JP2022057436A - Industrial robot and control method for the same - Google Patents

Abstract

To provide an industrial robot, which can suppress occurrence of vibrations even when a center of gravity thereof is high, and reduce tact-time in work that the robot executes.SOLUTION: The industrial robot comprises: a base; hands; arms (an RU-axis and an RD-axis) to which the hands are connected; arm support parts for supporting the arms; a lifting mechanism (a Z-axis) which lifts the arm support parts with respect to the base; a horizontal movement mechanism (an X-axis) that moves the base along a rail in a horizontal direction; first driving parts (motors 35RU and 35RD) that extend the arms; a second driving part (a motor 35Z) that drives the lifting mechanism; and a third driving part (a motor 35X) that drives the horizontal movement mechanism. When generating internal instructions to the driving parts on the basis of an operation instruction, the industrial robot performs filter processing to the internal instruction to the third driving part, using a filtering quantity greater than filtering quantities that are used for the other driving parts in which filtering processing is performed to their internal instructions.SELECTED DRAWING: Figure 3

Description

The present invention relates to an industrial robot and a control method thereof.

When transporting a work such as a glass substrate between different processing devices, an industrial robot for transport is used. When transporting a work, the robot's hand is inserted into the cassette or load lock chamber of the processing device that is the loading source, the work is held on the hand, the hand on which the work is placed is pulled out from the cassette, and the work is placed on the hand. The arm of the robot or the entire robot is moved while the robot is placed on the robot, then the hand is inserted into the cassette of the processing device to be carried in, the work is stored in the cassette, and then only the hand is pulled out from the cassette. When the transport distance of the work is long, it cannot be dealt with only by expanding and contracting the arm. Therefore, for example, the robot is horizontally moved along a rail provided on the floor surface. In such an industrial robot for transportation, the motor of each axis of the robot is driven and controlled based on the teaching data, and the hand is moved to a desired position. At this time, when controlling the robot based on the teaching data, for example, control is performed to move the hand by designating only the start point and the end point of the trajectory to be taken by the hand. It is not controlled by the smoothness of movement. Therefore, the acceleration of the robot changes greatly near the start point, the end point, the bending point in the orbit, and the robot may vibrate greatly due to the interaction between the change in acceleration and the arm or the mass of the robot. This vibration becomes larger when the hand or work is in a high position and the center of gravity of the robot is high. Therefore, it is conceivable that the higher the center of gravity of the robot, the smaller the acceleration / deceleration of the robot to suppress vibration. However, reducing the acceleration / deceleration means lengthening the acceleration / deceleration time, and the work performed by the robot. Increase the tact time of.

In Patent Document 1, in order to suppress the occurrence of vibration in a robot, for example, filtering processing by a moving average filter is performed on an internal operation command to each axis of the robot, particularly, the axis having the largest moving distance in the robot or the axis. It is disclosed that the occurrence of vibration in the robot is reduced by performing the filtering process only on the main axis with the axis having the longest movement time as the main axis.

Japanese Unexamined Patent Publication No. 2020-217509

By performing a filter process having a time constant corresponding to the frequency of vibration generated in the robot, it is possible to suppress the generation of vibration in the robot without lengthening the acceleration / deceleration time of the robot. However, when the overlap operation is performed in the control of the robot, the timing of shifting from the first movement operation to the second movement operation is delayed by performing the filter processing with the time constant corresponding to the vibration frequency, and the timing is delayed by that amount. The tact time of the work performed by the robot becomes longer. The overlap movement is the execution of the second movement movement before the end of the first movement movement when the robot executes the first movement movement and subsequently the second movement movement whose movement direction is different from that of the first movement movement. Means to start. In the overlap operation, the first movement operation and the second movement operation are partially overlapped and executed, so that the total execution time is longer than when the second movement operation is started after the end of the first movement operation. Can be shortened. More specifically, in the overlap operation, a predetermined filter process for the overlap operation is executed for the command of the first movement operation, and the command after the filter process is executed is based on the command (post-filter process command). The first movement operation is executed, the start timing of the second movement operation is determined based on the post-filtering command, and the second movement operation is executed based on the determined start timing.

