JP2830559B2 - Method of manufacturing a composite thin film magnetic head - Google Patents

Method of manufacturing a composite thin film magnetic head

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JP2830559B2
JP2830559B2 JP3331337A JP33133791A JP2830559B2 JP 2830559 B2 JP2830559 B2 JP 2830559B2 JP 3331337 A JP3331337 A JP 3331337A JP 33133791 A JP33133791 A JP 33133791A JP 2830559 B2 JP2830559 B2 JP 2830559B2
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yoke
lower
width
upper
shield
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JPH05143939A (en
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▲隆▼男 丸山
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日本電気株式会社
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【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【技術分野】本発明は複合型薄膜磁気ヘッドに関し、特に磁気抵抗効果ヘッドと巻線型ヘッドとを組合せた複合型薄膜磁気ヘッドの製造方法に関する。 TECHNICAL FIELD The present invention relates to a composite type thin film magnetic head, in particular a method for manufacturing a composite thin film magnetic head of a combination of a magnetoresistive head and the wire-wound head.

【0002】 [0002]

【従来技術】従来、この種の複合型薄膜磁気ヘッドにおいては、図5に示すように、下シールド1と、下再生ギャップ2と、磁気抵抗効果素子3と、上再生ギャップ5 BACKGROUND Conventionally, in this kind of composite type thin film magnetic head, as shown in FIG. 5, the lower shield 1, a lower reproducing gap 2, the magnetoresistance effect element 3, the upper reproducing gap 5
と、上シールドを兼ねる下ヨーク10と、記録ギャップ7と、上ヨーク11とが順次積層されている。 When a lower yoke 10 also serving as a top shield, a recording gap 7, and the upper yoke 11 are sequentially stacked.

【0003】下ヨーク10および上ヨーク11は記録ギャップ7の磁気記録媒体(図示せず)側の面に対して反対側の端面で接続され、その接続点を中心にコイル8が平面状に巻かれている。 [0003] lower yoke 10 and upper yoke 11 (not shown) the magnetic recording medium of the recording gap 7 side surface are connected at the end face opposite to the winding and the connection point coil 8 in a plane at the center is he. このコイル8に電流が流されると下ヨーク10および上ヨーク11が磁化され、記録ギャップ7から漏洩する磁界で磁気記録媒体に対する記録動作が行われる。 When this current flows through the coil 8 lower yoke 10 and upper yoke 11 is magnetized, the recording operation for the magnetic recording medium is performed in a magnetic field leaked from the recording gap 7.

【0004】一方、磁気記録媒体からのデータの再生時には磁気記録媒体から発生する磁界を磁気抵抗効果素子3の抵抗値の変化として検出し、センス電流を供給することによって再生出力電圧を得る。 On the other hand, upon reproduction of data from the magnetic recording medium to detect the magnetic field generated from the magnetic recording medium as a change in the resistance value of the magnetoresistive effect element 3, reproduction output voltage by supplying a sense current. 下ヨーク10および下シールド1は磁気抵抗効果素子3が検知する磁界の検出幅を下再生ギャップ2から上再生ギャップ5の間に制限し、磁気抵抗効果素子3の分解能を増加させる。 Lower yoke 10 and the lower shield 1 limits the detection width of the magnetic field detecting magnetoresistive effect element 3 between the upper reproducing gap 5 from the bottom read gap 2 increases the resolution of the magnetoresistive element 3.

【0005】このような従来の複合型薄膜ヘッドでは、 [0005] In such a conventional composite type thin-film head,
下ヨーク10の磁気記録媒体対向面の幅を上ヨーク11 On the width of the magnetic recording medium facing surface of the lower yoke 10 yoke 11
の磁気記録媒体対向面の幅に一致させて形成することが非常に困難であるので、記録幅aを厳密に制御することができないという欠点がある。 Since it is very difficult to match the width of the magnetic recording medium facing surface formed by a drawback that it is impossible to strictly control the printing width a. すなわち、上ヨーク11 In other words, the upper yoke 11
を下ヨーク10に重ねて形成する際に位置合せ誤差が避けられないため、上ヨーク11の幅を下ヨーク10の幅よりも狭くせざるを得ないので、上ヨーク11の幅と下ヨーク10の幅との差の領域に記録にじみが生じ、記録幅aの両端がぼやけてしまう。 Since the alignment error in forming overlapping the lower yoke 10 inevitable, since the width of the upper yoke 11 inevitably narrower than the width of the lower yoke 10, the width of the upper yoke 11 and lower yoke 10 width side writing occurs in the region of the difference between the both ends of the recording width a blurred.

