル部31からの噴射がきれいな連続状態とならないことが
往々にして生ずる。即ち、ノズル部31からの噴射状態は
エア供給管33からのエア圧と導入管34からの該加圧水の
導入圧との双方の圧力に依存してしまう。従って、導入
管34からの導入圧が流通管33からのエア圧より高くなっ
て、多過の砥粒を混入した加圧水がノズル管35に導入さ
れると、所謂詰まった状態となり、ノズル管35からの噴
射が断続的になってしまう。この断続的噴射を防止する
にはノズル管35の基端とエア供給管33の先端との管が存
しない分断部aにおける圧力(エア供給管33からのエア
圧,導入管34からの導入圧・砥粒を混入した加圧水の導
入量)を適正に制御し、導入管34からノズル部31へ導入
される砥粒を混入した加圧水が多過の状態とならないよ
うに配慮しなければならない。ところが、該分断部aに
おける該圧力を適正に制御することは非常に難しいので
ある。
Introduction of air from the air supply pipe 33 and the introduction pipe
It is very difficult to maintain a good balance with the introduction of pressurized water mixed with abrasive grains from 34, and the balance is often broken, and the ejection from the nozzle part 31 often does not become a clean continuous state. That is, the injection state from the nozzle portion 31 depends on both the pressure of the air from the air supply pipe 33 and the pressure of the pressurized water introduced from the introduction pipe 34. Therefore, when the introduction pressure from the introduction pipe 34 becomes higher than the air pressure from the flow pipe 33 and the pressurized water mixed with excessive abrasive grains is introduced into the nozzle pipe 35, a so-called clogged state occurs, and the nozzle pipe 35 The injection from is intermittent. In order to prevent this intermittent injection, the pressure at the dividing portion a where the base end of the nozzle pipe 35 and the tip of the air supply pipe 33 do not exist (air pressure from the air supply pipe 33, introduction pressure from the introduction pipe 34). The amount of pressurized water mixed with abrasive grains) should be appropriately controlled so that the pressurized water mixed with abrasive grains introduced from the introduction pipe 34 to the nozzle portion 31 does not become excessive. However, it is very difficult to properly control the pressure at the dividing portion a.

【0007】尚、分断部aにおける圧力の制御が難しい
のは、エアがエア供給管33から噴射され、そのまま前記
砥粒を混入した加圧水とともにノズル部31から噴射され
る構成だからである。
The reason why it is difficult to control the pressure in the dividing portion a is that the air is jetted from the air supply pipe 33 and is jetted from the nozzle portion 31 together with the pressurized water containing the abrasive grains as it is.

【0008】本発明は、このような欠点を解決したIC
モールド等のワーク洗浄用のノズル体を提供することを
目的とするものである。
The present invention is an IC which solves such drawbacks.
It is an object to provide a nozzle body for cleaning a work such as a mold.

【0009】[0009]

【課題を解決するための手段】添付図面を参照して本発
明の要旨を説明する。
The gist of the present invention will be described with reference to the accompanying drawings.

【0010】砥粒を混入した加圧水をICモールド等の
ワークに噴射せしめて該ワークを洗浄する洗浄装置に付
設するノズル体1であって、内部を一定圧に保持せしめ
ることが可能な空間9を有する本体2を設け、この空間
9内に流通管3を設け、この流通管3の先端にノズル部
4を、基端に加圧エア供給部5を設け、該流通管3の空
間9内における所定位置に連通孔8を設け、空間9に砥
粒を混入した所定圧の加圧水を導入・導出する導入部6
及び導出部7を夫々設けて空間9内における該砥粒を混
入した加圧水の圧力を一定に保持せしめ、空間9内にお
ける一定圧に保持せしめられた該砥粒を混入した加圧水
を前記流通管3の連通孔8を介して該流通管3内に吸引
導入し得るように構成したことを特徴とするICモール
ド等のワーク洗浄用のノズル体に係るものである。
A nozzle body 1 attached to a cleaning device for spraying pressurized water mixed with abrasive grains onto a work such as an IC mold to clean the work, and a space 9 capable of holding the inside at a constant pressure. In the space 9 of the flow pipe 3, the main body 2 is provided, the flow pipe 3 is provided in the space 9, the nozzle part 4 is provided at the tip of the flow pipe 3, and the pressurized air supply part 5 is provided at the base end. Introducing portion 6 which is provided with a communication hole 8 at a predetermined position and introduces and draws out pressurized water of a predetermined pressure mixed with abrasive grains into space 9
And a lead-out portion 7 are provided to keep the pressure of the pressurized water mixed with the abrasive grains in the space 9 constant, and the pressurized water mixed with the abrasive grains kept at the constant pressure in the space 9 is used as the flow pipe 3 The present invention relates to a nozzle body for cleaning a work such as an IC mold, which is constructed so as to be sucked and introduced into the flow pipe 3 through the communication hole 8.

