JP2022160811A - Conveyance deviation detection method - Google Patents

Abstract

To provide a transport deviation amount detection method capable of easily obtaining a transport deviation amount of transport means.SOLUTION: A conveyance deviation amount detection method includes a first coordinate storing step of holding a workpiece on which a mark M is formed on a first table, imaging the workpiece with imaging means, and storing the coordinates of the mark M as X1 and Y1 coordinates, a 180-degree rotation step of conveying and holding the workpiece held on the first table by conveying means to a second table and rotating the second table by 180 degrees, a return step of conveying the workpiece held on the second table by the conveying means to the first table and holding the workpiece, a second coordinate storing step of rotating the first table by 180 degrees and capturing an image of the workpiece with the imaging means, and storing the coordinates of the mark M as X2 and Y2 coordinates, and a conveyance deviation amount calculation step of calculating (X2-X1)/2 as the conveyance deviation amount in the X-axis direction and (Y2-Y1)/2 as the conveyance deviation amount in the Y-axis direction.SELECTED DRAWING: Figure 1

Description

TECHNICAL FIELD The present invention relates to a method for detecting a conveyance deviation amount of a conveyance means for conveying a work from a first table to a second table.

A wafer in which a plurality of devices such as ICs and LSIs are partitioned by dividing lines and formed on the surface is divided into individual device chips by a dicing machine, and each of the divided device chips is applied to electrical equipment such as mobile phones and personal computers. used.

The dicing apparatus includes a chuck table for holding a wafer, cutting means for cutting the wafer held by the chuck table, X-axis feeding means for relatively feeding the chuck table and the cutting means in the X-axis direction, and a chuck. Y-axis feeding means for relatively indexing and feeding the table and cutting means in the Y-axis direction; imaging means for imaging the wafer held on the chuck table to detect the area to be cut; and cleaning the cut wafer. It is generally composed of cleaning means and transport means for transporting the wafer from the chuck table to the cleaning means, and can cut the wafer with high accuracy (see, for example, Patent Document 1). The cleaning means of the dicing apparatus includes a rotatable spinner table that holds the wafer, and a cleaning liquid injection nozzle that injects cleaning liquid onto the wafer held on the spinner table.

JP 2010-36275 A

However, if the wafer held at the appropriate position on the chuck table of the dicing machine cannot be transported to the appropriate position on the spinner table of the cleaning means by the transport means, the wafer is scattered from the spinner table due to the high-speed rotation of the spinner table. There is a risk of doing so. Therefore, it is necessary to actually measure the direction and distance from the chuck table to the spinner table and finely adjust the transport direction and transport distance of the transport means. be.

Such a problem can also occur in various types of processing equipment (for example, laser processing equipment, grinding equipment, inspection equipment) equipped with a mechanism for transporting wafers between two or more tables.

SUMMARY OF THE INVENTION An object of the present invention, which has been devised in view of the above facts, is to provide a method for detecting the amount of deviation in transport that can easily determine the amount of deviation in transport of a transport means.

According to the present invention, there is provided the following transport deviation amount detection method for solving the above problems. That is, a rotatable first table, a rotatable second table, conveying means for conveying a work from the first table to the second table, and a work held on the first table. and a processing apparatus for processing a workpiece, the method for detecting a conveyance deviation amount of the conveying means, wherein the workpiece having a mark formed thereon is held on the first table. a first coordinate storing step of capturing an image by the imaging means and storing the coordinates of the mark as X1 and Y1 coordinates; and transporting the workpiece held on the first table to the second table by the transport means. a 180-degree rotation step of rotating the second table by 180 degrees, a return step of conveying the work held on the second table by the conveying means to the first table and holding the work; a second coordinate storing step of rotating the first table by 180 degrees and capturing an image of the workpiece by the imaging means, storing the coordinates of the mark as X2 and Y2 coordinates; A transport deviation amount detection method including a transport deviation amount calculation step of calculating (Y2−Y1)/2 as the transport deviation amount in the Y-axis direction.

Preferably, (X2-X1)/2 and (Y2-Y1)/2 are added to the movement amount of the conveying means to correct the conveying deviation.

A conveying deviation amount detection method of the present invention comprises a rotatable first table, a rotatable second table, conveying means for conveying a work from the first table to the second table, and the 1. A conveying displacement amount detection method for obtaining a conveying displacement amount of said conveying means in a processing apparatus having at least an imaging means for picking up an image of a workpiece held on a table and processing the workpiece, the workpiece having a mark formed thereon. is held on the first table, imaged by the imaging means, and the coordinates of the mark are stored as X1 and Y1 coordinates; a 180-degree rotation step of conveying and holding the work to the second table and rotating the second table 180 degrees; and conveying the work held on the second table to the first table by the conveying means. a returning step of rotating the first table by 180 degrees to image the workpiece with the imaging means and storing the coordinates of the mark as X2 and Y2 coordinates; )/2 in the X-axis direction and (Y2-Y1)/2 in the Y-axis direction. It is not necessary to actually measure the direction and distance to the table, and the amount of deviation of the transport means can be easily obtained from the deviation of the coordinates of the mark.

