JP3146538B2 - Non-contact height measuring device - Google Patents

Non-contact height measuring device

Info

Publication number
JP3146538B2
JP3146538B2 JP19930391A JP19930391A JP3146538B2 JP 3146538 B2 JP3146538 B2 JP 3146538B2 JP 19930391 A JP19930391 A JP 19930391A JP 19930391 A JP19930391 A JP 19930391A JP 3146538 B2 JP3146538 B2 JP 3146538B2
Authority
JP
Japan
Prior art keywords
light
reflected light
photoelectric conversion
optical path
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP19930391A
Other languages
Japanese (ja)
Other versions
JPH0540035A (en
Inventor
秀行 上岡
英二 奥田
裕司 小野
健一 戎田
知博 木村
Original Assignee
松下電器産業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 松下電器産業株式会社 filed Critical 松下電器産業株式会社
Priority to JP19930391A priority Critical patent/JP3146538B2/en
Publication of JPH0540035A publication Critical patent/JPH0540035A/en
Application granted granted Critical
Publication of JP3146538B2 publication Critical patent/JP3146538B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact height measuring apparatus which irradiates a measuring object with a minute beam of light and measures the height of the measuring object using the reflected light. It is.

[0002]

2. Description of the Related Art In recent years, a non-contact method using minute beam light has been often used for height measurement. The conventional technique will be described below. FIG. 5 shows the principle of a conventional non-contact height measuring device. In FIG. 5 , reference numeral 1 denotes a light source for generating a minute light beam. Reference numeral 2 denotes an optical system for irradiating the substrate 11 on which the measurement object 3 is mounted with spot light of a minute beam. Reference numeral 4 denotes a half mirror that deflects reflected light from the measurement target 3 in the vertical direction. Reference numeral 5 denotes a lens system for collecting the deflected reflected light. Reference numeral 8 denotes a photoelectric conversion element that detects the amount of reflected light after passing through the lens system 5. Reference numeral 7 denotes an aperture for limiting reflected light emitted to the photoelectric conversion element 8. Reference numeral 10 denotes a lens movement actuator that moves the lens system 5 in the optical axis direction to change the amount of light irradiated on the photoelectric conversion element 8.

[0003] The operation of the non-contact height measuring device constructed as described above will be described below. First, the measuring object 3 is spot-irradiated with a minute beam light from the light source 1 and the optical system 2, and reflected light in the vertical direction from the spot irradiation position is deflected by the half mirror 4 toward the lens system 5. Then, the reflected light condensed by the lens system 5 is limited by the restrictor 7, and the amount of the light is measured by the photoelectric conversion element 8. At this time, the lens system 5 is moved in the optical axis direction by the lens moving actuator 10 so that the output of the photoelectric conversion element 8 is maximized by utilizing the fact that the amount of light at the focal position of the reflected light is maximized. Knowing the position of the system 5 allows the height of the measuring object 3 to be measured.

[0004]

However, in the above-described conventional configuration, the output of the photoelectric conversion element is maximized.
Since the lens system 5 has to be moved by the lens moving actuator 10, the measurement takes time. Further, since only one photoelectric conversion element 8 is used, the maximum value of the light amount cannot be measured correctly due to a variation in the light amount distribution of the reflected light due to uneven surface conditions of the measurement object.
There is a problem that a measurement error occurs.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a measuring device for measuring the height of an object to be measured with high accuracy and at high speed.

[0006]

Non-contact height measuring apparatus of the present invention to solve the above problems SUMMARY OF THE INVENTION comprises a light source for generating a fine beam, and focusing the minute light beam onto a measurement object irradiated An optical system to perform, and the microbeam on the object to be measured
A lens system for condensing reflected light from a light irradiation position,
The reflected light collected by the lens system is split into two optical paths.
A spectroscopic unit that emits light, and one of the spectroscopic components
To converge the reflected light of the
It is arranged at a position having a different optical path length, and reflects the reflected light after the spectral separation.
A grain of the same size that deflects and limits the amount of light at the same time
A plurality of squeezing means provided with a squeezing means,
Receives the light that has passed through the streamer, depending on the amount of light received
First photoelectric conversion means for converting the output into electrical output,
The reflected light that is split by the light
Next position at different optical path length to deflect in different directions
And deflects the reflected light after the spectral
Multiple apertures with the same size to limit the amount of light
Deflecting means, and light deflected by the deflecting means.
The second is to receive the light and convert it to an electrical output according to the amount of received light.
A photoelectric conversion means for measuring the height of the object to be measured by comparing the electrical outputs of the first and second photoelectric conversion means.

