JP2021062357A - Fine matter removal system and fine matter removal device - Google Patents

Fine matter removal system and fine matter removal device Download PDF

Info

Publication number
JP2021062357A
JP2021062357A JP2019220394A JP2019220394A JP2021062357A JP 2021062357 A JP2021062357 A JP 2021062357A JP 2019220394 A JP2019220394 A JP 2019220394A JP 2019220394 A JP2019220394 A JP 2019220394A JP 2021062357 A JP2021062357 A JP 2021062357A
Authority
JP
Japan
Prior art keywords
fine
liquid
substances
substance removing
matter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019220394A
Other languages
Japanese (ja)
Other versions
JP7432888B2 (en
Inventor
高橋 一彰
Kazuaki Takahashi
一彰 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industria Co Ltd
Original Assignee
Industria Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industria Co Ltd filed Critical Industria Co Ltd
Priority to PCT/JP2020/017235 priority Critical patent/WO2020246162A1/en
Priority to TW109114033A priority patent/TWI779280B/en
Publication of JP2021062357A publication Critical patent/JP2021062357A/en
Priority to JP2023202266A priority patent/JP2024026222A/en
Application granted granted Critical
Publication of JP7432888B2 publication Critical patent/JP7432888B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
  • Physical Water Treatments (AREA)

Abstract

To provide a fine matter removal system that separates and removes fine matters contained in liquid through automatic operation, collects the fine matters by removing the liquid adhering to the fine matters and allows for unmanned operation.SOLUTION: A fine matter removal system 10 includes: a centrifugal separation device 110 for separating and precipitating fine matters contained in liquid with centrifugal force; and a fine matter removal device 120 for removing the liquid adhering to the precipitated fine matters and discharging the fine matters, in a circulation path 102. The fine matter removal system drives the fine matter removal device 120 on the basis of an amount of the fine matter that is precipitated and accumulated.SELECTED DRAWING: Figure 1

Description

この発明は、液体に含まれる微粉末状クズ等の微細物を分離し、微細物に付着する液体を除去して微細物を回収する微細物除去システム及び微細物除去装置に関する。 The present invention relates to a fine substance removing system and a fine substance removing device for separating fine substances such as fine powdery debris contained in a liquid, removing the liquid adhering to the fine substances, and recovering the fine substances.

例えば、機械加工装置では、供給タンクから切削液を供給しながら切削加工が行なわれるが、切削液には微粉末状の切削クズが含まれる。この微粉末状の切削クズが含まれる切削液をフィルタ装置に供給し、このフィルタ装置で切削クズを除去して切削液を供給タンクに戻している(例えば特許文献1)。 For example, in a machining apparatus, cutting is performed while supplying cutting fluid from a supply tank, and the cutting fluid contains cutting debris in the form of fine powder. The cutting fluid containing the fine powder cutting debris is supplied to the filter device, the cutting debris is removed by the filter device, and the cutting fluid is returned to the supply tank (for example, Patent Document 1).

このようなフィルタ装置として、例えばフィルタ膜によって切削クズを除去したり、沈殿によって切削クズを除去するものがあるが、いずれも切削液に大量に含まれる微粉末状の切削クズを、小型の装置で短時間に確実に除去することができない等の問題がある。 As such a filter device, for example, a filter film is used to remove cutting debris, and a settling is used to remove cutting debris. In each case, a small amount of fine powder-like cutting debris contained in a cutting fluid is removed. There is a problem that it cannot be reliably removed in a short time.

また、フィルタ膜が目詰まりを起こすことがあり、詰まってしまった場合まずフィルタ装置の分解作業をし、そのフィルタ膜を洗浄しなければならない。この洗浄作業や使用不能になると交換作業が発生する。また、フィルタ膜は大抵繰り返し使用すると、濾過精度は悪くなり、詰まり易くなるため、フィルタ膜の殆どが使い捨てフィルタ膜であり、コストがかかる等の問題がある。 In addition, the filter film may be clogged, and if it is clogged, the filter device must first be disassembled and the filter film must be cleaned. If this cleaning work or becomes unusable, replacement work will occur. Further, when the filter membrane is used repeatedly, the filtration accuracy is deteriorated and the filter membrane is easily clogged. Therefore, most of the filter membranes are disposable filter membranes, and there is a problem that the cost is high.

特開2001−137743号公報Japanese Unexamined Patent Publication No. 2001-137734

このように微細物除去システムにおいて、フィルタ膜によって切削クズを除去するなどの構成では、フィルタ膜の洗浄作業や交換作業が必要であり、無人化の自動運転により液体に含まれる微粉末状クズ等の微細物を分離し、微細物に付着する液体を除去して微細物を回収することが困難であった。 In this way, in a configuration that removes cutting debris with a filter film in a fine substance removal system, cleaning work and replacement work of the filter film are required, and fine powder debris contained in the liquid due to unmanned automatic operation, etc. It was difficult to separate the fine matter and remove the liquid adhering to the fine matter to recover the fine matter.

この発明は、かかる実情に鑑みてなされたもので、自動運転により液体に含まれる微細物を分離して除去し、微細物に付着する液体を除去して微細物を回収することで、無人化運転を可能にする微細物除去システム及び微細物除去装置を提供することを目的としている。 The present invention has been made in view of such circumstances, and is unmanned by separating and removing fine substances contained in the liquid by automatic operation, removing the liquid adhering to the fine substances, and recovering the fine substances. It is an object of the present invention to provide a fine substance removing system and a fine substance removing device that enable operation.

前記課題を解決し、かつ目的を達成するために、この発明は、以下のように構成した。 In order to solve the above problems and achieve the object, the present invention is configured as follows.

請求項1に記載の発明は、液体を用いて加工または処理を行う装置と、
加工または処理に用いるための液体を貯留する貯留タンクと、
前記貯留タンクから液体を前記装置に供給し、前記装置から前記貯留タンクに戻して循環させる循環経路と、を含み、
前記循環経路に、
前記液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置と、
沈澱した微細物に付着する液体を除去して前記微細物を排出する微細物除去装置と、
沈殿により溜まる微細物量を検出する微細物量検出装置と、
前記検出する微細物量に基づき前記微細物除去装置を制御する制御装置と、を備えることを特徴とする微細物除去システムである。
The invention according to claim 1 is an apparatus for processing or processing using a liquid.
A storage tank that stores liquids for processing or processing,
A circulation path for supplying a liquid from the storage tank to the device and returning the liquid from the device to the storage tank for circulation.
In the circulation path,
A centrifuge that separates and precipitates fine substances contained in the liquid by centrifugal force,
A fine substance removing device that removes the liquid adhering to the precipitated fine substances and discharges the fine substances.
A fine material detection device that detects the amount of fine material accumulated by precipitation, and
The fine substance removing system is characterized by comprising a control device for controlling the fine substance removing device based on the detected fine substance amount.

請求項2に記載の発明は、沈澱する微細物を溜める沈殿部を備え、
前記微細物量検出装置は、
前記沈殿部に溜まる微細物量を検出することを特徴とする請求項1に記載の微細物除去システムである。
The invention according to claim 2 comprises a settling portion for accumulating fine matter to be settled.
The fine quantity detection device is
The fine substance removing system according to claim 1, wherein the amount of fine substances accumulated in the settling portion is detected.

請求項3に記載の発明は、前記微細物除去装置に前記微細物量検出装置を備え、
前記微細物量検出装置は、
前記微細物除去装置に溜まる微細物量を検出することを特徴とする請求項1に記載の微細物除去システムである。
According to the third aspect of the present invention, the fine substance removing device is provided with the fine substance amount detecting device.
The fine quantity detection device is
The fine substance removing system according to claim 1, wherein the amount of fine substances accumulated in the fine substance removing device is detected.

請求項4に記載の発明は、前記微細物除去装置を、複数個直列に接続して備えることを特徴とする請求項1乃至請求項3のいずれか1項に記載の微細物除去システムである。 The invention according to claim 4 is the fine substance removing system according to any one of claims 1 to 3, wherein a plurality of the fine substance removing devices are connected in series. ..

請求項5に記載の発明は、前記循環経路に、前記沈殿部と前記微細物除去装置を洗浄する洗浄回路を備え、
前記制御装置は、前記沈殿部と前記微細物除去装置から前記微細物を排出した後に、前記洗浄回路を駆動して前記沈殿部と前記微細物除去装置を洗浄することを特徴とする請求項1乃至請求項4のいずれか1項に記載の微細物除去システムである。
The invention according to claim 5 includes a cleaning circuit for cleaning the settling portion and the fine substance removing device in the circulation path.
The control device is characterized in that, after discharging the fine matter from the settling portion and the fine matter removing device, the cleaning circuit is driven to clean the settling portion and the fine matter removing device. The fine substance removing system according to any one of claims 4.

請求項6に記載の発明は、前記微細物除去装置の上流側に、前記沈殿部を直接連結して一体化したことを特徴とする請求項1乃至請求項5のいずれか1項に記載の微細物除去システムである。 The invention according to claim 6 is the invention according to any one of claims 1 to 5, wherein the settling portion is directly connected and integrated on the upstream side of the fine substance removing device. It is a fine substance removal system.

請求項7に記載の発明は、沈澱する微細物を前記微細物除去装置に導く導入通路を含み、
前記導入通路に前記沈殿部を備え、
前記微細物量検出装置は、前記沈殿部に溜まる微細物量を検出することを
特徴とする請求項1乃至請求項6のいずれか1項に記載の微細物除去システムである。
The invention according to claim 7 includes an introduction passage for guiding the precipitated fine matter to the fine matter removing device.
The introduction passage is provided with the sedimentation portion.
The fine matter removing system according to any one of claims 1 to 6, wherein the fine matter amount detecting device detects the fine matter amount accumulated in the settling portion.