【0006】一方、磁気記録媒体対向面において上ヨーク11の幅と下ヨーク10の幅とを夫々所定の記録幅a On the other hand, the magnetic recording medium width and the width and the respective predetermined recording width a of the lower yoke 10 of the upper yoke 11 in the opposing surface
よりも予め広く形成しておき、上ヨーク11を形成した後に所定の記録幅aを有するマスク材料を用いて上ヨーク11と下ヨーク10とを一括してイオンエッチングすることによって、上ヨーク11の幅と下ヨーク10の幅とを一致させるヘッド作製方法がインダクティブヘッド Advance wider than, by ion etched at the same time and the upper yoke 11 and lower yoke 10 by using a mask material having a predetermined recording width a after the formation of the upper yoke 11, upper yoke 11 head manufacturing method to match the width of the lower yoke 10 is inductive head
では提案されている。 In has been proposed. しかし、この方法においては上ヨーク11と下ヨーク10 の下端に至るまでを連続してエッチングするため、エッチングの終点制御が困難であり、 磁気抵抗効果素子を備えた複合型薄膜磁気ヘッドに However, in order to sequentially etching up to the lower end of the upper yoke 11 and lower yoke 10 in this way, it is difficult to end point control of the etching, the composite type thin film magnetic head including a magnetoresistive element
適用すると、エッチングの際にしばしば磁気抵抗効果素子3や電極4を損傷させてしまうという欠点がある。 Once applied, there is a disadvantage that often damage the magnetoresistance effect element 3 and the electrode 4 during etching.

【0007】 [0007]

【発明の目的】本発明は上記のような従来のものの欠点を除去すべくなされたもので、記録幅を厳密に制御することができるとともに記録にじみを少なくすることができ、磁気抵抗効果素子や電極の損傷を防止することができる複合型薄膜磁気ヘッドの製造方法の提供を目的とする。 SUMMARY OF THE INVENTION The present invention has been made to remove the drawbacks of the above-described conventional, it is possible to reduce the bleeding recording it is possible to strictly control the recording width, Ya magnetoresistive element and an object thereof is to provide a method of manufacturing a composite thin film magnetic head capable of preventing damage to the electrode.

【0008】 [0008]

【発明の構成】本発明による複合型薄膜磁気ヘッドは、 SUMMARY OF THE INVENTION The composite type thin film magnetic head according to the present invention,
下シールドと下再生ギャップと磁気抵抗効果素子と上再生ギャップと上シールドとが順次積層された磁気抵抗効果ヘッドと、前記上シールドを兼ねる下ヨークと上ヨークとの間に記録ギャップとコイルとが積層された巻線型ヘッドとからなる複合型薄膜磁気ヘッドであって、前記下ヨークの磁気記録媒体対向面を前記上ヨーク側の辺が前記上ヨークと等しい幅の四辺形の上半部と、前記下シールド側の辺が前記下シールドと略同一幅の四辺形の下半部とから構成するようにしたことを特徴とする。 A magnetoresistive head and the lower shield and the lower reproducing gap and the magnetoresistive element and the upper reproducing gap and the upper shield are sequentially stacked, and a recording gap and a coil between the lower yoke and the upper yoke serves as the on shield a composite type thin film magnetic head comprising a laminated wirewound head, and the upper half of the quadrilateral width of the magnetic recording medium facing surface of the lower yoke the upper yoke side edges is equal to the upper yoke, wherein the lower shielding side in edge so as to constitute and a lower half of the quadrilateral of the lower shield and substantially the same width.

