JP2543750B2 - Magnetic head and magnetic recording / reproducing apparatus - Google Patents
Magnetic head and magnetic recording / reproducing apparatusInfo
- Publication number
- JP2543750B2 JP2543750B2 JP63172763A JP17276388A JP2543750B2 JP 2543750 B2 JP2543750 B2 JP 2543750B2 JP 63172763 A JP63172763 A JP 63172763A JP 17276388 A JP17276388 A JP 17276388A JP 2543750 B2 JP2543750 B2 JP 2543750B2
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- Prior art keywords
- magnetic
- magnetic head
- glass
- less
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Recording Or Reproducing By Magnetic Means (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は高保磁力の金属磁性材料を磁気記録媒体とす
るテープ(いわゆるメタルテープ)と組合せて使用する
のに適した磁気ヘツドに係り、特に高周波記録再生特
性、耐摩耗性、摺動性、耐久性及び量産性に優れた磁気
ヘツド及びそれを用いた磁気記録再生装置に関する。Description: TECHNICAL FIELD The present invention relates to a magnetic head suitable for use in combination with a tape (so-called metal tape) using a magnetic magnetic material having a high coercive force as a magnetic recording medium, and more particularly, to a magnetic head. The present invention relates to a magnetic head excellent in high frequency recording / reproducing characteristics, wear resistance, slidability, durability and mass productivity, and a magnetic recording / reproducing apparatus using the same.
現在、高密度磁気記録再生装置には磁気記録媒体とし
て保磁力が1000Oeを超える金属磁性材料が使用されるよ
うになつた。この磁気記録媒体に十分な情報を記録する
ためには、従来のフエライト磁気ヘツドではフエライト
の飽和磁束密度が低いため能力不足であり、特開昭60−
606号、同58−155513号、同58−98824号各公報に記載の
ような非晶質磁性合金膜−フエライト複合型磁気ヘツド
が使用される。この磁気ヘツドはフエライト磁性支持体
に形成した非晶質磁性合金膜からなる一対の磁気ヘツド
コアを、非磁性ギヤツプ材を介し低温軟化ガラスで接合
した構造となつている。At present, a metal magnetic material having a coercive force of more than 1000 Oe has come to be used as a magnetic recording medium in a high density magnetic recording / reproducing apparatus. In order to record sufficient information on this magnetic recording medium, the conventional ferrite magnetic head is insufficient in capacity because the saturation magnetic flux density of the ferrite is low.
Amorphous magnetic alloy film-ferrite composite type magnetic heads as described in JP-A Nos. 606, 58-155513 and 58-98824 are used. This magnetic head has a structure in which a pair of magnetic head cores made of an amorphous magnetic alloy film formed on a ferrite magnetic support are joined with a low temperature softening glass via a non-magnetic gap material.
この非晶質磁性合金は、フエライトより高飽和磁束密
度、かつ高磁率であるので、これを用いた磁気ヘツドは
従来のフエライト磁気ヘツドより記録再生特性が著しく
優れている。磁気ヘツド用非晶質磁性合金膜の材料とし
てはCoを主成分とする非晶質合金が使用されている。ま
た、磁気ヘツドコアの接合は非晶質磁性合金が結晶化を
起こさない温度で行う必要があるので、従来のフエライ
ト磁気ヘツドに使用されるガラスより作業温度が著しく
低いPbOを主成分とする低温軟化ガラスが用いられてい
る。しかし、この非晶質磁性合金膜−フエライト複合型
磁気ヘツドには、性能上次のような問題がある。Since this amorphous magnetic alloy has a higher saturation magnetic flux density and a higher magnetic susceptibility than ferrite, the magnetic head using it has remarkably excellent recording / reproducing characteristics than the conventional ferrite magnetic head. As the material of the amorphous magnetic alloy film for the magnetic head, an amorphous alloy containing Co as a main component is used. In addition, since the magnetic head core must be joined at a temperature at which the amorphous magnetic alloy does not crystallize, the low-temperature softening containing PbO as the main component, which has a significantly lower working temperature than the glass used for conventional ferrite magnetic heads, is used. Glass is used. However, this amorphous magnetic alloy film-ferrite composite type magnetic head has the following problems in performance.
(1) 高周波領域で大きな摺動雑音を生じる。(1) Large sliding noise is generated in the high frequency region.
(2) 励磁用のコイルの巻線数を多くするとインダク
タンスが大きくなるため、巻線を多くできない。(2) If the number of windings of the exciting coil is increased, the inductance increases, and therefore the number of windings cannot be increased.
(3) 非晶質磁性合金膜とフエライトの境界部が疑似
ギヤツプとして作動するおそれがある。(3) The boundary portion between the amorphous magnetic alloy film and the ferrite may act as a pseudo gear trap.
上記問題は磁気ヘツド材にフエライトを用いることに
原因があり、フエライトを使用している部分を非磁性材
料に置換えることによつて解決できる。この種の磁気ヘ
ツドとして、特開昭59−142716号公報に記載のような非
晶質磁性合金膜−非磁性材料複合型磁気ヘツドがある。
更に、この種の磁気ヘツドは高周波領域において好適な
記録再生特性を得るために、非晶質磁性合金膜と非磁性
絶縁体膜を交互に積層し、多層化している。非晶質磁性
合金膜を形成するための支持体である非磁性材料には、
メタルテープに対し耐摩耗性を有することが必要である
ので、フエライトと同等又はそれ以上の耐摩耗性を有す
るセラミツクス、硬質ガラス等の中から、非晶質磁性合
金の熱膨張係数に近いものが使用されている。この熱膨
張係数の差が著しいと、非晶質磁性合金膜がはがれてし
まう等の問題が発生する。The above problem is caused by using ferrite for the magnetic head material, and can be solved by replacing the portion using ferrite with a non-magnetic material. As this type of magnetic head, there is an amorphous magnetic alloy film-nonmagnetic material composite type magnetic head as described in JP-A-59-142716.
Further, in this type of magnetic head, an amorphous magnetic alloy film and a non-magnetic insulator film are alternately laminated to form a multi-layer structure in order to obtain suitable recording / reproducing characteristics in a high frequency region. The non-magnetic material that is the support for forming the amorphous magnetic alloy film includes
Since it is necessary to have abrasion resistance with respect to the metal tape, among ceramics, hard glass, etc. having abrasion resistance equal to or higher than that of ferrite, one having a coefficient of thermal expansion close to that of the amorphous magnetic alloy is preferable. in use. If this difference in thermal expansion coefficient is significant, problems such as peeling of the amorphous magnetic alloy film occur.
上記非晶質磁性合金膜−非磁性材料複合型磁気ヘツド
は従来のフエライト磁気ヘツドより、更には上記非晶質
磁性合金膜−フエライト複合型磁気ヘツドより、広帯域
において良好な記録再生特性を有し、摺動雑音が小さい
という特長をもつ。The amorphous magnetic alloy film-nonmagnetic material composite type magnetic head has better recording and reproducing characteristics in a wide band than the conventional ferrite magnetic head, and further, the amorphous magnetic alloy film-ferrite composite type magnetic head. The feature is that sliding noise is small.
しかし、この磁気ヘツドに適合した非磁性支持体材料
及び接合ガラスが見出されていない。However, no non-magnetic support material and bonding glass suitable for this magnetic head have been found.