FIG. 2 is a perspective view of a processing apparatus in which the method for detecting the amount of deviation in conveyance according to the present invention can be implemented; The top view of the workpiece|work in which the mark was formed. FIG. 2 is a schematic plan view of the first and second tables shown in FIG. 1; FIG. 4 is a schematic plan view of first and second tables in a first coordinate storage step; FIG. 4 is a schematic plan view showing a state in which a workpiece held on the first table is conveyed to and held by a second table by conveying means; FIG. 6 is a schematic plan view showing a state in which the second table is rotated 180 degrees from the state shown in FIG. 5; FIG. 4 is a schematic plan view showing a state in which a workpiece held on a second table is conveyed to and held by a first table by conveying means; FIG. 8 is a schematic plan view showing a state in which the first table is rotated 180 degrees from the state shown in FIG. 7;

Preferred embodiments of the method for detecting the amount of conveyance deviation of the present invention will be described below with reference to the drawings.

First, a processing apparatus in which the method for detecting the amount of deviation in conveyance of the present invention can be implemented will be described. The processing apparatus 2 shown in FIG. 1 includes a rotatable first table 4, a rotatable second table 6, a conveying means 8 for conveying a workpiece from the first table 4 to the second table 6, At least an imaging means 10 for imaging the work held on the first table 4 is provided.

The circular first table 4 is conveyed by X-axis conveying means (not shown) in the X-axis direction indicated by arrow X in FIG. ) as an axis center by a first table motor (not shown). The X-axis conveying means may have, for example, a ball screw that is connected to the first table 4 and extends in the X-axis direction, and a motor that rotates the ball screw. Note that the Y-axis direction indicated by arrow Y in FIG. 1 is a direction orthogonal to the X-axis direction, and the XY plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

As shown in FIG. 1, a porous circular suction chuck 4a connected to suction means (not shown) is arranged on the upper end of the first table 4. As shown in FIG. The first table 4 sucks and holds a workpiece W (see FIG. 2) such as a disk-shaped semiconductor wafer by generating a suction force on the suction chuck 4a with suction means. The processing device 2 of the illustrated embodiment is a dicing device that cuts the work W, and the first table 4 sucks and holds the work W when cutting the work W. .

The second table 6 of the illustrated embodiment is a spinner table that sucks and holds the work W when the work W that has been subjected to cutting processing and has cutting chips adhering thereto is cleaned. The circular second table 6 is rotated around the center C2 (see FIG. 3) of the second table 6 by a second table motor (not shown).

As shown in FIG. 1, on the upper end of the second table 6, similarly to the first table 4, a porous circular suction chuck 6a connected to suction means (not shown) is arranged. ing. Also in the second table 6, the workpiece W is sucked and held by generating a suction force on the suction chuck 6a by the suction means. Further, the work W can be cleaned by injecting the cleaning liquid from a cleaning liquid injection nozzle (not shown) to the work W while rotating the second table 6 holding the work W by suction.

The conveying means 8 of the illustrated embodiment includes the X-axis conveying means for conveying the work W held on the first table 4 in the X-axis direction, and the work W held on the first table 4. and a Y-axis transport means 11 for lifting and transporting in the Y-axis direction.

The Y-axis conveying means 11 includes an arm 12 movable in the Y-axis direction, an arm moving means (not shown) for moving the arm 12 in the Y-axis direction, and a bracket piece attached to the lower surface of the tip of the arm 12. 14 , an H-shaped plate 16 fixed to the lower surface of the bracket piece 14 , and a plurality of suction pads 18 arranged on the lower surface of the plate 16 . The arm moving means may have, for example, a ball screw connected to the arm 12 and extending in the Y-axis direction, and a motor for rotating the ball screw. The bracket piece 14 is vertically extendable by an appropriate actuator such as an air cylinder. Each suction pad 18 is also connected to suction means (not shown).

In the transport means 8, after the first table 4 is positioned at a predetermined transport start position by the X-axis transport means, the suction pad 18 of the Y-axis transport means 11 sucks and holds the work W on the first table 4. to receive the workpiece W from the first table 4 . After receiving the work W, the Y-axis transfer means 11 moves the arm 12 and the bracket piece 14 to transfer the work W from the first table 4 to the second table 6 .