【0009】本発明による複合型薄膜磁気ヘッドの製造方法は、下シールド、下再生ギャップ、磁気抵抗効果素子、上再生ギャップ、上シールドを兼ねる下ヨーク、記録ギャップ、コイル、および上ヨークを順次積層し、前 [0009] method of manufacturing a composite thin film magnetic head according to the present invention, the lower yoke also serves as the lower shield, the lower reproducing gap, the magnetoresistive element, the upper reproducing gap, the upper shield, the recording gap, the coil, and laminating the upper yoke sequentially and, before
記上シールドを兼ねる下ヨークが、磁気記録媒体対向面 Lower yoke serving as a serial on shield, magnetic recording medium facing surface
において、前記下シールド側の辺が前記磁気抵抗効果素 In the lower shield side sides the magnetoresistive element
子に接続される2つの電極の最外端間の幅より大きい幅 Width greater than the width between the outermost ends of the two electrodes connected to the child
の四辺形をなす下半部と、前記上ヨーク側の辺が前記上 A lower half portion which forms a quadrilateral, the upper yoke side edges on the
ヨークと等しい幅の四辺形をなす上半部とから構成され Is composed of the semi-portion upper forming quadrilaterals width equal yoke
る複合型薄膜磁気ヘッドの製造方法であって、前記上ヨ A method of manufacturing a that the composite type thin film magnetic head, the upper yo
ークとなる部分を成膜した後に、前記上ヨークから記録 After forming the portion to be the over-click, recorded from the upper yoke
ギャップおよび前記上シールドを兼ねる下ヨークの前記 Said of the lower yoke which also serves as a gap and the upper shield
上ヨーク側の上半部までのみを前記磁気記録媒体対向面 Only until the upper half of the upper yoke side of the magnetic recording medium facing surface
近傍のみ記録幅と同一幅のマスクを用いて一括してイオ Io collectively using a mask of the recording width and the same width only in the vicinity
ンエッチング加工し、前記上シールドを兼ねる下ヨーク Emissions etched, the lower yoke serves as the on shield
の上ヨーク側の辺に連なる側面の2辺が前記上ヨークの Two sides of the side surfaces connected to the yoke side of the edge on the can of the upper yoke
側面の辺の延長線上にあるように形成することを特徴とする。 And forming as an extension of the side edges.

【0010】 [0010]

【実施例】次に、本発明の一実施例について図面を参照して説明する。 EXAMPLES will be described with reference to the accompanying drawings, an embodiment of the present invention.

【0011】図1は本発明の一実施例の斜視図であり、 [0011] Figure 1 is a perspective view of one embodiment of the present invention,
図2は図1の正面図である。 Figure 2 is a front view of FIG. これらの図において、下シールド1の上には下再生ギャップ2を介して磁気抵抗効果素子3と磁気抵抗効果素子3に接続される電極4とが形成されている。 In these figures, and an electrode 4 connected to the magnetoresistance effect element 3 and the magnetoresistive element 3 via a lower reproducing gap 2 is formed on the lower shield 1. これら磁気抵抗効果素子3および電極4の上には上再生ギャップ5を介して上シールドを兼ねる下ヨーク6が形成されている。 Lower yoke 6 also serving as a top shield through the upper reproducing gap 5 on top of these magneto-resistance effect element 3 and the electrode 4 are formed. ここで、磁気抵抗効果素子3および電極4の磁気記録媒体対向面近傍においては少なくとも下シールド1上にのみあり、かつ下ヨーク6によって完全に覆われている。 Here, it is completely covered with the magnetoresistive element 3 and located only on the lower shield 1 at least in the magnetic recording medium facing surface near the electrode 4, and the lower yoke 6.

【0012】下ヨーク6の上には記録ギャップ7を介して上ヨーク9が形成され、下ヨーク6および上ヨーク9 [0012] On the lower yoke 6 upper yoke 9 is formed via a recording gap 7, the lower yoke 6 and the upper yoke 9
は記録ギャップ7の磁気記録媒体(図示せず)側の面に対して反対側の端面で接続され、その接続点を中心にコイル8が平面状に巻かれている。 Are connected by an end surface opposite to the magnetic recording medium (not shown) of the side surface of the recording gap 7, the coil 8 is wound in a planar shape about its connection point.

【0013】また、下ヨーク6の形状は上半部6aが上ヨーク9と等しい幅の矩形で、下半部6bが下シールド1の幅と略同一幅の台形状となっている。 Further, a rectangular width equal upper yoke 9 of the shape of the lower yoke 6 upper half portion 6a, and the lower half 6b has a width substantially the same width of the trapezoidal lower shield 1. 上ヨーク9および下ヨーク6の上半部6aの幅は下シールド1および下ヨーク6の下半部6bの幅よりも狭くなっている。 Thickness of the top half 6a of the upper yoke 9 and the lower yoke 6 is narrower than the width of the lower half portion 6b of the lower shield 1 and the lower yoke 6. すなわち、下ヨーク6の上半部6aは下ヨークとして動作し、下ヨーク6の下半部6bは上シールドとして作用する。 That is, the halves 6a on the lower yoke 6 operates as the lower yoke, the lower half 6b of the lower yoke 6 serves as an upper shield. そのため、記録幅aは互いに等しい幅を有する上ヨーク9と下ヨーク6の上半部6aとによって厳密に制御される。 Therefore, the recording width a is tightly controlled by the half 6a on the upper yoke 9 and the lower yoke 6 having a width equal to each other.