現状では支持体として、非磁性フエライト、Al2O3、
高温軟化ガラスなど、接合ガラスとしてPbOを主成分と
する低温軟化ガラスが使用されているが、この組合せで
は磁気ヘツドの製造歩留りが悪く、また磁気ヘツドの信
頼性に欠けるという問題があつた。今後、記録再生装置
の高性能化を図るために、メタルテープが使用され、磁
気ヘツドに対し著しく高速走行することになると、磁気
ヘツドの信頼性、すなわち耐久性を著しく向上させる必
要が出てくる。上記非晶質磁性合金膜−非磁性材料複合
型磁気ヘツドに使用されている非磁性材料は耐摩耗性と
熱膨張係数しか考慮されていないが、加工性、メタルテ
ープとの摺動性等にも配慮する必要がある。At present, as a support, non-magnetic ferrite, Al 2 O 3 ,
Although low-temperature softened glass containing PbO as a main component is used as the bonding glass such as high-temperature softened glass, the production yield of the magnetic head is poor and the reliability of the magnetic head is lacking with this combination. In the future, in order to improve the performance of the recording / reproducing apparatus, when a metal tape is used and runs at a remarkably high speed with respect to the magnetic head, it is necessary to remarkably improve the reliability of the magnetic head, that is, the durability. . The non-magnetic material used in the amorphous magnetic alloy film-non-magnetic material composite type magnetic head is considered only in wear resistance and thermal expansion coefficient, but it is difficult to process, slidability with a metal tape, etc. Also needs to be considered.
例えば、Al2O3は硬すぎるためにメタルテープを傷付
け、高温軟化ガラスはもろいために加工性が悪いという
問題があつた。非磁性フエライトはメタルテープの低速
走行に関しては問題はないが、高速走行に対しては摩耗
しやすいという問題があつた。接合ガラスにはPbOを主
成分とする低温軟化ガラスが使用されているが、熱膨張
係数が大きい、強度及び硬度が低い、耐水性が悪いなど
の問題があつた。For example, Al 2 O 3 is too hard to damage the metal tape, and high-temperature softened glass is fragile, resulting in poor workability. Non-magnetic ferrite does not have a problem when the metal tape runs at a low speed, but has a problem that it is easily worn when running at a high speed. Although low-temperature softened glass containing PbO as a main component is used as the bonding glass, there are problems such as a large coefficient of thermal expansion, low strength and hardness, and poor water resistance.
本発明の目的は、上記問題を解決するに好適な非磁性
材料と接合ガラスを使用し、高周波記録再生特性、耐摩
耗、摺動性、耐久性及び量産性に優れた磁気ヘツドを提
供することにある。An object of the present invention is to provide a magnetic head excellent in high frequency recording / reproducing characteristics, wear resistance, slidability, durability and mass productivity by using a non-magnetic material and a bonding glass suitable for solving the above problems. It is in.
本発明を概説すれば、本発明の第1の発明は磁気ヘツ
ドに関する発明であつて、非磁性支持体に形成した非晶
質磁性合金膜からなる一対の磁気ヘツドコアが、非磁性
ギヤツプ材を介して互いに突合されてガラスで接合され
ている磁気ヘツドにおいて、該非磁性支持体が、立方晶
のZrO2を主材とし、0.01〜1.0重量%のCを含有する平
均結晶粒径3μm以下の焼結体からなり、かつ該接合ガ
ラスが、熱膨張係数75〜95×10-7/℃の範囲内にある、
少なくともバナジウム、りん、アンチモンから構成され
る酸化物系ガラスからなることを特徴とする。Briefly describing the present invention, the first invention of the present invention relates to a magnetic head, in which a pair of magnetic head cores made of an amorphous magnetic alloy film formed on a non-magnetic support is provided with a non-magnetic gear gap material. In a magnetic head which is butted to each other and joined with glass, the non-magnetic support is composed of cubic ZrO 2 as a main material and contains 0.01 to 1.0% by weight of C and has an average crystal grain size of 3 μm or less. Consisting of a body, and the bonding glass has a coefficient of thermal expansion of 75 to 95 × 10 −7 / ° C.,
It is characterized by being made of an oxide glass composed of at least vanadium, phosphorus and antimony.
そして、本発明の第2の発明は磁気記録再生装置に関
する発明であつて、磁気テープを、回転磁気ヘツドを内
蔵するドラム外周部に斜めに巻回し、磁気テープ長手方
向に対して所定の傾き角を有する磁気記録パターンを形
成し、信号の記録・再生を行う磁気記録再生装置におい
て、前記磁気ヘツドは、前記本発明の第1の発明の磁気
ヘツドからなることを特徴とする。A second invention of the present invention relates to a magnetic recording / reproducing apparatus, in which a magnetic tape is wound obliquely around an outer peripheral portion of a drum containing a rotating magnetic head, and a predetermined tilt angle with respect to the longitudinal direction of the magnetic tape. In the magnetic recording / reproducing apparatus for forming a magnetic recording pattern having the above and recording / reproducing a signal, the magnetic head is the magnetic head of the first invention of the present invention.
非磁性支持体として用いる上記焼結体は、酸化物に換
算して10モル%以下のY2O3、20モル%以下のCaO、MgO及
びSrO、30モル%以下のCeO2及び35モル%以下のLa2O3の
うち少なくとも1種以上と、更にCを0.01〜1重量%を
含むことにより、安易に得られる高ち密化焼結体が好適
である。The above-mentioned sintered body used as a non-magnetic support is, in terms of oxide, 10 mol% or less of Y 2 O 3 , 20 mol% or less of CaO, MgO and SrO, 30 mol% or less of CeO 2 and 35 mol%. A highly densified sintered body which is easily obtained by containing at least one of the following La 2 O 3 and 0.01 to 1% by weight of C is preferable.
接合ガラスとして用いる上記ガラスには、酸化物に換
算して重量でV2O5の55〜70%、P2O5の17〜25%及びSb2O
3の3〜20%を必須成分とする低温軟化ガラスが最も適
している。特に、V2O5の55〜65%、P2O5の18〜22%及び
Sb2O3の5〜12%が好ましく、更にPbOの20%以下、Tl2O
の15%以下、Nb2O5の5%以下、好ましくは、PbOの3〜
10%、Tl2Oの3〜10%、Nb2O5の0.5〜2%を含むことが
できる。The aforementioned glass used as a bonding glass, 55 to 70% of V 2 O 5 by weight in terms of oxide, 17-25% of the P 2 O 5 and Sb 2 O
Low temperature softened glass containing 3 to 20% of 3 as an essential component is most suitable. In particular 55-65% of the V 2 O 5, 18 to 22% of the P 2 O 5 and
5 to 12% of Sb 2 O 3 is preferable, 20% or less of PbO, Tl 2 O
15% or less, 5% or less of Nb 2 O 5 , preferably 3 to 5% of PbO.
It may contain 10%, 3-10% of Tl 2 O, and 0.5-2% of Nb 2 O 5 .
上記非晶質磁性合金膜としては高飽和磁束密度かつ高
透磁率であるCoを主成分とする非晶質合金が適してお
り、更には、この非磁性絶縁体膜を介し、多層化されて
いることが好ましい。As the above amorphous magnetic alloy film, an amorphous alloy containing Co as a main component, which has a high saturation magnetic flux density and a high magnetic permeability, is suitable, and further, a multi-layered structure is formed through this non-magnetic insulator film. Is preferred.
本発明の磁気ヘツドは、テープ特にメタルテープに十
分対応できるテープ接触型の磁気ヘツドとして好適に用
いられるものである。The magnetic head of the present invention is preferably used as a tape contact type magnetic head capable of sufficiently supporting a tape, particularly a metal tape.
