JP2024019962A5 - - Google Patents
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- Publication number
- JP2024019962A5 JP2024019962A5 JP2022122766A JP2022122766A JP2024019962A5 JP 2024019962 A5 JP2024019962 A5 JP 2024019962A5 JP 2022122766 A JP2022122766 A JP 2022122766A JP 2022122766 A JP2022122766 A JP 2022122766A JP 2024019962 A5 JP2024019962 A5 JP 2024019962A5
- Authority
- JP
- Japan
- Prior art keywords
- information
- reliability
- polishing
- end point
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 40
- 239000000758 substrate Substances 0.000 claims 32
- 238000001514 detection method Methods 0.000 claims 19
- 230000006870 function Effects 0.000 claims 17
- 238000007517 polishing process Methods 0.000 claims 16
- 239000000126 substance Substances 0.000 claims 14
- 230000015556 catabolic process Effects 0.000 claims 11
- 238000006731 degradation reaction Methods 0.000 claims 11
- 238000000034 method Methods 0.000 claims 10
- 238000010801 machine learning Methods 0.000 claims 8
- 230000000593 degrading effect Effects 0.000 claims 6
- 230000010365 information processing Effects 0.000 claims 6
- 239000007788 liquid Substances 0.000 claims 6
- 238000013500 data storage Methods 0.000 claims 4
- 239000012530 fluid Substances 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 4
- 239000012528 membrane Substances 0.000 claims 3
- 238000003672 processing method Methods 0.000 claims 1
- 230000004044 response Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022122766A JP2024019962A (ja) | 2022-08-01 | 2022-08-01 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
| PCT/JP2023/023932 WO2024029236A1 (ja) | 2022-08-01 | 2023-06-28 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
| US18/998,420 US20260034636A1 (en) | 2022-08-01 | 2023-06-28 | Information processing device, inference device, machine learning device, information processing method, inference method, and machine learning method |
| CN202380055328.0A CN119631164A (zh) | 2022-08-01 | 2023-06-28 | 信息处理装置、推论装置、机器学习装置、信息处理方法、推论方法、及机器学习方法 |
| KR1020257002803A KR20250047726A (ko) | 2022-08-01 | 2023-06-28 | 정보 처리 장치, 추론 장치, 기계 학습 장치, 정보 처리 방법, 추론 방법 및 기계 학습 방법 |
| TW112128538A TW202406675A (zh) | 2022-08-01 | 2023-07-31 | 資訊處理裝置、推論裝置、機械學習裝置、資訊處理方法、推論方法、及機械學習方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022122766A JP2024019962A (ja) | 2022-08-01 | 2022-08-01 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024019962A JP2024019962A (ja) | 2024-02-14 |
| JP2024019962A5 true JP2024019962A5 (https=) | 2025-04-23 |
Family
ID=89848872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022122766A Pending JP2024019962A (ja) | 2022-08-01 | 2022-08-01 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20260034636A1 (https=) |
| JP (1) | JP2024019962A (https=) |
| KR (1) | KR20250047726A (https=) |
| CN (1) | CN119631164A (https=) |
| TW (1) | TW202406675A (https=) |
| WO (1) | WO2024029236A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2025170830A (ja) * | 2024-05-08 | 2025-11-20 | 株式会社荏原製作所 | 基板研磨装置および膜厚算出方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013176828A (ja) * | 2012-02-29 | 2013-09-09 | Ebara Corp | 研磨終点検出装置の遠隔監視システム |
| TW202044394A (zh) * | 2019-05-22 | 2020-12-01 | 日商荏原製作所股份有限公司 | 基板處理系統 |
| JP2021028099A (ja) | 2019-08-09 | 2021-02-25 | 株式会社荏原製作所 | 終点検知装置、終点検知方法 |
-
2022
- 2022-08-01 JP JP2022122766A patent/JP2024019962A/ja active Pending
-
2023
- 2023-06-28 KR KR1020257002803A patent/KR20250047726A/ko active Pending
- 2023-06-28 CN CN202380055328.0A patent/CN119631164A/zh active Pending
- 2023-06-28 WO PCT/JP2023/023932 patent/WO2024029236A1/ja not_active Ceased
- 2023-06-28 US US18/998,420 patent/US20260034636A1/en active Pending
- 2023-07-31 TW TW112128538A patent/TW202406675A/zh unknown
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