【0014】また、磁気抵抗効果素子3および電極4は下ヨーク6の下半部6bによって完全に覆われているため、下ヨーク6および上ヨーク9の形成時に断線を引起こすような損傷を受けることはない。 Further, since it is completely covered by the lower half 6b of the lower yoke 6 magnetoresistive element 3 and the electrode 4 is damaged, such as cause a disconnection in the formation of the lower yoke 6 and the upper yoke 9 it is not.

【0015】さらに、下シールド1および下ヨーク6においては少なくともコイル8が巻かれる部分の断面形状が台形となっているため、それらの間に形成される磁気抵抗効果素子3の電極4やコイル8が下シールド1および下ヨーク6における段差を乗越える際に断線などが生じ難くなっている。 Furthermore, since the cross-sectional shape of a portion at least of the coil 8 is wound in the lower shield 1 and the lower yoke 6 has a trapezoidal electrode 4 of the magnetoresistance effect element 3 formed therebetween and a coil 8 There disconnection when overcome the difference in level lower shield 1 and the lower yoke 6 is made less likely to occur. 但し、下シールド1および下ヨーク6の段差解消を行う平坦処理が行われる場合には、必ずしもそれらの断面形状が台形である必要はない。 However, when the flattening processing for performing step difference cancellation under shield 1 and the lower yoke 6 is made is not necessarily their cross-sectional shape is trapezoidal.

【0016】下ヨーク6の上半部6aおよび下半部6b [0016] The halves 6a and the lower half portion 6b on the lower yoke 6
各々の厚さは上ヨーク9から下半部6bへの磁束の漏洩とシールド効果とによって最適化される。 The thickness of each of which is optimized by the leakage and the shield effect of the magnetic flux from the upper yoke 9 to the lower half 6b. 上ヨーク9から下半部6bへの磁束の漏洩の影響を避けるために、上半部6aの厚さは記録ギャップ7の幅の5倍以上であることが望ましい。 To avoid the influence of the magnetic flux leakage from the upper yoke 9 to the lower half 6b, it is desirable that the thickness of the upper part 6a is at least 5 times the width of the recording gap 7. また、シールド効果を十分に得るために、下半部6bの厚さは1μm以上であることが望ましい。 Further, in order to obtain a shielding effect sufficiently, the thickness of the lower half 6b is desirably 1μm or more.

【0017】図3および図4は本発明の一実施例による複合型薄膜磁気ヘッドの製造方法を示す図である。 [0017] Figures 3 and 4 are views showing a manufacturing method of a composite type thin film magnetic head according to an embodiment of the present invention. これら図3および図4を用いて本発明の一実施例による複合型薄膜磁気ヘッドの製造方法について以下説明する。 With these FIGS. 3 and 4 for manufacturing a composite type thin film magnetic head according to an embodiment of the present invention will be described below.

【0018】まず、図示せぬ基板上にNiFe合金からなる下シールド1をメッキやスパッタなどの方法によって成膜し、イオンエッチング技術を用いて加工する[図3(a)参照]。 [0018] First, the lower shield 1 of NiFe alloy on a substrate (not shown) is deposited by a method such as plating or sputtering, it is processed by ion etching technique [FIGS. 3 (a) Reference. このとき、マスクとなるフォトレジストを130 度程度でベークし、入射角10°程度でエッチングすることによって下シールド1の磁気記録媒体対向面に直交する端面をテーパ化することができる。 In this case, it is possible to a photoresist serving as a mask was baked at about 130 degrees and tapered end surfaces perpendicular to the magnetic recording medium facing surface of the lower shield 1 by etching in about an incident angle 10 °.

【0019】次に、Al 23からなる下再生ギャップ2をスパッタ法によって成膜した後に、NiFe、Ti Next, the lower reproducing gap 2 of Al 2 O 3 after forming by sputtering, NiFe, Ti
およびCoZrMoの積層構造からなる磁気抵抗効果素子3をスパッタ法や蒸着法などによって成膜し、フォトリソグラフィ技術やイオンエッチング技術を用いて図示した形状に加工する。 And a magnetoresistance effect element 3 having a layered structure of CoZrMo deposited by sputtering or vapor deposition, is processed into a shape shown by photolithography and ion etching technique. この後に、磁気抵抗効果素子3の両端にAuからなる電極膜を蒸着法などによって成膜し、電極4を形成する[図3(b)参照]。 Thereafter, an electrode film made of Au at both ends of the magnetoresistive element 3 was formed by vapor deposition method to form the electrode 4 [see FIG. 3 (b)].