本発明による磁気ヘツドは、耐摩耗性、摺動性、耐久
性及び量産性を著しく向上又は改善されたものである。The magnetic head according to the present invention has significantly improved or improved wear resistance, slidability, durability and mass productivity.
上記非磁性支持体用焼結体は、加工性、耐摩耗性及び
摺動性が非常に優れている。これは平均結晶粒径を3μ
m以下とすることにより加工性が良く、立方晶の高ち密
化焼結体にすることによりメタルテープに対しての耐摩
耗性と摺動性が良くなるためである。この焼結体は、Zr
O2を室温で立方晶にするための安定化剤として、Y2O3、
CaO、MgO、SrO、CeO2及びLa2O3のうち少なくとも一種類
以上を含む。この安定化剤の量が少ないと、難加工性で
ある正方晶ZrO2が混入し、加工性と摺動性が悪化する。
しかし、正方晶ZrO2の量が少なければ、あまり問題とは
ならない。したがつて、立方晶の割合は、90〜100%が
好ましく、特に100%がよい。また、この焼結体の平均
結晶粒径を3μm以下とするために、この焼結体は粒成
長抑制剤として、Cを0.01〜1.0重量%含む。このC含
有量は0.01重量%未満では効果がなく、1.0重量%を超
えると、気孔率が大きくなり、高ち密化焼結体が得られ
ない。終結体の平均的結晶粒径が3μmを超えると、加
工時のチツピングが大きくなり、支持体の加工歩留りが
著しく低下する。The non-magnetic support sintered body is very excellent in workability, wear resistance and slidability. This has an average grain size of 3μ
This is because when it is m or less, workability is good, and when it is made into a cubic crystal highly densified sintered body, wear resistance and slidability with respect to the metal tape are improved. This sintered body is Zr
As a stabilizer for making O 2 into a cubic crystal at room temperature, Y 2 O 3 ,
It contains at least one of CaO, MgO, SrO, CeO 2 and La 2 O 3 . When the amount of this stabilizer is small, tetragonal ZrO 2 which is difficult to work is mixed, and workability and slidability are deteriorated.
However, if the amount of tetragonal ZrO 2 is small, it does not cause much problem. Therefore, the proportion of cubic crystals is preferably 90 to 100%, and particularly preferably 100%. Further, in order to make the average crystal grain size of this sintered body 3 μm or less, this sintered body contains 0.01 to 1.0% by weight of C as a grain growth inhibitor. If the C content is less than 0.01% by weight, there is no effect, and if it exceeds 1.0% by weight, the porosity becomes large and a highly densified sintered body cannot be obtained. When the average crystal grain size of the terminated body exceeds 3 μm, chipping during processing becomes large, and the processing yield of the support is significantly reduced.
更に、上記非磁性支持体用焼結体は熱膨張係数が85〜
100×10-7/℃程度であり、Coを主成分とする非晶質磁性
合金のそれより小さいが、非晶質磁性合金膜はスパツタ
により、はがれることなく強固に形成でき、しかもこの
膜の磁気特性を劣化させることはほとんどない。Furthermore, the non-magnetic support sintered body has a thermal expansion coefficient of 85 to
Although it is about 100 × 10 -7 / ° C, which is smaller than that of the amorphous magnetic alloy containing Co as a main component, the amorphous magnetic alloy film can be firmly formed by peeling without peeling, It hardly deteriorates the magnetic properties.
上記接合用の低温軟化ガラスはクラツクの発生を防止
するため、上記非磁性支持体用焼結体の熱膨張係数より
若干小さ目の75〜95×10-7/℃のものを使用した方が良
い。この点、本発明による低温軟化ガラスは従来使用し
ているPbOを主成分とする低温軟化ガラスより、熱膨張
係数が小さく、要求に合つたガラスが得られる。更に本
発明による低温軟化ガラスは従来知られている低温軟化
ガラスより強度及び硬度が高く、しかも加工性及び耐水
性が優れている。In order to prevent cracking, it is better to use a low-temperature softening glass for bonding that has a thermal expansion coefficient of 75 to 95 × 10 -7 / ° C, which is slightly smaller than the thermal expansion coefficient of the non-magnetic support sintered body. . In this respect, the low-temperature softened glass according to the present invention has a smaller coefficient of thermal expansion than the conventionally used low-temperature softened glass containing PbO as a main component, and a glass meeting the requirements can be obtained. Further, the low-temperature softened glass according to the present invention has higher strength and hardness than the conventionally known low-temperature softened glass, and is excellent in workability and water resistance.
また、本発明の磁気ヘツドは、コア材にCoを主成分と
する高飽和磁束密度かつ高透磁率非晶質合金膜を用い、
更にこの非晶質合金膜を非磁性絶縁体膜を介し多層化す
ることにより、広帯域において好適な記録再生特性を示
す。Further, the magnetic head of the present invention uses a high saturation magnetic flux density and high magnetic permeability amorphous alloy film containing Co as a main component in the core material,
Further, by forming this amorphous alloy film into a multi-layer structure with a non-magnetic insulator film interposed therebetween, suitable recording / reproducing characteristics are exhibited in a wide band.
すなわち、Coを主成分とする高飽和磁束密度かつ高透
磁率非晶質合金膜、その非磁性支持体用の平均結晶粒径
3μm以下の立方晶のZrO2を主材とする高ち密化焼結
体、及び磁気ヘツドコア接合用の熱膨張係数が75〜95×
10-7/℃の範囲にあるV2O5、P2O5及びSb2O3を主成分とす
る低温軟化ガラスの3材料を組合せることによつて、メ
タルテープとの摺動性及び磁気ヘツドの耐摩耗性が従来
より著しく優れた高性能磁気ヘツドを高い歩留りで製造
することができる。That is, a high-saturation magnetic flux density and high-permeability amorphous alloy film containing Co as a main component, and a high-density calcination mainly composed of cubic ZrO 2 having an average crystal grain size of 3 μm or less for its non-magnetic support. Coefficient of thermal expansion for joining and magnetic head core joining is 75 to 95 ×
By combining three materials of low temperature softening glass whose main components are V 2 O 5 , P 2 O 5 and Sb 2 O 3 in the range of 10 -7 / ° C, slidability with metal tape and It is possible to manufacture a high-performance magnetic head in which the wear resistance of the magnetic head is remarkably superior to the conventional one, with a high yield.
本発明の磁気ヘツドは、コア材に非晶質磁性合金を用
いた場合に特に有効であるが、センダスト、パーマロ
イ、アルパームなどの結晶質磁性合金にコア材に使用
し、相当する熱膨張係数を持つガラスで接合してもよ
い。The magnetic head of the present invention is particularly effective when an amorphous magnetic alloy is used for the core material, but it is used as a core material for a crystalline magnetic alloy such as sendust, permalloy, and alperm, and has a corresponding thermal expansion coefficient. You may join with the glass you have.
本発明に係る装置はビデオテープレコーダに好適であ
る。このビデオテープレコーダは記録媒体として金属が
用いられ、高速走行に好適である。The device according to the present invention is suitable for a video tape recorder. This video tape recorder uses metal as a recording medium and is suitable for high-speed running.
以下、本発明を具体的に説明する。 Hereinafter, the present invention will be specifically described.