請求項8に記載の発明は、前記沈殿部の上流側は、
第1の自動バルブを介して前記装置に通じる経路と、
第2の自動バルブと前記遠心分離装置を順に介して前記装置に通じる経路と、を含み、
前記沈殿部の下流側は、
第3の自動バルブを介して前記微細物除去装置に通じる経路と、
を含み、
前記制御装置の制御により、
通常動作は、前記第1の自動バルブを閉じ、前記第2の自動バルブを開き、前記第3の自動バルブを閉じて前記沈殿部に微細物を溜め、
排出動作は、前記第2の自動バルブを閉じ、前記第3の自動バルブを開き、前記沈殿部に溜まる微細物を排出し、その時前記第1の自動バルブを開き、前記沈殿部と前記第3の自動バルブを洗浄して排出しきれない微細物を前記微細物除去装置へ排出し、
通常動作への復帰は、前記第1の自動バルブを閉じ、前記第2の自動バルブを開き、前記第3の自動バルブを閉じて前記沈殿部に微細物を溜めように構成されることを特徴とする請求項2乃至請求項7のいずれか1項に記載の微細物除去システムである。
In the invention according to claim 8, the upstream side of the settling portion is
A path leading to the device via the first automatic valve,
Includes a second automatic valve and a path leading to the device through the centrifuge in sequence.
The downstream side of the sedimentation part is
A path leading to the fine substance removing device via a third automatic valve,
Including
By the control of the control device
In normal operation, the first automatic valve is closed, the second automatic valve is opened, the third automatic valve is closed, and fine substances are accumulated in the settling portion.
The discharge operation closes the second automatic valve, opens the third automatic valve, discharges fine substances accumulated in the settling portion, and then opens the first automatic valve, and opens the settling portion and the third. The automatic valve is cleaned and the fine substances that cannot be discharged are discharged to the fine substance removing device.
The return to the normal operation is characterized in that the first automatic valve is closed, the second automatic valve is opened, the third automatic valve is closed, and fine substances are accumulated in the settling portion. The fine substance removing system according to any one of claims 2 to 7.

請求項9に記載の発明は、前記微細物除去装置は、
液体が付着した微細物を収容する円筒収容部と、
前記円筒収容部の内部に軸方向に配置されて回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含み、
前記スクリュー軸の回転により前記微細物に付着する液体を除去し、
前記液体を除去した微細物を前記円筒収容部から排出することを特徴とする請求項1乃至請求項8に記載の微細物除去システムである。
According to the invention of claim 9, the fine substance removing device is
A cylindrical housing unit that stores fine objects to which liquid has adhered,
A screw shaft that is arranged in the axial direction inside the cylindrical housing portion and discharges the fine material by rotation,
Including a driving means for rotationally driving the screw shaft,
The liquid adhering to the fine object is removed by the rotation of the screw shaft, and the liquid is removed.
The fine substance removing system according to claim 1 to 8, wherein the fine substance from which the liquid has been removed is discharged from the cylindrical housing portion.

請求項10に記載の発明は、前記円筒収容部の排出側に、絞り部を設け、
前記絞り部を、ストッパーで覆い、
前記ストッパーを、付勢手段により常に閉じ方向に付勢し、
前記円筒収容部から排出される微細物により前記ストッパーを押動し、前記絞り部が開閉可能な構成であることを特徴とする請求項9に記載の微細物除去システムである。
The invention according to claim 10 is provided with a throttle portion on the discharge side of the cylindrical accommodating portion.
Cover the throttle with a stopper and
The stopper is always urged in the closing direction by the urging means, and the stopper is always urged in the closing direction.
The fine substance removing system according to claim 9, wherein the stopper is pushed by a fine substance discharged from the cylindrical accommodating portion, and the throttle portion can be opened and closed.

請求項11に記載の発明は、前記円筒収容部の排出側に、排出筒を接続し、
前記排出筒は、前記円筒収容部より上方に開口する排出開口を有し、
前記円筒収容部から排出される微細物を、前記排出筒の排出開口から排出可能な構成であることを特徴とする請求項9に記載の微細物除去システムである。
According to the eleventh aspect of the present invention, a discharge cylinder is connected to the discharge side of the cylindrical housing portion.
The discharge cylinder has a discharge opening that opens above the cylindrical housing portion.
The fine substance removing system according to claim 9, wherein the fine substance discharged from the cylindrical accommodating portion can be discharged from the discharge opening of the discharge cylinder.

請求項12に記載の発明は、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜める沈殿部に接続し、微細物に付着する液体を除去して微細物を排出する微細物除去装置であり、
液体が付着した微細物を収容する円筒収容部と、
前記円筒収容部の内部に軸方向に配置されて回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含み、
前記スクリュー軸の回転により前記微細物に付着する液体を除去し、
前記液体を除去した微細物を前記円筒収容部から排出することを特徴とする微細物除去装置である。
The invention according to claim 12 is connected to a centrifuge device that separates and precipitates fine substances contained in a liquid by centrifugal force, or a precipitation portion that collects the separated fine substances, and removes the liquid adhering to the fine substances. It is a fine substance removing device that discharges fine substances.
A cylindrical housing unit that stores fine objects to which liquid has adhered,
A screw shaft that is arranged in the axial direction inside the cylindrical housing portion and discharges the fine material by rotation,
Including a driving means for rotationally driving the screw shaft,
The liquid adhering to the fine object is removed by the rotation of the screw shaft, and the liquid is removed.
It is a fine substance removing device characterized by discharging the fine substance from which the liquid has been removed from the cylindrical accommodating portion.

請求項13に記載の発明は、前記円筒収容部の排出側に、絞り部を設け、
前記絞り部を、ストッパーで覆い、
前記ストッパーを、付勢手段により常に閉じ方向に付勢し、
前記円筒収容部から排出される微細物により前記ストッパーを押動し、前記絞り部が開閉可能な構成であることを特徴とする請求項12に記載の微細物除去装置である。
The invention according to claim 13 is provided with a throttle portion on the discharge side of the cylindrical accommodating portion.
Cover the throttle with a stopper and
The stopper is always urged in the closing direction by the urging means, and the stopper is always urged in the closing direction.
The fine substance removing device according to claim 12, wherein the stopper is pushed by a fine substance discharged from the cylindrical accommodating portion, and the throttle portion can be opened and closed.

請求項14に記載の発明は、前記円筒収容部の排出側に、排出筒を接続し、
前記排出筒は、前記円筒収容部より上方に開口する排出開口を有し、
前記円筒収容部から排出される微細物を、前記排出筒の排出開口から排出可能な構成であることを特徴とする請求項12に記載の微細物除去装置である。
In the invention according to claim 14, a discharge cylinder is connected to the discharge side of the cylindrical housing portion.
The discharge cylinder has a discharge opening that opens above the cylindrical housing portion.
The fine substance removing device according to claim 12, wherein the fine substance discharged from the cylindrical accommodating portion can be discharged from the discharge opening of the discharge cylinder.

請求項15に記載の発明は、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜める沈殿部に接続し、微細物に付着する液体を除去して微細物を排出する微細物除去装置であり、
回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含む横方向配置型微細物除去部と、
液体が付着した微細物を収容する円筒収容部と、
前記円筒収容部の内部に軸方向に配置されて回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含む斜め方向配置型微細物除去部と、を備え、
前記横方向配置型微細物除去部の駆動と、前記斜め方向配置型微細物除去部の駆動により、
前記横方向配置型微細物除去部から前記斜め方向配置型微細物除去部へ微細物を送り、
前記斜め方向配置型微細物除去部から液体を除去して微細物を排出することを特徴とする微細物除去装置である。
The invention according to claim 15 is connected to a centrifuge device that separates and precipitates fine substances contained in a liquid by centrifugal force, or a precipitation portion that collects the separated fine substances, and removes the liquid adhering to the fine substances. It is a fine substance removing device that discharges fine substances.
A screw shaft that discharges the fine objects by rotation,
A laterally arranged fine object removing unit including a driving means for rotationally driving the screw shaft, and
A cylindrical housing unit that stores fine objects to which liquid has adhered,
A screw shaft that is arranged in the axial direction inside the cylindrical housing portion and discharges the fine material by rotation,
A drive means for rotationally driving the screw shaft, and an obliquely arranged fine object removing portion including the screw shaft are provided.
By driving the laterally arranged fine object removing unit and driving the diagonally arranged fine object removing unit,
The fine matter is sent from the laterally arranged fine matter removing portion to the diagonally arranged fine matter removing portion.
It is a fine substance removing device characterized by removing a liquid from the diagonally arranged type fine substance removing part and discharging the fine substance.

請求項16に記載の発明は、前記斜め方向配置型微細物除去部は、
液体を除去した微細物を排出する微細物排出レールを備え、
前記微細物排出レールは、排出口の位置を変更可能な構成であることを特徴とする請求項15に記載の微細物除去装置である。
In the invention according to claim 16, the diagonally arranged fine object removing portion is
Equipped with a fine substance discharge rail that discharges fine substances from which liquid has been removed
The fine substance removing device according to claim 15, wherein the fine substance discharging rail has a configuration in which the position of the discharging port can be changed.

請求項17に記載の発明は、前記斜め方向配置型微細物除去部のスクリュー軸方向は、
前記横方向配置型微細物除去部のスクリュー軸中心を支点として角度を可変可能な構成であることを特徴とする請求項15または請求項16に記載の微細物除去装置である。
In the invention according to claim 17, the screw axial direction of the diagonally arranged fine object removing portion is
The fine substance removing device according to claim 15 or 16, wherein the angle can be changed with the screw shaft center of the laterally arranged fine substance removing portion as a fulcrum.

前記構成により、この発明は、以下のような効果を有する。 With the above configuration, the present invention has the following effects.

請求項1乃至請求項11に記載の発明では、沈殿により溜まる微細物量に基づき微細物除去装置を駆動することで、自動運転により液体に含まれる微細物を分離して除去し、微細物に付着する液体を除去して微細物を回収することで、無人化運転を可能にする。 According to the first to eleventh aspects of the invention, by driving the fine substance removing device based on the amount of fine substances accumulated by precipitation, the fine substances contained in the liquid are separated and removed by automatic operation and adhered to the fine substances. Unmanned operation is made possible by removing the liquid to be collected and collecting fine substances.

請求項12乃至請求項17に記載の発明では、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜める沈殿部に接続し、微細物に付着する液体を除去して微細物を排出する微細物除去装置により、液体に含まれる微細物を分離して除去し、微細物に付着する液体を除去して微細物を回収することができる。 In the invention according to claim 12 to 17, the liquid is connected to a centrifugal separator that separates and precipitates fine substances contained in a liquid by centrifugal force, or a precipitation portion that collects the separated fine substances, and adheres to the fine substances. The fine substance removing device that removes the liquid and discharges the fine substance can separate and remove the fine substance contained in the liquid, remove the liquid adhering to the fine substance, and recover the fine substance.