[0007]

According to the above arrangement, each of the obtained photoelectric conversion means can be used .
The focal length can be determined by obtaining the optical path length using the accumulated value of the output . Therefore, the height of the measurement object can be measured at high speed without moving the lens system. Further, to approximate the relationship between the light amount and the optical path length from the plurality of photoelectric conversion means, an error occurs in the output of some photoelectric conversion elements due to the variation in the light amount distribution of the reflected light due to uneven surface conditions of the measurement object. Is less affected, and the height can be measured with high accuracy.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram of a non-contact height measuring device according to the first embodiment. In FIG. 1 , reference numeral 1 denotes a light source for generating a minute light beam, 2 denotes an optical system for spot-irradiating the minute light beam onto a measurement target 3, 4.
Is a half mirror for deflecting the reflected light from the spot irradiation position of the measuring object 3 in the vertical direction from the spot irradiation position, 5 is a lens system for condensing the reflected light deflected by the half mirror 4, 6 is a lens system 5 Is a beam splitter for splitting the reflected light after passing through the first and second optical paths in two directions. Reference numeral 9 denotes a reflecting mirror with a diaphragm for deflecting the reflected light and limiting the amount of the diaphragm to the same diaphragm amount. For example, as shown in FIG.
A perforated mirror having the same size of the squeezed portion is used. Reference numeral 8 denotes a photoelectric conversion element for detecting the amount of reflected light after being reflected by each of the reflecting mirrors 9 with a stop or after passing through the apertures of the reflecting mirrors 9 with a stop.

In the figure, in the portion A where the reflected light near the focal point of the first optical path converges, the amount of light after passing through the aperture of the reflecting mirror 9 with a diaphragm is enlarged by the reflected light near the focal point of the second optical path. In section B, the reflecting mirror 9 with a diaphragm and the photoelectric conversion element 8 are arranged so that the amount of light reflected by the reflecting mirror 9 with a diaphragm can be measured. Part A of the first optical path and B of the second optical path
The arrangement of the reflecting mirror 9 with a diaphragm and the photoelectric conversion element 8 in the section will be described in more detail with reference to FIG . First, FIG.
In (a) , the portion A of the first optical path is an optical path in which the reflected light near the focal point converges.
Place A1. Then, placing the photoelectric conversion elements 8A 1 to allow receiving the reflected light passing through the diaphragm aperture with reflector 9A 1. Subsequently, with throttle reflector 9A 1 aperture with reflector 9A 2 on the optical path of the reflected light reflected place by, with throttle reflector photoelectric conversion element as 9A 2 aperture can receive the reflected light passing through the placing 8A 2. Likewise the arrangement of the combination of the diaphragm with the reflector and the photoelectric conversion elements repeated n times, placed in the n-th behind the always focus the Reflective mirror 9A n aperture.

In FIG. 2B, part B of the second optical path is an optical path in which the reflected light near the focal point expands. On this optical path, the reflected light with the aperture is always located before the focal position. placing a mirror 9B 1. The photoelectric conversion element 8B 1 is configured to receive the light reflected by the reflecting mirror 9B 1 with the stop.
Place. Subsequently, with throttle reflector 9B 1 of the aperture with reflector 9B 2 on the optical path of the reflected light which has passed through the diaphragm disposed, with throttle reflector 9B photoelectric conversion element so that it can receive the reflected light reflected by 2 placing 8B 2. Similarly, the arrangement of the combination of the reflecting mirror with the diaphragm and the photoelectric conversion element is repeated n times. Then, placing the photoelectric conversion element 8B n + 1 for receiving the reflected light passing through the diaphragm aperture with reflector 9B n last.

