JP2023090667A - 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 - Google Patents

情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 Download PDF

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JP2023090667A
JP2023090667A JP2022194727A JP2022194727A JP2023090667A JP 2023090667 A JP2023090667 A JP 2023090667A JP 2022194727 A JP2022194727 A JP 2022194727A JP 2022194727 A JP2022194727 A JP 2022194727A JP 2023090667 A JP2023090667 A JP 2023090667A
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polishing
substrate
information
state
top ring
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JP2023090667A5 (https=
Inventor
健一 武渕
Kenichi Takebuchi
賢一郎 斎藤
Kenichiro Saito
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Ebara Corp
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Ebara Corp
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Priority to KR1020247022612A priority Critical patent/KR20240125594A/ko
Priority to PCT/JP2022/045330 priority patent/WO2023112830A1/ja
Priority to US18/719,028 priority patent/US20250050461A1/en
Priority to CN202280083021.7A priority patent/CN118434534A/zh
Priority to TW111147841A priority patent/TW202339896A/zh
Publication of JP2023090667A publication Critical patent/JP2023090667A/ja
Publication of JP2023090667A5 publication Critical patent/JP2023090667A5/ja
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JP2022194727A 2021-12-17 2022-12-06 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 Pending JP2023090667A (ja)

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KR1020247022612A KR20240125594A (ko) 2021-12-17 2022-12-08 정보 처리 장치, 추론 장치, 기계 학습 장치, 정보 처리 방법, 추론 방법, 및 기계 학습 방법
PCT/JP2022/045330 WO2023112830A1 (ja) 2021-12-17 2022-12-08 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法
US18/719,028 US20250050461A1 (en) 2021-12-17 2022-12-08 Information processing apparatus, inference apparatus, machine-learning apparatus, information processing method, inference method, and machine-learning method
CN202280083021.7A CN118434534A (zh) 2021-12-17 2022-12-08 信息处理装置、推论装置、机器学习装置、信息处理方法、推论方法及机器学习方法
TW111147841A TW202339896A (zh) 2021-12-17 2022-12-13 資訊處理裝置、推論裝置、機械學習裝置、資訊處理方法、推論方法、及機械學習方法

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JP2021204866 2021-12-17
JP2021204866 2021-12-17

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JP2023090667A true JP2023090667A (ja) 2023-06-29
JP2023090667A5 JP2023090667A5 (https=) 2025-11-13

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