実施の形態1の微細物除去システムを示す図である。It is a figure which shows the fine matter removal system of Embodiment 1. FIG. 実施の形態2の微細物除去システムを示す図である。It is a figure which shows the fine matter removal system of Embodiment 2. 実施の形態3の微細物除去システムを示す図である。It is a figure which shows the fine substance removal system of Embodiment 3. 実施の形態4の微細物除去システムを示す図である。It is a figure which shows the fine matter removal system of Embodiment 4. 実施の形態5の微細物除去システムを示す図である。It is a figure which shows the fine matter removal system of Embodiment 5. 微細物量検出装置を説明する図である。It is a figure explaining the micro physical quantity detection apparatus. 微細物量の検出を説明する原理図である。It is a principle diagram explaining the detection of a minute substance. 微細物量を検出しない場合を示す図である。It is a figure which shows the case where the minute substance is not detected. 微細物量を検出する場合を示す図である。It is a figure which shows the case of detecting the fine quantity. 微細物量の検出を示すフロー図である。It is a flow chart which shows the detection of the minute material quantity. 他の形態の微細物量検出装置を示す図である。It is a figure which shows the fine physical quantity detection apparatus of another form. 微細物除去装置の断面図である。It is sectional drawing of the fine matter removing apparatus. 微細物を除去する状態を示す図である。It is a figure which shows the state which removes a fine substance. 他の形態の微細物除去装置を示す図である。It is a figure which shows the fine matter removing apparatus of another form. 他の形態の微細物除去装置を示す図である。It is a figure which shows the fine matter removing apparatus of another form. 微細物除去装置を示す正面図である。It is a front view which shows the fine matter removing apparatus. 微細物除去装置を示す平面図である。It is a top view which shows the fine matter removing apparatus. 微細物除去装置を示す斜視図である。It is a perspective view which shows the fine matter removing apparatus. 排出口の位置が変更可能な構成を示す図である。It is a figure which shows the structure which can change the position of a discharge port. スクリュー軸中心を支点として角度を可変可能な構成を示す図である。It is a figure which shows the structure which can change the angle with the center of a screw shaft as a fulcrum.

以下、この発明の微細物除去システム及び微細物除去装置の実施の形態を、図面に基づいて詳細に説明するが、この発明はこの実施形態に限定されない。 Hereinafter, embodiments of the fine substance removing system and the fine substance removing device of the present invention will be described in detail with reference to the drawings, but the present invention is not limited to this embodiment.

この発明の微細物除去システムは、製薬、化学、食品、飲料の原料他の微細物の回収に、また自動車、工作機、加工業の切削粉等の微細物の回収に、また各工場、水処理等の循環水、排水の濾過に、また半導体、バイオ等の不純物等の微細物の除去に、また洗浄水、溶剤等の異物である微細物の除去等に使用され、液体に含まれる微細物を分離除去するものに広く使用される。 The fine substance removal system of the present invention is used for collecting fine substances such as raw materials for pharmaceuticals, chemicals, foods and beverages, and for collecting fine substances such as cutting powder of automobiles, machine tools and processing industries, and for each factory and water. It is used for filtering circulating water and wastewater for treatment, for removing fine substances such as impurities such as semiconductors and biotechnology, and for removing fine substances that are foreign substances such as cleaning water and solvents. Widely used for separating and removing things.

(実施の形態1)
この実施の形態1を、図1に示す。図1は微細物除去システムを示す図である。
(Embodiment 1)
The first embodiment is shown in FIG. FIG. 1 is a diagram showing a fine substance removal system.

この実施の形態の微細物除去システム10は、液体を用いて加工または処理を行う装置100と、加工または処理に用いるための液体を貯留する貯留タンク101と、貯留タンク101から液体を装置100に供給し、装置100から貯留タンク101に戻して循環させる循環経路102と、を含み、ポンプ103の駆動により液体を循環させる。 The fine substance removing system 10 of this embodiment has an apparatus 100 for processing or processing using a liquid, a storage tank 101 for storing a liquid to be used for processing or processing, and a liquid from the storage tank 101 to the apparatus 100. A circulation path 102, which is supplied and returned from the device 100 to the storage tank 101 for circulation, is included, and the liquid is circulated by driving the pump 103.

循環経路102には、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置110と、沈澱した微細物に付着する液体を除去して微細物を排出する微細物除去装置120と、を備える。 The circulation path 102 includes a centrifugal separator 110 that separates and precipitates fine substances contained in the liquid by centrifugal force, and a fine substance removing device 120 that removes the liquid adhering to the precipitated fine substances and discharges the fine substances. , Equipped with.

遠心分離装置110は、周知の構成であり、遠心力により微細物を含む液体から微細物を分離し、この分離された微細物が沈降し、沈殿部111に溜まる。この実施の形態では、沈殿部111が樹脂や金属などで成形されたカップで構成される。 The centrifugal separator 110 has a well-known configuration, and separates fine substances from a liquid containing fine substances by centrifugal force, and the separated fine substances settle and accumulate in the settling portion 111. In this embodiment, the settling portion 111 is composed of a cup formed of resin, metal, or the like.

沈殿により溜まる微細物量を検出する微細物量検出装置112と、検出する微細物量に基づき微細物除去装置120を駆動する制御装置113を備え、制御装置113は、微細物量検出装置112において検出する沈殿部111に溜まる微細物量に基づき、微細物除去装置120を駆動する。微細物量検出装置112は、沈殿部111に備える構成である。 The control device 113 includes a fine material detection device 112 for detecting the fine material accumulated by precipitation and a control device 113 for driving the fine material removal device 120 based on the detected fine material, and the control device 113 is a precipitation unit detected by the fine material detection device 112. Based on the amount of fine matter accumulated in 111, the fine matter removing device 120 is driven. The fine material detection device 112 is provided in the precipitation section 111.

沈殿部111の入側には、第2の自動バルブ114aを備え、出側には、第3の自動バルブ114bを備え、それぞれ制御装置113により制御される。通常運転では、第2の自動バルブ114aを開き、第3の自動バルブ114bを閉じており、分離された微細物が沈降し、沈殿部111に溜まる。沈殿部111に溜まる微細物が所定量になると、第2の自動バルブ114aを閉じ、第3の自動バルブ114bを開き、沈殿部111に溜まる微細物を排出する。 A second automatic valve 114a is provided on the entrance side of the settling portion 111, and a third automatic valve 114b is provided on the exit side, each of which is controlled by the control device 113. In the normal operation, the second automatic valve 114a is opened and the third automatic valve 114b is closed, and the separated fine matter settles and accumulates in the settling portion 111. When the amount of fine matter accumulated in the settling portion 111 reaches a predetermined amount, the second automatic valve 114a is closed, the third automatic valve 114b is opened, and the fine matter accumulated in the settling portion 111 is discharged.

微細物量検出装置112は、沈殿部111に溜まる微細物量を検出し、制御装置113は、微細物量検出装置112からの検出する微細物量に基づき、
第2の自動バルブ114aを閉じ、第3の自動バルブ114bを開き、沈殿部111に溜まる微細物を微細物除去装置120に送り、微細物除去装置120を駆動し、沈澱した微細物に付着する液体を除去して微細物を排出し、微細物は、回収容器61に回収され、除去された液体は、貯留タンク101へ戻る。
The fine material detection device 112 detects the fine material accumulated in the precipitation portion 111, and the control device 113 is based on the fine material amount detected from the fine material detection device 112.
The second automatic valve 114a is closed, the third automatic valve 114b is opened, the fine matter accumulated in the settling portion 111 is sent to the fine matter removing device 120, the fine matter removing device 120 is driven, and the fine matter is adhered to the precipitated fine matter. The liquid is removed and the fine matter is discharged, the fine matter is collected in the collection container 61, and the removed liquid returns to the storage tank 101.

この実施の形態では、循環経路102に、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置110と、沈澱した微細物に付着する液体を除去して微細物を排出する微細物除去装置120と、を備え、微細物量検出装置112により沈殿部111に溜まる微細物量を検出し、制御装置113は、微細物量検出装置112からの検出する微細物量に基づき、微細物除去装置120を駆動し、沈澱した微細物に付着する液体を除去して微細物を排出することで、自動運転により液体に含まれる微細物を分離して除去し、微細物に付着する液体を除去して微細物を回収することで、無人化運転を可能にする。 In this embodiment, the circulation path 102 includes a centrifugal separator 110 that separates and precipitates fine substances contained in the liquid by centrifugal force, and fine particles that remove the liquid adhering to the precipitated fine substances and discharge the fine substances. The fine material removing device 120 is provided, and the fine material removing device 112 detects the fine material accumulated in the settling portion 111, and the control device 113 detects the fine material amount detected from the fine material detecting device 112. By driving and removing the liquid adhering to the precipitated fine matter and discharging the fine matter, the fine matter contained in the liquid is separated and removed by automatic operation, and the liquid adhering to the fine matter is removed. Unmanned operation is possible by collecting fine objects.

この実施の形態では、沈殿部111の入側に第2の自動バルブ114aを備え、沈殿部111に溜まる微細物を微細物除去装置120に送るときに閉じるようにしているが、第2の自動バルブ114aを備えないで微細物を沈殿部111に溜め、微細物除去装置120に送るようにしてもよい。第2の自動バルブ114a、第3の自動バルブ114bの種類は、特に限定されない。 In this embodiment, a second automatic valve 114a is provided on the entry side of the settling portion 111 so as to close the fine matter accumulated in the settling portion 111 when it is sent to the fine matter removing device 120. The fine matter may be stored in the settling portion 111 without the valve 114a and sent to the fine matter removing device 120. The types of the second automatic valve 114a and the third automatic valve 114b are not particularly limited.

(実施の形態2)
この実施の形態2を、図2に示す。図2は微細物除去システムを示す図である。
(Embodiment 2)
The second embodiment is shown in FIG. FIG. 2 is a diagram showing a fine substance removal system.

この実施の形態の微細物除去システム10は、実施の形態1と同じ構成は同じ符号を付して説明を省略する。この実施の形態の微細物除去システム10は、
微細物除去装置120を、2個の複数個直列に接続して備える。上流側の微細物除去装置120は、遠心分離装置110に接続され、下流側の微細物除去装置120は、貯留タンク101に接続される。
In the fine substance removing system 10 of this embodiment, the same configurations as those of the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. The fine substance removal system 10 of this embodiment is
A plurality of fine object removing devices 120 are connected in series and provided. The upstream side fine substance removing device 120 is connected to the centrifuge device 110, and the downstream side fine substance removing device 120 is connected to the storage tank 101.