An object of the present invention is to provide an industrial robot and a control method thereof, which can suppress the generation of vibration even when the center of gravity is high and can shorten the takt time of the work performed by the robot. There is something in it.

The industrial robot of the present invention has a base, a hand, an arm to which the hand is connected, an arm support portion that supports the arm, an elevating mechanism that raises and lowers the arm support portion with respect to the base, and a base. The horizontal movement mechanism that moves horizontally along the rail, the first drive unit that expands and contracts the arm, the second drive unit that drives the elevating mechanism, the third drive unit that drives the horizontal movement mechanism, and the operation command A control unit that generates internal commands for each of the first drive unit, the second drive unit, and the third drive unit to control the operation of the first drive unit, the second drive unit, and the third drive unit is provided. The control unit performs filtering processing on the internal command for the third drive unit with a larger filter amount than that used for other drive units on which the filter processing for the internal command is performed.

The main vibration in an industrial robot that is used for transporting workpieces and can raise and lower the arm to which the hand is connected with respect to the base is that the base is the fixed end and the upper end of the robot moves back and forth in the horizontal direction. It is a vibration like a robot. This vibration tends to increase when the center of gravity of the robot is high, but it is not induced by the movement of the center of gravity in the vertical direction. In addition, since the mass of the entire robot is overwhelmingly larger than the mass of the arm, hand, and work held by the hand, this vibration is greatly induced by accelerating and decelerating the entire robot in the horizontal direction. It is considered to be. Therefore, in the industrial robot of the present invention, another drive unit (that is, the arm is expanded and contracted) in response to an internal command to the third drive unit that drives the horizontal movement mechanism that moves the base of the robot horizontally along the rail. The filter processing is performed with a filter amount larger than the filter amount in the filter processing performed on the first drive unit and the second drive unit that drives the elevating mechanism). As a result, the generation of vibration caused by the movement of the robot by the horizontal movement mechanism is suppressed, and the axes other than the horizontal movement mechanism are not filtered or only filtered with a small amount of filter. It is possible to shorten the tact time of the work performed by the robot by the overlapping operation. The filtering process is, for example, a moving average filter, and the filter amount is, for example, a time constant in the filtering process or an averaging time in the moving average filter.

In the industrial robot of the present invention, a rotation mechanism for rotating the elevating mechanism with respect to the base around a vertical rotation axis and a fourth drive unit for driving the rotation mechanism are further provided, and the control unit issues an operation command. May be converted into an internal command for the fourth drive unit to control the fourth drive unit. Rotation by the rotation mechanism also contributes little to the generation of vibration in the robot. Even when filtering is performed for the internal command for driving the rotation mechanism, the filter amount for the filtering process should be smaller than the filter amount used for the internal command for driving the horizontal movement mechanism. As a result, the tact time can be shortened while suppressing the occurrence of vibration.

In the industrial robot of the present invention, the arm support portion and the arm are provided with a link mechanism so that the hand can be advanced and retracted along the predetermined direction while the direction of the hand with respect to the arm support portion is fixed in the predetermined direction. An articulated mechanism may be configured, and the arm may be expanded or contracted by driving the link mechanism by the first driving unit. With this configuration, the arm can be expanded and contracted by the first drive unit composed of a single motor, and the drive control of the arm becomes easy. Further, the industrial robot of the present invention can be an industrial robot for transport, which holds the work in a hand and transports the work. In an industrial robot for transportation, the robot is frequently moved horizontally by a horizontal movement mechanism. By applying the present invention to an industrial robot for transportation, the tact while surely suppressing the generation of vibration in the robot. It becomes possible to shorten the time.

The control method of the industrial robot of the present invention includes a base, a hand, an arm to which the hand is connected, an arm support portion that supports the arm, an elevating mechanism that raises and lowers the arm support portion with respect to the base, and the like. A horizontal movement mechanism that moves the base horizontally along the rail, a first drive unit that expands and contracts the arm, a second drive unit that drives the elevating mechanism, and a third drive unit that drives the horizontal movement mechanism. It is a control method of an industrial robot having On the other hand, it has a step of performing a filter process with a larger amount of filter than used for other drive units in which the filter process for an internal command is performed.

