JP2025129313A5 - - Google Patents

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Publication number
JP2025129313A5
JP2025129313A5 JP2025112595A JP2025112595A JP2025129313A5 JP 2025129313 A5 JP2025129313 A5 JP 2025129313A5 JP 2025112595 A JP2025112595 A JP 2025112595A JP 2025112595 A JP2025112595 A JP 2025112595A JP 2025129313 A5 JP2025129313 A5 JP 2025129313A5
Authority
JP
Japan
Prior art keywords
flange
link
base
chamber
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025112595A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025129313A (ja
Filing date
Publication date
Priority claimed from JP2023111681A external-priority patent/JP7707239B2/ja
Application filed filed Critical
Priority to JP2025112595A priority Critical patent/JP2025129313A/ja
Publication of JP2025129313A publication Critical patent/JP2025129313A/ja
Publication of JP2025129313A5 publication Critical patent/JP2025129313A5/ja
Pending legal-status Critical Current

Links

JP2025112595A 2023-07-06 2025-07-02 ロボット及び基板搬送装置 Pending JP2025129313A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025112595A JP2025129313A (ja) 2023-07-06 2025-07-02 ロボット及び基板搬送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023111681A JP7707239B2 (ja) 2023-07-06 2023-07-06 ロボット及び基板搬送装置
JP2025112595A JP2025129313A (ja) 2023-07-06 2025-07-02 ロボット及び基板搬送装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2023111681A Division JP7707239B2 (ja) 2023-07-06 2023-07-06 ロボット及び基板搬送装置

Publications (2)

Publication Number Publication Date
JP2025129313A JP2025129313A (ja) 2025-09-04
JP2025129313A5 true JP2025129313A5 (https=) 2026-01-22

Family

ID=94104730

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023111681A Active JP7707239B2 (ja) 2023-07-06 2023-07-06 ロボット及び基板搬送装置
JP2025112595A Pending JP2025129313A (ja) 2023-07-06 2025-07-02 ロボット及び基板搬送装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2023111681A Active JP7707239B2 (ja) 2023-07-06 2023-07-06 ロボット及び基板搬送装置

Country Status (4)

Country Link
US (1) US20250010461A1 (https=)
JP (2) JP7707239B2 (https=)
KR (2) KR102920427B1 (https=)
CN (1) CN119275166A (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020188218A (ja) 2019-05-17 2020-11-19 東京エレクトロン株式会社 真空搬送装置

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