【0011】また、請求項1記載のICモールド等のワ
ーク洗浄用のノズル体において、導入部6から導入され
る砥粒を混入した加圧水は、一部が導出部7から導出さ
れ且つ一部が連通孔8を介して流通管3内に吸引導入さ
れることで減圧され、この減圧により空間9内における
該砥粒を混入した加圧水が一定の圧力に保持せしめられ
るように設定されていることを特徴とするICモールド
等のワーク洗浄用のノズル体に係るものである。
Further, in the nozzle body for cleaning a work such as an IC mold according to claim 1, a part of the pressurized water mixed with the abrasive grains introduced from the introduction part 6 is led out from the lead-out part 7 and a part thereof. It is decompressed by being sucked and introduced into the flow pipe 3 through the communication hole 8, and the depressurized water containing the abrasive grains in the space 9 is set to be kept at a constant pressure. The present invention relates to a characteristic nozzle body for cleaning a work such as an IC mold.

【0012】また、請求項1,2いずれか1項に記載の
ICモールド等のワーク洗浄用のノズル体において、本
体2の先端にはノズル管10が前記空間9と連通する状態
で装着され、このノズル管10の基端には中空管11が連通
連設され、この中空管11の基端が本体2の基端部に連設
され、この本体2の基端部は加圧エア供給部5と連設さ
れ、前記中空管11に連通孔8が穿設されていることを特
徴とするICモールド等のワーク洗浄用のノズル体に係
るものである。
Further, in the nozzle body for cleaning a work such as an IC mold according to any one of claims 1 and 2, a nozzle tube 10 is attached to the tip of the main body 2 in a state of communicating with the space 9. A hollow pipe 11 is continuously connected to the base end of the nozzle pipe 10, the base end of the hollow pipe 11 is connected to the base end of the main body 2, and the base end of the main body 2 is pressurized air. The present invention relates to a nozzle body for cleaning a work such as an IC mold, which is connected to the supply unit 5 and has a communication hole 8 formed in the hollow tube 11.

【0013】[0013]

【作用】導入部6及び導出部7により本体2の空間9内
は、砥粒を混入した加圧水が一定圧で保持されており、
流通管3内を通過するエアの吸引力により本体2内の砥
粒を混入した一定圧の加圧水は連通孔8を介して流通管
3内に吸引・導入される為、ノズル部4からの噴射は断
続的とはならない。
The pressurized water mixed with abrasive grains is held at a constant pressure in the space 9 of the main body 2 by the introduction section 6 and the derivation section 7.
Pressurized water of a constant pressure mixed with abrasive grains in the main body 2 is sucked and introduced into the flow pipe 3 through the communication hole 8 by the suction force of the air passing through the flow pipe 3, and thus is jetted from the nozzle portion 4. Is not intermittent.

【0014】即ち、従来例と異なり、導入部6及び導出
部7の存在により、所定圧にバランス良く保持された空
間9内の砥粒が混入された加圧水が連通孔8から吸引さ
れる構成であるから、噴射は断続的とはならない。
That is, unlike the conventional example, due to the existence of the introduction part 6 and the extraction part 7, the pressurized water mixed with the abrasive grains in the space 9 held at a predetermined pressure in good balance is sucked from the communication hole 8. As such, the injections will not be intermittent.

【0015】[0015]

【実施例】図面は本発明の一実施例を図示したもので、
以下に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The drawings show one embodiment of the present invention.
This will be described below.