The imaging means 10 is adapted to image the work W on the first table 4 positioned at a predetermined imaging position by the X-axis conveying means. Image data captured by the imaging means 10 is sent to control means (not shown) of the processing device 2 .

The control means composed of a computer includes a central processing unit (CPU) that performs arithmetic processing according to a control program, a read-only memory (ROM) that stores control programs and the like, and a readable and writable random access memory that stores arithmetic results and the like ( RAM). The control means executes image analysis on the image data sent from the imaging means 10. For example, the X coordinate and the X coordinate of the mark M (see FIG. 2) formed on the work W Get and store the Y coordinate. Further, the control means controls the operation of the processing device 2, and as an example, controls the amount of movement of the conveying means 8 in accordance with conditions input in advance to the control means.

As shown in FIG. 1, the processing apparatus 2 further includes a cutting means 20 for cutting the workpiece W held on the first table 4, and a vertically movable cassette table 24 on which a cassette 22 containing a plurality of workpieces W is placed. a loading/unloading means 28 that pulls out the pre-processed work W from the cassette 22, carries it out to the temporary placement table 26, and loads the processed work W positioned on the temporary placement table 26 into the cassette 22; A moving means 30 for moving the unprocessed work W carried out to the placing table 26 to the first table 4 is provided.

Next, a method for detecting the amount of conveyance deviation of the conveying means 8 in the processing apparatus 2 described above will be described. In the illustrated embodiment, first, a first coordinate storing step is performed in which the workpiece W on which the mark M is formed is held on the first table 4, is imaged by the imaging means 10, and the coordinates of the mark M are stored as X1 and Y1 coordinates. to implement.

In the first coordinate storage step, first, the workpiece W is placed on the first table 4 with the surface on which the mark M is formed facing upward. Next, the first table 4 is moved by the X-axis conveying means, the first table 4 is positioned at a predetermined imaging position, and the workpiece W held on the first table 4 is imaged by the imaging means 10 . Then, image analysis is performed by the control means on the image captured by the imaging means 10, and the coordinates of the mark M are obtained and stored as X1 and Y1 coordinates (see FIG. 4).

After carrying out the first coordinate storing step, the work W held on the first table 4 is carried by the carrying means 8 to the second table 6 and held there, and the second table 6 is rotated 180 degrees. A rotation process is performed.

In the 180-degree rotation step, the first table 4 is first moved by the X-axis transport means and positioned at a predetermined transport start position. After positioning the first table 4 at the transfer start position, the arm 12 and the bracket piece 14 of the Y-axis transfer means 11 are operated to bring the suction pad 18 into close contact with the upper surface of the work W on the first table 4 . Next, each suction pad 18 sucks and holds the work W, and the suction force of the first table 4 is released.

Next, by operating the arm 12 and the bracket piece 14 of the Y-axis transfer means 11 , the work W is transferred from the first table 4 to the second table 6 , and the lower surface of the work W is transferred to the upper surface of the second table 6 . come into contact with Next, the workpiece W is held by suction by the second table 6, and the suction force of the suction pad 18 is released. In this way, the work W is transferred from the Y-axis transfer means 11 to the second table 6 (see FIG. 5). After transferring the work W to the second table 6, the second table motor is operated to rotate the second table 6 sucking and holding the work W by 180 degrees as shown in FIG.

After performing the 180-degree rotation step, the return step of transporting the work W held on the second table 6 by the transport means 8 to the first table 4 and holding it there is performed.

In the return process, first, the suction pads 18 of the Y-axis conveying means 11 are brought into close contact with the upper surface of the work W on the second table 6 , and the work W is held by suction with each suction pad 18 . release the attraction. Next, by operating the arm 12 and the bracket piece 14 , the workpiece W is conveyed from the second table 6 to the first table 4 and the lower surface of the workpiece W is brought into contact with the upper surface of the first table 4 . Then, as shown in FIG. 7, the workpiece W is held by suction by the first table 4, and the suction force of the suction pad 18 is released. Thus, the work W is returned from the second table 6 to the first table 4.例文帳に追加

After the return process is performed, the first table 4 is rotated 180 degrees, the image of the workpiece W is imaged by the imaging means 10, and the coordinates of the mark M are stored as X2 and Y2 coordinates in the second coordinate storage process.

In the second coordinate storage step, first, as shown in FIG. 8, the first table motor is operated to rotate the first table 4 sucking and holding the workpiece W by 180 degrees. Next, the first table 4 is moved by the X-axis conveying means, the first table 4 is positioned at a predetermined imaging position, and the workpiece W held on the first table 4 is imaged by the imaging means 10 . Then, image analysis is performed by the control means on the image captured by the imaging means 10, and the coordinates of the mark M are obtained and stored as X2 and Y2 coordinates (see FIG. 8).

