JP3240347B2 - Method of filling resin into hole of printed wiring board - Google Patents

Method of filling resin into hole of printed wiring board

Info

Publication number
JP3240347B2
JP3240347B2 JP35816198A JP35816198A JP3240347B2 JP 3240347 B2 JP3240347 B2 JP 3240347B2 JP 35816198 A JP35816198 A JP 35816198A JP 35816198 A JP35816198 A JP 35816198A JP 3240347 B2 JP3240347 B2 JP 3240347B2
Authority
JP
Japan
Prior art keywords
resin
hole
filling
stencil
printed wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP35816198A
Other languages
Japanese (ja)
Other versions
JP2000183519A (en
Inventor
敦史 奥野
孝一良 永井
紀隆 大山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyu Rec Co Ltd
Original Assignee
Sanyu Rec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyu Rec Co Ltd filed Critical Sanyu Rec Co Ltd
Priority to JP35816198A priority Critical patent/JP3240347B2/en
Publication of JP2000183519A publication Critical patent/JP2000183519A/en
Application granted granted Critical
Publication of JP3240347B2 publication Critical patent/JP3240347B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、プリント配線基板
孔部への樹脂充填方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for filling a hole in a printed wiring board with a resin.

【0002】[0002]

【従来技術】プリント配線基板孔部、例えば両面プリン
ト配線板の基板に形成のスルーホールや多層プリント配
線板に於ける積層板の基板に形成のビアホール等に樹脂
を充填するに際しては、孔版印刷手段による充填方法が
量産性,効率性,経済性等に優れることから広く普及す
る傾向にある。しかしながら、孔版印刷手段による充填
方法では、スルーホールやビアホール等のように孔部が
狭く且つ深い場合には、孔部内の隅々まで樹脂を完全に
充填するということは困難であり、例えば孔内底部に未
充填部が残る恐れがあるばかりでなく、樹脂の充填時に
気泡を巻き込む恐れがあった。導電性メッキが施されて
いるスルーホール又はビアホールに対しては絶縁性樹脂
が、また導電性メッキの施されていないスルーホール又
はビアホールに対しては導電性樹脂が充填されるが、樹
脂充填層中に未充填部や気泡が残っていると、前者の場
合には、熱衝撃時の亀裂により導電性メッキ部分に断線
等を招きやすくなり、また後者の場合には、抵抗値にば
らつきを発生させる原因になり、好ましくない。
2. Description of the Related Art When a resin is filled into a hole in a printed wiring board, for example, a through hole formed in a substrate of a double-sided printed wiring board or a via hole formed in a substrate of a laminated board in a multilayer printed wiring board, a stencil printing means is used. The method of filling with methane is excellent in mass productivity, efficiency, economy, etc., and thus tends to be widely used. However, in the filling method using the stencil printing means, when the hole is narrow and deep, such as a through hole or a via hole, it is difficult to completely fill the resin in every corner of the hole. Not only was there a possibility that an unfilled portion would remain at the bottom, but there was also a risk that bubbles would be trapped when the resin was filled. Insulating resin is filled in through holes or via holes with conductive plating, and conductive resin is filled in through holes or via holes with no conductive plating. If unfilled portions or bubbles remain inside, in the former case, cracks at the time of thermal shock tend to cause disconnection etc. in the conductive plating portion, and in the latter case, variation in resistance value occurs It is not preferable because it may cause

【0003】また、孔版印刷手段適用による樹脂充填方
法は、上記と同様の理由で、片面プリント配線板の基板
の有底孔部内に配置された半導体素子、コイルなどの電
子部品素子を絶縁性樹脂で封止するに際しても適用され
る傾向にあるが、この場合に於いても、孔底部、その他
ワイヤーの周囲及び下部、素子周縁部、コイル巻き線間
に気泡が残存或いは未充填部が発生しやすくなり、品
質,性能面での低下を招いていた。
[0003] In addition, a resin filling method using stencil printing means applies an electronic component element such as a semiconductor element and a coil disposed in a bottomed hole of a substrate of a single-sided printed wiring board to the insulating resin for the same reason as described above. However, even in this case, bubbles remain or unfilled portions are generated between the bottom of the hole, the periphery and lower portion of the wire, the peripheral portion of the element, and the coil winding. This has led to lower quality and performance.