第1図に代表的な磁気ヘツドの斜視図を示す。符号
1、1′は非晶質磁性合金膜であり、実施例には高飽和
磁束密度かつ高透磁率非晶質合金であるCo83−Nb13−Zr
4を用いた。2、2′はこの非晶質磁性合金膜を形成す
るための非磁性支持体である。3、3′は磁気ヘツドコ
アの接合に用いられる低温軟化ガラスである。4、4′
は低温軟化ガラスが非晶質磁性合金膜を侵食しないため
の保護膜と低温軟化ガラスが十分にぬれるようなぬれ性
向上膜の2層からなる。5はギヤツプ突き合せ部で、非
磁性絶縁体膜を介し、作動ギヤツプを形成している。6
はコイル巻線窓である。FIG. 1 shows a perspective view of a typical magnetic head. Reference numerals 1 and 1 ′ are amorphous magnetic alloy films, and in the examples, Co 83 —Nb 13 —Zr, which is an amorphous alloy with high saturation magnetic flux density and high magnetic permeability.
4 was used. Reference numerals 2 and 2'are non-magnetic supports for forming this amorphous magnetic alloy film. Reference numerals 3, 3'are low temperature softened glass used for joining magnetic head cores. 4, 4 '
Is composed of two layers, a protective film for preventing the low temperature softened glass from eroding the amorphous magnetic alloy film and a wettability improving film for sufficiently wetting the low temperature softened glass. Reference numeral 5 is a gear butting portion, which forms an operating gear via a non-magnetic insulating film. 6
Is a coil winding window.
上記非晶質磁性合金膜は、好ましくは第2図に示すよ
うに非磁性絶縁体膜20、20′、21、21′、22、22′を介
し、多層化した方が良い。すなわち第2図は第1図の磁
気ヘツドの摺動面の平面図である。The amorphous magnetic alloy film is preferably multi-layered with nonmagnetic insulator films 20, 20 ', 21, 21', 22, 22 'interposed therebetween, as shown in FIG. That is, FIG. 2 is a plan view of the sliding surface of the magnetic head of FIG.
次に第1図で示した磁気ヘツドの作製方法について説
明する。第3図〜第6図は第1図の磁気ヘツドの製造方
法における一連の各工程の説明図である。各図におい
て、符号30は非磁性支持体用基板、31はコイル巻線窓用
溝、32はトラツク溝、33は非晶質磁性合金膜、34は保護
膜、35はぬれ性向上膜、36は低温軟化ガラス、37及び38
は磁気ヘツドコアブロツク、39は非磁性ギヤツプ材を意
味する。Next, a method of manufacturing the magnetic head shown in FIG. 1 will be described. 3 to 6 are explanatory views of a series of steps in the method of manufacturing the magnetic head shown in FIG. In each figure, reference numeral 30 is a non-magnetic support substrate, 31 is a coil winding window groove, 32 is a track groove, 33 is an amorphous magnetic alloy film, 34 is a protective film, 35 is a wettability improving film, 36 Is low temperature softened glass, 37 and 38
Indicates a magnetic head core block, and 39 indicates a non-magnetic gear material.
第3図に示すように、非磁性支持体として用いる基板
30にコイル巻線窓用の溝31とトラツク溝32を設け、ギヤ
ツプ突合せ面を形成した。次に、第4図に示すように、
ギヤツプ突合せ面に、Co83−Nb14−Zr3非晶質合金膜3
3、保護膜34、ぬれ性向上膜35の順にスパツタし、トラ
ツク溝32に低温軟化ガラス36を充てんした。ここで、Co
83−Nb14−Zr3非晶質合金の耐熱温度が480℃なので、ガ
ラス充てんは460℃で行つた。この非晶質合金膜は先に
述べたように単層ではなく、非磁性絶縁体膜を介し、多
層化させた方が良い。次に、第5図に示すように、不要
な低温軟化ガラスと非晶質磁性合金膜を除去することに
より、コイル巻線窓用の溝と所要のトラツク幅tをギヤ
ツプ突合せ面に形成し、一点鎖線Aで切断し、一対の磁
気ヘツドコアブロツク37、38を作製した。A substrate used as a non-magnetic support, as shown in FIG.
A groove 31 for a coil winding window and a track groove 32 were provided in 30 to form a butt face of the gear. Next, as shown in FIG.
Co 83 -Nb 14 -Zr 3 Amorphous alloy film 3
3, the protective film 34 and the wettability improving film 35 were sputtered in this order, and the track groove 32 was filled with a low temperature softening glass 36. Where Co
83 -Nb 14 -Zr 3 since heat resistant temperature of 480 ° C. of amorphous alloy, glass filled at 460 ° C. KoTsuta. This amorphous alloy film is not a single layer as described above, but it is better to have a multilayer structure with a non-magnetic insulating film interposed. Next, as shown in FIG. 5, unnecessary low temperature softening glass and amorphous magnetic alloy film are removed to form a groove for the coil winding window and a required track width t on the butt face of the gear cup. A pair of magnetic head core blocks 37 and 38 were produced by cutting along the alternate long and short dash line A.
なお、第5図以降においては、保護膜34とぬれ性向上
膜35を省略して示した。両コアブロツク37、38のギヤツ
プ突合せ面にそれぞれ非磁性ギヤツプ材39を所要量スパ
ツタし、第6図に示すように突合せ、460℃で接合し
た。次に、一点鎖線B及びB′で順次切断し、第1図で
示した磁気ヘツドを作製した。Note that the protective film 34 and the wettability improving film 35 are omitted in FIGS. The required amount of non-magnetic gear material 39 was sputtered on the gear mating surfaces of both core blocks 37 and 38, and they were butted as shown in FIG. 6 and joined at 460.degree. Next, the magnetic heads shown in FIG. 1 were manufactured by cutting along the dashed-dotted lines B and B '.
上記非磁性支持体として適している代表例を第1表、
適していない代表例を第2表に示す。なお第3表には、
第1表及び第2表で示した支持体の予備検討結果を示
す。なお、ZrO2の結晶系及びその結晶相の割合は、X線
回折により調べた。平均結晶粒径は、支持体用基板の研
磨面をエツチングし、その拡大写真からインターセプト
法(コード法)によつて、研磨面における約200個の結
晶粒の平均結晶粒径を求め、これに統計的係数1.56を乗
じて得た立体的な平均結晶粒径である。平均欠け大きさ
は、第3図で示した溝加工を施したときの欠けの大きさ
の平均値である。加工歩留りは、磁気ヘツドの形状及び
大きさに加工した支持体を100個作製しようとしたとき
のものであり、5μm以上の欠けがある場合を不良とし
た。摩耗量は、磁気ヘツドの形状及び大きさに加工した
支持体をVTRのシリンダーに取付け、メタルテープを相
対速度5.8m/secで300時間走行させて、支持体の摩耗量
を測定した。摺動性は、摩耗量の測定に用いた支持体の
テープ走行面を観察し、メタルテープ走行による汚れ、
すなわち、磁気記録媒体又はそれをテープに付着させる
ための有機バインダーが認められるかどうかで評価し
た。認められない場合には、メタルテープとの相性が良
く、摺動性が良好であると判断した。Representative examples suitable as the above non-magnetic support are shown in Table 1,
Table 2 shows typical examples that are not suitable. In addition, in Table 3,
The preliminary examination results of the supports shown in Tables 1 and 2 are shown. The crystal system of ZrO 2 and the proportion of its crystal phase were examined by X-ray diffraction. The average crystal grain size is obtained by etching the polished surface of the support substrate and obtaining the average crystal grain size of about 200 crystal grains on the polished surface by the intercept method (code method) from the enlarged photograph. It is a three-dimensional average crystal grain size obtained by multiplying by a statistical coefficient of 1.56. The average chip size is the average size of the chips when the groove processing shown in FIG. 3 is performed. The processing yield is that when 100 pieces of the support processed into the shape and size of the magnetic head were to be produced, and the case where there was a chip of 5 μm or more was regarded as defective. The amount of wear was measured by mounting a support processed into the shape and size of a magnetic head on a VTR cylinder and running a metal tape at a relative speed of 5.8 m / sec for 300 hours to measure the amount of wear of the support. The slidability is measured by observing the tape running surface of the support used to measure the amount of wear,
That is, it was evaluated whether or not the magnetic recording medium or the organic binder for adhering it to the tape was recognized. When not observed, it was judged that the compatibility with the metal tape was good and the slidability was good.