After performing the second coordinate storage step, (X2-X1)/2 is the amount of transport deviation in the X-axis direction, and (Y2-Y1)/2 is the amount of transport deviation in the Y-axis direction. Carry out the process. In the illustrated embodiment, the calculation of the transport deviation amount is performed by the control means.

In the illustrated embodiment, as described above, the workpiece W conveyed from the first table 4 to the second table 6 is rotated by 180 degrees on the second table 6, and is transferred from the second table 6 to the first table 4. Since the work W conveyed (returned) to the first table 4 is rotated 180 degrees on the first table 4, if there is a conveyance deviation due to the conveyance means 8, the coordinates (X1, Y1) of the mark M before conveyance and the conveyance The distance from the coordinates (X2, Y2) of the subsequent mark M is twice the amount of displacement of the conveying means 8 . Therefore, by executing the calculations of (X2-X1)/2 and (Y2-Y1)/2, it is possible to obtain the amounts of transport deviation in the X-axis direction and the Y-axis direction. If there is no transport deviation by the transport means 8, the coordinates (X1, Y1) of the mark M before transport and the coordinates (X2, Y2) of the mark M after transport match.

It is preferable to add (X2-X1)/2 and (Y2-Y1)/2 to the amount of movement of the transport means 8 to correct the transport deviation after performing the transport deviation calculation step. In the illustrated embodiment, when the work W is transported from the first table 4 to the second table 6, the X-axis transport means transports the work W in the X-axis direction, and the Y-axis transport means 11 transports the work W. Since the sheet is conveyed in the Y-axis direction and the vertical direction, the amount of conveyance deviation in the X-axis direction is added to the amount of movement of the X-axis conveyance means, and the amount of conveyance deviation in the Y-axis direction is added to the amount of movement of the Y-axis conveyance means 11. . As a result, the work W can be prevented from being displaced when the work W is transferred from the first table 4 to the second table 6, and the work W can be placed at an appropriate position on the second table 6. can be done.

As described above, in the illustrated embodiment, the workpiece W on which the mark M is formed is held on the first table 4 and imaged by the imaging means 10, and the coordinates of the mark M are stored as the X1 and Y1 coordinates. 1 coordinate storage step, a 180-degree rotation step in which the workpiece W held on the first table 4 is conveyed to and held by the second table 6 by the conveying means 8, and the second table 6 is rotated 180 degrees; A returning process of conveying the workpiece W held on the second table 6 by the conveying means 8 to the first table 4 and holding it there, and rotating the first table 4 by 180 degrees and imaging the workpiece W with the imaging means 10. a second coordinate storage step of storing the coordinates of the mark M as X2 and Y2 coordinates; , the amount of conveyance deviation of the conveying means 8 can be easily obtained.

Contrary to the illustrated embodiment, the amounts of transport deviation in the X-axis direction and the Y-axis direction may be (X1-X2)/2 and (Y1-Y2)/2. A half of the difference between X1 and X2 and a half of the difference between Y1 and Y2 are the amount of misalignment. This is because it indicates the direction in which the

Further, in the illustrated embodiment, an example in which the processing device 2 is configured as a dicing device for cutting the work W has been described. It can be carried out by placing it in various processing devices including a laser processing device that performs laser processing on the work, a grinding device that performs grinding processing on the work, and an inspection device that inspects the work.

2: Processing device 4: First table 6: Second table 8: Conveying means 10: Imaging means W: Work

Claims (2)

A rotatable first table, a rotatable second table, conveying means for conveying a work from the first table to the second table, and an image of the work held on the first table A conveying deviation amount detection method for obtaining a conveying deviation amount of said conveying means in a processing apparatus for processing a workpiece, comprising at least an imaging means for
a first coordinate storing step of holding the work on which the mark is formed on the first table, imaging the work with the imaging means, and storing the coordinates of the mark as X1 and Y1 coordinates;
a 180-degree rotation step of conveying and holding the workpiece held on the first table by the conveying means to the second table and rotating the second table by 180 degrees;
a return step of conveying the workpiece held on the second table by the conveying means to the first table and holding the work;
a second coordinate storing step of rotating the first table by 180 degrees and capturing an image of the workpiece with the imaging means, and storing the coordinates of the mark as X2 and Y2 coordinates;
a transport deviation amount calculation step of calculating (X2-X1)/2 as the transport deviation amount in the X-axis direction and (Y2-Y1)/2 as the transport deviation amount in the Y-axis direction;
A conveying deviation amount detection method including. 2. The method of detecting a conveying deviation amount according to claim 1, wherein (X2-X1)/2 and (Y2-Y1)/2 are added to the moving amount of said conveying means to correct the conveying deviation.

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