JP3220937U - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
- Publication number
- JP3220937U JP3220937U JP2019000336U JP2019000336U JP3220937U JP 3220937 U JP3220937 U JP 3220937U JP 2019000336 U JP2019000336 U JP 2019000336U JP 2019000336 U JP2019000336 U JP 2019000336U JP 3220937 U JP3220937 U JP 3220937U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- disk
- heat
- vertical direction
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 70
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 64
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 62
- 238000012545 processing Methods 0.000 claims abstract description 41
- 238000006243 chemical reaction Methods 0.000 claims abstract description 26
- 238000009413 insulation Methods 0.000 claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 50
- 235000012489 doughnuts Nutrition 0.000 claims description 48
- 239000010453 quartz Substances 0.000 claims description 48
- 230000002265 prevention Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 description 9
- 238000003466 welding Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019000336U JP3220937U (ja) | 2019-01-31 | 2019-01-31 | 熱処理装置 |
| CN201920804593.5U CN210378972U (zh) | 2019-01-31 | 2019-05-30 | 热处理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019000336U JP3220937U (ja) | 2019-01-31 | 2019-01-31 | 熱処理装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3220937U true JP3220937U (ja) | 2019-04-11 |
Family
ID=66092450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019000336U Active JP3220937U (ja) | 2019-01-31 | 2019-01-31 | 熱処理装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3220937U (zh) |
| CN (1) | CN210378972U (zh) |
-
2019
- 2019-01-31 JP JP2019000336U patent/JP3220937U/ja active Active
- 2019-05-30 CN CN201920804593.5U patent/CN210378972U/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN210378972U (zh) | 2020-04-21 |
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