A〜Jの支持体及び(K)〜(Q)の支持体の熱膨張
係数はある程度大きく、Co83−Nb14−Zr3非晶質合金を
スパツタしてもはがれることはなかつた。A〜Jの支持
体及び(K)〜(M)の支持体はZrO2を主材とする焼結
体である。A〜Jの支持体は平均結晶粒径3μm以下の
立方晶ZrO2を主材とする高ち密化焼結体であり、加工
性、耐摩耗性及び摺動性に優れている。特にBの支持体
が優れている。それに対し、(K)の支持体は平均結晶
粒径が大きいために、加工時の欠けも大きく、加工性が
悪い。(L)の支持体は気孔率が高く、すなわち高ち密
化されておらず、気孔部に磁気記録媒体が引掛かり、摺
動性が悪い。(M)の支持体は難加工性である正方晶Zr
O2を25重量%も含むために、加工性が悪い。(N)〜
(Q)の支持体はZrO2を主材とする焼結体ではない。
(N)と(O)の支持体は硬すぎるため、メタルテープ
を傷付ける。(P)と(O)の支持体は柔らかいため、
耐摩耗性が悪い。(Q)の支持体は従来のフエライト磁
気ヘツド及び非晶質磁性合金−フエライト複合型磁気ヘ
ツドに使用されている磁性材料であるため、本発明にお
いては本質的に適していないが、加工性、耐摩耗性及び
摺動性を比較する上では有効なものである。これとA〜
Jの支持体を比較すると、A〜Jの支持体はマイクロビ
ツカース硬さが1000〜1500であり、耐摩耗性が著しく優
れ、磁気ヘツドの長寿命化に貢献する。 The thermal expansion coefficients of the supports A to J and the supports (K) to (Q) were large to some extent, and the Co 83 —Nb 14 —Zr 3 amorphous alloy was not peeled off even when sputtered. The supports A to J and the supports (K) to (M) are sintered bodies containing ZrO 2 as a main material. The supports A to J are highly densified sintered bodies mainly composed of cubic ZrO 2 having an average crystal grain size of 3 μm or less, and are excellent in workability, wear resistance and slidability. In particular, the B support is excellent. On the other hand, since the support (K) has a large average crystal grain size, it has a large chipping during processing and has poor processability. The support (L) has a high porosity, that is, it is not highly densified, the magnetic recording medium is caught in the pores, and the slidability is poor. (M) support is difficult to work Tetragonal Zr
Since it contains 25% by weight of O 2 , workability is poor. (N) ~
The support (Q) is not a sintered body containing ZrO 2 as a main material.
Since the supports (N) and (O) are too hard, the metal tape is damaged. Since the supports of (P) and (O) are soft,
Wear resistance is poor. The support (Q) is a magnetic material used in conventional ferrite magnetic heads and amorphous magnetic alloy-ferrite composite type magnetic heads, and thus is essentially unsuitable in the present invention. It is effective in comparing wear resistance and slidability. This and A ~
Comparing the J supports, the A to J supports have a Micro Vickers hardness of 1000 to 1500, are extremely excellent in wear resistance, and contribute to prolonging the life of the magnetic head.
第4表に代表的な接合ガラスの組成と特性を示す。 Table 4 shows the composition and characteristics of typical bonded glass.
a〜eの接合ガラスはV2O5を主成分とする低温軟化ガ
ラスであり、(f)の接合ガラスは従来のPbOを主成分
とする一般的な低温軟化ガラスで、比較のために用い
た。これら接合ガラスはDTAから測定した特性点が低
く、460℃でガラス充てん及び接合ガラスが可能であ
る。a〜eの接合ガラスは(f)の接合ガラスより熱膨
張係数が小さく、先に示した第1表の支持体の熱膨張係
数に合せることができる。一般に、接合ガラスの熱膨張
係数は支持体のそれより小さ目が良い。特に(f)の接
合ガラスのように接合ガラスの方が支持体より熱膨張係
数が大きいと、ガラスに引張り応力がかかり、ガラスが
破損しやすく、磁気ヘツドの製造歩留りが悪い。また、
a〜eの接合ガラスは4点曲げ強度が4.5kgf/mm2以上、
硬さが300以上であり、(f)の接合ガラスより強度と
硬度が高い。磁気ヘツドのチツプ強度は接合ガラスの強
度に依存するところが大きい。一般にガラスは粒界がな
いため、摺動性が良く、ガラスの耐摩耗性は硬度に依存
するところが大きい。したがつて、a〜eの接合ガラス
は磁気ヘツドの耐久性を向上又は改善できる。耐水性は
5×5×5mmの立方体に加工したガラス片を40cc.の蒸留
水中に入れ、70℃、2時間加熱したときの単位重量当り
の重量減(mg/g)であり、a〜eの接合ガラスは1mg/g
以下で、(f)の接合ガラスより耐水性が著しく優れ、
磁気ヘツドの信頼性を向上又は改善できる。 The bonded glass of a to e is a low temperature softened glass containing V 2 O 5 as a main component, and the bonded glass of (f) is a general low temperature softened glass containing PbO as a main component, which is used for comparison. I was there. These bonded glasses have low characteristic points measured by DTA and can be filled and bonded at 460 ° C. The bonded glasses of a to e have a smaller coefficient of thermal expansion than the bonded glass of (f), and can be matched with the coefficient of thermal expansion of the support shown in Table 1 above. Generally, the coefficient of thermal expansion of the bonded glass is preferably smaller than that of the support. In particular, when the bonded glass has a larger thermal expansion coefficient than the support, such as the bonded glass of (f), tensile stress is applied to the glass, the glass is easily broken, and the manufacturing yield of the magnetic head is poor. Also,
The bonded glass of a to e has a 4-point bending strength of 4.5 kgf / mm 2 or more,
It has a hardness of 300 or more, and has higher strength and hardness than the bonded glass of (f). The chip strength of the magnetic head largely depends on the strength of the bonded glass. Generally, since glass has no grain boundary, it has good slidability, and the wear resistance of glass largely depends on hardness. Therefore, the bonded glasses a to e can improve or improve the durability of the magnetic head. Water resistance is the weight loss per unit weight (mg / g) when a glass piece processed into a cube of 5 × 5 × 5 mm is put in 40 cc. Of distilled water and heated at 70 ° C. for 2 hours. 1mg / g for bonded glass
In the following, water resistance is remarkably superior to that of the bonded glass of (f),
The reliability of the magnetic head can be improved or improved.
以下、本発明を実施例により更に具体的に説明する
が、本発明はこれら実施例に限定されない。Hereinafter, the present invention will be described more specifically with reference to Examples, but the present invention is not limited to these Examples.
第1表又は第2表の支持体と第4表の接合ガラスを用
いて第1図で示した磁気ヘツドを作製し、評価した。The magnetic heads shown in FIG. 1 were prepared and evaluated using the supports shown in Table 1 or 2 and the bonded glass shown in Table 4.