上流側の微細物除去装置120及び下流側の微細物除去装置120には、微細物量検出装置112を備え、微細物量検出装置112は、微細物除去装置120に溜まる微細物量を検出し、検出信号を制御装置113へ送る。 The fine matter removing device 120 on the upstream side and the fine matter removing device 120 on the downstream side are provided with a fine matter amount detecting device 112, and the fine matter amount detecting device 112 detects the fine matter amount accumulated in the fine matter removing device 120 and detects a detection signal. To the control device 113.

制御装置113は、上流側の微細物除去装置120に配置した微細物量検出装置112からの検出信号に基づき上流側の微細物除去装置120を駆動し、
沈澱した微細物に付着する液体を除去して微細物を排出し、微細物は、回収容器61に回収され、除去された液体は、下流側の微細物除去装置120へ送られる。
The control device 113 drives the fine substance removing device 120 on the upstream side based on the detection signal from the fine substance amount detecting device 112 arranged in the fine substance removing device 120 on the upstream side.
The liquid adhering to the precipitated fine matter is removed and the fine matter is discharged, the fine matter is collected in the collection container 61, and the removed liquid is sent to the fine matter removing device 120 on the downstream side.

制御装置113は、下流側の微細物除去装置120に配置した微細物量検出装置112からの検出信号に基づき下流側の微細物除去装置120を駆動し、
沈澱した微細物に付着する液体を除去して微細物を排出し、微細物は、回収容器61に回収され、除去された液体は、貯留タンク101へ戻る。
The control device 113 drives the fine substance removing device 120 on the downstream side based on the detection signal from the fine substance amount detecting device 112 arranged in the fine substance removing device 120 on the downstream side.
The liquid adhering to the precipitated fine matter is removed and the fine matter is discharged, the fine matter is collected in the collection container 61, and the removed liquid returns to the storage tank 101.

(実施の形態3)
この実施の形態3を、図3に示す。図3は微細物除去システムを示す図である。
(Embodiment 3)
The third embodiment is shown in FIG. FIG. 3 is a diagram showing a fine substance removal system.

この実施の形態の微細物除去システム10は、実施の形態1と同じ構成は同じ符号を付して説明を省略する。この実施の形態の微細物除去システム10は、沈殿部111の上流側は、第1の自動バルブ114cを介して装置100に通じる経路と、第2の自動バルブ114aと遠心分離装置110を順に介して装置100に通じる経路と、を含み、沈殿部111の下流側は、第3の自動バルブ114bを介して微細物除去装置120に通じる経路と、を含む。 In the fine substance removing system 10 of this embodiment, the same configurations as those of the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. In the fine substance removing system 10 of this embodiment, the upstream side of the settling portion 111 passes through a path leading to the device 100 via the first automatic valve 114c, a second automatic valve 114a, and a centrifuge device 110 in this order. The downstream side of the settling portion 111 includes a path leading to the device 100 and a path leading to the fine matter removing device 120 via the third automatic valve 114b.

制御装置113の制御により、通常動作は、第1の自動バルブ114cを閉じ、第2の自動バルブ114aを開き、第3の自動バルブ114bを閉じて沈殿部111に微細物を溜める。沈殿部111に溜まる微細物の量を微細物量検出装置112が検出し、制御装置113は微細物を検出する微細物量に基づき制御し、排出動作は、第2の自動バルブ114aを閉じ、第3の自動バルブ114bを開き、沈殿部111に溜まる微細物を排出し、その時第1の自動バルブ114cを開き、沈殿部111と第3の自動バルブ114bを洗浄して排出しきれない微細物を微細物除去装置120へ排出する。通常動作への復帰は、第1の自動バルブ114cを閉じ、第2の自動バルブ114aを開き、第3の自動バルブ114bを閉じて沈殿部111に微細物を溜めように構成される。第1の自動バルブ114c、第2の自動バルブ114a、第3の自動バルブ114bの種類は、特に限定されない。 Under the control of the control device 113, the normal operation closes the first automatic valve 114c, opens the second automatic valve 114a, closes the third automatic valve 114b, and collects fine substances in the settling portion 111. The fine matter detection device 112 detects the amount of fine matter accumulated in the settling portion 111, the control device 113 controls based on the fine matter amount for detecting the fine matter, and the discharge operation closes the second automatic valve 114a and the third The automatic valve 114b of the above is opened to discharge the fine matter accumulated in the settling portion 111, and at that time, the first automatic valve 114c is opened, the settling portion 111 and the third automatic valve 114b are washed, and the fine matter that cannot be discharged is finely formed. It is discharged to the object removing device 120. The return to the normal operation is configured to close the first automatic valve 114c, open the second automatic valve 114a, close the third automatic valve 114b, and collect fine matter in the settling portion 111. The types of the first automatic valve 114c, the second automatic valve 114a, and the third automatic valve 114b are not particularly limited.

この実施の形態の微細物除去システム10では、通常動作、排出動作、通常動作への復帰を実施することで、毎分の流量に関係なく、微細物の滞留量のみを検知し、排出することができ、廃液量を最小限に抑えた自動化が可能となる。 In the fine substance removing system 10 of this embodiment, by performing the normal operation, the discharge operation, and the return to the normal operation, only the accumulated amount of the fine substance is detected and discharged regardless of the flow rate per minute. This enables automation with a minimum amount of waste liquid.

(実施の形態4)
この実施の形態4を、図4に示す。図4は微細物除去システムを示す図である。
(Embodiment 4)
This embodiment 4 is shown in FIG. FIG. 4 is a diagram showing a fine substance removal system.

この実施の形態の微細物除去システム10は、実施の形態1と同じ構成は同じ符号を付して説明を省略する。この実施の形態の微細物除去システム10は、沈澱する微細物を微細物除去装置120に導く導入通路140を含み、導入通路140は、遠心分離装置110に自動バルブ141を介して連通する構成である。 In the fine substance removing system 10 of this embodiment, the same configurations as those of the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. The fine substance removing system 10 of this embodiment includes an introduction passage 140 that guides the settled fine matter to the fine substance removing device 120, and the introduction passage 140 communicates with the centrifuge device 110 via an automatic valve 141. is there.

通常運転では、自動バルブ141を開き、分離された微細物が沈降し、導入通路140を介して微細物除去装置120に導入される。導入通路140には、微細物量検出装置112を備えており、微細物量検出装置112は、導入通路140に溜まる微細物量を検出する。制御装置113は、微細物量検出装置112において検出する微細物量に基づき、自動バルブ141を閉じ、微細物除去装置120を駆動し、沈澱した微細物に付着する液体を除去して微細物を排出する。 In normal operation, the automatic valve 141 is opened, the separated fine matter is settled, and is introduced into the fine matter removing device 120 via the introduction passage 140. The introduction passage 140 is provided with a fine material detection device 112, and the fine material detection device 112 detects the fine material accumulated in the introduction passage 140. The control device 113 closes the automatic valve 141, drives the fine matter removing device 120, removes the liquid adhering to the precipitated fine matter, and discharges the fine matter, based on the fine matter amount detected by the fine matter amount detecting device 112. ..

(実施の形態5)
この実施の形態5を、図5に示す。図5は微細物除去システムを示す図である。
(Embodiment 5)
This embodiment 5 is shown in FIG. FIG. 5 is a diagram showing a fine substance removal system.

この実施の形態の微細物除去システム10は、実施の形態1と同じ構成は同じ符号を付して説明を省略する。この実施の形態の微細物除去システム10は、
沈澱する微細物を微細物除去装置120に導く導入通路140を含み、導入通路140は、遠心分離装置110に自動バルブ141aを介して連通する構成である。
In the fine substance removing system 10 of this embodiment, the same configurations as those of the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. The fine substance removal system 10 of this embodiment is
The introduction passage 140 includes an introduction passage 140 that guides the settled fine matter to the fine matter removing device 120, and the introduction passage 140 communicates with the centrifuge device 110 via an automatic valve 141a.

この実施の形態の微細物除去システム10は、導入通路140の上流側は、第1の自動バルブ114cを介して装置100に通じる経路と、第2の自動バルブ114aと遠心分離装置110を順に介して装置100に通じる経路と、を含み、導入通路140の下流側は、微細物除去装置120に通じる経路と、を含む。 In the fine substance removing system 10 of this embodiment, the upstream side of the introduction passage 140 is passed through the path leading to the device 100 via the first automatic valve 114c, the second automatic valve 114a, and the centrifuge device 110 in this order. The downstream side of the introduction passage 140 includes a path leading to the device 100, and the downstream side of the introduction passage 140 includes a path leading to the fine substance removing device 120.

制御装置113の制御により、通常動作は、第1の自動バルブ114cを閉じ、第2の自動バルブ114aを開き、導入通路140に微細物を溜める。導入通路140に溜まる微細物の量を微細物量検出装置112が検出し、制御装置113は微細物を検出する微細物量に基づき制御し、排出動作は、第2の自動バルブ114aを閉じ、微細物除去装置120導入を駆動して通路140に溜まる微細物を排出し、その時第1の自動バルブ114cを開き、導入通路140を洗浄して排出しきれない微細物を微細物除去装置120へ排出する。通常動作への復帰は、第1の自動バルブ114cを閉じ、第2の自動バルブ114aを開き、導入通路140に微細物を溜めように構成される。 Under the control of the control device 113, the normal operation closes the first automatic valve 114c, opens the second automatic valve 114a, and collects fine objects in the introduction passage 140. The fine matter detection device 112 detects the amount of fine matter accumulated in the introduction passage 140, the control device 113 controls based on the fine matter amount for detecting the fine matter, and the discharge operation closes the second automatic valve 114a and the fine matter is discharged. The introduction of the removal device 120 is driven to discharge the fine matter accumulated in the passage 140, and at that time, the first automatic valve 114c is opened, the introduction passage 140 is washed, and the fine matter that cannot be discharged is discharged to the fine matter removal device 120. .. The return to the normal operation is configured to close the first automatic valve 114c, open the second automatic valve 114a, and collect fine objects in the introduction passage 140.