【0020】これら磁気抵抗効果素子3および電極4の上にAl 23からなる上再生ギャップ5をスパッタ法によって成膜した後に、NiFe合金からなる下ヨーク6をメッキやスパッタなどの方法によって成膜し、イオンエッチング技術を用いて加工する[図3(c)参照]。 [0020] formed over reproduction gap 5 made of Al 2 O 3 on top of these magneto-resistance effect element 3 and the electrode 4 after forming by sputtering, the lower yoke 6 made of NiFe alloy by a method such as plating or sputtering and film, is processed by ion etching [Fig. 3 (c) reference. このとき、上記の下シールド1の場合と同様の処理を施すことによって、下ヨーク6の磁気記録媒体対向面に直交する端面をテーパ化することができる。 At this time, by performing the same processing as in the case lower shield 1 above, it is possible to taper the end surface perpendicular to the magnetic recording medium facing surface of the lower yoke 6. また、 Also,
下ヨーク6の磁気記録媒体対向面の下辺の幅を下シールド1の幅と略同一幅として下ヨーク6で磁気抵抗効果素子3および電極4を完全に覆うようにする。 To completely cover the magnetoresistance effect element 3 and the electrode 4 in the lower yoke 6 the width of the lower edge of the magnetic recording medium facing surface of the lower yoke 6 as width substantially the same width of the lower shield 1.

【0021】この下ヨーク6の上にAl 23からなる記録ギャップ7をスパッタ法によって成膜した後に、上下に絶縁層(図示せず)を介してコイル8を成膜加工する[図3(d)参照]。 [0021] After forming by sputtering the recording gap 7 of Al 2 O 3 on top of the lower yoke 6, vertically via an insulating layer (not shown) is deposited machining coil 8 [3 see (d)]. コイル8は予め下地膜上にフォトレジストパターンを形成した基板上に電気メッキ法によって成膜される。 Coil 8 is deposited by electroplating method on a substrate to form a photoresist pattern in advance on the base film.

【0022】コイル8の上にNiFe合金からなる上ヨーク9をメッキやスパッタなどの方法によって成膜した後に、フォトリソグラフィ技術やイオンエッチング技術を用いて図示した形状に加工する。 [0022] The upper yoke 9 made of NiFe alloy on the coil 8 after forming by a method such as plating or sputtering, is processed into a shape shown by photolithography and ion etching technique. このとき、上ヨーク9の磁気記録媒体対向面の幅は記録幅aより広く設定される[図4(a)参照]。 The width of the magnetic recording medium facing surface of the upper yoke 9 is set wider than the recording width a [FIGS. 4 (a) Reference.

【0023】ここで、下シールド1と下ヨーク6と上ヨーク9とに対する加工法としてフォトリソグラフィ技術やイオンエッチング技術を用いる例を示したが、予め下地膜上にフォトレジストパターンを形成した基板面に電気メッキ法によって形成することも可能である。 [0023] Here, the substrate surface although an example of using a photolithography technique and ion etching as a processing method for the lower shield 1 and the lower yoke 6 and the upper yoke 9, forming a photoresist pattern on the advance base film it is also possible to form by electroplating method. この場合、端面形状をテーパ化することができないので、電極4あるいはコイル8の断線防止のために何らかの平坦化処理が必要となる。 In this case, it is impossible to taper the edge shapes, some planarization process to prevent disconnection of the electrode 4 or the coil 8 is required.

【0024】上ヨーク9を形成した後に、所定の記録幅aを有するフォトレジストマスクを用いて、上ヨーク9 [0024] After the formation of the upper yoke 9, using a photoresist mask having a predetermined recording width a, the upper yoke 9
と下ヨーク6とを一括してイオンエッチング技術によって図示した形状に加工する。 Collectively the lower yoke 6 and processed into a shape shown by ion etching technique. すなわち、上ヨーク9の磁気記録媒体対向面の幅が記録幅aに加工されるとともに、下ヨーク6に上半部6aと下半部6bとが形成される[図4(b)参照]。 That is, the width of the magnetic recording medium facing surface of the upper yoke 9 is processed in the recording width a, and Uehan portion 6a and the lower half 6b is formed on the lower yoke 6 [see FIG. 4 (b)].