実施例1 第5表で示す支持体と接合ガラスの組合せで第1図の
磁気ヘツドを作製した。なお、得られた磁気ヘツドの評
価も第5表に合せて示す。ここで、ヘツド製造歩留りは
磁気ヘツドを製造する際の加工歩留りである。平均ヘツ
ドチツプ強度は、得られた磁気ヘツドチツプがどの程度
の荷重により、壊れるのかを測定したものである。摩耗
量は得られた磁気ヘツドをVTRのシリンダーに取付けメ
タルテープを相対速度5.8m/secで300時間走行させて、
磁気ヘツドの摩耗量を測定した。Example 1 The magnetic head shown in FIG. 1 was prepared by combining the support and the bonded glass shown in Table 5. The evaluation of the obtained magnetic head is also shown in Table 5. Here, the head manufacturing yield is the processing yield when manufacturing the magnetic head. The average head chip strength is a measure of how much load the obtained magnetic head chip breaks. The amount of wear was obtained by attaching the obtained magnetic head to the VTR cylinder and running the metal tape at a relative speed of 5.8 m / sec for 300 hours.
The amount of wear of the magnetic head was measured.
支持体Bと接合ガラス(f)との組合せでは、ヘツド
製造歩留り及び平均ヘツドチツプ強度が著しく低い。こ
れは接合ガラス(f)の熱膨張係数が支持体Bのそれよ
り非常に大きいため、接合ガラス(f)にクラツクがは
いりやすいことが原因である。 With the combination of the support B and the bonded glass (f), the head production yield and the average head chip strength are extremely low. This is because the coefficient of thermal expansion of the bonded glass (f) is much larger than that of the support B, and thus cracks are easily introduced into the bonded glass (f).
支持体(P)と接合ガラス(f)、及び支持体(Q)
と接合ガラス(f)との組合せでは、平均ヘツドチツプ
強度が低く、摩耗量が非常に大きい。これは接合ガラス
(f)の強度が低く、しかも支持体(P)及び(Q)の
摩耗量が大きいことが原因である。接合ガラス(f)よ
り高強度かつ高硬度の接合ガラスdを用いて、支持体
(Q)と組合せると、ヘツド製造歩留り、平均ヘツドチ
ツプ強度及び耐摩耗性が著しく向上する。Support (P) and bonded glass (f), and support (Q)
The average head chip strength is low and the amount of wear is very large in the combination of the above and the bonded glass (f). This is because the strength of the bonding glass (f) is low and the amounts of wear of the supports (P) and (Q) are large. When the bonding glass d having higher strength and hardness than the bonding glass (f) is used and combined with the support (Q), the head manufacturing yield, the average head chip strength and the abrasion resistance are remarkably improved.
上記比較例に対し、実施例では支持体Bと接合ガラス
a〜eをそれぞれ組合せることにより、ヘツド製造歩留
り、平均ヘツドチツプ強度及び耐摩耗性が非常に優れ
る。その中でも特に、接合ガラスeとの組合せで、優れ
た結果が得られる。In contrast to the comparative example, in the example, by combining the support B and the bonding glasses a to e, respectively, the head manufacturing yield, the average head chip strength and the abrasion resistance are very excellent. Above all, excellent results are obtained especially in combination with the bonding glass e.
更に、第5表の組合せで作製した磁気ヘツドの摺動性
は、摺動性が良い支持体B、(P)及び(Q)を用いる
ために、良好な結果が得られた。しかし、接合ガラス
(f)を用いた場合には、このガラスの摩耗量が著し
く、接合ガラス部のへこみが大きい。Further, as for the slidability of the magnetic heads produced by the combinations shown in Table 5, good results were obtained because the supports B, (P) and (Q) having good slidability were used. However, when the bonded glass (f) is used, the amount of wear of this glass is remarkable and the dent in the bonded glass portion is large.
性能に関しては、接合ガラスによらず、非磁性支持体
B、(P)を用いた場合には広帯域において良好な記録
再生特性を示したが、磁性支持体(Q)を用いた場合に
は高周波領域で摺動雑音を発生する。Regarding the performance, good recording and reproducing characteristics were shown in a wide band when the non-magnetic supports B and (P) were used irrespective of the bonded glass, but when the magnetic support (Q) was used, high frequency was achieved. Generates sliding noise in the area.
以上より、第5表における実施例の磁気ヘツドは高周
波記録再生特性、耐摩耗性、摺動性、耐久性及び量産性
について、これら全特性を満足する。From the above, the magnetic heads of the examples in Table 5 satisfy all of these characteristics with respect to high frequency recording / reproducing characteristics, wear resistance, slidability, durability and mass productivity.
実施例2 第1表で示した支持体A及びC〜Jと、接合ガラスe
を組合せて、第1図の磁気ヘツドを作製した。それぞれ
の評価結果を第6表に示す。なお、評価法は実施例1と
同様である。Example 2 Supports A and C to J shown in Table 1 and bonded glass e
In combination, the magnetic head of FIG. 1 was produced. Table 6 shows the respective evaluation results. The evaluation method is the same as in Example 1.
得られた9種類の磁気ヘツドは、ヘツド製造歩留り及
び平均ヘツドチツプ強度が高く、しかも摩耗量が少な
く、耐摩耗性に優れている。また、摺動性が良い支持体
を用いているため、良好な摺動結果が得られる。性能に
関しても、問題はなかつた。 The nine types of magnetic heads thus obtained have high head manufacturing yield and average head chip strength, and have a small amount of wear, and are excellent in wear resistance. Moreover, since a support having good slidability is used, good sliding results can be obtained. There was no problem with performance.
実施例3 第7図は磁気記録再生装置の回転部の斜視図である。Embodiment 3 FIG. 7 is a perspective view of a rotating portion of a magnetic recording / reproducing apparatus.
すなわち、ビデオテープレコーダに用いられる回転磁
気ヘツド装置41は、第7図に示すように矢印A方向に回
転する回転デイスク42を有しており、この回転デイスク
42の上下位置には、ビデオテープレコーダのシヤーシ等
に対して固定された上、下ドラム43、44が配置されてい
る。モータ45は、上記回転デイスク42を回転駆動せしめ
る。磁気テープ46は、これら上、下ドラム43、44等の周
囲に約180゜の角度範囲で斜めに巻付けられ、矢印B方
向に走行操作される。この磁気テープ46の回転ヘツド装
置41に対する位置を一定に保つため、ガイドポール47、
48及び下ドラム44の段部49等が設けられている。また、
磁気ヘツド50は、例えば2個設けられており、これらは
互いに180゜の角度をなして上記回転デイスク42上に取
付けられている。そして、上記磁気ヘツド50のヘツドチ
ツプの先端は上、下ドラム43、44等の外周面からわずか
に突出し、磁気テープ46と摺接接触することによつてビ
デオ信号の記録再生が行われる。That is, the rotary magnetic head device 41 used in the video tape recorder has a rotary disk 42 which rotates in the direction of arrow A as shown in FIG.