(微細物量検出装置)
[形態1の構成]
微細物量検出装置は、図6乃至図11に示すように構成される。図6は微細物量検出装置を説明する図、図7は微細物量の検出を説明する原理図、図8は微細物量を検出しない場合を示す図、図9は微細物量を検出する場合を示す図、図10は微細物量の検出を示すフロー図、図11は他の形態の微細物量検出装置を示す図である。
(Fine quantity detection device)
[Structure of Form 1]
The fine material detection device is configured as shown in FIGS. 6 to 11. FIG. 6 is a diagram for explaining a fine material detection device, FIG. 7 is a principle diagram for explaining the detection of the fine material, FIG. 8 is a diagram showing a case where the fine material is not detected, and FIG. 9 is a diagram showing a case where the fine material is detected. , FIG. 10 is a flow diagram showing detection of a fine material amount, and FIG. 11 is a diagram showing another form of a fine material amount detection device.

この微細物量検出装置112は、沈殿部111に溜まる微細物量を検出する装置であり、沈殿部111の外側面に備える超音波センサ112aと、超音波センサ112aからの出力に基づいて沈殿部111に溜まる微細物量を検出する検出手段112bと、を備える。 The fine material detection device 112 is a device that detects the amount of fine material accumulated in the settling section 111, and is provided on the settling section 111 based on the output from the ultrasonic sensor 112a provided on the outer surface of the settling section 111 and the ultrasonic sensor 112a. A detection means 112b for detecting the amount of fine material accumulated is provided.

超音波センサ112aは、沈殿部111の外側面にカップリング材112cにより保持され、取付治具112dで所定位置に取り付けられる。この超音波センサ112aを取り付けた位置が、沈殿部111に溜まる微細物量を検出する位置である。沈殿部111の底部に、排出通路150が連通する。 The ultrasonic sensor 112a is held by the coupling material 112c on the outer surface of the settling portion 111, and is mounted at a predetermined position by the mounting jig 112d. The position where the ultrasonic sensor 112a is attached is the position where the amount of fine matter accumulated in the sedimentation portion 111 is detected. The discharge passage 150 communicates with the bottom of the settling portion 111.

検出手段112bは、超音波センサ112aからの出力が閾値以上の場合には、微細物量が規定値以下と判断し、超音波センサ112aからの出力が閾値以下の場合には、微細物量が規定値以上と判断する。 When the output from the ultrasonic sensor 112a is equal to or greater than the threshold value, the detection means 112b determines that the fine substance amount is equal to or less than the specified value, and when the output from the ultrasonic sensor 112a is equal to or less than the threshold value, the fine substance amount is the specified value. Judge as above.

(検出原理)
この実施の形態の超音波センサ112aは、送波器112a1により超音波を対象物に向け発信し、その反射波を受波器112a2で受信することにより、対象物の有無検出する構成である。
(Detection principle)
The ultrasonic sensor 112a of this embodiment has a configuration in which the presence or absence of an object is detected by transmitting ultrasonic waves toward an object by a transmitter 112a1 and receiving the reflected waves by a receiver 112a2.

この実施の形態では、反射形を用いており、図7(a)に示すように、沈殿部111の側壁によって、口元反射、内壁反射、外壁反射が生じる。例えば、距離調整ボリウムなどで設定した検出距離範囲内に存在する物体からの反射波のみを検出する方式を用いることができる。 In this embodiment, the reflection type is used, and as shown in FIG. 7A, the side wall of the settling portion 111 causes mouth reflection, inner wall reflection, and outer wall reflection. For example, it is possible to use a method of detecting only the reflected wave from an object existing within the detection distance range set by the distance adjustment volume or the like.

図7(b)に示すように、沈殿部111の内部には、切削液のみが溜まっている場合、あるいは切削液が溜まっていない場合には、超音波センサ112aの内壁反射による出力が大きい。図7(c)に示すように、切削液に含まれる微細物を分離して除去し、この微細物が沈殿部111の内部に溜まってくると、超音波センサ112aの内壁反射による出力が微細物によって減衰して小さくなる。 As shown in FIG. 7B, when only the cutting fluid is accumulated inside the settling portion 111 or when the cutting fluid is not accumulated, the output due to the reflection on the inner wall of the ultrasonic sensor 112a is large. As shown in FIG. 7C, when the fine matter contained in the cutting fluid is separated and removed and the fine matter accumulates inside the settling portion 111, the output due to the reflection on the inner wall of the ultrasonic sensor 112a is fine. It is attenuated by an object and becomes smaller.

(微細物量検出)
この実施の形態の微細物量検出装置112による微細物量検出を、図8乃至図10に基づいて説明する。この実施の形態の微細物量検出装置112では、超音波センサ112aがケーブルにより検出手段112bに接続される。
(Detection of minute quantity)
The minute amount detection by the fine amount detecting device 112 of this embodiment will be described with reference to FIGS. 8 to 10. In the fine material detection device 112 of this embodiment, the ultrasonic sensor 112a is connected to the detection means 112b by a cable.

微細物量の検出を開始し(図10(a))、超音波センサ112aでは、超音波を送信し、この反射波を受信する(図10(b)、(c))。検出手段112bでは、超音波センサ112aで受信した信号を判定し(図10(d))、超音波センサ112aからの出力、即ち受信電圧が閾値以上は、微細物量が規定値以下と判断し(図8(b))、受信電圧が閾値以下は、微細物量が規定値以上と判断する(図9(b))。 The detection of the minute amount is started (FIG. 10 (a)), and the ultrasonic sensor 112a transmits an ultrasonic wave and receives the reflected wave (FIGS. 10 (b) and 10 (c)). The detection means 112b determines the signal received by the ultrasonic sensor 112a (FIG. 10 (d)), and determines that the output from the ultrasonic sensor 112a, that is, the received voltage is equal to or more than the threshold value, and the minute amount is equal to or less than the specified value ( FIG. 8B) shows that when the reception voltage is below the threshold value, it is determined that the amount of fine matter is equal to or higher than the specified value (FIG. 9B).

微細物量が規定値以下と判断した場合には、正常表示を行い(図10(e))、例えば青色ランプを点灯させている。微細物量が規定値以上と判断した場合には、検出信号を出力し(図10(f))、終了する(図10(g))。 When it is determined that the amount of fine matter is equal to or less than the specified value, a normal display is performed (FIG. 10 (e)), and for example, a blue lamp is turned on. When it is determined that the amount of fine matter is equal to or higher than the specified value, a detection signal is output (FIG. 10 (f)) and the process ends (FIG. 10 (g)).

[形態2の構成]
この実施の形態の微細物量検出装置112は、図11に示すように、沈殿部111の外側面に備える超音波センサ112aとして透過形を用いる。この透過形は、送波器112a1により超音波を対象物に向け発信し、その送波を受波器112a2で受信することにより、対象物の有無検出する構成である。送波器112a1と受波器112a2は、対抗する位置において、沈殿部111の外側面にカップリング材112cにより保持され、取付治具で所定位置に取り付けられる。この超音波センサ112aを取り付けた位置が、沈殿部111に溜まる微細物量を検出する位置である。
[Structure of Form 2]
As shown in FIG. 11, the fine material detection device 112 of this embodiment uses a transmission type as the ultrasonic sensor 112a provided on the outer surface of the precipitation portion 111. This transmissive type has a configuration in which the presence or absence of an object is detected by transmitting ultrasonic waves toward an object by a transmitter 112a1 and receiving the transmitted waves by a receiver 112a2. The transmitter 112a1 and the receiver 112a2 are held by the coupling material 112c on the outer surface of the settling portion 111 at opposite positions, and are attached to the predetermined positions by the attachment jig. The position where the ultrasonic sensor 112a is attached is the position where the amount of fine matter accumulated in the sedimentation portion 111 is detected.

検出手段112bは、超音波センサ112aからの出力が閾値以上の場合には、微細物量が規定値以下と判断し、超音波センサ112aからの出力が閾値以下の場合には、微細物量が規定値以上と判断する。 When the output from the ultrasonic sensor 112a is equal to or greater than the threshold value, the detection means 112b determines that the fine substance amount is equal to or less than the specified value, and when the output from the ultrasonic sensor 112a is equal to or less than the threshold value, the fine substance amount is the specified value. Judge as above.

この実施の形態では、図11(b)に示すように、沈殿部111の内部には、切削液のみが溜まっている場合、あるいは切削液が溜まっていない場合には、超音波センサ112aの出力が大きい。切削液に含まれる微細物を分離して除去し、この微細物が沈殿部111の内部に溜まってくると、超音波センサ112aの出力が微細物によって減衰して小さくなる。 In this embodiment, as shown in FIG. 11B, when only the cutting fluid is accumulated inside the settling portion 111, or when the cutting fluid is not accumulated, the output of the ultrasonic sensor 112a is output. Is big. When the fine matter contained in the cutting fluid is separated and removed and the fine matter accumulates inside the settling portion 111, the output of the ultrasonic sensor 112a is attenuated by the fine matter and becomes smaller.

(微細物除去装置)
[形態1の構成]
この実施の形態の微細物除去装置を、図12及び図13に基づいて説明する。図12は微細物除去装置の断面図、図13は微細物を除去する状態を示す図である。
(Fine object removal device)
[Structure of Form 1]
The fine substance removing device of this embodiment will be described with reference to FIGS. 12 and 13. FIG. 12 is a cross-sectional view of the fine object removing device, and FIG. 13 is a diagram showing a state of removing fine objects.

この実施の形態の微細物除去装置120は、沈降する液体が付着した微細物を収容する円筒収容部20と、円筒収容部20の内部に軸方向に配置されて回転により微細物を排出するスクリュー軸30と、スクリュー軸30を回転駆動する駆動手段40と、を含む構成である。 The fine substance removing device 120 of this embodiment has a cylindrical accommodating portion 20 for accommodating fine objects to which a settling liquid is attached, and a screw which is arranged in the cylindrical accommodating portion 20 in the axial direction and discharges fine objects by rotation. The configuration includes a shaft 30 and a driving means 40 for rotationally driving the screw shaft 30.

円筒収容部20には、中央部の上方位置に導入開口21が形成され、この導入開口21に導入管22が接続されている。円筒収容部20には、導入管22を介して遠心分離装置50が接続されている。液体が付着した微細物は、導入開口21から円筒収容部20の内部に収容される。 An introduction opening 21 is formed in the cylindrical accommodating portion 20 at a position above the central portion, and the introduction pipe 22 is connected to the introduction opening 21. A centrifuge device 50 is connected to the cylindrical accommodating portion 20 via an introduction pipe 22. The fine substance to which the liquid is attached is accommodated inside the cylindrical accommodating portion 20 through the introduction opening 21.