The vibration that the upper end side of the robot reciprocates in the horizontal direction with the base as the fixed end is greatly induced by the acceleration / deceleration when the robot is moved horizontally. Therefore, in the control method of the industrial robot of the present invention, another drive unit (that is, that is, in response to an internal command to the third drive unit that drives the horizontal movement mechanism that moves the base of the robot in the horizontal direction along the rail). The filter processing is performed with a filter amount larger than the filter amount in the filter processing performed on the first drive unit for expanding and contracting the arm and the second drive unit for driving the elevating mechanism). As a result, the generation of vibration in the robot is suppressed, and the tact time of the work performed by the robot can be shortened by the overlapping operation for the operation related to the axis other than the horizontal movement mechanism.

In the control method of the industrial robot of the present invention, the industrial robot further includes a rotation mechanism that rotates the elevating mechanism with respect to the base around a vertical rotation axis, and a fourth drive unit that drives the rotation mechanism. In that case, an internal command to the fourth drive unit may be generated based on the operation command. Since the rotation by the rotation mechanism also contributes less to the generation of vibration in the robot, in this case as well, the internal command to the third drive unit is compared to the other drive unit in which the internal command is filtered. By performing the filter processing with a large amount of filter, it is possible to shorten the tact time while suppressing the generation of vibration.

In the control method of the industrial robot of the present invention, the arm support portion and the arm of the industrial robot are provided with a link mechanism, and the hand is moved forward and forward along a predetermined direction while the direction of the hand with respect to the arm support portion is fixed in a predetermined direction. An articulated mechanism that can be retracted may be configured, in which case the first drive unit may extend or contract the arm by driving the link mechanism. According to such a configuration, the arm can be expanded and contracted by the first drive unit including a single motor, so that the drive control of the arm becomes easy. Further, in the control method of the industrial robot of the present invention, the operation command may be an operation command for holding the work in the hand and transporting the work. Such operation commands are widely used in industrial robots for transport used for transporting workpieces. In an industrial robot for transportation, the robot is frequently moved horizontally by a horizontal movement mechanism. By applying the present invention to an industrial robot for transportation, the tact while surely suppressing the generation of vibration in the robot. It becomes possible to shorten the time.

According to the present invention, in an industrial robot, it is possible to suppress the generation of vibration even when the center of gravity is high, and it is possible to shorten the tact time of the work performed by the robot.

It is a figure which shows the structure of the industrial robot of one embodiment of this invention. (A) and (b) are a side view and a plan view of the robot unit, respectively. It is a block diagram for demonstrating the motion control of an industrial robot.

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing an industrial robot according to an embodiment of the present invention. The purpose of this industrial robot is to transport a work such as a glass substrate, and an operation command for the robot unit 10 that actually performs an operation as a horizontal articulated robot and an operation command for the robot unit 10 are input from the outside. A control device (robot controller) 40 that drives and controls the robot unit 10 based on this operation command is provided, and the robot unit 10 and the control device 40 are electrically connected by a cable. The robot unit 10 is configured as a so-called double-handed robot including two hands 13A and 13B for holding the work 50 (not shown in FIG. 1), respectively. FIG. 1 shows a state in which the horizontal articulated mechanism is raised in the robot unit 10. The control device 40 includes a control unit 41 for inputting an operation command, a servo driver 45 (see FIG. 3) for driving motors 35RD, 35RU, 35TH, 35X, 35Z (see FIG. 3) provided in the robot unit 10, and the like. 42, including the drive circuit 42. The detailed configuration of the control device 40 will be described later. Since the industrial robot of the present embodiment is used for transporting the work 50, the operation command is basically a command for the movement operation as to which position the hands 13A and 13B should be moved. The control unit 41 generates an internal command including the speed for each axis of the robot unit 10 based on the operation command, and the drive circuit 42 uses an internal command for each axis to generate a motor for each axis of the robot unit 10. Actually drive.