【0025】この工程において、上ヨーク9および下ヨーク6のエッチングされる領域は、図1に示すように、 [0025] In this step, a region to be etched in the upper yoke 9 and the lower yoke 6, as shown in FIG. 1,
磁気記録媒体対向面近傍のみであり、かつエッチングは下ヨーク6の途中まで行われた所で停止される。 But only the magnetic recording medium facing surface vicinity, and the etching is stopped at made halfway lower yoke 6.

【0026】各層の膜厚は下シールド1が1〜2μm、 [0026] The thickness of each layer under the shield 1 1~2μm,
下再生ギャップ2が0.1 〜0.5 μm、上再生ギャップ2 Lower reproducing gap 2 is 0.1 ~0.5 μm, the upper reproduction gap 2
が0.1 〜0.5 μm、下ヨーク6の下半部6bが1〜2μ But 0.1 ~0.5 μm, the lower half portion 6b of the lower yoke 6 1~2μ
m、下ヨーク6の上半部6aが3〜4μm、記録ギャップ7が0.2 〜0.7 μm、上ヨーク9が3〜5μmに設定される。 m, halves 6a on the lower yoke 6 is 3 to 4 [mu] m, the recording gap 7 is 0.2 to 0.7 [mu] m, the upper yoke 9 is set to 3 to 5 [mu] m.

【0027】このように、下ヨーク6の磁気記録媒体対向面を上ヨーク9側の辺が上ヨーク9と等しい幅の上半部6aと、下シールド1側の辺が下シールド1と略同一幅の下半部6bとから構成することによって、記録幅a [0027] Thus, substantially the same as, the lower shield 1 side edges and the lower shield 1 half 6a on the magnetic recording medium facing surface width equal sides of the upper yoke 9 side and the upper yoke 9 of the lower yoke 6 by configuring from the lower half 6b of the width, the recording width a
を下ヨーク6の上半部6aと上ヨーク9とによって厳密に制御することができる。 The can be strictly controlled by the half 6a and the upper yoke 9 on the lower yoke 6. これによって、記録幅aの両端における記録にじみを少なくすることができる。 Thereby, it is possible to reduce the bleeding recording at both ends of the recording width a.

【0028】また、下ヨーク6の下半部6bの下シールド1側の辺の幅を磁気抵抗効果素子3に接続される電極4の幅よりも大きくすることによって、磁気抵抗効果素子3および電極4を完全に覆うことができるので、上ヨーク9の加工時の断線となるような損傷を防止することができる。 Further, by greater than the width of the electrode 4 connected to the width of the lower shield 1 sides to the magnetoresistive element 3 of the lower half 6b of the lower yoke 6, the magnetoresistive effect element 3 and the electrode 4 it is possible to completely cover, it is possible to prevent damage such as a breakage during processing of the upper yoke 9.

【0029】さらに、下シールド1および下ヨーク6において少なくともコイル8が巻かれる部分の断面形状を台形状とすることによって、磁気抵抗効果素子3に接続される電極4やコイル8の断線を生じ難くすることができる。 Furthermore, by making the portion of the cross-sectional shape at least the coil 8 is wound trapezoidal in lower shield 1 and the lower yoke 6, hardly occurs disconnection of the electrode 4 and the coil 8 is connected to the magnetoresistive element 3 can do.

【0030】さらにまた、複合型薄膜磁気ヘッドの製造方法において、下ヨーク6の下シールド1側の辺を磁気抵抗効果素子3に接続される電極4の幅よりも大きな幅で形成しかつ下ヨーク6の上ヨーク9側の辺を記録ギャップ7の幅よりも大きな幅で形成する処理と、上ヨーク9の下ヨーク6側の辺を記録ギャップ7の幅よりも大きな幅で形成する処理と、上ヨーク9の形成後に下ヨーク6の上半部6aおよび上ヨーク9を記録ギャップ7の幅と同一幅のマスクを用いてイオンエッチング加工する処理とを含むようにすることによって、記録幅aを厳密に制御することができるとともに記録にじみを少なくすることができ、磁気抵抗効果素子3や電極4の損傷を防止することができる。 [0030] Furthermore, in the manufacturing method of a composite type thin film magnetic head, than the width of the electrode 4 connected to the lower shield 1 side of the lower yoke 6 side to the magnetoresistive element 3 is formed with a large width and a lower yoke a process of forming at larger width than the width of the yoke 9 a side edge recording gap 7 on the 6, a process of forming in width greater than the width of the recording gap 7 the sides of the lower yoke 6 side of the upper yoke 9, by to include a process of ion etching using a mask halves 6a and the upper yoke 9 the width and same width of the recording gap 7 on the lower yoke 6 after formation of the upper yoke 9, the recording width a it is possible to reduce the bleeding recording it is possible to strictly control, it is possible to prevent damage of the magnetoresistive element 3 and the electrode 4.