A method of processing the output value of the photoelectric conversion element 8 in the height measuring device configured as described above will be described. In the portion A of the first optical path where the reflected light converges, the amount of light after passing through the aperture of the reflecting mirror 9 with a diaphragm is measured.
When the light image irradiated on the reflecting mirror with the stop is smaller than the aperture of the reflecting mirror and the reflection on the reflecting mirror surface is eliminated, the output of the photoelectric conversion element group located thereafter becomes zero. This position is defined as the i-th position in the portion A of the first optical path. Similarly, also in the portion B of the second optical path, the position when the output of the photoelectric conversion element 8 becomes 0 without being deflected by the reflecting mirror 9 with the stop is the j-th position. In the portion B where the reflected light of the second optical path expands, the output values of the photoelectric conversion elements before the j-th are ignored and set to 0, and the output values of the photoelectric conversion elements after the j-th are corrected.
That is, the output value of the photoelectric conversion element in the portion A of the first optical path is
The total Shiguma8A n and 8Atotal, photoelectric at B of the second optical path
The total Shiguma8B n output values of the conversion element and 8Btotal, second k-th in the B portion of the optical path (j ≦ k ≦ n + 1 ) correcting the added 8B k of the following equation to output values 8B k photoelectric conversion element ' And amend
The sum of the output values in the subsequent B section, Σ8Bn`, is the sum of the outputs in the A section.
Total 8Atotal (= Σ8A n) becomes equal to a.

8Bk ′ = 8Bk × (8Atotal / 8Btotal ) FIG. 4 is a graph showing the relationship between the output value of the photoelectric conversion element and the position. This figure will be described. The horizontal axis, the optical path length from the object to be measured 3 corresponding photoelectric conversion element 8A l located A portion of the first optical path 8A i-1 (lA i- 1 from lA l)
And the photoelectric conversion elements 8Bj to 8 located in the second optical path B portion.
Corresponding optical path length B n + 1 is taken and (lB n + 1 from LBJ). The vertical axis, in a portion corresponding to the first optical path length of the optical path of the horizontal axis, k th output 8A n of the photoelectric conversion element (1 ≦ k <i
The accumulated value Σ8 Ak up to -1) is taken. Then, in the portion corresponding to the second optical path length on the horizontal axis, the total value 8Atotal of the outputs of the photoelectric conversion elements 7 in the first optical path A portion is calculated as
The value obtained by subtracting the accumulated value Σ8Bk ′ of the photoelectric conversion element 8Bk ′ up to the k-th (j ≦ k ≦ n + 1) is (8Atotal−Σ8Bk ′).

Each of these measurement points is approximated by, for example, the least square method, and the relationship between the optical path length and the light amount is represented by an approximate curve. From this approximate curve, the optical path length l at which the maximum value 8max of the cumulative value (light amount) of the photoelectric conversion element outputs on the vertical axis is obtained. This optical path length becomes the focal length of the reflected light, and the height of the measurement object can be known from the relationship between the optical path length and the height of the measurement object set in advance.

As described above, according to this embodiment, a plurality of reflecting mirrors with a stop and a photoelectric conversion element are arranged on the optical path of the reflected light to measure the light amount, and the maximum light amount is obtained by interpolating between the measurement points. Since it is not necessary to detect the focal point by moving the lens system with an actuator or the like, the height can be measured at high speed. In addition, since the relationship between the light amount and the optical path length is approximated by using a plurality of photoelectric conversion elements, the influence of the variation in the light amount distribution of the reflected light due to the unevenness of the surface state of the measurement object is reduced, and the measurement accuracy is improved.

In this embodiment, the lens system 5 is arranged before the beam splitter 6, but the beam splitter 6
The lens system 5 may be arranged after the above, or the lens system 5 may be arranged between the measurement object 3 and the half mirror 4. Needless to say, a perforated mirror may be used instead of the half mirror 4.