2A and 2B are views showing details of the robot unit 10 in a state where the horizontal articulated mechanism is lowered, and FIGS. 2A and 2B are side views and plan views of the robot unit 10, respectively. The robot unit 10 has a base 22 that can move on a pair of rails 21 that are parallel to each other and are provided in a straight line on the floor surface, and a motor 35TH that is provided on the base 22 and is built in the base 22. It is provided with a rotary table 23 that rotates in a horizontal plane around a rotary shaft 31 according to (see FIG. 3), and an elevating mechanism 24 that is provided so as to stand upright with respect to the rotary table 23. A cover 25 covering the rail 21 is attached to the rail 21. The base 22 is provided with a motor 35X (see FIG. 3) for horizontally moving the base 22 along the rail 21, and the motor 35X moves the robot unit 10 together with the base 22 along the rail 21. A horizontal movement mechanism that moves in the horizontal direction is configured and driven. Further, the motor 35TH and the rotary table 23 constitute a rotation mechanism for rotating the elevating mechanism 24 with respect to the base 22 around the vertical rotation shaft 31, and this rotation mechanism is driven by the motor 35TH.

The elevating mechanism 24 includes a fixed portion 24A attached to the rotary table 23 and a moving portion 24B that elevates and elevates with respect to the fixed portion 24A by a motor 35Z (see FIG. 3). In FIG. 2A, the moving portion 24B of the elevating mechanism 24 is located at the lowest position in the elevating range. The moving portion 24B is provided with an arm support portion 26 for holding the horizontal articulated mechanism so as to extend in the horizontal direction, and two sets of horizontal articulated mechanisms are arranged in the vertical direction at the tip of the arm support portion 26. Is attached. The elevating mechanism 24 is driven by the motor 35Z to elevate the arm support portion 26 with respect to the base 22. The upper horizontal articulated mechanism is a first arm 11A attached to the arm support 26 and rotatable in a horizontal plane around a common shaft 32, and a horizontal plane attached to the tip of the first arm 11A around a shaft 33A. A second arm 12A that can rotate inside is provided, and a hand 13A is attached to the tip of the second arm 12A. Similarly, the lower horizontal articulated mechanism is attached to the first arm 11B, which is attached to the arm support portion 26 and can rotate in a horizontal plane around the common shaft 32, and the shaft 33B, which is attached to the tip of the first arm 11B. It is equipped with a second arm 12B that can rotate around in a horizontal plane, and a hand 13B is attached to the tip of the second arm 12B.

The hands 13A and 13B have a fork-like shape in which a plurality of rod-shaped members are arranged in parallel so that the plate-shaped work 50 can be conveyed while being held in a horizontal state by holding the hands 13A and 13B from below. The hands 13A and 13B take out the work 50 stored in the cassette of the processing device, the load lock chamber, etc. and hold it on the hands 13A, 13B, or store the held work 50 in the cassette or the like. Occasionally, it moves forward or backward with respect to the work 50. The forward and backward directions of the hands 13A and 13B coincide with the extending direction of the rod-shaped member. The width of the hands 13A and 13B in the left-right direction, that is, in the direction orthogonal to the front-back direction is shorter than the width in the left-right direction of the work 50 to be conveyed.

In this robot, the horizontal articulated mechanism is a hand 13A in a linear motion along a direction orthogonal to the direction in which the arm support portion 26 extends by a link mechanism incorporated in the first arms 11A and 11B and the second arms 12A and 12B. , 13B are configured to perform forward and backward movements. That is, both hands 13A and 13B move forward and backward in the same direction. The movement in which the tips of the hands 13A and 13B move away from the central axis 32 is the forward movement, and the movement in the direction opposite to the forward movement is the backward movement. The first arms 11A and 11B and the second arms 12A and 12B perform bending motions as a whole, and nevertheless, in order to keep the directions of the hands 13A and 13B in the horizontal plane constant, the hands 13A and 13B are used. They are rotatably attached in the horizontal plane around the wrist shafts 34A and 34B at the positions of the tips of the second arms 12A and 12B, respectively. In the upper horizontal articulated mechanism, the first arm 11A and the second arm 12A move by driving the link mechanism by the motor 35RU (see FIG. 3) provided in the arm support portion 26, and the hand 13A is oriented in that direction. While maintaining the above, the arm support portion 26 moves in a direction orthogonal to the extending direction. Similarly, in the lower horizontal articulated mechanism, the first arm 11B and the second arm 12B move by driving the link mechanism by the motor 35RD (see FIG. 3) provided on the arm support portion 26, and the hand 13B. Moves in a direction orthogonal to the extending direction of the arm support portion 26 while maintaining the direction. In this robot, the hand 13A and the hand 13B can be moved forward and backward independently. The movement of the hands 13A and 13B forward or backward due to the bending motion of the first arms 11A and 11B and the second arms 12A and 12B is called expansion and contraction of the arm.