【0004】[0004]

【発明が解決しようとする課題】この場合、孔版印刷手
段による樹脂の充填を真空雰囲気下で行うようにすれ
ば、充填時の空気の巻き込み、その他空気の残存等をあ
る程度防止することができるが、樹脂の未充填部の発生
は依然として残り、その解決が望まれていた。
In this case, if the filling of the resin by the stencil printing means is performed in a vacuum atmosphere, it is possible to prevent air entrapment at the time of filling and other residual air to some extent. However, generation of an unfilled portion of the resin still remains, and a solution to the problem has been desired.

【0005】本発明は、空気の巻き込み、空気の残存防
止はもとより、樹脂の未充填部の発生をも防止すること
ができる、樹脂の充填方法を提供することを目的として
なされたものである。
An object of the present invention is to provide a resin filling method capable of preventing not only entrapment of air and remaining of air but also generation of an unfilled portion of the resin.

【0006】[0006]

【課題を解決するための手段】本発明は、プリント配線
基板孔部への液状樹脂の充填を真空雰囲気中で孔版印刷
手段を適用して行い、樹脂充填後は、真空雰囲気中の真
空度を常圧に向けて少なくとも3.99kPa低下さ
せ、しかる後、孔版の離型を行う樹脂充填方法であっ
て、孔版の通孔部の下端開口部にネットが張られ、該ネ
ット上の樹脂が離型時に孔版と共に余剰樹脂として除去
されることを特徴とするプリント配線基板孔部への樹脂
充填方法に係る。
According to the present invention, a liquid resin is filled into a hole in a printed wiring board by applying a stencil printing means in a vacuum atmosphere, and after filling the resin, the degree of vacuum in the vacuum atmosphere is reduced. A resin filling method for lowering at least 3.99 kPa toward normal pressure and then releasing the stencil, wherein a net is stretched at the lower end opening of the through hole of the stencil.
The resin on the tray is removed as excess resin together with the stencil when releasing the mold.
The present invention relates to a method for filling a hole in a printed wiring board with a resin.

【0007】[0007]

【0008】[0008]

【0009】[0009]

【0010】[0010]

【0011】[0011]

【発明の実施の形態】以下に本発明の一実施形態を添付
図面に基づき説明する。図1(イ)〜(ホ)は、本発明
充填方法を基板1のスルーホール2への樹脂充填に適用
した場合の一例を工程順に示している。図1(イ)は、
孔版印刷手段適用による樹脂充填の開始時の状況を概略
的に示している。スルーホール2は貫通孔であり、その
下端開口2aは予め易剥離性の閉鎖部材、例えば粘着テ
ープ3を適用して密閉されている。下端開口2aの密閉
は、下記に述べるように、差圧を利用し樹脂の押し込み
充填を行うために必要である。
An embodiment of the present invention will be described below with reference to the accompanying drawings. FIGS. 1A to 1E show an example of a case in which the filling method of the present invention is applied to filling a resin into a through hole 2 of a substrate 1 in the order of steps. Fig. 1 (a)
The situation at the beginning of resin filling by stencil printing means is schematically shown. The through-hole 2 is a through-hole, and the lower end opening 2 a is sealed in advance by applying an easily peelable closing member, for example, an adhesive tape 3. The sealing of the lower end opening 2a is necessary for injecting and filling the resin using the differential pressure as described below.

