JP2023143838A5 - - Google Patents
Info
- Publication number
- JP2023143838A5 JP2023143838A5 JP2023045213A JP2023045213A JP2023143838A5 JP 2023143838 A5 JP2023143838 A5 JP 2023143838A5 JP 2023045213 A JP2023045213 A JP 2023045213A JP 2023045213 A JP2023045213 A JP 2023045213A JP 2023143838 A5 JP2023143838 A5 JP 2023143838A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022048738 | 2022-03-24 | ||
| JP2022048738 | 2022-03-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023143838A JP2023143838A (ja) | 2023-10-06 |
| JP2023143838A5 true JP2023143838A5 (https=) | 2026-01-22 |
Family
ID=88095677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023045213A Pending JP2023143838A (ja) | 2022-03-24 | 2023-03-22 | 塩、酸発生剤、樹脂、レジスト組成物及びレジストパターンの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20230305391A1 (https=) |
| JP (1) | JP2023143838A (https=) |
| KR (1) | KR20230141974A (https=) |
| TW (1) | TW202340139A (https=) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100077404A (ko) | 2008-12-29 | 2010-07-08 | 주식회사 티엔텍 | 슬림형 히터 |
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2023
- 2023-03-21 TW TW112110475A patent/TW202340139A/zh unknown
- 2023-03-21 US US18/124,180 patent/US20230305391A1/en active Pending
- 2023-03-22 JP JP2023045213A patent/JP2023143838A/ja active Pending
- 2023-03-22 KR KR1020230037464A patent/KR20230141974A/ko active Pending