Upper and lower drums 43 and 44, which are fixed to the chassis of the video tape recorder, are arranged above and below 42. The motor 45 drives the rotary disc 42 to rotate. The magnetic tape 46 is obliquely wound around the upper and lower drums 43, 44, etc. within an angle range of about 180 °, and is run in the direction of arrow B. In order to keep the position of the magnetic tape 46 with respect to the rotary head device 41 constant, a guide pole 47,
A step portion 49 of the lower drum 44 and the lower drum 44 are provided. Also,
Two magnetic heads 50 are provided, for example, and they are mounted on the rotary disk 42 at an angle of 180 ° with respect to each other. The tip of the head chip of the magnetic head 50 slightly projects from the outer peripheral surfaces of the upper and lower drums 43, 44, etc., and the sliding contact with the magnetic tape 46 causes the recording and reproduction of the video signal.
このように回転する磁気ヘツドにより、磁気テープ46
上には、第8図に示すように記録トラツクTが順次斜め
に形成されていく。これらの記録トラツクTは、磁気テ
ープ46が定常速度V0で矢印B方向に走行駆動されるとき
に形成されるものであつて、通常の再生(ノーマル再
生)時には、ヘツドチツプ11が直線l0上を移動すること
によつて正常なビデオ信号の再生が行われる。With the magnetic head rotating in this manner, the magnetic tape 46
As shown in FIG. 8, recording tracks T are sequentially formed on the upper side in an oblique manner. These recording tracks T are formed when the magnetic tape 46 is driven to travel in the direction of arrow B at a constant speed V 0 , and the head chip 11 is on the straight line l 0 during normal reproduction (normal reproduction). A normal video signal is reproduced by moving the.
このような磁気記録再生装置において、磁気ヘツド50
として第1図に示す構造のものを作製した。磁気ヘツド
支持体に第1表のNo.Aの組成、前述のCo基合金非晶質磁
性膜及び接合ガラスとして第4表のNo.aのものを用い
た。この磁気ヘツドをVTRシリンダーに取付け、メタル
テープを相対速度5.8m/secで300時間走行させた結果、
摩耗量は0.3μm以下、摺動性は良好であり、平均欠け
大きさが3μm以下であつた。In such a magnetic recording / reproducing apparatus, the magnetic head 50
Then, the structure shown in FIG. 1 was manufactured. The composition of No. A in Table 1, the above Co-based alloy amorphous magnetic film and the bonding glass of No. a in Table 4 were used for the magnetic head support. As a result of attaching this magnetic head to the VTR cylinder and running the metal tape at a relative speed of 5.8 m / sec for 300 hours,
The amount of wear was 0.3 μm or less, the slidability was good, and the average chip size was 3 μm or less.
本発明によれば、高保磁力を有する記録媒体にも十分
に記録再生が可能な高飽和磁束密度かつ高透磁率の非晶
質合金膜からなる磁気ヘツドコアと、この非晶質合金を
形成する非磁性支持体に立方晶のZrO2を主材とする平均
結晶粒径3μm以下の高ち密化焼結体、また磁気ヘツド
コアの接合ガラスに熱膨張係数が75〜95×10-7/℃の範
囲にある低温軟化ガラスを組合せて用いることにより、
高周波記録再生特性、耐摩耗性、摺動性、耐久性及び量
産性に優れた高信頼性、高性能磁気ヘツドを提供するこ
とができる。According to the present invention, a magnetic head core made of an amorphous alloy film having a high saturation magnetic flux density and a high magnetic permeability, which enables sufficient recording / reproduction even on a recording medium having a high coercive force, and a non-magnetic core which forms this amorphous alloy. The magnetic support has cubic ZrO 2 as the main material and is a highly densified sintered body with an average grain size of 3 μm or less. Also, the thermal expansion coefficient of the bonded glass of the magnetic head core is in the range of 75 to 95 × 10 -7 / ° C. By using a combination of low temperature softened glass in
It is possible to provide a high-reliability and high-performance magnetic head excellent in high-frequency recording / reproducing characteristics, wear resistance, slidability, durability and mass productivity.
第1図は本発明の一実施例における磁気ヘツドの斜視
図、第2図は第1図の磁気ヘツドの摺動面の平面図、第
3図〜第6図は第1図の磁気ヘツドの製造方法における
各工程の説明図、第7図は磁気記録再生装置の回転部の
斜視図、第8図は磁気テープ上の記録トラツクを示す平
面図である。 1、1′、33:非晶質磁性合金膜、2、2′:非磁性支
持体、3、3′、36:低温軟化ガラス、6:コイル巻線
窓、20、20′、21、21′、22、22′:非磁性絶縁体膜、
30:非磁性支持体用基板、31:コイル巻線窓用溝、32:ト
ラツク溝、4、4′、34:保護膜、35:ぬれ性向上膜、3
7、38:磁気ヘツドコアブロツク、39:非磁性カツプ材、4
1:回転磁気ヘツド装置、42:回転デイスク、43:上ドラ
ム、44:下ドラム、45:モータ、46:磁気テープ、47、48:
ガイドポール、49:下ドラムの段部、50:磁気ヘツド、1
1:ヘツドチツプ1 is a perspective view of a magnetic head in an embodiment of the present invention, FIG. 2 is a plan view of a sliding surface of the magnetic head of FIG. 1, and FIGS. 3 to 6 are magnetic heads of FIG. FIG. 7 is an explanatory view of each step in the manufacturing method, FIG. 7 is a perspective view of a rotating portion of the magnetic recording / reproducing apparatus, and FIG. 8 is a plan view showing a recording track on the magnetic tape. 1, 1 ', 33: Amorphous magnetic alloy film, 2, 2': Non-magnetic support, 3, 3 ', 36: Low temperature softened glass, 6: Coil winding window, 20, 20', 21, 21 ', 22, 22': non-magnetic insulating film,
30: non-magnetic support substrate, 31: coil winding window groove, 32: track groove, 4, 4 ′, 34: protective film, 35: wettability improving film, 3
7, 38: Magnetic head core block, 39: Non-magnetic cup material, 4
1: rotating magnetic head device, 42: rotating disk, 43: upper drum, 44: lower drum, 45: motor, 46: magnetic tape, 47, 48:
Guide pole, 49: Lower drum step, 50: Magnetic head, 1
1: Head chip
───────────────────────────────────────────────────── フロントページの続き (72)発明者 山田 誠一 茨城県日立市久慈町4026番地 株式会社 日立製作所日立研究所内 (72)発明者 前田 邦裕 茨城県日立市久慈町4026番地 株式会社 日立製作所日立研究所内 (72)発明者 熊坂 登行 東京都国分寺市東恋ケ窪1丁目280番地 株式会社日立製作所中央研究所内 (72)発明者 稲田 健吉 茨城県勝田市大字稲田1410番地 株式会 社日立製作所東海工場内 (56)参考文献 特開 昭63−25824(JP,A) 特開 昭63−20705(JP,A) 特開 昭61−190703(JP,A) 特開 昭63−134562(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Seiichi Yamada, 4026 Kujimachi, Hitachi, Hitachi, Ibaraki Prefecture, Hitachi Research Laboratory, Ltd. (72) Kunihiro Maeda, 4026, Kujimachi, Hitachi, Hitachi, Hitachi, Ltd. In-house (72) Climbing Kumasaka 1-280 Higashi Koigokubo, Kokubunji, Tokyo Inside Central Research Laboratory, Hitachi, Ltd. (72) Kenkichi Inada 1410 Inada, Katsuta-shi, Ibaraki Stock Company Hitachi Ltd. Tokai Plant (56 ) Reference JP 63-25824 (JP, A) JP 63-20705 (JP, A) JP 61-190703 (JP, A) JP 63-134562 (JP, A)
Claims (10)
からなる一対の磁気ヘツドコアが、非磁性ギヤツプ材を
介して互いに突合されてガラスで接合されている磁気ヘ
ツドにおいて、該非磁性支持体が、立方晶のZrO2を主材
とし、0.01〜1.0重量%のCを含有する平均結晶粒径3
μm以下の焼結体からなり、かつ該接合ガラスが、熱膨
張係数75〜95×10-7/℃の範囲内にある、少なくともバ
ナジウム、りん、アンチモンから構成される酸化物系ガ
ラスからなることを特徴とする磁気ヘツド。1. A magnetic head in which a pair of magnetic head cores made of an amorphous magnetic alloy film formed on a non-magnetic support are butted against each other via a non-magnetic gap material and bonded with glass. The main body is cubic ZrO 2 and contains 0.01 to 1.0% by weight of C. Average grain size 3
The sintered glass having a size of less than or equal to μm, and the bonded glass is made of an oxide glass having a coefficient of thermal expansion of 75 to 95 × 10 −7 / ° C. and at least vanadium, phosphorus and antimony. Magnetic head.