【0012】図1(イ)に示す状態で、真空雰囲気中、
例えば真空に保持されたケーシング(図示せず)内に於
いて、スキージ4の作動をして液状樹脂5を孔版6の通
孔部7を通じ該通孔部7と位置合わせされたスルーホー
ル2内にそれぞれ押し込み充填する。
In the state shown in FIG.
For example, in a casing (not shown) held in a vacuum, the squeegee 4 is operated to move the liquid resin 5 through the through-hole 7 of the stencil 6 into the through-hole 2 aligned with the through-hole 7. And press-fill.

【0013】図1(ロ)は 液状樹脂5の押し込み充填
を終えた直後の状況を示し、スルーホール2の底部に
は、未充填部8が発生している。この未充填部8の発生
は、スキージ4作動による押し込み充填では、充填圧に
限界があり、充填圧不足が影響しているものと推定され
る。未充填部8がそのまま残っていると、製品の品質,
性能を低下させる原因になり、好ましくない。
FIG. 1B shows a state immediately after the completion of the press-filling of the liquid resin 5, and an unfilled portion 8 is formed at the bottom of the through hole 2. The occurrence of the unfilled portion 8 is presumed to be due to the fact that there is a limit to the filling pressure in the indentation filling by the operation of the squeegee 4, and the insufficient filling pressure has an effect. If the unfilled portion 8 remains, the quality of the product,
This is undesirable because it causes a decrease in performance.

【0014】本発明では、上記未充填部8を消去させる
ために、真空雰囲気下での樹脂の充填操作を終えると、
例えば真空雰囲気中を大気に解放し、常圧に戻すように
している。
According to the present invention, in order to erase the unfilled portion 8, the resin filling operation in a vacuum atmosphere is completed.
For example, a vacuum atmosphere is released to the atmosphere and returned to normal pressure.

【0015】図1(ハ)は常圧に戻した後の状況を示し
ている。未充填部8は粘着テープ3により密閉された閉
鎖空間であり、一応孔版印刷時の真空度をそのまま保持
しているものとみなすことができるので、外部雰囲気
(大気)との間に圧力差が生じる。この圧力差により、
液状樹脂5はスルーホール2の底部に向けて押し込ま
れ、よって未充填部8の部分にも樹脂が充填されること
になり、未充填部8は消去されるに至る。
FIG. 1C shows the situation after the pressure has been returned to normal pressure. The unfilled portion 8 is a closed space closed by the adhesive tape 3 and can be regarded as holding the degree of vacuum at the time of stencil printing. Therefore, the pressure difference between the unfilled portion 8 and the external atmosphere (atmosphere) is reduced. Occurs. Due to this pressure difference,
The liquid resin 5 is pushed toward the bottom of the through-hole 2, so that the unfilled portion 8 is also filled with the resin, and the unfilled portion 8 is erased.

【0016】常圧に戻した後は、図1(ニ)に示すよう
に孔版6を離型し、次いで液状樹脂5を加熱硬化させ、
硬化後、粘着テープ3を剥離除去することにより、未充
填部並びに気泡を含まない樹脂充填層5Aが得られる。
After returning to normal pressure, the stencil 6 is released as shown in FIG. 1D, and then the liquid resin 5 is cured by heating.
After the curing, the pressure-sensitive adhesive tape 3 is peeled off to obtain a resin-filled layer 5A containing no unfilled portions and no air bubbles.

【0017】図2は、スルーホール2に導電性メッキ9
が施されている場合を示し、この場合には、樹脂充填層
5Aの形成に絶縁性樹脂が使用される。
FIG. 2 shows a conductive plating 9 in the through hole 2.
In this case, an insulating resin is used for forming the resin-filled layer 5A.

【0018】図3は、スルーホール2に導電性メッキが
施されていない場合を示し、この場合には、樹脂充填層
5Aの形成に導電性樹脂が使用される。
FIG. 3 shows a case where the conductive plating is not applied to the through-hole 2. In this case, a conductive resin is used for forming the resin filling layer 5A.

