JP2024049807A5 - - Google Patents

Download PDF

Info

Publication number
JP2024049807A5
JP2024049807A5 JP2022156267A JP2022156267A JP2024049807A5 JP 2024049807 A5 JP2024049807 A5 JP 2024049807A5 JP 2022156267 A JP2022156267 A JP 2022156267A JP 2022156267 A JP2022156267 A JP 2022156267A JP 2024049807 A5 JP2024049807 A5 JP 2024049807A5
Authority
JP
Japan
Prior art keywords
heater
rotating part
plate
heat shield
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022156267A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024049807A (ja
JP7810625B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022156267A priority Critical patent/JP7810625B2/ja
Priority claimed from JP2022156267A external-priority patent/JP7810625B2/ja
Priority to CN202311016243.XA priority patent/CN117781689A/zh
Priority to KR1020230118322A priority patent/KR102850976B1/ko
Publication of JP2024049807A publication Critical patent/JP2024049807A/ja
Publication of JP2024049807A5 publication Critical patent/JP2024049807A5/ja
Priority to JP2025091869A priority patent/JP2025122208A/ja
Application granted granted Critical
Publication of JP7810625B2 publication Critical patent/JP7810625B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022156267A 2022-09-29 2022-09-29 加熱処理装置 Active JP7810625B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022156267A JP7810625B2 (ja) 2022-09-29 2022-09-29 加熱処理装置
CN202311016243.XA CN117781689A (zh) 2022-09-29 2023-08-14 加热处理装置
KR1020230118322A KR102850976B1 (ko) 2022-09-29 2023-09-06 가열 처리 장치
JP2025091869A JP2025122208A (ja) 2022-09-29 2025-06-02 加熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022156267A JP7810625B2 (ja) 2022-09-29 2022-09-29 加熱処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025091869A Division JP2025122208A (ja) 2022-09-29 2025-06-02 加熱処理装置

Publications (3)

Publication Number Publication Date
JP2024049807A JP2024049807A (ja) 2024-04-10
JP2024049807A5 true JP2024049807A5 (https=) 2024-08-06
JP7810625B2 JP7810625B2 (ja) 2026-02-03

Family

ID=90384129

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022156267A Active JP7810625B2 (ja) 2022-09-29 2022-09-29 加熱処理装置
JP2025091869A Pending JP2025122208A (ja) 2022-09-29 2025-06-02 加熱処理装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025091869A Pending JP2025122208A (ja) 2022-09-29 2025-06-02 加熱処理装置

Country Status (3)

Country Link
JP (2) JP7810625B2 (https=)
KR (1) KR102850976B1 (https=)
CN (1) CN117781689A (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142082A (ja) * 1988-11-24 1990-05-31 Matsushita Electric Ind Co Ltd シーズヒーターの接地装置
JP3328763B2 (ja) * 1995-10-30 2002-09-30 エヌティティエレクトロニクス株式会社 縦型ウエハボートのウエハ支持構造
JP3312873B2 (ja) * 1998-07-01 2002-08-12 日本アビオニクス株式会社 減圧オーブンのヒータ装置
EP1976337A1 (en) * 2005-12-22 2008-10-01 Harison Toshiba Lighting Corp. Heater lamp
JP5467743B2 (ja) 2008-08-29 2014-04-09 光洋サーモシステム株式会社 ヒータユニットおよび熱処理装置
JP6940541B2 (ja) 2018-04-16 2021-09-29 芝浦メカトロニクス株式会社 有機膜形成装置

Similar Documents

Publication Publication Date Title
KR20170095656A (ko) 방열구조를 갖는 세탁기
JP6538770B2 (ja) 洗濯装置
JPH06204316A (ja) 耐熱ロボットハンド
JP2024049807A5 (https=)
CN102757171A (zh) 退火炉
TW517018B (en) Thermostat
RU2005115278A (ru) Стиральная машина барабанного типа (варианты) и сушильное устройство для такой стиральной машины
US4088868A (en) Fuser cooling system
KR20160078895A (ko) 열 처리 장치
JP2004226970A (ja) 伝熱性の熱平等化装置
JP4692568B2 (ja) 除湿機
KR102593634B1 (ko) 선재 증착 장치
JP2025527969A (ja) 線材蒸着装置
JP2003038930A (ja) 除湿機
JP4869904B2 (ja) 熱放射物体、特にロケットエンジンに装着するための熱シールド
JP5096503B2 (ja) 環境試験装置
JP5569266B2 (ja) 電気パネル暖房機
TW202045754A (zh) 蒸鍍單元及具備有此蒸鍍單元之真空蒸鍍裝置
JP7810625B2 (ja) 加熱処理装置
CN214841014U (zh) 熟化箱
CN210532859U (zh) 石墨膜的加热烘道
CN118846168B (zh) 消毒柜
CN210602740U (zh) 一种受热均匀的热处理炉
CN209869223U (zh) 一种高分子流延机热熔装置
JP6713093B1 (ja) 蒸着ユニット及びこの蒸着ユニットを備える真空蒸着装置