【0031】 [0031]

【発明の効果】以上説明したように本発明の複合型薄膜磁気ヘッドによれば、下ヨークの磁気記録媒体対向面を上ヨーク側の辺が上ヨークと等しい幅の四辺形の上半部と、下シールド側の辺が下シールドと略同一幅の四辺形の下半部とから構成することによって、記録幅を厳密に制御することができるとともに記録にじみを少なくすることができるという効果がある。 According to the composite type thin film magnetic head of the present invention as described in the foregoing, and on the upper yoke side of the magnetic recording medium facing surface of the lower yoke sides of a quadrilateral equal width as the upper yoke half by lower shield side edge is composed of the lower half of the quadrilateral lower shield substantially the same width, there is an effect that it is possible to reduce the bleeding recording it is possible to strictly control the recording width .

【0032】また、本発明の他の複合型薄膜磁気ヘッドによれば、下ヨークの下シールド側の辺の幅を磁気抵抗効果素子に接続される電極の幅よりも大きくすることによって、磁気抵抗効果素子や電極の損傷を防止することができるという効果がある。 [0032] According to another composite thin film magnetic head of the present invention, by greater than the width of the electrode connected to the width of the lower shield side edges of the lower yoke to the magnetoresistive element, magnetoresistive there is an effect that it is possible to prevent damage of the effect element and the electrode.

【0033】さらに、本発明の別の複合型薄膜磁気ヘッドによれば、下ヨークにおいて少なくともコイルが巻かれる部分の断面形状を下シールド側の辺の幅が上ヨーク側の辺の幅よりも大きな台形状とすることによって、磁気抵抗効果素子に接続される電極やコイルの断線を生じ難くすることができるという効果がある。 Furthermore, according to another composite thin film magnetic head of the present invention, greater than at least a portion of the cross-sectional shape which the coil is wound in the lower shield sides of the width of the upper yoke sides of the width at the lower yoke by a trapezoidal shape, there is an effect that it is possible to hardly occur a wire breakage of the electrode and coil connected to the magnetoresistive element.

【0034】さらにまた、本発明の複合型薄膜磁気ヘッドの製造方法によれば、下ヨークの下シールド側の辺を磁気抵抗効果素子に接続される電極の幅よりも大きな幅で形成しかつ下ヨークの上ヨーク側の辺を記録ギャップの記録幅よりも大きな幅で形成する処理と、上ヨークの下ヨーク側の辺を記録幅よりも大きな幅で形成する処理と、上ヨークの形成後に下ヨークの上ヨーク側の上半部および上ヨークを記録幅と同一幅のマスクを用いてイオンエッチング加工する処理とを含むようにすることによって、記録幅を厳密に制御することができるとともに記録にじみを少なくすることができ、磁気抵抗効果素子や電極の損傷を防止することができるという効果がある。 [0034] Furthermore, the composite according to the method of manufacturing a thin film magnetic head, and a width greater width than the electrode connected to the lower shield side edges of the lower yoke to the magnetoresistive element and under the present invention a process of forming a large width yoke side edge on the yoke than the recording width of the recording gap, the process of forming the lower yoke side edges of the upper yoke in larger width than the recording width, lower after the formation of the upper yoke the halves and the upper yoke on the upper yoke side of the yoke by using the mask of the recording width and the same width by to include a process of ion etching, side writing it is possible to strictly control the recording width can be reduced, there is an effect that it is possible to prevent damage of the magnetoresistive element and the electrode.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の一実施例の斜視図である。 1 is a perspective view of an embodiment of the present invention.

【図2】図1の正面図である。 Is a front view of FIG. 1;

【図3】本発明の一実施例による複合型薄膜磁気ヘッドの製造方法を示す図である。 3 is a diagram showing a method of manufacturing a composite thin film magnetic head according to an embodiment of the present invention.

【図4】本発明の一実施例による複合型薄膜磁気ヘッドの製造方法を示す図である。 4 is a diagram showing a method of manufacturing a composite thin film magnetic head according to an embodiment of the present invention.