【0016】ノズル部4を先端に設けたノズル管10(内
径約1mm)を、内部に空間9を設けた本体2の先端に該
空間9と連通する状態で装着し、このノズル管10の基端
に中管11(内径約1mm)を連通連設し、この中管11の基
端を本体2の基端部に連設する。この本体2の基端部は
ポート12を介して加圧エア供給部5と連設される。
A nozzle tube 10 (inner diameter of about 1 mm) provided with a nozzle portion 4 at its tip is attached to the tip of a main body 2 having a space 9 therein so as to communicate with the space 9, and the base of this nozzle tube 10 is attached. A middle pipe 11 (inner diameter of about 1 mm) is continuously provided at the end, and the base end of the middle pipe 11 is continuously provided at the base end of the main body 2. The base end portion of the main body 2 is connected to the pressurized air supply portion 5 via the port 12.

【0017】中管11の中程には連通孔8が穿設され、ま
た、本体2の外周所定ケ所には砥粒を混入した加圧水を
導入出する管状の導入部6及び導出部7が連通連設され
ている。
A communication hole 8 is bored in the middle of the middle pipe 11, and a tubular introduction portion 6 and a discharge portion 7 for introducing pressurized water mixed with abrasive grains are communicated with a predetermined location on the outer periphery of the main body 2. It is lined up.

【0018】本実施例は上記構成であるから、空間9内
に導入部6を介して適量の砥粒(径約50μm以下)を
混入した加圧水(圧力1.0〜2.0kg/cm2)を導入
し、且つ該加圧水を導出部7を介して空間9外に導出せ
しめる。結局該加圧水は、導出部7からの導出によって
減圧され、空間9内において一定圧(0.5〜1.0kg/
cm2)を保持しつつ循環していることになる。この状態
でポート12から、中管11へ加圧エア(圧力0.5〜4.0
kg/cm2)が導入されると、加圧エアは連通孔8を介し
て空間9内の砥粒を混入した加圧水を吸引し、該加圧水
は中管11内のエアにより加速されてノズル管10,ノズル
部4から外部に噴射される。空間9内においては砥粒を
混入した加圧水が導入部6及び導出部7により循環し、
該空間9内は一定圧に保持せしめられている(従って、
連通孔8を介して該加圧水が中管11内へ吸引されても空
間9内の圧力は変化しない。)。
Since this embodiment has the above-mentioned structure, pressurized water (pressure 1.0 to 2.0 kg / cm 2 ) in which a proper amount of abrasive grains (diameter of about 50 μm or less) is mixed into the space 9 through the introduction portion 6. And introducing the pressurized water to the outside of the space 9 via the outlet 7. Eventually, the pressurized water is depressurized by being led out from the lead-out portion 7, and is kept at a constant pressure (0.5-1.0 kg /
It means that it is circulating while holding cm 2 ). In this state, pressurized air (pressure 0.5 to 4.0) is applied from the port 12 to the middle pipe 11.
(kg / cm 2 ) is introduced, the pressurized air sucks the pressurized water mixed with the abrasive grains in the space 9 through the communication hole 8, and the pressurized water is accelerated by the air in the middle pipe 11 and the nozzle pipe 10, jetted from the nozzle unit 4 to the outside. In the space 9, pressurized water mixed with abrasive grains is circulated by the introduction section 6 and the derivation section 7,
The inside of the space 9 is kept at a constant pressure (hence,
Even if the pressurized water is sucked into the middle pipe 11 via the communication hole 8, the pressure in the space 9 does not change. ).

【0019】従って、本実施例によれば次の効果が得ら
れる。
Therefore, according to this embodiment, the following effects can be obtained.

【0020】 砥粒を混入した加圧水が封入された一
定圧の空間9から一定圧のエアの通過により吸引する構
成であり、従来例のようなノズル管35とエア供給管33と
の間の分断部aが存しないから、従来例の場合に生ずる
砥粒多過の状態は生ぜず、また、連通孔8を介して吸入
する吸入圧がバランス良く保持され、よって、噴射され
る砥粒を混入した加圧水が断続的とならず、円滑且つ連
続的に噴射され、且つノズル部4から噴射される加圧水
中の砥粒含有量は連通孔8からの砥粒吸引量が一定故に
一定となり、均一な洗浄が可能となる。
The pressurized water mixed with abrasive grains is sucked by passing a constant pressure of air from a space 9 of a constant pressure in which the pressured water is sealed, and the separation between the nozzle pipe 35 and the air supply pipe 33 as in the conventional example is performed. Since the portion a does not exist, the state of excess abrasive grains that occurs in the case of the conventional example does not occur, and the suction pressure sucked through the communication hole 8 is maintained in a well-balanced manner, so that the sprayed abrasive grains are mixed. The pressurized water is not intermittently ejected, is smoothly and continuously ejected, and the abrasive content in the pressurized water ejected from the nozzle portion 4 is constant because the abrasive suction amount from the communication hole 8 is constant, and is uniform. It becomes possible to wash.

