JP2023090667A5 - - Google Patents
Info
- Publication number
- JP2023090667A5 JP2023090667A5 JP2022194727A JP2022194727A JP2023090667A5 JP 2023090667 A5 JP2023090667 A5 JP 2023090667A5 JP 2022194727 A JP2022194727 A JP 2022194727A JP 2022194727 A JP2022194727 A JP 2022194727A JP 2023090667 A5 JP2023090667 A5 JP 2023090667A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- information
- substrate
- stress
- conditions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020247022612A KR20240125594A (ko) | 2021-12-17 | 2022-12-08 | 정보 처리 장치, 추론 장치, 기계 학습 장치, 정보 처리 방법, 추론 방법, 및 기계 학습 방법 |
| PCT/JP2022/045330 WO2023112830A1 (ja) | 2021-12-17 | 2022-12-08 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
| US18/719,028 US20250050461A1 (en) | 2021-12-17 | 2022-12-08 | Information processing apparatus, inference apparatus, machine-learning apparatus, information processing method, inference method, and machine-learning method |
| CN202280083021.7A CN118434534A (zh) | 2021-12-17 | 2022-12-08 | 信息处理装置、推论装置、机器学习装置、信息处理方法、推论方法及机器学习方法 |
| TW111147841A TW202339896A (zh) | 2021-12-17 | 2022-12-13 | 資訊處理裝置、推論裝置、機械學習裝置、資訊處理方法、推論方法、及機械學習方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021204866 | 2021-12-17 | ||
| JP2021204866 | 2021-12-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023090667A JP2023090667A (ja) | 2023-06-29 |
| JP2023090667A5 true JP2023090667A5 (https=) | 2025-11-13 |
Family
ID=86937432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022194727A Pending JP2023090667A (ja) | 2021-12-17 | 2022-12-06 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023090667A (https=) |
-
2022
- 2022-12-06 JP JP2022194727A patent/JP2023090667A/ja active Pending
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