JP3386202B2 - ２段式油回転真空ポンプ - Google Patents

２段式油回転真空ポンプ

Info

Publication number
JP3386202B2
JP3386202B2 JP24755693A JP24755693A JP3386202B2 JP 3386202 B2 JP3386202 B2 JP 3386202B2 JP 24755693 A JP24755693 A JP 24755693A JP 24755693 A JP24755693 A JP 24755693A JP 3386202 B2 JP3386202 B2 JP 3386202B2
Authority
JP
Japan
Prior art keywords
oil
pump
cylinder
stage
rotary vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24755693A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0777184A (ja
Inventor
充 矢作
通 対比地
克徳 中
俊一 立野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17165254&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3386202(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP24755693A priority Critical patent/JP3386202B2/ja
Priority to CN941151344A priority patent/CN1065026C/zh
Publication of JPH0777184A publication Critical patent/JPH0777184A/ja
Application granted granted Critical
Publication of JP3386202B2 publication Critical patent/JP3386202B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Applications Or Details Of Rotary Compressors (AREA)
JP24755693A 1993-09-08 1993-09-08 ２段式油回転真空ポンプ Expired - Lifetime JP3386202B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP24755693A JP3386202B2 (ja) 1993-09-08 1993-09-08 ２段式油回転真空ポンプ
CN941151344A CN1065026C (zh) 1993-09-08 1994-09-08 两级旋转真空泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24755693A JP3386202B2 (ja) 1993-09-08 1993-09-08 ２段式油回転真空ポンプ

Publications (2)

Publication Number Publication Date
JPH0777184A JPH0777184A (ja) 1995-03-20
JP3386202B2 true JP3386202B2 (ja) 2003-03-17

Family

ID=17165254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24755693A Expired - Lifetime JP3386202B2 (ja) 1993-09-08 1993-09-08 ２段式油回転真空ポンプ

Country Status (2)

Country Link
JP (1) JP3386202B2 (zh)
CN (1) CN1065026C (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
CN100453946C (zh) * 2006-05-08 2009-01-21 杭州金舟电炉有限公司 一种风冷式油路自循环冷却系统
JP5746887B2 (ja) * 2011-03-18 2015-07-08 アルバック機工株式会社 油回転真空ポンプ
KR101630827B1 (ko) 2014-06-27 2016-06-15 (주) 씨엠테크 멸균장치의 진공배기 시스템
RU2666720C2 (ru) * 2014-06-27 2018-09-11 Ателье Буш Са Способ откачивания в системе вакуумных насосов и система вакуумных насосов
CN105275820B (zh) * 2014-07-07 2017-06-16 上海汉钟精机股份有限公司 干式真空泵轴封离心冷却机构

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5939982A (ja) * 1982-08-28 1984-03-05 Kashiyama Kogyo Kk 真空ポンプの冷却機構
DE8807065U1 (de) * 1988-05-30 1989-09-28 Siemens AG, 1000 Berlin und 8000 München Auf einem transportablen Traggestell angeordnetes Vakuumpumpenaggregat
ATE75007T1 (de) * 1988-06-24 1992-05-15 Siemens Ag Mehrstufiges vakuumpumpenaggregat.

Also Published As

Publication number Publication date
JPH0777184A (ja) 1995-03-20
CN1105426A (zh) 1995-07-19
CN1065026C (zh) 2001-04-25

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