%以下のY2O3、20モル%以下のCaO、MgO及びSrO、36モ
ル%以下のCeO2及び35モル%以下のLa2O3よりなる群か
ら選択した酸化物に相当する金属の少なくとも1種を含
むものである請求項1記載の磁気ヘツド。2. The sintered body contains 10 mol% or less of Y 2 O 3 , 20 mol% or less of CaO, MgO and SrO, and 36 mol% or less of CeO 2 and 35 mol% in terms of oxides. The magnetic head according to claim 1, which contains at least one metal corresponding to an oxide selected from the group consisting of La 2 O 3 below.
量でV2O5の55〜70%、P2O5の17〜25%及びSb2O3の3〜2
0%を必須成分とするガラスである請求項1又は2記載
の磁気ヘツド。Wherein said bonding glass are each from 55 to 70% of V 2 O 5 by weight in terms of oxide, of from 17 to 25% and Sb 2 O 3 of P 2 O 5 3~2
The magnetic head according to claim 1 or 2, which is a glass containing 0% as an essential component.
非晶質合金膜である請求項1〜3のいずれか1項に記載
の磁気ヘツド。4. The magnetic head according to claim 1, wherein the amorphous magnetic alloy film is an amorphous alloy film containing Co as a main component.
して多層化されている請求項1〜4のいずれか1項に記
載の磁気ヘツド。5. The magnetic head according to claim 1, wherein the amorphous magnetic alloy film is multilayered with a nonmagnetic insulating film interposed therebetween.
を磁気記録媒体とするテープに使用するテープ接触型磁
気ヘツドである請求項1〜5のいずれか1項に記載の磁
気ヘツド。6. The magnetic head according to claim 1, wherein the magnetic head is a tape contact type magnetic head used for a tape using a magnetic magnetic material having a high coercive force as a magnetic recording medium.
さが1000〜1500であり、平均結晶粒径3μm以下のセラ
ミツクス焼結体からなる請求項1〜6のいずれか1項に
記載の磁気ヘツド。7. The magnetic material according to claim 1, wherein the non-magnetic support is made of a ceramics sintered body having a Micro Vickers hardness of 1000 to 1500 and an average crystal grain size of 3 μm or less. Head.
ドラム外周部に斜めに巻回し、磁気テープ長手方向に対
して所定の傾き角を有する磁気記録パターンを形成し、
信号の記録・再生を行う磁気記録再生装置において、前
記磁気ヘツドは、非磁性支持体に形成した非晶質磁性合
金膜からなる一対の磁気ヘツドコアが、非磁性ギヤツプ
材を介して互いに突合されてガラスで接合され、該非磁
性支持体が、立方晶のZrO2を主材とし、0.01〜1.0重量
%のCを含有する平均結晶粒径3μm以下の焼結体から
なり、かつ該接合ガラスが、熱膨張係数75〜95×10-7/
℃の範囲内にある、少なくともバナジウム、りん、アン
チモンから構成される酸化物系ガラスからなることを特
徴とする磁気記録再生装置。8. A magnetic tape is obliquely wound around an outer peripheral portion of a drum containing a rotating magnetic head to form a magnetic recording pattern having a predetermined inclination angle with respect to the longitudinal direction of the magnetic tape,
In a magnetic recording / reproducing apparatus for recording / reproducing signals, a pair of magnetic head cores made of an amorphous magnetic alloy film formed on a non-magnetic support are butted against each other through a non-magnetic gear material. The non-magnetic support is joined with glass, and the non-magnetic support is composed of a sintered body containing cubic ZrO 2 as a main material and containing 0.01 to 1.0% by weight of C and having an average crystal grain size of 3 μm or less, and the joined glass is Coefficient of thermal expansion 75 to 95 × 10 -7 /
A magnetic recording / reproducing apparatus characterized by comprising an oxide-based glass composed of at least vanadium, phosphorus, and antimony within a range of ° C.
さが1000〜1500であり、ほとんどが立方晶のZrO2を主成
分とし、Y2O3、CaO、MgO、SrO、CeO2、La2O3の少なくと
も1種を含む平均結晶粒径3μm以下のセラミツクス焼
結体からなる請求項8に記載の磁気記録再生装置。9. The non-magnetic support has a micro-Vickers hardness of 1000 to 1500 and is composed mainly of cubic ZrO 2 as a main component, and Y 2 O 3 , CaO, MgO, SrO, CeO 2 , La. 9. The magnetic recording / reproducing apparatus according to claim 8, which is made of a ceramics sintered body having an average crystal grain size of 3 μm or less containing at least one of 2 O 3 .
〜70%のジルコニウムに、Y2O3に換算して10%以下のイ
ツトリウム、CaO、MgO及びSrOに換算して各々20%以下
のカルシウム、マグネシウム及びストロンチウム、CeO2
に換算して30%以下のセリウム、La2O3に換算して35%
以下のランタンの少なくとも1種を含む請求項9に記載
の磁気記録再生装置。10. The sintered body has a molar ratio of ZrO 2 of 55.
~ 70% zirconium, Y 2 O 3 10% or less yttrium, CaO, MgO and SrO 20% or less each of calcium, magnesium and strontium, CeO 2
30% or less when converted to 35% when converted to La 2 O 3
The magnetic recording / reproducing apparatus according to claim 9, comprising at least one of the following lanterns.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63172763A JP2543750B2 (en) | 1988-07-13 | 1988-07-13 | Magnetic head and magnetic recording / reproducing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63172763A JP2543750B2 (en) | 1988-07-13 | 1988-07-13 | Magnetic head and magnetic recording / reproducing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0224808A JPH0224808A (en) | 1990-01-26 |
JP2543750B2 true JP2543750B2 (en) | 1996-10-16 |
Family
ID=15947886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63172763A Expired - Lifetime JP2543750B2 (en) | 1988-07-13 | 1988-07-13 | Magnetic head and magnetic recording / reproducing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2543750B2 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61190703A (en) * | 1985-02-19 | 1986-08-25 | Matsushita Electric Ind Co Ltd | Magnetic head |
JPS6320705A (en) * | 1986-07-14 | 1988-01-28 | Hitachi Ltd | Magnetic erasion head |
JPS6325824A (en) * | 1986-07-18 | 1988-02-03 | Hitachi Ltd | Production of magnetic head |
JPS63134562A (en) * | 1986-11-21 | 1988-06-07 | 住友特殊金属株式会社 | Material for magnetic head slider |
-
1988
- 1988-07-13 JP JP63172763A patent/JP2543750B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0224808A (en) | 1990-01-26 |
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