スクリュー軸30は、スクリュー31を有し、このスクリュー31は、円筒収容部20の長さに対応して形成されている。駆動手段40は、モータ41により構成され、モータ41の出力軸42は、連結部材43を介してスクリュー軸30の入力軸部32と連結されている。 The screw shaft 30 has a screw 31, and the screw 31 is formed corresponding to the length of the cylindrical housing portion 20. The drive means 40 is composed of a motor 41, and the output shaft 42 of the motor 41 is connected to the input shaft portion 32 of the screw shaft 30 via a connecting member 43.

円筒収容部20の後端には、取付体23を介してモータ41が取り付けられ、スクリュー軸30の入力軸部32は、軸受24を介して取付体23に軸支されている。 The motor 41 is attached to the rear end of the cylindrical housing portion 20 via the mounting body 23, and the input shaft portion 32 of the screw shaft 30 is pivotally supported by the mounting body 23 via the bearing 24.

円筒収容部20の排出側には、絞り部27を設け、この絞り部27を、ストッパー70で覆うように構成されている。ストッパー70は、絞り部27の開口に当接する球面を有するストッパー部71と、ストッパー部71が固定された支持軸部72と、支持軸部72を支持する支持筒73と、を含む。支持筒73は、ホルダー74に支持され、ホルダー74は、取付ボルト75によって絞り部27に固定した支持体76に取り付けられている。 A throttle portion 27 is provided on the discharge side of the cylinder accommodating portion 20, and the throttle portion 27 is covered with a stopper 70. The stopper 70 includes a stopper portion 71 having a spherical surface that abuts on the opening of the throttle portion 27, a support shaft portion 72 to which the stopper portion 71 is fixed, and a support cylinder 73 that supports the support shaft portion 72. The support cylinder 73 is supported by the holder 74, and the holder 74 is attached to the support 76 fixed to the throttle portion 27 by the mounting bolts 75.

支持軸部72の受け部72aにストッパー部71が固定され、この受け部72aと、支持筒73の鍔部73aとの間に、付勢手段77を構成するスプリング78が配置されている。スプリング78は、支持軸部72の受け部72aを介してストッパー部71の面が、常に絞り部27の開口に当接するように付勢する。このように、ストッパー70は、付勢手段77により常に閉じ方向に付勢される構成である。 The stopper portion 71 is fixed to the receiving portion 72a of the support shaft portion 72, and the spring 78 constituting the urging means 77 is arranged between the receiving portion 72a and the flange portion 73a of the support cylinder 73. The spring 78 is urged so that the surface of the stopper portion 71 is always in contact with the opening of the throttle portion 27 via the receiving portion 72a of the support shaft portion 72. As described above, the stopper 70 is always urged in the closing direction by the urging means 77.

スクリュー軸30は、駆動手段40を構成するモータ41の駆動によって回転し、このスクリュー軸30の回転により円筒収容部20の内部に収容される微細物がスクリュー31によって排出方向へ移動する(図13(a))。この移動する微細物は、ストッパー部71の面に当接し(図13(b))、さらにスクリュー軸30の回転により微細物が移動し、その微細物がストッパー部71を押動し、絞り部27の開口が開く(図13(c))。微細物は、絞り部27の開口から落下して回収容器61に回収される(図13(d))。 The screw shaft 30 is rotated by being driven by a motor 41 constituting the driving means 40, and the rotation of the screw shaft 30 causes fine objects housed inside the cylindrical housing portion 20 to move in the discharge direction by the screw 31 (FIG. 13). (A)). The moving fine object comes into contact with the surface of the stopper portion 71 (FIG. 13 (b)), and further, the minute object moves due to the rotation of the screw shaft 30, and the fine object pushes the stopper portion 71 to push the stopper portion 71 to the throttle portion. The opening of 27 opens (FIG. 13 (c)). The fine material falls from the opening of the throttle portion 27 and is collected in the collection container 61 (FIG. 13 (d)).

このように、スクリュー軸30の回転により円筒収容部20の内部に収容される微細物がスクリュー31によって排出方向へ移動し、円筒収容部20から排出され、回収容器61に回収される際に、微細物に付着する液体が除去され、この液体は、排出孔26を介して貯留タンク101に回収される。 In this way, when the fine matter stored inside the cylindrical housing portion 20 is moved in the discharge direction by the screw 31 due to the rotation of the screw shaft 30, is discharged from the cylindrical housing portion 20, and is collected in the collection container 61, The liquid adhering to the fine matter is removed, and this liquid is collected in the storage tank 101 through the discharge hole 26.

[形態2の構成]
この実施の形態の微細物除去装置を、図14に基づいて説明する。図14は微細物除去装置を示す図である。
[Structure of Form 2]
The fine substance removing device of this embodiment will be described with reference to FIG. FIG. 14 is a diagram showing a fine substance removing device.

この微細物除去装置120は、形態1の構成と同じ構成は同じ符号を付して説明を省略する。この形態は、円筒収容部20の排出側に、排出筒80を接続し、排出筒80は、円筒収容部20より上方に開口する排出開口81を有し、円筒収容部20から排出される微細物を、排出筒80の排出開口81から排出可能な構成である。 The fine substance removing device 120 has the same configuration as that of the first embodiment with the same reference numerals, and the description thereof will be omitted. In this embodiment, the discharge cylinder 80 is connected to the discharge side of the cylindrical storage portion 20, and the discharge cylinder 80 has a discharge opening 81 that opens above the cylindrical storage portion 20, and is discharged from the cylindrical storage portion 20. The structure is such that an object can be discharged from the discharge opening 81 of the discharge cylinder 80.

この微細物除去装置120は、前記した実施の形態の微細物除去システムに限定されず、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜めるホッパーに接続することが可能に構成され、微細物に付着する液体を除去して微細物を排出する。 The fine substance removing device 120 is not limited to the fine substance removing system of the above-described embodiment, and is a centrifugal separator that separates and precipitates fine substances contained in a liquid by centrifugal force, or a hopper that stores the separated fine substances. It is configured so that it can be connected to, removes the liquid adhering to the fine matter, and discharges the fine matter.

[形態3の構成]
この実施の形態の微細物除去装置を、図15に基づいて説明する。図15は微細物除去装置を示す図である。
[Structure of Form 3]
The fine substance removing device of this embodiment will be described with reference to FIG. FIG. 15 is a diagram showing a fine substance removing device.

この微細物除去装置120は、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜めるホッパーに接続し、微細物に付着する液体を除去して微細物を排出する装置であり、横方向配置型微細物除去部Aと、斜め方向配置型微細物除去部Bと、を備える。 The fine substance removing device 120 is connected to a centrifugal separator that separates and precipitates fine substances contained in the liquid by centrifugal force, or a hopper that stores the separated fine substances, and removes the liquid adhering to the fine substances to be fine. It is a device for discharging an object, and includes a laterally arranged fine object removing unit A and an obliquely arranged fine object removing unit B.

横方向配置型微細物除去部Aは、回転により前記微細物を排出するスクリュー軸200と、スクリュー軸200を回転駆動する駆動手段201と、を含み、
遠心分離装置、またはホッパーに接続した投入部202から、直接スクリュー軸200の部位へ微細物を落下させる構成である。
The laterally arranged fine object removing unit A includes a screw shaft 200 for discharging the fine objects by rotation and a driving means 201 for rotationally driving the screw shaft 200.
The structure is such that fine objects are directly dropped from the centrifuge device or the charging section 202 connected to the hopper to the portion of the screw shaft 200.

斜め方向配置型微細物除去部Bは、液体が付着した微細物を収容する円筒収容部300と、円筒収容部300の内部に軸方向に配置されて回転により微細物を排出するスクリュー軸301と、スクリュー軸301を回転駆動する駆動手段302と、を含み、微細物は、開口303から落下して回収容器61に回収される。 The diagonally arranged fine matter removing portion B includes a cylindrical accommodating portion 300 for accommodating fine matter to which liquid is attached, and a screw shaft 301 which is arranged in the cylindrical accommodating portion 300 in the axial direction and discharges fine matter by rotation. , The driving means 302 for rotationally driving the screw shaft 301, and the fine material falls from the opening 303 and is collected in the collection container 61.

横方向配置型微細物除去部Aの駆動と、斜め方向配置型微細物除去部Bの駆動により、投入部202から横方向配置型微細物除去部Aのスクリュー軸200の部位へ微細物を直接落下すると、スクリュー軸200の回転により、横方向配置型微細物除去部Aから斜め方向配置型微細物除去部Bへ微細物を送る。 By driving the laterally arranged fine object removing unit A and driving the diagonally arranged fine object removing unit B, fine objects are directly sent from the charging unit 202 to the screw shaft 200 of the laterally arranged fine object removing unit A. When the screw shaft 200 is dropped, the screw shaft 200 rotates to send the fine matter from the laterally arranged fine matter removing portion A to the diagonally arranged fine matter removing portion B.

斜め方向配置型微細物除去部Bでは、スクリュー軸301の回転駆動により、微細物が持ち上がり、液体を除去して微細物が、開口303から落下して回収容器61に回収される。 In the obliquely arranged fine object removing unit B, the fine object is lifted by the rotational drive of the screw shaft 301, the liquid is removed, and the fine substance falls from the opening 303 and is collected in the collection container 61.

この微細物除去装置120では、横方向配置型微細物除去部Aのスクリュー軸200と、横方向配置型微細物除去部Aのスクリュー軸200の2本のスクリュー軸により常時微細物が流動していることにより低負荷で微細物が排出可能となり、駆動手段201及び駆動手段302を構成するモータの小型化が可能である。また、長期間停止時も、水脈がある程度確保できることにより最低限の負荷で可動することが可能となる。また、固まりやすい微細物でも常時流動させることで水脈を維持し内部での固着化を最小限に防ぐことができる。 In this fine object removing device 120, fine objects are constantly flowed by two screw shafts, a screw shaft 200 of the laterally arranged fine object removing section A and a screw shaft 200 of the laterally arranged fine object removing section A. As a result, fine objects can be discharged with a low load, and the motors constituting the drive means 201 and the drive means 302 can be miniaturized. In addition, even when stopped for a long period of time, it is possible to move with a minimum load because water veins can be secured to some extent. In addition, it is possible to maintain water veins and prevent internal sticking to a minimum by constantly flowing even fine substances that tend to solidify.