【図5】従来例の斜視図である。 5 is a perspective view of a conventional example.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 下シールド 2 下再生ギャップ 3 磁気抵抗効果素子 4 電極 5 上再生ギャップ 6 下ヨーク 6a 上半部 6b 下半部 7 記録ギャップ 8 コイル 9 上ヨーク 1 lower shield 2 under reproduction gap 3 magnetoresistive element 4 electrode 5 on reproduction gap 6 lower yoke 6a upper half 6b lower half 7 write gap 8 coil 9 the upper yoke

Claims (1)

    (57)【特許請求の範囲】 (57) [the claims]
  1. 【請求項1】 下シールド、下再生ギャップ、磁気抵抗効果素子、上再生ギャップ、上シールドを兼ねる下ヨーク、記録ギャップ、コイル、および上ヨークを順次積層し、前記上シールドを兼ねる下ヨークが、磁気記録媒体 1. A lower shield, the lower reproducing gap, the magnetoresistive element, the upper reproducing gap, the lower yoke also serves as the upper shield, the recording gap, the coil, and sequentially stacked on the yoke, a lower yoke also serves as the on shield, magnetic recording media
    対向面において、前記下シールド側の辺が前記磁気抵抗 In the opposing surfaces, the lower shield side sides the magnetoresistive
    効果素子に接続される2つの電極の最外端間の幅より大 Larger than the width between the outermost ends of the two electrodes connected to the effect device
    きい幅の四辺形をなす下半部と、前記上ヨーク側の辺が A lower half portion which forms a quadrilateral of hearing width, the upper yoke side edges
    前記上ヨークと等しい幅の四辺形をなす上半部とから構 Structure of the semi-section on forming a quadrilateral of the upper yoke width equal
    成される複合型薄膜磁気ヘッドの製造方法であって、 前記上ヨークとなる部分を成膜した後に、前記上ヨーク A method of manufacturing a composite thin film magnetic heads made, after forming a portion to be said on the yoke, the upper yoke
    から記録ギャップおよび前記上シールドを兼ねる下ヨー Lower yaw serving as a recording gap and the upper shield from
    クの前記上ヨーク側の上半部までのみを前記磁気記録媒 The magnetic recording medium only to the upper half on the yoke side of the click
    体対向面近傍のみ記録幅と同一幅のマスクを用いて一括 Only the body facing surface vicinity using a mask of the recording width and the same width as bulk
    してイオンエッチング加工し、前記上シールドを兼ねる Ion etched by, serves as the on shield
    下ヨークの上ヨーク側の辺に連なる側面の2辺が前記上 On two sides of the side surfaces connected to the yoke side of the edge on the lower yoke the
    ヨークの側面の辺の延長線上にあるように形成すること It is formed to an extension of the side edges of the yoke
    特徴とする複合型薄膜磁気ヘッドの製造方法。 Method of manufacturing a composite thin film magnetic head according to claim.
JP3331337A 1991-11-20 1991-11-20 Method of manufacturing a composite thin film magnetic head Expired - Lifetime JP2830559B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3331337A JP2830559B2 (en) 1991-11-20 1991-11-20 Method of manufacturing a composite thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3331337A JP2830559B2 (en) 1991-11-20 1991-11-20 Method of manufacturing a composite thin film magnetic head

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JPH05143939A JPH05143939A (en) 1993-06-11
JP2830559B2 true JP2830559B2 (en) 1998-12-02

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JPH064832A (en) * 1992-06-17 1994-01-14 Sony Corp Combine thin film magnetic head
DE69418551T2 (en) * 1993-08-27 1999-09-16 Read Rite Corp Magnetic head assembly with Schreibpol- / shield
US5438747A (en) * 1994-03-09 1995-08-08 International Business Machines Corporation Method of making a thin film merged MR head with aligned pole tips
AU6675298A (en) * 1997-03-04 1998-09-22 Micrion Corporation Thin-film magnetic recording head manufacture
US5916424A (en) 1996-04-19 1999-06-29 Micrion Corporation Thin film magnetic recording heads and systems and methods for manufacturing the same
US6332962B1 (en) 1997-06-13 2001-12-25 Micrion Corporation Thin-film magnetic recording head manufacture using selective imaging
JPH11353614A (en) 1998-06-08 1999-12-24 Nec Corp Thin-film magnetic head and magnetic memory device using the same
JP3292148B2 (en) 1998-07-15 2002-06-17 日本電気株式会社 Thin-film magnetic head, a manufacturing method thereof and a magnetic storage device
JP2000105907A (en) 1998-07-30 2000-04-11 Tdk Corp Thin film magnetic head and manufacture thereof

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JP2728487B2 (en) * 1989-02-08 1998-03-18 株式会社日立製作所 Recording and reproducing separation composite type magnetic head

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