【0019】図4には、図2に示す基板1を内積層板と
して含む多層プリント配線板が、また図5には、図3に
示す基板1を内積層板として含む多層プリント配線板が
それぞれ示され、図中、10はプリプレグからなる絶縁
層、11は銅箔等の導電性膜を備えた外積層板を示して
いる。
FIG. 4 shows a multilayer printed wiring board including the substrate 1 shown in FIG. 2 as an inner laminate, and FIG. 5 shows a multilayer printed wiring board including the substrate 1 shown in FIG. 3 as an inner laminate. In the drawing, reference numeral 10 denotes an insulating layer made of prepreg, and 11 denotes an outer laminate provided with a conductive film such as a copper foil.

【0020】スルーホール2(積層板の場合、通常ビア
ホールと呼ばれている)の樹脂充填層5Aが気泡を含有
し及び/又は未充填部8を含んでいる場合には、リフロ
ー時の熱によりスルーホール2部分の導電性メッキの破
断、その他スルーホール2部分からの膨れ,剥がれ等を
招く原因になるが、本発明では、気泡や未充填部を含ん
でいないので、破断,膨れ、剥がれ等の不具合を一掃で
き、多層積層板の品質性能を向上できる。
When the resin-filled layer 5A of the through-hole 2 (in the case of a laminated board, usually called a via-hole) contains air bubbles and / or contains an unfilled portion 8, heat is generated during reflow. This may cause breakage of the conductive plating at the through hole 2 portion and cause swelling and peeling off from the through hole 2 portion. However, in the present invention, since no bubbles or unfilled portions are included, breakage, swelling, peeling, etc. Can be eliminated and the quality performance of the multilayer laminate can be improved.

【0021】図6,7は、基板1の有底孔部12に半導
体素子,コイルなどの電子部品素子13を配置した例を
示し、該基板1の有底孔部12に図1に示す手順で液状
樹脂5(絶縁性)を充填することにより、気泡と未充填
部を含まない品質性能の良い樹脂封止層(図示せず)を
形成することができる。
FIGS. 6 and 7 show an example in which electronic components 13 such as semiconductor elements and coils are arranged in the bottomed hole 12 of the substrate 1. By filling with the liquid resin 5 (insulating property), a high-quality resin sealing layer (not shown) that does not include bubbles and unfilled portions can be formed.

【0022】本発明充填方法は、図8に示すような、パ
ッケージ作成時の基板1の貫通孔部14への樹脂充填に
も適用できる。この場合、貫通孔部14の下端開口14
aは、図1に示すスルーホール2の場合と同様に、易剥
離性の閉鎖部材15を適用して密閉される。閉塞部材1
5の孔部14内に臨む面には、予め電子部品素子13が
配置固定されている。
The filling method of the present invention can also be applied to resin filling into the through-hole portion 14 of the substrate 1 at the time of forming a package as shown in FIG. In this case, the lower end opening 14 of the through hole 14
As in the case of the through hole 2 shown in FIG. 1, a is sealed by applying the easily peelable closing member 15. Closing member 1
The electronic component element 13 is arranged and fixed in advance on a surface facing the inside of the hole 14 of No. 5.

【0023】図9は、図8に示す基板1の貫通孔部14
に、図1(イ)と同様に、真空印刷手段を適用して液状
樹脂5を充填した状況を示し、この充填状態に於いて
は、孔部14の底部、特に電子部品素子13の周り等に
未充填部8が発生している。この未充填部8は、図1
(ハ)と同様に、真空雰囲気中を大気に解放し、例えば
常圧に戻し、未充填部8と外部雰囲気との間に圧力差を
発生させることにより、消去することができる。
FIG. 9 shows the through hole 14 of the substrate 1 shown in FIG.
1A shows a state in which the liquid resin 5 is filled by applying vacuum printing means as in FIG. 1A. In this filled state, the bottom of the hole 14, especially around the electronic component element 13, etc. The unfilled portion 8 has occurred. This unfilled part 8 is shown in FIG.
Similarly to (c), erasing can be performed by releasing the vacuum atmosphere to the atmosphere and returning it to normal pressure, for example, and generating a pressure difference between the unfilled portion 8 and the external atmosphere.

