JP2023108810A - 炭化ケイ素単結晶成長の熱場調整方法 - Google Patents
炭化ケイ素単結晶成長の熱場調整方法 Download PDFInfo
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- JP2023108810A JP2023108810A JP2022010056A JP2022010056A JP2023108810A JP 2023108810 A JP2023108810 A JP 2023108810A JP 2022010056 A JP2022010056 A JP 2022010056A JP 2022010056 A JP2022010056 A JP 2022010056A JP 2023108810 A JP2023108810 A JP 2023108810A
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- 239000013078 crystal Substances 0.000 title claims abstract description 73
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 45
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 39
- 239000010439 graphite Substances 0.000 claims abstract description 39
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 230000006698 induction Effects 0.000 claims abstract description 12
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 10
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 10
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 claims description 9
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 6
- 230000003750 conditioning effect Effects 0.000 claims description 2
- 238000012216 screening Methods 0.000 claims description 2
- 239000012808 vapor phase Substances 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 16
- 238000000151 deposition Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000000859 sublimation Methods 0.000 description 5
- 230000008022 sublimation Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004854 X-ray topography Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000002109 crystal growth method Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004943 liquid phase epitaxy Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
- C30B23/063—Heating of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02167—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon carbide not containing oxygen, e.g. SiC, SiC:H or silicon carbonitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
2・・・炭化ケイ素
3・・・るつぼ
4・・・断熱材
5・・・誘導コイル
6・・・ガイド
7・・・剛性受熱材料
A・・・隙間
B・・・距離
C・・・厚さ
S1~S7・・・ステップ
Claims (7)
- 炭化ケイ素単結晶成長の熱場調整方法であって、
(A)炭化ケイ素源を選別して黒鉛るつぼの底部に充填するステップと、
(B)ガイドを前記黒鉛るつぼ内に入れるステップと、
(C)剛性受熱材料を前記ガイドに置き、前記ガイドと前記黒鉛るつぼのるつぼ壁との隙間を減らさせるステップと、
(D)種結晶を前記黒鉛るつぼの頂部に固定させるステップと、
(E)前記炭化ケイ素源及び前記種結晶を格納した前記黒鉛るつぼを物理気相輸送法用の誘導加式高温炉に入れるステップと、
(F)炭化ケイ素結晶成長工程を実施するステップと、
(G)炭化ケイ素単結晶体を得るステップと、
を含む炭化ケイ素単結晶成長の熱場調整方法。 - 前記剛性受熱材料は、黒鉛、炭化タンタル(TaC)、炭化ニオブ(NbC)又は炭化タングステン(WC)の耐高温・低圧材料であり、熱伝導率>10W/m・Kである請求項1に記載の炭化ケイ素単結晶成長の熱場調整方法。
- 前記剛性受熱材料の数は、少なくとも1つ以上で、幾何学的形状は円盤状又は多角形の軸対称の幾何学的形状である請求項1に記載の炭化ケイ素単結晶成長の熱場調整方法。
- 前記剛性受熱材料の数は、2つ以上であり、異なる幾何学的形状で組み合わせる請求項3に記載の炭化ケイ素単結晶成長の熱場調整方法。
- 前記剛性受熱材料と前記るつぼ壁との隙間は、15mm以下である請求項1に記載の炭化ケイ素単結晶成長の熱場調整方法。
- 前記剛性受熱材料の頂部と前記ガイドの頂部との距離は、1mm~30mmの範囲である請求項1に記載の炭化ケイ素単結晶成長の熱場調整方法。
- 前記剛性受熱材料の厚さは、15mm以下である請求項1に記載の炭化ケイ素単結晶成長の熱場調整方法。
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JP2022010056A JP7305818B1 (ja) | 2021-12-08 | 2022-01-26 | 炭化ケイ素単結晶成長の熱場調整方法 |
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TW110146222A TWI811883B (zh) | 2021-12-08 | 2021-12-08 | 調整碳化矽單晶成長熱場之方法 |
US17/579,604 US20230227998A1 (en) | 2021-12-08 | 2022-01-20 | Method for adjusting thermal field of silicon carbide single crystal growth |
JP2022010056A JP7305818B1 (ja) | 2021-12-08 | 2022-01-26 | 炭化ケイ素単結晶成長の熱場調整方法 |
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JP2023108810A true JP2023108810A (ja) | 2023-08-07 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004224663A (ja) * | 2003-01-27 | 2004-08-12 | National Institute Of Advanced Industrial & Technology | 単結晶成長装置 |
JP2009274933A (ja) * | 2008-05-16 | 2009-11-26 | Mitsubishi Electric Corp | 単結晶成長装置および単結晶の製造方法 |
JP2017088415A (ja) * | 2015-11-02 | 2017-05-25 | 昭和電工株式会社 | SiC単結晶成長装置およびSiC単結晶成長方法 |
JP2018080072A (ja) * | 2016-11-15 | 2018-05-24 | 昭和電工株式会社 | SiC単結晶複合体及びSiCインゴット |
JP2019189499A (ja) * | 2018-04-26 | 2019-10-31 | 昭和電工株式会社 | SiC単結晶成長装置およびSiC単結晶の成長方法 |
Family Cites Families (2)
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CN202390579U (zh) * | 2011-12-09 | 2012-08-22 | 北京有色金属研究总院 | 一种物理气相输运法生长碳化硅单晶用石墨坩埚 |
US10753010B2 (en) * | 2014-09-25 | 2020-08-25 | Pallidus, Inc. | Vapor deposition apparatus and techniques using high puritiy polymer derived silicon carbide |
-
2021
- 2021-12-08 TW TW110146222A patent/TWI811883B/zh active
-
2022
- 2022-01-20 US US17/579,604 patent/US20230227998A1/en not_active Abandoned
- 2022-01-26 JP JP2022010056A patent/JP7305818B1/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004224663A (ja) * | 2003-01-27 | 2004-08-12 | National Institute Of Advanced Industrial & Technology | 単結晶成長装置 |
JP2009274933A (ja) * | 2008-05-16 | 2009-11-26 | Mitsubishi Electric Corp | 単結晶成長装置および単結晶の製造方法 |
JP2017088415A (ja) * | 2015-11-02 | 2017-05-25 | 昭和電工株式会社 | SiC単結晶成長装置およびSiC単結晶成長方法 |
JP2018080072A (ja) * | 2016-11-15 | 2018-05-24 | 昭和電工株式会社 | SiC単結晶複合体及びSiCインゴット |
JP2019189499A (ja) * | 2018-04-26 | 2019-10-31 | 昭和電工株式会社 | SiC単結晶成長装置およびSiC単結晶の成長方法 |
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TWI811883B (zh) | 2023-08-11 |
TW202323604A (zh) | 2023-06-16 |
JP7305818B1 (ja) | 2023-07-10 |
US20230227998A1 (en) | 2023-07-20 |
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