JP2023504151A5 - - Google Patents
Info
- Publication number
- JP2023504151A5 JP2023504151A5 JP2022532572A JP2022532572A JP2023504151A5 JP 2023504151 A5 JP2023504151 A5 JP 2023504151A5 JP 2022532572 A JP2022532572 A JP 2022532572A JP 2022532572 A JP2022532572 A JP 2022532572A JP 2023504151 A5 JP2023504151 A5 JP 2023504151A5
- Authority
- JP
- Japan
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025076559A JP2025111782A (ja) | 2019-12-02 | 2025-05-02 | 反射フーリエプティコグラフィによる大型表面の撮像 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962942636P | 2019-12-02 | 2019-12-02 | |
| US62/942,636 | 2019-12-02 | ||
| PCT/US2020/062108 WO2021113131A1 (en) | 2019-12-02 | 2020-11-24 | Reflective fourier ptychography imaging of large surfaces |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025076559A Division JP2025111782A (ja) | 2019-12-02 | 2025-05-02 | 反射フーリエプティコグラフィによる大型表面の撮像 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2023504151A JP2023504151A (ja) | 2023-02-01 |
| JPWO2021113131A5 JPWO2021113131A5 (https=) | 2023-11-27 |
| JP2023504151A5 true JP2023504151A5 (https=) | 2023-11-27 |
| JP7678810B2 JP7678810B2 (ja) | 2025-05-16 |
Family
ID=76222154
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022532572A Active JP7678810B2 (ja) | 2019-12-02 | 2020-11-24 | 反射フーリエプティコグラフィによる大型表面の撮像 |
| JP2025076559A Pending JP2025111782A (ja) | 2019-12-02 | 2025-05-02 | 反射フーリエプティコグラフィによる大型表面の撮像 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025076559A Pending JP2025111782A (ja) | 2019-12-02 | 2025-05-02 | 反射フーリエプティコグラフィによる大型表面の撮像 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220413276A1 (https=) |
| JP (2) | JP7678810B2 (https=) |
| KR (1) | KR20220104821A (https=) |
| CN (1) | CN115053122A (https=) |
| TW (1) | TW202136753A (https=) |
| WO (1) | WO2021113131A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11689821B2 (en) * | 2020-08-07 | 2023-06-27 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Incoherent Fourier ptychographic super-resolution imaging system with priors |
| FR3125893A1 (fr) * | 2021-07-29 | 2023-02-03 | Institut Mines Telecom | Système d’éclairage, notamment à usage de microscopie |
| KR20240108945A (ko) | 2023-01-03 | 2024-07-10 | 삼성전자주식회사 | 기판 검사 장치 및 기판 검사 방법 |
| US20240353665A1 (en) * | 2023-03-30 | 2024-10-24 | California Institute Of Technology | Angular ptychographic imaging with closed-form reconstruction |
| US12581754B2 (en) * | 2023-05-16 | 2026-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus to enhance semiconductor device manufacturing |
| CN120254888B (zh) * | 2025-05-30 | 2025-09-09 | 长春理工大学 | 基于偏振关联算法的水下溢油成像探测方法及设备 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9497379B2 (en) | 2013-08-22 | 2016-11-15 | California Institute Of Technology | Variable-illumination fourier ptychographic imaging devices, systems, and methods |
| US9892812B2 (en) | 2012-10-30 | 2018-02-13 | California Institute Of Technology | Fourier ptychographic x-ray imaging systems, devices, and methods |
| US20160154301A1 (en) * | 2013-06-17 | 2016-06-02 | Paul Scherrer Institut | Scanning coherent diffractive imaging method and system for actinic mask inspection for euv lithography |
| DE102014213198B4 (de) * | 2014-07-08 | 2020-08-06 | Carl Zeiss Ag | Verfahren zur Lokalisierung von Defekten auf Substraten |
| WO2016090331A1 (en) | 2014-12-04 | 2016-06-09 | California Institute Of Technology | Multiplexed fourier ptychography imaging systems and methods |
| WO2016106379A1 (en) | 2014-12-22 | 2016-06-30 | California Institute Of Technology | Epi-illumination fourier ptychographic imaging for thick samples |
| AU2014280894A1 (en) * | 2014-12-23 | 2016-07-07 | Canon Kabushiki Kaisha | Illumination systems and devices for Fourier Ptychographic imaging |
| WO2016187591A1 (en) * | 2015-05-21 | 2016-11-24 | California Institute Of Technology | Laser-based fourier ptychographic imaging systems and methods |
| CN108431692B (zh) * | 2015-12-23 | 2021-06-18 | Asml荷兰有限公司 | 量测方法、量测设备和器件制造方法 |
| US10739275B2 (en) * | 2016-09-15 | 2020-08-11 | Kla-Tencor Corporation | Simultaneous multi-directional laser wafer inspection |
| CN106707486B (zh) | 2017-01-24 | 2019-07-26 | 清华大学 | 基于fpm的宽视场显微成像方法及系统 |
| KR20190088277A (ko) * | 2018-01-18 | 2019-07-26 | 서울대학교산학협력단 | 단일촬영 푸리에 타이코그래피 마이크로스코피 시스템 |
-
2020
- 2020-11-24 JP JP2022532572A patent/JP7678810B2/ja active Active
- 2020-11-24 US US17/781,643 patent/US20220413276A1/en active Pending
- 2020-11-24 CN CN202080083517.5A patent/CN115053122A/zh active Pending
- 2020-11-24 KR KR1020227022550A patent/KR20220104821A/ko active Pending
- 2020-11-24 WO PCT/US2020/062108 patent/WO2021113131A1/en not_active Ceased
- 2020-12-01 TW TW109142173A patent/TW202136753A/zh unknown
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2025
- 2025-05-02 JP JP2025076559A patent/JP2025111782A/ja active Pending