【0024】図10は、未充填部の消去後、孔版6の離
型時の状況を示している。この場合、孔版6の通孔部7
の下端開口部7aにネット16を張っておけば、ネット
16上の樹脂5′が余剰樹脂として除去され、樹脂充填
層5Aの上面を基板1面と略々揃えることができ、パッ
ケージの寸法精度を高めることができる。得られたパッ
ケージは、図11に示すように、樹脂硬化,離型を経た
後に反転され、導体回路17が例えば印刷手段を適用し
て形成される。
FIG. 10 shows the situation when the stencil 6 is released after the unfilled portion is erased. In this case, the through holes 7 of the stencil 6
If the net 16 is stretched in the lower end opening 7a of the resin, the resin 5 'on the net 16 is removed as surplus resin, and the upper surface of the resin filling layer 5A can be substantially aligned with the surface of the substrate 1, so that the dimensional accuracy of the package can be improved. Can be increased. As shown in FIG. 11, the obtained package is inverted after being cured and released from the resin, and the conductor circuit 17 is formed by applying a printing means, for example.

【0025】ネット16付き孔版は、図12(イ)〜
(ニ)に示すように、スルーホール2への樹脂の充填、
その他図示されていないが、図6,7に示すような有底
孔部12への樹脂の充填にも適用可能である。
The stencil with the net 16 is shown in FIGS.
(D) As shown in FIG.
Although not shown, the present invention is also applicable to filling the bottomed hole portion 12 with a resin as shown in FIGS.

【0026】本発明に於いて、孔版印刷時の真空度は、
気泡を残存させないという観点から言えば、低,中及び
高真空度のいずれでもよいが、中及び高真空度の保持は
気密保持に厳しい制限を受けるばかりでなく、真空復帰
に時間がかかり、生産効率を低下させる原因になる恐れ
があるので、低真空度、例えば0.013〜1.33k
Pa、好ましくは0.013〜0.667kPa、より
好ましくは0.013〜0.267kPa程度の低真空
度の保持で充分である。因みに真空度が1.33kPa
よりも低くなり、あまりに常圧に近づきすぎると、樹脂
充填層中に気泡を発生させる恐れがあるので、好ましく
ない。
In the present invention, the degree of vacuum at the time of stencil printing is:
From the viewpoint of not allowing air bubbles to remain, any of low, medium, and high vacuum levels may be used. Since there is a possibility that the efficiency may be reduced, a low vacuum degree, for example, 0.013 to 1.33 k
It is sufficient to maintain a low vacuum degree of Pa , preferably about 0.013 to 0.667 kPa , more preferably about 0.013 to 0.267 kPa . By the way, the degree of vacuum is 1.33 kPa
If the pressure is too low and the pressure is too close to normal pressure, air bubbles may be generated in the resin-filled layer, which is not preferable.

【0027】真空孔版印刷後に於ける真空雰囲気中の真
空度の低下は、通常は真空雰囲気中を大気に解放し、大
気圧まで降下させることにより行うが、大気圧までの低
下は必ずしも必要でなく、孔版印刷時の真空度との間に
少なくとも3.99kPa程度、例えば3.99〜8.
00kPa程度の差圧が生ずるように、真空度を低下さ
せればよい。差圧が3.99kPaに達しない場合に
は、孔底部に向かう樹脂の押し込み充填効果ひいては未
充填部の消去効果が不十分となり、好ましくない。
Reduction of the degree of vacuum in a vacuum atmosphere after vacuum stencil printing is usually performed by releasing the vacuum atmosphere to the atmosphere and lowering the pressure to the atmospheric pressure. However, the reduction to the atmospheric pressure is not always necessary. , At least about 3.99 kPa , for example, between 3.99 and 8.
The degree of vacuum may be reduced so that a pressure difference of about 00 kPa is generated. If the differential pressure does not reach 3.99 kPa , the effect of injecting and filling the resin toward the bottom of the hole and the effect of erasing the unfilled portion become insufficient, which is not preferable.

