JP2023098702A5 - - Google Patents
Info
- Publication number
- JP2023098702A5 JP2023098702A5 JP2022210476A JP2022210476A JP2023098702A5 JP 2023098702 A5 JP2023098702 A5 JP 2023098702A5 JP 2022210476 A JP2022210476 A JP 2022210476A JP 2022210476 A JP2022210476 A JP 2022210476A JP 2023098702 A5 JP2023098702 A5 JP 2023098702A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021214977 | 2021-12-28 | ||
| JP2021214977 | 2021-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023098702A JP2023098702A (ja) | 2023-07-10 |
| JP2023098702A5 true JP2023098702A5 (https=) | 2025-10-24 |
Family
ID=87072047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022210476A Pending JP2023098702A (ja) | 2021-12-28 | 2022-12-27 | レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023098702A (https=) |
-
2022
- 2022-12-27 JP JP2022210476A patent/JP2023098702A/ja active Pending