【0021】従って、連通孔8を介しての中管11への吸
引力をエア圧の調整により適宜調節することでノズル部
4の径を可及的に径小にすることも可能となり、所望部
位をそれだけ正確に洗浄し得ることになる。正確な洗浄
を行うには、ノズル部4の径を径小にすることが望まし
い訳であるが、従来例の構造では、ノズル径を径小にす
ればする程、前記断続噴射状態が生じていた。この問題
点も本従来例によれば解消されることになる。
Therefore, the diameter of the nozzle portion 4 can be made as small as possible by appropriately adjusting the suction force to the middle pipe 11 through the communication hole 8 by adjusting the air pressure. The part can be cleaned so accurately. In order to perform accurate cleaning, it is desirable to make the diameter of the nozzle portion 4 small, but in the structure of the conventional example, the smaller the nozzle diameter, the more the intermittent injection state occurs. It was This problem will be solved according to this conventional example.

【0022】本実施例は、実験の結果、ノズル部4の径
を径小にしても(φ1mm程度)該噴射は断続的とならず
連続的に行えた。
In this embodiment, as a result of experiments, even if the diameter of the nozzle portion 4 was small (about 1 mm in diameter), the injection could be continuously performed without being intermittent.

【0023】 加圧エアの通路が従来例に比し、長く
設定できる為(従来例においては、加圧エアの通路はノ
ズル管35ということになり、加圧エアの通路の長さはこ
のノズル管35の長さということになる。)、それだけ、
エアの加速長さが長くなり、従ってエア供給圧をそれほ
ど高くしなくとも、ノズル部4からの噴射速度を高くす
ることが可能となり、洗浄効果を高めることができる。
Since the passage of the pressurized air can be set longer than that of the conventional example (in the conventional example, the passage of the pressurized air is the nozzle pipe 35, and the length of the passage of the pressurized air is this nozzle). It means the length of the tube 35.)
The accelerating length of the air becomes long, so that the jetting speed from the nozzle portion 4 can be made high without increasing the air supply pressure so much, and the cleaning effect can be enhanced.

【0024】このことは、長いエア通路においてエアの
膨張がそれだけ十分に行われること及びエア整流作用が
良好となることを意味し、ノズル部4から噴射する際の
該加圧水の広がり(放射状に広がる広がり)はそれだけ
小さくなり、従って、洗浄したい部位をそれだけ正確に
洗浄し得ることが可能となり、また、ノズル部4からの
噴射の際の広がりが小さくなるということは、それだけ
広がる際に発生する騒音を抑えることが可能となること
を意味することになる。
This means that the air is sufficiently expanded in the long air passage and the air rectifying function is improved. The spread of the pressurized water (spreading radially) at the time of jetting from the nozzle portion 4 (Spreading) becomes smaller accordingly, so that it becomes possible to wash the part to be washed more accurately, and the spread when jetting from the nozzle part 4 becomes smaller means that the noise generated when spreading is increased. It means that it is possible to suppress.

【0025】[0025]

【発明の効果】本発明は上述のように構成したから、極
めて効果的な洗浄が可能となるICモールド等のワーク
洗浄用のノズル体を提供することになる。
As described above, the present invention provides a nozzle body for cleaning a work such as an IC mold which enables extremely effective cleaning.

【図面の簡単な説明】[Brief description of drawings]

【図1】従来例の説明断面図である。FIG. 1 is an explanatory cross-sectional view of a conventional example.

【図2】本実施例の説明断面である。FIG. 2 is an explanatory cross section of the present embodiment.

【図3】本実施例の断面図である。FIG. 3 is a sectional view of the present embodiment.