【0028】基板孔部への充填に適用される液状樹脂の
粘度は広い範囲から選択でき、通常は20〜200Pa
・s程度の範囲内から基板孔部の開口面積及び/又は深
さ等を考慮し適宜選択決定される。一般的に言って、例
えばパッケージの作成に適用されるような比較的開口面
積が大きく且つ低深度の孔部に対する充填には、比較的
高粘度の樹脂を適用でき、一方スルーホールのように比
較的開口面積が小さく且つ高深度の孔部に対しては、比
較的低粘度の樹脂が適用される。
The viscosity of the liquid resin to be applied to the filling to the substrate hole can be selected from a wide range, typically 20~200Pa
-It is appropriately selected and determined from the range of about s in consideration of the opening area and / or depth of the substrate hole. Generally speaking, relatively high-viscosity resin can be applied to filling holes having a relatively large opening area and low depth, for example, as applied to the production of a package, while a comparative example such as a through hole is used. A resin having a relatively low viscosity is applied to a hole having a small target opening area and a high depth.

【0029】真空孔版印刷に適用される孔版の厚みは、
特に制限されないが、通常は0.01〜3.0mm程度の
ものが使用され、該孔版には通孔部が充填対象の孔部と
同じパターンで形成されている。
The thickness of a stencil applied to vacuum stencil printing is as follows:
Although not particularly limited, a hole having a diameter of about 0.01 to 3.0 mm is usually used, and the through-holes are formed in the stencil in the same pattern as the holes to be filled.

【0030】孔版通孔部の下端開口に設けられるネット
16の目の大きさは、使用される樹脂の粘度等によって
適宜選択決定すればよく、要するに、孔版印刷時には実
質的に樹脂の押し込み充填を妨げず、離型時には、ネッ
ト16上に余剰樹脂が実質的にそのまま留まり、ネット
16と共に搬出できるようなメッシュのものを使用すれ
ばよい。例えば、50Pa・s程度の樹脂に対しては1
00〜200メッシュ程度のものが適当であり、これを
基準に樹脂の粘度によってネット16のメッシュを決定
すればよい。ネットの材質は特に制限されないが、強度
と耐久性等を考慮しステンレスが適当である。
The size of the mesh of the net 16 provided at the lower end opening of the stencil through-hole may be appropriately selected and determined depending on the viscosity of the resin to be used. When the mold is released, a mesh material that allows the surplus resin to remain substantially as it is on the net 16 and can be carried out together with the net 16 may be used. For example, for resin of about 50 Pa · s, 1
A mesh having a mesh size of about 100 to 200 is appropriate, and the mesh of the net 16 may be determined based on the viscosity of the resin based on the mesh. The material of the net is not particularly limited, but stainless steel is suitable in consideration of strength and durability.

【0031】スキージは、できるだけ押し込み充填圧の
大きいものが望ましく、例えば図13,14に示すよう
な接触角θが90°より小さいものが適当である。
It is desirable that the squeegee has as large an indentation filling pressure as possible. For example, a squeegee having a contact angle θ smaller than 90 ° as shown in FIGS.

【0032】本発明において、プリント配線基板とは、
プリント配線板(片面、両面及び多層を含む)の製造に
適用されるプリント配線基板はもとより、半導体装置の
製造,チップ部品の製造,ICカード及びメモリーカー
ドの製造、コイル基板の製造等に適用されるプリント配
線基板の全てを包含する。
In the present invention, a printed wiring board is
Applied to the manufacture of printed wiring boards (including single-sided, double-sided and multi-layer), semiconductor devices, chip parts, IC cards and memory cards, coil substrates, etc. All printed wiring boards.

