JP2023116396A - 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 - Google Patents

情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 Download PDF

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JP2023116396A
JP2023116396A JP2022200006A JP2022200006A JP2023116396A JP 2023116396 A JP2023116396 A JP 2023116396A JP 2022200006 A JP2022200006 A JP 2022200006A JP 2022200006 A JP2022200006 A JP 2022200006A JP 2023116396 A JP2023116396 A JP 2023116396A
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Prior art keywords
polishing
information
top ring
substrate
processing
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Pending
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JP2022200006A
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Japanese (ja)
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JP2023116396A5 (https=
Inventor
昇鎬 尹
Sheng Gao Yin
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Ebara Corp
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Ebara Corp
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Priority to KR1020247029674A priority Critical patent/KR20240146043A/ko
Priority to US18/833,522 priority patent/US20250153302A1/en
Priority to CN202380020814.9A priority patent/CN118660786A/zh
Priority to PCT/JP2023/002243 priority patent/WO2023153208A1/ja
Priority to TW112103567A priority patent/TW202347476A/zh
Publication of JP2023116396A publication Critical patent/JP2023116396A/ja
Publication of JP2023116396A5 publication Critical patent/JP2023116396A5/ja
Pending legal-status Critical Current

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  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2022200006A 2022-02-09 2022-12-15 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 Pending JP2023116396A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020247029674A KR20240146043A (ko) 2022-02-09 2023-01-25 정보 처리 장치, 추론 장치, 기계 학습 장치, 정보 처리 방법, 추론 방법, 및 기계 학습 방법
US18/833,522 US20250153302A1 (en) 2022-02-09 2023-01-25 Information processing apparatus, inference apparatus, machine-learning apparatus, information processing method, inference method, and machine-learning method
CN202380020814.9A CN118660786A (zh) 2022-02-09 2023-01-25 信息处理装置、推论装置、机器学习装置、信息处理方法、推论方法及机器学习方法
PCT/JP2023/002243 WO2023153208A1 (ja) 2022-02-09 2023-01-25 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法
TW112103567A TW202347476A (zh) 2022-02-09 2023-02-02 資訊處理裝置、推論裝置、機械學習裝置、資訊處理方法、推論方法、及機械學習方法

Applications Claiming Priority (2)

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JP2022018782 2022-02-09
JP2022018782 2022-02-09

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JP2023116396A true JP2023116396A (ja) 2023-08-22
JP2023116396A5 JP2023116396A5 (https=) 2025-11-13

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026010729A1 (en) * 2024-07-01 2026-01-08 Applied Materials, Inc. Substrate slip detection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026010729A1 (en) * 2024-07-01 2026-01-08 Applied Materials, Inc. Substrate slip detection

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