斜め方向配置型微細物除去部Bは、スクリュー軸301を微細物に応じて95度〜180度と任意の角度に調整することも可能であり、例えば、微細物の種類と含水率に応じて角度を調整する。 The obliquely arranged fine object removing unit B can adjust the screw shaft 301 to an arbitrary angle of 95 degrees to 180 degrees depending on the fine object, for example, depending on the type and water content of the fine object. Adjust the angle.

この微細物除去装置120は、液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜めるホッパーに接続し、微細物に付着する液体を除去して微細物を排出する装置であり、横方向配置型微細物除去部Aと、斜め方向配置型微細物除去部Bの駆動により、微細物に付着する液体を除去して微細物を回収する。 The fine substance removing device 120 is connected to a centrifugal separator that separates and precipitates fine substances contained in the liquid by centrifugal force, or a hopper that stores the separated fine substances, and removes the liquid adhering to the fine substances to be fine. It is a device for discharging an object, and by driving a laterally arranged fine substance removing unit A and an obliquely arranged fine object removing unit B, a liquid adhering to the fine substance is removed and the fine substance is collected.

[形態4の構成]
この実施の形態の微細物除去装置を、図16乃至図20に基づいて説明する。図16は微細物除去装置を示す正面図、図17は微細物除去装置を示す平面図、図18は微細物除去装置を示す斜視図、図19は排出口の位置が変更可能な構成を示す図、図20はスクリュー軸中心を支点として角度を可変可能な構成を示す図である。この形態4の構成は、形態3の構成と同じ部分は、同じ符号を付して説明を省略する。
[Structure of Form 4]
The fine substance removing device of this embodiment will be described with reference to FIGS. 16 to 20. 16 is a front view showing the fine substance removing device, FIG. 17 is a plan view showing the fine substance removing device, FIG. 18 is a perspective view showing the fine substance removing device, and FIG. 19 shows a configuration in which the position of the discharge port can be changed. FIG. 20 is a diagram showing a configuration in which the angle can be changed with the center of the screw shaft as a fulcrum. In the configuration of the fourth embodiment, the same parts as those of the third embodiment are designated by the same reference numerals, and the description thereof will be omitted.

横方向配置型微細物除去部Aと、斜め方向配置型微細物除去部Bを備え、横方向配置型微細物除去部Aは、ホッパーの投入部202から直接スクリュー軸200の部位へ微細物を落下させる構成である。ホッパーの投入部202は、
オーバーフローカバ―400を有し、オーバーフローカバ―400を開放することで分離した微細物に付着し、ホッパーの投入部202に溜まる液体を排出させる。
A laterally arranged fine object removing portion A and an obliquely arranged fine object removing portion B are provided, and the laterally arranged fine object removing portion A directly removes fine objects from the loading portion 202 of the hopper to the portion of the screw shaft 200. It is configured to be dropped. The input section 202 of the hopper is
It has an overflow cover 400, and by opening the overflow cover 400, it adheres to separated fine objects and discharges the liquid accumulated in the charging portion 202 of the hopper.

斜め方向配置型微細物除去部Bは、液体を除去した微細物を排出する微細物排出レール410を備え、微細物排出レール410は、排出口411の位置を変更可能な構成である。例えば、微細物排出レール410を、斜め方向配置型微細物除去部Bの筒体に接続部412を回動可能に設け、微細物排出レール410を回動して排出口411の位置を変える。微細物排出レール410を回動することで、図19(a)は排出口411の位置が側面から見て左側に位置し、図19(b)は排出口411の位置が側面から見て右側に位置しており、排出口411の位置を設備や装置の設置状況に応じて自由に変更することができる。 The obliquely arranged fine substance removing unit B includes a fine substance discharging rail 410 for discharging the fine substance from which the liquid has been removed, and the fine substance discharging rail 410 has a configuration in which the position of the discharging port 411 can be changed. For example, the fine material discharge rail 410 is provided with the connection portion 412 rotatably provided on the cylinder of the obliquely arranged fine material removal unit B, and the fine material discharge rail 410 is rotated to change the position of the discharge port 411. By rotating the fine material discharge rail 410, the position of the discharge port 411 is located on the left side when viewed from the side in FIG. 19 (a), and the position of the discharge port 411 is located on the right side when viewed from the side in FIG. 19 (b). The position of the discharge port 411 can be freely changed according to the installation status of equipment and devices.

斜め方向配置型微細物除去部Bは、図20に示すように、スクリュー軸方向は、横方向配置型微細物除去部Aのスクリュー軸中心を支点として角度を可変可能な構成である。例えば、初期設置時に、斜め方向配置型微細物除去部Bに位置を考慮し、横方向配置型微細物除去部Aに対する斜め方向配置型微細物除去部Bの取付角度を決めて、ボルト・ナットなどの取付手段500で締め付け固定する。また、その後の設備の変更等の事情によって、ボルト・ナットなどの取付手段を外して横方向配置型微細物除去部Aに対する斜め方向配置型微細物除去部Bの取付角度を変化させて、ボルト・ナットなどの取付手段500で締め付け固定する。このように、横方向配置型微細物除去部Aに対する斜め方向配置型微細物除去部Bの取付角度を変えて、斜め方向配置型微細物除去部Bのスクリュー軸方向を変化させることで、排出口411の位置を設備や装置の設置状況に応じて自由に変更することができる。 As shown in FIG. 20, the obliquely arranged fine object removing portion B has a configuration in which the angle of the screw axis direction can be changed with the screw axis center of the laterally arranged fine object removing portion A as a fulcrum. For example, at the time of initial installation, the position of the diagonally arranged fine object removing portion B is taken into consideration, the mounting angle of the diagonally arranged fine object removing portion B with respect to the laterally arranged fine object removing portion A is determined, and bolts and nuts are used. Tighten and fix with the mounting means 500 such as. In addition, due to subsequent changes in equipment, the mounting means such as bolts and nuts are removed, and the mounting angle of the diagonally arranged fine object removing portion B with respect to the laterally arranged fine object removing portion A is changed to change the bolts. -Tighten and fix with mounting means 500 such as nuts. In this way, by changing the mounting angle of the diagonally arranged fine object removing portion B with respect to the laterally arranged fine object removing portion A and changing the screw axial direction of the obliquely arranged fine object removing portion B, the ejection is performed. The position of the exit 411 can be freely changed according to the installation status of equipment and devices.

この発明は、液体に含まれる微粉末状クズ等の微細物を分離し、微細物に付着する液体を除去して微細物を回収する微細物除去システム及び微細物除去装置に適用可能であり、自動運転により液体に含まれる微細物を分離して除去し、微細物に付着する液体を除去して微細物を回収することで、無人化運転を可能にする。 The present invention is applicable to a fine substance removing system and a fine substance removing device that separates fine substances such as fine powdery debris contained in a liquid, removes the liquid adhering to the fine substances, and recovers the fine substances. Unmanned operation is made possible by separating and removing fine substances contained in the liquid by automatic operation, removing the liquid adhering to the fine substances, and recovering the fine substances.

10 微細物除去システム
20 円筒収容部
21 導入開口
22 導入管
23 取付体
24 軸受
27 絞り部
30 スクリュー軸
31 スクリュー
32 入力軸部
40 駆動手段
41 モータ
42 出力軸
43 連結部材
70 ストッパー
71 ストッパー部
72 支持軸部
73 支持筒
74 ホルダー
75 取付ボルト
76 支持体
77 付勢手段
78 スプリング
80 排出筒
81 排出開口
100 加工または処理を行う装置
101 貯留タンク
102 循環経路
103 ポンプ
110 遠心分離装置
111 沈殿部
112 微細物量検出装置
112a 超音波センサ
112b 検出手段
113 制御装置
120 微細物除去装置
140 導入通路
A 横方向配置型微細物除去部
B 斜め方向配置型微細物除去部
10 Fine object removal system 20 Cylindrical housing part 21 Introduction opening 22 Introduction pipe 23 Mounting body 24 Bearing 27 Squeezing part 30 Screw shaft 31 Screw 32 Input shaft part 40 Drive means 41 Motor 42 Output shaft 43 Connecting member 70 Stopper 71 Stopper part 72 Support Shaft 73 Support cylinder 74 Holder 75 Mounting bolt 76 Support 77 Biasing means 78 Spring 80 Discharge cylinder 81 Discharge opening 100 Processing or processing device 101 Storage tank 102 Circulation path 103 Pump 110 Centrifugal separator 111 Sedimentation 112 Fine amount Detection device 112a Ultrasonic sensor 112b Detection means 113 Control device 120 Fine object removal device 140 Introduction passage A Lateral arrangement type fine object removal unit B Diagonal arrangement type fine object removal unit

Claims (17)