【0033】[0033]

【発明の効果】本発明によれば、プリント配線基板の孔
部への樹脂の充填を孔版印刷を適用して行うに際し、空
気の巻き込み、空気の残存等はもとより、樹脂の未充填
部をも発生させる恐れのない、樹脂充填方法を提供する
ことができる。
According to the present invention, when the resin is filled into the holes of the printed wiring board by applying the stencil printing, not only the entrainment of air and the residual air, but also the unfilled portions of the resin are performed. It is possible to provide a resin filling method that does not cause generation.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明充填方法をスルーホールの樹脂充填に適
用した場合の一例を概略的に示す工程図である。
FIG. 1 is a process diagram schematically showing an example in which the filling method of the present invention is applied to resin filling of a through hole.

【図2】導電性メッキが施されたスルーホールへの樹脂
充填状況を概略的に示す縦断面図である。
FIG. 2 is a longitudinal sectional view schematically showing a state of filling a resin into a through-hole provided with conductive plating.

【図3】導電性メッキが施されていないスルーホールへ
の樹脂充填状況を概略的に示す縦断面図である。
FIG. 3 is a longitudinal sectional view schematically showing a resin filling state in a through-hole on which conductive plating is not applied.

【図4】図2に示す基板を内積層板として含む多層プリ
ント配線板を概略的に示す縦断面図である。
4 is a longitudinal sectional view schematically showing a multilayer printed wiring board including the substrate shown in FIG. 2 as an inner laminate.

【図5】図3に示す基板を内積層板として含む多層プリ
ント配線板を概略的に示す縦断面図である。
FIG. 5 is a longitudinal sectional view schematically showing a multilayer printed wiring board including the substrate shown in FIG. 3 as an inner laminate.

【図6】有底孔部の例を示す説明図である。FIG. 6 is an explanatory view showing an example of a bottomed hole.

【図7】他の有底孔部の例を示す説明図である。FIG. 7 is an explanatory view showing an example of another bottomed hole.

【図8】パッケイジの基板の孔部の説明図である。FIG. 8 is an explanatory view of a hole of a package substrate.

【図9】パッケージの基板孔部への樹脂の充填状況を示
す、図1(ロ)に対応する図である。
FIG. 9 is a view, corresponding to FIG. 1B, showing a state of filling the resin into the substrate hole of the package.

【図10】図9の状態より離型している状況を示す説明
図である。
FIG. 10 is an explanatory diagram showing a state where the mold is released from the state of FIG. 9;

【図11】パッケージの基板面に導体回路を形成した状
況を示す説明図である。
FIG. 11 is an explanatory diagram showing a situation where a conductor circuit is formed on the substrate surface of the package.

【図12】ネット付き孔版をスルーホールの樹脂充填に
適用している状況を示す工程図である。
FIG. 12 is a process diagram showing a situation in which a stencil with a net is applied to resin filling of a through hole.

【図13】スキージの好ましい一例を示す説明図であ
る。
FIG. 13 is an explanatory diagram showing a preferred example of a squeegee.

【図14】スキージの他の好ましい一例を示す説明図で
ある。
FIG. 14 is an explanatory view showing another preferred example of the squeegee.

【符号の説明】 1 基板 2 スルーホール 3 粘着テープ 4 スキージ 5 液状樹脂 6 孔版 7 通孔部 8 未充填部 9 導電性メッキ 10 絶縁層 11 外積層板 12 有底孔部 13 電子部品素子 14 貫通孔部 15 閉鎖部材 16 ネット 17 導体回路[Description of Signs] 1 substrate 2 through hole 3 adhesive tape 4 squeegee 5 liquid resin 6 stencil 7 through hole 8 unfilled portion 9 conductive plating 10 insulating layer 11 outer laminated plate 12 bottomed hole 13 electronic component element 14 penetrating Hole 15 Closing member 16 Net 17 Conductor circuit