【符号の説明】[Explanation of symbols]

1 ノズル体 2 本体 3 流通管 4 ノズル部 5 加圧エア供給部 6 導入部 7 導出部 8 連通孔 9 空間 10 ノズル管 11 中空管 1 nozzle body 2 body 3 distribution pipes 4 nozzle 5 Pressurized air supply unit 6 Introduction 7 Derivation part 8 communication holes 9 space 10 nozzle tube 11 hollow tube

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 砥粒を混入した加圧水をICモールド等
のワークに噴射せしめて該ワークを洗浄する洗浄装置に
付設するノズル体であって、内部を一定圧に保持せしめ
ることが可能な空間を有する本体を設け、この空間内に
流通管を設け、この流通管の先端にノズル部を、基端に
加圧エア供給部を設け、該流通管の空間内における所定
位置に連通孔を設け、空間に砥粒を混入した所定圧の加
圧水を導入・導出する導入部及び導出部を夫々設けて空
間内における該砥粒を混入した加圧水の圧力を一定に保
持せしめ、空間内における一定圧に保持せしめられた該
砥粒を混入した加圧水を前記流通管の連通孔を介して該
流通管内に吸引導入し得るように構成したことを特徴と
するICモールド等のワーク洗浄用のノズル体。
1. A nozzle body attached to a cleaning device for spraying pressurized water containing abrasive grains onto a work such as an IC mold to clean the work, the space having a constant pressure inside. A main body is provided, a flow pipe is provided in this space, a nozzle portion is provided at the tip of the flow pipe, a pressurized air supply portion is provided at the base end, and a communication hole is provided at a predetermined position in the space of the flow pipe. An inlet and an outlet for introducing and discharging pressurized water of a predetermined pressure mixed with abrasive grains are provided in the space to keep the pressure of the pressurized water mixed with the abrasive grains constant in the space and keep it at a constant pressure in the space. A nozzle body for washing a work such as an IC mold, characterized in that the pressurized water mixed with the abrasive grains can be sucked and introduced into the flow pipe through a communication hole of the flow pipe.
【請求項2】 請求項1記載のICモールド等のワーク
洗浄用のノズル体において、導入部から導入される砥粒
を混入した加圧水は、一部が導出部から導出され且つ一
部が連通孔を介して流通管内に吸引導入されることで減
圧され、この減圧により空間内における該砥粒を混入し
た加圧水が一定の圧力に保持せしめられるように設定さ
れていることを特徴とするICモールド等のワーク洗浄
用のノズル体。
2. The nozzle body for cleaning a work such as an IC mold according to claim 1, wherein the pressurized water mixed with the abrasive grains introduced from the introduction part is partially extracted from the extraction part and part is a communication hole. It is decompressed by being introduced by suction into the flow pipe through the IC pipe, and the IC mold characterized by being set so that the pressurized water mixed with the abrasive grains in the space is kept at a constant pressure by this decompression. Nozzle body for cleaning the workpiece.
【請求項3】 請求項1,2いずれか1項に記載のIC
モールド等のワーク洗浄用のノズル体において、本体の
先端にはノズル管が前記空間と連通する状態で装着さ
れ、このノズル管の基端には中空管が連通連設され、こ
の中空管の基端が本体の基端部に連設され、この本体の
基端部は加圧エア供給部と連設され、前記中空管に連通
孔が穿設されていることを特徴とするICモールド等の
ワーク洗浄用のノズル体。
3. The IC according to claim 1,
In a nozzle body for cleaning a work such as a mold, a nozzle tube is attached to a tip of a main body in a state of communicating with the space, and a hollow tube is provided in continuous communication with a base end of the nozzle tube. The base end of the main body is connected to the base end of the main body, the base end of the main body is connected to the pressurized air supply portion, and a communication hole is bored in the hollow tube. Nozzle body for cleaning works such as molds.
JP27622692A 1992-10-14 1992-10-14 Nozzle body for cleaning workpieces such as IC molds Expired - Lifetime JP3393664B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27622692A JP3393664B2 (en) 1992-10-14 1992-10-14 Nozzle body for cleaning workpieces such as IC molds

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27622692A JP3393664B2 (en) 1992-10-14 1992-10-14 Nozzle body for cleaning workpieces such as IC molds

Publications (2)

Publication Number Publication Date
JPH06126628A JPH06126628A (en) 1994-05-10
JP3393664B2 true JP3393664B2 (en) 2003-04-07

Family

ID=17566453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27622692A Expired - Lifetime JP3393664B2 (en) 1992-10-14 1992-10-14 Nozzle body for cleaning workpieces such as IC molds

Country Status (1)

Country Link
JP (1) JP3393664B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016120572A (en) * 2014-12-25 2016-07-07 マコー株式会社 Nozzle body for wet blast treatment apparatus

Also Published As

Publication number Publication date
JPH06126628A (en) 1994-05-10

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