JP2023143838A5 - - Google Patents

Info

Publication number
JP2023143838A5
JP2023143838A5 JP2023045213A JP2023045213A JP2023143838A5 JP 2023143838 A5 JP2023143838 A5 JP 2023143838A5 JP 2023045213 A JP2023045213 A JP 2023045213A JP 2023045213 A JP2023045213 A JP 2023045213A JP 2023143838 A5 JP2023143838 A5 JP 2023143838A5
Authority
JP
Japan
Prior art keywords
formula
group
integer
carbon atoms
independently represent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023045213A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023143838A (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2023143838A publication Critical patent/JP2023143838A/ja
Publication of JP2023143838A5 publication Critical patent/JP2023143838A5/ja
Pending legal-status Critical Current

Links

JP2023045213A 2022-03-24 2023-03-22 塩、酸発生剤、樹脂、レジスト組成物及びレジストパターンの製造方法 Pending JP2023143838A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022048738 2022-03-24
JP2022048738 2022-03-24

Publications (2)

Publication Number Publication Date
JP2023143838A JP2023143838A (ja) 2023-10-06
JP2023143838A5 true JP2023143838A5 (https=) 2026-01-22

Family

ID=88095677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023045213A Pending JP2023143838A (ja) 2022-03-24 2023-03-22 塩、酸発生剤、樹脂、レジスト組成物及びレジストパターンの製造方法

Country Status (4)

Country Link
US (1) US20230305391A1 (https=)
JP (1) JP2023143838A (https=)
KR (1) KR20230141974A (https=)
TW (1) TW202340139A (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100077404A (ko) 2008-12-29 2010-07-08 주식회사 티엔텍 슬림형 히터

Similar Documents

Publication Publication Date Title
JP2023112680A5 (https=)
JP2023100005A5 (https=)
JP2023098698A5 (https=)
JP2023147265A5 (https=)
JP2023143845A5 (https=)
JP2023147263A5 (https=)
JP2023100003A5 (https=)
JP2023098703A5 (https=)
JP2023156257A5 (https=)
JP2023121152A5 (https=)
JP2023147264A5 (https=)
JP2023143838A5 (https=)
JP2023100006A5 (https=)
JP2023138467A5 (https=)
JP2023100004A5 (https=)
JP2023098702A5 (https=)
JP2023098705A5 (https=)
JP2023160797A5 (https=)
JP2023160796A5 (https=)
JP2023160801A5 (https=)
JP2023160799A5 (https=)
JP2023156256A5 (https=)
JP2023109729A5 (https=)
JP2023109733A5 (https=)
JP2023101395A5 (https=)