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭58−204545(JP,A) 特開 平5−218617(JP,A) 特開 平6−13751(JP,A) 特開 平10−313015(JP,A) 特開 昭54−80559(JP,A) 特開 平11−298138(JP,A) 特開 平11−40590(JP,A) (58)調査した分野(Int.Cl.7,DB名) H05K 1/11 H05K 3/28 H05K 3/40 - 3/42 H01L 21/56 H01L 23/28 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-58-204545 (JP, A) JP-A-5-218617 (JP, A) JP-A-6-13751 (JP, A) JP-A-10-108 313015 (JP, A) JP-A-54-80559 (JP, A) JP-A-11-298138 (JP, A) JP-A-11-40590 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H05K 1/11 H05K 3/28 H05K 3/40-3/42 H01L 21/56 H01L 23/28

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 プリント配線基板孔部への液状樹脂の充
填を真空雰囲気中で孔版印刷手段を適用して行い、樹脂
充填後は、真空雰囲気中の真空度を常圧に向けて少なく
とも3.99kPa低下させ、しかる後、孔版の離型を
行う樹脂充填方法であって、 孔版の通孔部の下端開口部にネットが張られ、該ネット
上の樹脂が離型時に孔版と共に余剰樹脂として除去され
ることを特徴とするプリント配線基板孔部への樹脂充填
方法。
1. A liquid resin is filled into a hole of a printed wiring board by applying a stencil printing means in a vacuum atmosphere, and after filling the resin, at least 3. A resin filling method for lowering the stencil by 99 kPa, and thereafter releasing the stencil, wherein a net is stretched at the lower end opening of the through hole of the stencil, and the resin on the net is removed as excess resin together with the stencil at the time of release. Filling a hole in a printed wiring board with a resin.
【請求項2】 孔版印刷時の真空雰囲気中の真空度が、
0.013〜1.33kPaであることを特徴とする請
求項1に記載の充填方法。
2. The degree of vacuum in a vacuum atmosphere during stencil printing is:
The filling method according to claim 1, wherein the pressure is 0.013 to 1.33 kPa.
JP35816198A 1998-12-16 1998-12-16 Method of filling resin into hole of printed wiring board Expired - Lifetime JP3240347B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35816198A JP3240347B2 (en) 1998-12-16 1998-12-16 Method of filling resin into hole of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35816198A JP3240347B2 (en) 1998-12-16 1998-12-16 Method of filling resin into hole of printed wiring board

Publications (2)

Publication Number Publication Date
JP2000183519A JP2000183519A (en) 2000-06-30
JP3240347B2 true JP3240347B2 (en) 2001-12-17

Family

ID=18457867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35816198A Expired - Lifetime JP3240347B2 (en) 1998-12-16 1998-12-16 Method of filling resin into hole of printed wiring board

Country Status (1)

Country Link
JP (1) JP3240347B2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG122743A1 (en) * 2001-08-21 2006-06-29 Micron Technology Inc Microelectronic devices and methods of manufacture
JP4270792B2 (en) 2002-01-23 2009-06-03 富士通株式会社 Conductive material and via hole filling method
JP2003257891A (en) * 2002-02-27 2003-09-12 Toray Eng Co Ltd Method for filling microhole with conductive paste, substrate with through electrode and substrate with non-through electrode
JP2006261323A (en) * 2005-03-16 2006-09-28 Sharp Corp Semiconductor device and its manufacturing method
JP4936352B2 (en) * 2005-09-02 2012-05-23 有限会社 ナプラ Method for filling a through hole or a non-through hole provided in a multilayer circuit board or wafer with a filler
JP4678888B2 (en) * 2009-02-20 2011-04-27 日本アビオニクス株式会社 Selective resin filling method to hole of printed wiring board
JP2015185735A (en) * 2014-03-25 2015-10-22 日立化成株式会社 Multilayer wiring board and manufacturing method therefor
CN105657987B (en) * 2014-12-03 2019-05-21 北大方正集团有限公司 Plate method for plugging and circuit board
CN112188733A (en) * 2019-07-03 2021-01-05 深圳碳森科技有限公司 Vacuum hole plugging method

Also Published As

Publication number Publication date
JP2000183519A (en) 2000-06-30

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