After all, the movements of the industrial robot in the robot unit 10 of the present embodiment are the horizontal movement along the rail 21 (this is referred to as the movement of the X-axis or the traveling axis) and the movement of the rotating shaft 31 which is a vertical axis. Rotation with respect to the base around (this is the movement of the θ axis or the rotation axis) and horizontal forward and backward movements of the hands 13A and 13B, that is, expansion and contraction movements of the arm (this is the movement of the R axis). And the raising and lowering of the arm support portion 26 by the raising and lowering mechanism 24 in the vertical direction (this is referred to as the movement of the Z axis). By providing two horizontal articulated mechanisms corresponding to the two hands 13A and 13B, in this robot the R axis corresponds to the RU axis corresponding to the upper hand 13A and the lower hand 13B. It is divided into the RD axis. The RU axis and the RD axis are independent of each other. These X-axis, θ-axis, RU-axis, RD-axis and Z-axis are driven by motors 35X, 35TH, 35RU, 35D, 35Z corresponding to the respective axes. The robot unit 10 executes an operation of moving only one of these axes or an operation of simultaneously moving two or more axes by drive control based on an internal command from the control device 40 in response to the operation command. do. The motor 35Z that drives the elevating mechanism 24 (Z axis) corresponds to the first drive unit, and the motors 35RU and 35RD that drive the expansion and contraction movement (RU axis and RD axis) of the arm correspond to the second drive unit. The motor 35Z that drives the horizontal movement mechanism (X-axis) corresponds to the third drive unit, and the motor 35TH that drives the rotation mechanism (θ-axis) corresponds to the fourth drive unit.

The transfer of the work 50 such as a glass substrate using the industrial robot of the present embodiment will be described. When the work 50 is transported between the processing devices by the industrial robot of the present embodiment, the cassette (or load lock chamber) of each processing device is arranged at positions substantially equidistant from the rail 21 in the horizontal direction. The vertical position (height) of the cassette is arbitrary as long as it can be moved up and down by the raising and lowering mechanism 24. Cassettes may be arranged on both sides of a track consisting of a pair of rails 21. When the work 50 is transferred from the first cassette on the carry-out side to the second cassette on the carry-in side by placing the work 50 on the hand 13A, the hands 13A and 13B are both retracted to the first cassette. With the arms 11A and 11B and the second arms 12A and 12B folded, the robot unit 10 is moved along the rail 21 to a position facing the first cassette, and at the same time or subsequently, the hand 13A The arm support portion 26 is raised and lowered by the raising and lowering mechanism 24 so that the height corresponds to the height corresponding to the first cassette. Then, the work 50 is placed on the hand 13A by advancing the hand 13A to advance the hand 13A into the first cassette and slightly raising the hand 13A. After that, the hand 13A is retracted and the hand 13A is pulled out from the first cassette together with the work 50. Next, the robot unit 10 is moved along the rail 21 to a position facing the second cassette with the work 50 mounted, and at the same time or subsequently, the height of the hand 13A corresponds to the second cassette. The arm support portion 26 is moved up and down by the raising and lowering mechanism 24 so as to reach the required height. Then, with the work 50 still mounted, the hand 13A is advanced to advance the hand 13A into the second cassette, and the hand 13A is slightly lowered to place the hook 50 in the second cassette, and the hand is placed. Retreat 13A and pull out hand 13A from the second cassette. By the above operation, the work 50 is conveyed from the first cassette to the second cassette. When the first cassette is arranged on one side of the horizontal moving track composed of the pair of rails 21 and the second cassette is arranged on the other side, in addition to the above operation, around the rotating shaft 31. The rotation action is performed at. When the processing device is arranged only on one side of the horizontal moving track consisting of the pair of rails 21, it is not necessary to provide the rotating mechanism including the rotary table 23 and the motor 35TH.

