JP2023015045A - 光ルミネセンス分光法を用いた有機発光ダイオード製造のための計測学 - Google Patents
光ルミネセンス分光法を用いた有機発光ダイオード製造のための計測学 Download PDFInfo
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Abstract
Description
Claims (15)
- 可視スペクトル又は近可視スペクトルからの光を含む励起光を生成する光源、
光ルミネセンス(PL)層上に前記励起光を導くように構成された光学アセンブリ、
前記励起光が前記PL層と相互作用したことに応じて前記PL層によって生成されたPL放射を受け取り、前記PL放射に基づいて信号を生成するように構成された検出器、及び
前記検出器に接続された計算デバイスであって、前記検出器から前記信号を受信し、前記信号に基づいて前記PL層の特性を特定するように構成された計算デバイスを備える、装置。 - 前記励起光が、第1の波長又は波長の群を含み、前記PL放射が、前記第1の波長又は波長の群とは異なる第2の波長又は波長の群を含む、請求項1に記載の装置。
- 前記光学アセンブリが、
前記励起光を前記PL層に導くように構成された対物レンズ、及び
前記励起光を前記対物レンズに導き、前記PL放射を伝達するように構成されたダイクロイックミラーを含む、請求項1に記載の装置。 - 前記光学アセンブリが、前記励起光の少なくとも第1の部分を前記PL層上の第1の測定箇所に導くように構成された第1の光ファイバを含み、前記励起光の第2の部分を前記PL層上の第2の測定箇所に導くように構成された第2の光ファイバを更に含む、請求項1に記載の装置。
- 前記光学アセンブリが、
前記PL放射の第1の部分を前記検出器に導くように構成された第3の光ファイバ、及び
前記PL放射の第2の部分を前記検出器に導くように構成された第4の光ファイバを更に含む、請求項4に記載の装置。 - 前記光学アセンブリが、光学スプリッタであって、前記励起光の前記第1の部分を前記第1の光ファイバに導き、前記励起光の前記第2の部分を前記第2の光ファイバに導くように構成された光学スプリッタを更に含む、請求項4に記載の装置。
- 前記検出器が、複数の波長のそれぞれについてのPL強度値を生成するように構成された検出器アレイを含み、前記計算デバイスによって特定される前記PL層の前記特性が、基板上の特定の箇所における前記PL層の厚さを含む、請求項1に記載の装置。
- 前記検出アレイが、線形アレイを含み、前記線形アレイが、前記基板の一方の側から前記基板の他方の側へ延在する前記基板の表面上の複数の箇所からの前記PL放射を測定するように構成されている、請求項1に記載の装置。
- 前記計算デバイスによって特定される前記PL層の前記特性が、前記PL層内に含まれているドーパントの濃度を含み、前記計算デバイスが、前記PL層の厚さ及び前記PL放射の静的PL強度値に基づいて、前記ドーパントの前記濃度を特定するように構成されている、請求項1に記載の装置。
- 前記計算デバイスによって特定される前記PL層の前記特性が、前記PL層内に含まれているドーパントの濃度を含み、前記計算デバイスが、前記PL放射に関連する過渡PL強度情報に基づいて、前記ドーパントの前記濃度を特定するように構成されている、請求項1に記載の装置。
- 前記過渡PL強度情報が、前記PL放射の経時的なPL強度の減衰を含むか、又は、前記計算デバイスが、波長の特定の範囲内の前記PL放射の総光子数に基づいて、前記ドーパントの前記濃度を特定するように構成されている、請求項10に記載の装置。
- 光ルミネセンス(PL)層を堆積させるためのシステム内に配置された基板上に形成された前記PL層の特性を特定する方法であって、
可視スペクトル又は近可視スペクトルからの光を含む励起光を生成すること、
前記励起光が前記PL層と相互作用したことに応じて前記PL層によって生成されたPL放射を受け取ること、
前記PL放射に基づいて信号を生成すること、及び
前記信号に基づいて前記特性を特定することを含む、方法。 - 前記励起光が、第1の波長又は波長の群を含み、前記PL放射が、前記第1の波長又は波長の群とは異なる第2の波長又は波長の群を含む、請求項12に記載の方法。
- 励起光を生成する光源、
光ルミネセンス(PL)層を堆積させるためのシステム内に配置された基板上に形成された前記PL層上に前記励起光を導くように構成された光学アセンブリ、
前記励起光が前記PL層と相互作用したことに応じて前記PL層によって生成されたPL放射を受け取り、第1の信号と第2の信号を生成するように構成された検出器であって、前記第1の信号が、前記PL放射に基づき、前記PL放射の経時的なPL強度の減衰を含み、前記第2の信号が、波長の特定の範囲内の前記PL放射の総光子数に基づく、検出器、及び
前記検出器に接続された計算デバイスであって、
前記検出器から前記第1の信号を受信し、前記第1の信号に基づいて前記PL層内のドーパントの濃度を特定し、
前記検出器から前記第2の信号を受信し、前記第2の信号に基づいて前記PL層の厚さを特定するように構成された計算デバイスを備える、装置。 - 前記基板が、前記PL層を堆積させるための前記システムの堆積チャンバ、移送チャンバ、及び/又はエンドオブライン・チャンバ内に配置されている間に、前記検出器が、前記PL層によって生成された前記PL放射を受け取るように構成されている、請求項14に記載の装置。
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IN201841014177 | 2018-04-13 | ||
IN201841014177 | 2018-04-13 | ||
US16/258,392 | 2019-01-25 | ||
US16/258,392 US10935492B2 (en) | 2018-04-13 | 2019-01-25 | Metrology for OLED manufacturing using photoluminescence spectroscopy |
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EP3775848A1 (en) | 2021-02-17 |
TW202208829A (zh) | 2022-03-01 |
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US20210208077A1 (en) | 2021-07-08 |
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