JP2024172768A - プローブ - Google Patents

プローブ Download PDF

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Publication number
JP2024172768A
JP2024172768A JP2023090723A JP2023090723A JP2024172768A JP 2024172768 A JP2024172768 A JP 2024172768A JP 2023090723 A JP2023090723 A JP 2023090723A JP 2023090723 A JP2023090723 A JP 2023090723A JP 2024172768 A JP2024172768 A JP 2024172768A
Authority
JP
Japan
Prior art keywords
probe
support member
axis direction
opening
protrusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023090723A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024172768A5 (https=
Inventor
敏永 竹谷
Toshinaga Takeya
康貴 岸
Yasutaka Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2023090723A priority Critical patent/JP2024172768A/ja
Priority to CN202480036224.XA priority patent/CN121241261A/zh
Priority to PCT/JP2024/019035 priority patent/WO2024247885A1/ja
Priority to KR1020257039040A priority patent/KR20260003757A/ko
Priority to TW113119874A priority patent/TWI880760B/zh
Publication of JP2024172768A publication Critical patent/JP2024172768A/ja
Priority to US19/398,492 priority patent/US20260079179A1/en
Publication of JP2024172768A5 publication Critical patent/JP2024172768A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
JP2023090723A 2023-06-01 2023-06-01 プローブ Pending JP2024172768A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023090723A JP2024172768A (ja) 2023-06-01 2023-06-01 プローブ
CN202480036224.XA CN121241261A (zh) 2023-06-01 2024-05-23 探测器
PCT/JP2024/019035 WO2024247885A1 (ja) 2023-06-01 2024-05-23 プローブ
KR1020257039040A KR20260003757A (ko) 2023-06-01 2024-05-23 프로브
TW113119874A TWI880760B (zh) 2023-06-01 2024-05-29 探針
US19/398,492 US20260079179A1 (en) 2023-06-01 2025-11-24 Probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023090723A JP2024172768A (ja) 2023-06-01 2023-06-01 プローブ

Publications (2)

Publication Number Publication Date
JP2024172768A true JP2024172768A (ja) 2024-12-12
JP2024172768A5 JP2024172768A5 (https=) 2026-04-27

Family

ID=93657947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023090723A Pending JP2024172768A (ja) 2023-06-01 2023-06-01 プローブ

Country Status (6)

Country Link
US (1) US20260079179A1 (https=)
JP (1) JP2024172768A (https=)
KR (1) KR20260003757A (https=)
CN (1) CN121241261A (https=)
TW (1) TWI880760B (https=)
WO (1) WO2024247885A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4932499B2 (ja) * 2005-01-14 2012-05-16 株式会社日本マイクロニクス 通電試験用プローブ
JP2010261718A (ja) * 2009-04-29 2010-11-18 Japan Electronic Materials Corp プローブ、複数のプローブが実装されたプローブカード、およびプローブカードにプローブを実装する際のプローブの位置決め方法
JP5412685B2 (ja) * 2009-07-24 2014-02-12 日本電子材料株式会社 プローブ、およびプローブの製造方法
JP5487049B2 (ja) * 2010-08-19 2014-05-07 株式会社日本マイクロニクス プローブカード
US8970238B2 (en) * 2011-06-17 2015-03-03 Electro Scientific Industries, Inc. Probe module with interleaved serpentine test contacts for electronic device testing
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
JP7471778B2 (ja) * 2019-03-29 2024-04-22 株式会社日本マイクロニクス プローブカード
JP7443017B2 (ja) 2019-10-17 2024-03-05 株式会社日本マイクロニクス 検査プローブ、検査プローブの製造方法および検査装置
KR102261798B1 (ko) * 2020-04-03 2021-06-07 (주)화이컴 프로브 카드 제조용 지그, 이를 포함하는 프로브 정렬 시스템 및 이를 이용하여 제조된 프로브 카드
JP7626693B2 (ja) * 2021-11-22 2025-02-04 株式会社日本マイクロニクス プローブ格納治具、プローブ格納システムおよびプローブ格納方法

Also Published As

Publication number Publication date
CN121241261A (zh) 2025-12-30
US20260079179A1 (en) 2026-03-19
KR20260003757A (ko) 2026-01-07
TWI880760B (zh) 2025-04-11
WO2024247885A1 (ja) 2024-12-05
TW202503280A (zh) 2025-01-16

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