Next, the operation control of the industrial robot of the present embodiment will be described with reference to FIG. FIG. 3 is a block diagram showing a control system in an industrial robot in order to explain the operation control of the industrial robot of the present embodiment. As described above, the robot unit 10 of the industrial robot includes motors 35Z for driving the elevating mechanism 24 and motors 35RU and 35RD for driving expansion and contraction of arms corresponding to the upper and lower hands 13A and 13B, respectively, as motors for each axis. A motor 35X for driving the horizontal movement mechanism and a motor 35TH for driving the rotation mechanism are provided. All of these motors are motors with encoders, and are servo-controlled by a servo driver 45 provided for each motor in the drive circuit 42 in the control device 40. The servo driver 45 for each axis is supplied with an internal command for each axis from the control unit 41 in the control device 40, and drives the corresponding motor in response to the internal command.

An operation command for causing the industrial robot to execute a desired operation is input to the control unit 41 of the control device 40. The motion command is generated as a result of teaching to the robot, for example, and is, for example, a command for a motion motion to move the hand 13A from the first place to the second place. However, the operation command does not directly describe the movement of each axis of the robot. Given the start and end points of the hand 13A, for example, both the horizontal movement of the entire robot unit 10 by the horizontal movement mechanism and the raising and lowering of the hand 13A by the elevating mechanism 24 are required to realize the movement. Sometimes. Therefore, the control unit 41 analyzes the input motion command to generate a robot trajectory (also called a motion plan), calculates the motion required for each axis based on the trajectory, and generates an internal command for each axis. An orbit calculation unit 43 is provided. The internal command output by the trajectory calculation unit 43 does not guarantee the smooth movement of the shaft, such as accompanied by an extreme change in acceleration / deceleration in the corresponding shaft. Therefore, the internal command of each axis is supplied to the servo driver 45 for each axis via the filter 44 provided for each axis.

In the industrial robot of the present embodiment, when the arm support portion 26 is raised, the center of gravity of the entire robot portion 10 becomes high, and as a result, particularly when the robot portion 10 is horizontally moved by the horizontal movement mechanism. The robot unit 10 tends to vibrate with the base 22 as a fixed end. This vibration is induced by a sudden change in the acceleration / deceleration speed when the robot unit 10 moves horizontally. Therefore, in the present embodiment, in order to suppress abrupt changes in acceleration / deceleration during horizontal movement and suppress vibration, in response to an internal command to the motor 35X that drives the X-axis, that is, the horizontal movement mechanism, other motors 35Z, 35RU, 35RD , Performs filtering with a larger amount of filtering than when filtering for internal commands for 35TH. In other words, the filter amount in the filter 44 corresponding to the X axis is set larger than the filter amount in the filter 44 corresponding to the Z axis, the RU axis, the RD axis and the TH axis. Each filter 44 is, for example, a moving average filter, and the filter amount is, for example, a time constant in the filtering process, or an averaging time when the filter is a moving average filter. As an example, the filter 44 for the X axis is set to 0.3 seconds as a time constant, whereas the filter 44 corresponding to the other axes, that is, the Z axis, the RU axis, the RD axis, and the TH axis is set as a time constant. 0.05 seconds is set. For axes other than the X axis, it is not necessary to provide the filter 44 because the filter processing is not performed. By filtering the internal command of the X-axis with a filter amount larger than that of the other axes, the sudden change in the acceleration / deceleration speed when the robot unit 10 moves horizontally is suppressed and the generation of vibration is suppressed. .. As a result, when the center of gravity of the robot is high, it is not necessary to lengthen the acceleration / deceleration time of the entire robot, and the tact time can be shortened. For axes other than the horizontal movement mechanism (that is, the X-axis), the amount of filter in the filter processing is small, or the filter processing itself is not performed, so even if the overlap operation is applied to those axes, it is caused by the filter processing. There is no delay, and the tact time can be shortened in that respect as well.