[0016]

As described above, according to the present invention, a plurality of photoelectric conversion elements are arranged at positions where the optical path lengths of reflected light from an object to be measured are different from each other, and the amount of reflected light and the amount of reflected light are determined based on the output of the photoelectric conversion elements. By examining the focal position of the reflected light by approximating the relationship with the optical path length, it is possible to realize an excellent non-contact height measuring device capable of measuring the height of the measuring object at high speed. Furthermore, even if an error occurs in the output of some photoelectric conversion elements due to variations in the distribution of the amount of reflected light due to unevenness in the surface state of the measurement target, the influence is reduced,
It can measure with high accuracy.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a non-contact height measuring device according to a first embodiment of the present invention.

FIG. 2 (a) Reflection with a stop in section A of the first optical path
Arrangement diagram of mirror and photoelectric conversion element (b) Reflector with diaphragm and photoelectric converter in portion B of second optical path
Conversion element layout

FIG. 3 is a perspective view of a reflecting mirror with a stop in the embodiment.

FIG. 4 shows the output of the photoelectric conversion element and the optical path length in the embodiment .
Relationship diagram

FIG. 5 is a configuration diagram of a conventional non-contact height measuring device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Light source 2 Optical system 3 Object to be measured 4 Half mirror 5 Lens system 6 Beam splitter 7 Aperture 8 Photoelectric conversion element 9 Reflector with a diaphragm 10 Lens movement actuator

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tomohiro Kimura 2-2-1-10 Kotobukicho, Takamatsu-shi, Kagawa Inside Matsushita Kotobuki Electronic Industries Co., Ltd. (72) Eiji Okuda 2-2-2 Kotobukicho, Takamatsu-shi, Kagawa No. 10 Matsushita Hisashi Electronics Co., Ltd. (56) References JP-A-49-134354 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01B 11/00-11/30 102 G01C 3/00-3/32

Claims (2)

    (57) [Claims]
  1. A light source for generating a minute beam light; an optical system for condensing and irradiating the minute beam light on a measuring object; and a reflected light from an irradiation position of the minute beam light on the measuring object. A lens system for condensing the reflected light, a spectroscopic unit for dispersing the reflected light condensed by the lens system into two optical paths, and sequentially converging one of the reflected lights separated by the spectroscopic unit in different directions. Arranged at different positions of the optical path length to deflect, a plurality of squeezing means having the same size of squeezing means for deflecting the reflected light after the spectroscopy and simultaneously limiting the amount of light, and passed the squeezing means of the respective squeezing means. First photoelectric conversion means for receiving light respectively and converting the light into an electrical output corresponding to the amount of light received; and an optical path for sequentially deflecting the enlarged light of the other reflected light split by the splitting means in different directions. Long A plurality of deflecting units arranged at different positions and having the same size as the deflecting unit that deflects the reflected light after the spectroscopy and simultaneously limits the amount of the reflected light, respectively receives the light deflected by the deflecting unit. And a second photoelectric conversion unit that converts the electric output into an electric output according to the amount of received light, and measures the height of the object to be measured in comparing the electric outputs of the first and second photoelectric conversion units. Non-contact height measuring device characterized by the above-mentioned.
  2. 2. The method according to claim 1, wherein the reflected light from the irradiation position of the minute beam light on the object to be measured is spectrally separated by spectral means, and then the reflected light after spectral separation is condensed by a lens system. The non-contact height measuring device according to claim 2.
JP19930391A 1991-08-08 1991-08-08 Non-contact height measuring device Expired - Fee Related JP3146538B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19930391A JP3146538B2 (en) 1991-08-08 1991-08-08 Non-contact height measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19930391A JP3146538B2 (en) 1991-08-08 1991-08-08 Non-contact height measuring device

Publications (2)

Publication Number Publication Date
JPH0540035A JPH0540035A (en) 1993-02-19
JP3146538B2 true JP3146538B2 (en) 2001-03-19

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Family Applications (1)

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