As described above, in the industrial robot of the present embodiment, the internal command to the drive unit (motor 35X) for driving the horizontal movement mechanism (that is, the X axis) is driven by another axis in which the internal command is filtered. By performing filter processing with a larger amount of filter than used for the unit, it is possible to suppress the generation of vibration even when the center of gravity of the robot unit 10 is high, and work such as transporting the work 50. Tact time can be shortened.

10 ... Robot part; 11A, 11B ... 1st arm; 12A, 12B ... 2nd arm; 13A, 13B ... Hand; 21 ... Rail; 22 ... Base; 23 ... Rotating table; 24 ... Elevating mechanism; 24A ... Fixed part 24B ... Moving part; 25 ... Cover; 26 ... Arm support part; 31 ... Rotating axis; 32 ... Common axis; 33A, 33B ... Axis; 34A, 34B ... Wrist axis; 40 ... Control device; 41 ... Control unit; 42 ... Drive circuit; 43 ... Orbit calculation unit; 44 ... Filter; 45 ... Servo driver; 35RD, 35RU, 35TH, 35X, 35Z ... Motor; 50 ... Work.

Claims (8)

Base and
With a hand
The arm to which the hand is connected and
An arm support portion that supports the arm and
An elevating mechanism that raises and lowers the arm support with respect to the base,
A horizontal movement mechanism that moves the base horizontally along the rail,
The first drive unit that expands and contracts the arm,
The second drive unit that drives the elevating mechanism and
A third drive unit that drives the horizontal movement mechanism,
Based on the operation command, an internal command is generated for each of the first drive unit, the second drive unit, and the third drive unit, and the operation of the first drive unit, the second drive unit, and the third drive unit is performed. And the control unit that controls
Equipped with
The control unit is an industrial robot that filters an internal command for the third drive unit with a larger amount of filter than that used for other drive units that are filtered for the internal command. A rotating mechanism that rotates the elevating mechanism with respect to the base around a vertical axis of rotation.
The fourth drive unit that drives the rotation mechanism and
Further prepare
The industrial robot according to claim 1, wherein the control unit converts the operation command into an internal command for the fourth drive unit to control the fourth drive unit. The arm support portion and the arm are provided with a link mechanism to provide an articulated mechanism capable of advancing and retracting the hand along the predetermined direction while fixing the direction of the hand with respect to the arm support portion in a predetermined direction. Configure and
The industrial robot according to claim 1 or 2, wherein the first driving unit expands and contracts the arm by driving the link mechanism. The industrial robot according to any one of claims 1 to 3, wherein the work is held in the hand and the work is conveyed. A base, a hand, an arm to which the hand is connected, an arm support portion that supports the arm, an elevating mechanism that raises and lowers the arm support portion with respect to the base, and the base along a rail. An industry having a horizontal movement mechanism for moving the arm in the horizontal direction, a first drive unit for expanding and contracting the arm, a second drive unit for driving the elevating mechanism, and a third drive unit for driving the horizontal movement mechanism. It is a control method for industrial robots.
A process of generating internal commands for each of the first drive unit, the second drive unit, and the third drive unit based on the operation command, and
A step of filtering the internal command for the third drive unit with a larger amount of filter than that used for the other drive unit in which the filter process for the internal command is performed.
Control method having. The industrial robot further has a rotation mechanism for rotating the elevating mechanism with respect to the base around a vertical rotation axis, and a fourth drive unit for driving the rotation mechanism.
The control method according to claim 5, wherein an internal command is generated for the fourth drive unit based on the operation command. In the industrial robot, the arm support portion and the arm may be provided with a link mechanism to move the hand forward and backward along the predetermined direction while the direction of the hand with respect to the arm support portion is fixed in a predetermined direction. Construct an articulated mechanism that can
The control method according to claim 5 or 6, wherein the first driving unit expands and contracts the arm by driving the link mechanism. The control method according to any one of claims 5 to 7, wherein the operation command is an operation command for holding the work in the hand and transporting the work.

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