液体を用いて加工または処理を行う装置と、
加工または処理に用いるための液体を貯留する貯留タンクと、
前記貯留タンクから液体を前記装置に供給し、前記装置から前記貯留タンクに戻して循環させる循環経路と、を含み、
前記循環経路に、
前記液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置と、
沈澱した微細物に付着する液体を除去して前記微細物を排出する微細物除去装置と、
沈殿により溜まる微細物量を検出する微細物量検出装置と、
前記検出する微細物量に基づき前記微細物除去装置を制御する制御装置と、を備えることを特徴とする微細物除去システム。
Equipment that processes or processes using liquids,
A storage tank that stores liquids for processing or processing,
A circulation path for supplying a liquid from the storage tank to the device and returning the liquid from the device to the storage tank for circulation.
In the circulation path,
A centrifuge that separates and precipitates fine substances contained in the liquid by centrifugal force,
A fine substance removing device that removes the liquid adhering to the precipitated fine substances and discharges the fine substances.
A fine material detection device that detects the amount of fine material accumulated by precipitation, and
A fine substance removing system comprising: a control device for controlling the fine substance removing device based on the detected fine substance amount.
沈澱する微細物を溜める沈殿部を備え、
前記微細物量検出装置は、
前記沈殿部に溜まる微細物量を検出することを特徴とする請求項1に記載の微細物除去システム。
Equipped with a settling part to collect fine substances that settle
The fine quantity detection device is
The fine substance removing system according to claim 1, wherein the amount of fine substances accumulated in the settling portion is detected.
前記微細物除去装置に前記微細物量検出装置を備え、
前記微細物量検出装置は、
前記微細物除去装置に溜まる微細物量を検出することを特徴とする請求項1に記載の微細物除去システム。
The fine substance removing device is provided with the fine substance amount detecting device.
The fine quantity detection device is
The fine substance removing system according to claim 1, wherein the amount of fine substances accumulated in the fine substance removing device is detected.
前記微細物除去装置を、複数個直列に接続して備えることを特徴とする請求項1乃至請求項3のいずれか1項に記載の微細物除去システム。 The fine substance removing system according to any one of claims 1 to 3, wherein a plurality of the fine substance removing devices are connected in series. 前記循環経路に、前記沈殿部と前記微細物除去装置を洗浄する洗浄回路を備え、
前記制御装置は、前記沈殿部と前記微細物除去装置から前記微細物を排出した後に、前記洗浄回路を駆動して前記沈殿部と前記微細物除去装置を洗浄することを特徴とする請求項1乃至請求項4のいずれか1項に記載の微細物除去システム。
The circulation path is provided with a cleaning circuit for cleaning the settling portion and the fine substance removing device.
The control device is characterized in that, after discharging the fine matter from the settling portion and the fine matter removing device, the cleaning circuit is driven to clean the settling portion and the fine matter removing device. The fine substance removing system according to any one of claims 4.
前記微細物除去装置の上流側に、前記沈殿部を直接連結して一体化したことを特徴とする請求項1乃至請求項5のいずれか1項に記載の微細物除去システム。 The fine substance removing system according to any one of claims 1 to 5, wherein the settling portion is directly connected and integrated on the upstream side of the fine substance removing device. 沈澱する微細物を前記微細物除去装置に導く導入通路を含み、
前記導入通路に前記沈殿部を備え、
前記微細物量検出装置は、前記沈殿部に溜まる微細物量を検出することを
特徴とする請求項1乃至請求項6のいずれか1項に記載の微細物除去システム。
Including an introduction passage that guides the precipitated fine matter to the fine matter removing device.
The introduction passage is provided with the sedimentation portion.
The fine matter removing system according to any one of claims 1 to 6, wherein the fine matter amount detecting device detects the fine matter amount accumulated in the settling portion.
前記沈殿部の上流側は、
第1の自動バルブを介して前記装置に通じる経路と、
第2の自動バルブと前記遠心分離装置を順に介して前記装置に通じる経路と、を含み、
前記沈殿部の下流側は、
第3の自動バルブを介して前記微細物除去装置に通じる経路と、
を含み、
前記制御装置の制御により、
通常動作は、前記第1の自動バルブを閉じ、前記第2の自動バルブを開き、前記第3の自動バルブを閉じて前記沈殿部に微細物を溜め、
排出動作は、前記第2の自動バルブを閉じ、前記第3の自動バルブを開き、前記沈殿部に溜まる微細物を排出し、その時前記第1の自動バルブを開き、前記沈殿部と前記第3の自動バルブを洗浄して排出しきれない微細物を前記微細物除去装置へ排出し、
通常動作への復帰は、前記第1の自動バルブを閉じ、前記第2の自動バルブを開き、前記第3の自動バルブを閉じて前記沈殿部に微細物を溜めように構成されることを特徴とする請求項2乃至請求項7のいずれか1項に記載の微細物除去システム。
The upstream side of the settling portion is
A path leading to the device via the first automatic valve,
Includes a second automatic valve and a path leading to the device through the centrifuge in sequence.
The downstream side of the sedimentation part is
A path leading to the fine substance removing device via a third automatic valve,
Including
By the control of the control device
In normal operation, the first automatic valve is closed, the second automatic valve is opened, the third automatic valve is closed, and fine substances are accumulated in the settling portion.
The discharge operation closes the second automatic valve, opens the third automatic valve, discharges fine substances accumulated in the settling portion, and then opens the first automatic valve, and opens the settling portion and the third. The automatic valve is cleaned and the fine substances that cannot be discharged are discharged to the fine substance removing device.
The return to the normal operation is characterized in that the first automatic valve is closed, the second automatic valve is opened, the third automatic valve is closed, and fine substances are accumulated in the settling portion. The fine substance removing system according to any one of claims 2 to 7.
前記微細物除去装置は、
液体が付着した微細物を収容する円筒収容部と、
前記円筒収容部の内部に軸方向に配置されて回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含み、
前記スクリュー軸の回転により前記微細物に付着する液体を除去し、
前記液体を除去した微細物を前記円筒収容部から排出することを特徴とする請求項1乃至請求項8に記載の微細物除去システム。
The fine substance removing device is
A cylindrical housing unit that stores fine objects to which liquid has adhered,
A screw shaft that is arranged in the axial direction inside the cylindrical housing portion and discharges the fine material by rotation,
Including a driving means for rotationally driving the screw shaft,
The liquid adhering to the fine object is removed by the rotation of the screw shaft, and the liquid is removed.
The fine substance removing system according to claim 1 to 8, wherein the fine substance from which the liquid has been removed is discharged from the cylindrical housing portion.
前記円筒収容部の排出側に、絞り部を設け、
前記絞り部を、ストッパーで覆い、
前記ストッパーを、付勢手段により常に閉じ方向に付勢し、
前記円筒収容部から排出される微細物により前記ストッパーを押動し、前記絞り部が開閉可能な構成であることを特徴とする請求項9に記載の微細物除去システム。
A throttle portion is provided on the discharge side of the cylindrical accommodating portion.
Cover the throttle with a stopper and
The stopper is always urged in the closing direction by the urging means.
The fine substance removing system according to claim 9, wherein the stopper is pushed by a fine substance discharged from the cylindrical accommodating portion, and the throttle portion can be opened and closed.
前記円筒収容部の排出側に、排出筒を接続し、
前記排出筒は、前記円筒収容部より上方に開口する排出開口を有し、
前記円筒収容部から排出される微細物を、前記排出筒の排出開口から排出可能な構成であることを特徴とする請求項9に記載の微細物除去システム。
A discharge cylinder is connected to the discharge side of the cylindrical housing portion, and the discharge cylinder is connected.
The discharge cylinder has a discharge opening that opens above the cylindrical housing portion.
The fine substance removing system according to claim 9, wherein the fine substance discharged from the cylindrical accommodating portion can be discharged from the discharge opening of the discharge cylinder.
液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜める沈殿部に接続し、微細物に付着する液体を除去して微細物を排出する微細物除去装置であり、
液体が付着した微細物を収容する円筒収容部と、
前記円筒収容部の内部に軸方向に配置されて回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含み、
前記スクリュー軸の回転により前記微細物に付着する液体を除去し、
前記液体を除去した微細物を前記円筒収容部から排出することを特徴とする微細物除去装置。
Centrifugal separation device that separates and precipitates fine substances contained in liquid by centrifugal force, or fine substance removal that removes liquid adhering to fine substances and discharges fine substances by connecting to a sedimentation part that collects the separated fine substances. It is a device
A cylindrical housing unit that stores fine objects to which liquid has adhered,
A screw shaft that is arranged in the axial direction inside the cylindrical housing portion and discharges the fine material by rotation,
Including a driving means for rotationally driving the screw shaft,
The rotation of the screw shaft removes the liquid adhering to the fine matter,
A fine substance removing device for discharging the fine substance from which the liquid has been removed from the cylindrical housing portion.
前記円筒収容部の排出側に、絞り部を設け、
前記絞り部を、ストッパーで覆い、
前記ストッパーを、付勢手段により常に閉じ方向に付勢し、
前記円筒収容部から排出される微細物により前記ストッパーを押動し、前記絞り部が開閉可能な構成であることを特徴とする請求項12に記載の微細物除去装置。
A throttle portion is provided on the discharge side of the cylindrical accommodating portion.
Cover the throttle with a stopper and
The stopper is always urged in the closing direction by the urging means, and the stopper is always urged in the closing direction.
The fine substance removing device according to claim 12, wherein the stopper is pushed by a fine substance discharged from the cylindrical accommodating portion, and the throttle portion can be opened and closed.
前記円筒収容部の排出側に、排出筒を接続し、
前記排出筒は、前記円筒収容部より上方に開口する排出開口を有し、
前記円筒収容部から排出される微細物を、前記排出筒の排出開口から排出可能な構成であることを特徴とする請求項12に記載の微細物除去装置。
A discharge cylinder is connected to the discharge side of the cylindrical housing portion, and the discharge cylinder is connected.
The discharge cylinder has a discharge opening that opens above the cylindrical housing portion.
The fine substance removing device according to claim 12, wherein the fine substance discharged from the cylindrical accommodating portion can be discharged from the discharge opening of the discharge cylinder.
液体に含まれる微細物を遠心力により分離して沈殿させる遠心分離装置、または分離した微細物を溜める沈殿部に接続し、微細物に付着する液体を除去して微細物を排出する微細物除去装置であり、
回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含む横方向配置型微細物除去部と、
液体が付着した微細物を収容する円筒収容部と、
前記円筒収容部の内部に軸方向に配置されて回転により前記微細物を排出するスクリュー軸と、
前記スクリュー軸を回転駆動する駆動手段と、を含む斜め方向配置型微細物除去部と、を備え、
前記横方向配置型微細物除去部の駆動と、前記斜め方向配置型微細物除去部の駆動により、
前記横方向配置型微細物除去部から前記斜め方向配置型微細物除去部へ微細物を送り、
前記斜め方向配置型微細物除去部から液体を除去して微細物を排出することを特徴とする微細物除去装置。
Centrifugal separation device that separates and precipitates fine substances contained in liquid by centrifugal force, or fine substance removal that removes liquid adhering to fine substances and discharges fine substances by connecting to a sedimentation part that collects the separated fine substances. It is a device
A screw shaft that discharges the fine objects by rotation,
A laterally arranged fine object removing unit including a driving means for rotationally driving the screw shaft, and
A cylindrical housing unit that stores fine objects to which liquid has adhered,
A screw shaft that is arranged in the axial direction inside the cylindrical housing portion and discharges the fine material by rotation,
A drive means for rotationally driving the screw shaft, and an obliquely arranged fine object removing portion including the screw shaft are provided.
By driving the laterally arranged fine object removing unit and driving the diagonally arranged fine object removing unit,
The fine matter is sent from the laterally arranged fine matter removing portion to the diagonally arranged fine matter removing portion.
A fine substance removing device characterized in that a liquid is removed from the obliquely arranged fine substance removing portion and the fine substance is discharged.
前記斜め方向配置型微細物除去部は、
液体を除去した微細物を排出する微細物排出レールを備え、
前記微細物排出レールは、排出口の位置を変更可能な構成であることを特徴とする請求項15に記載の微細物除去装置。
The diagonally arranged fine object removing portion is
Equipped with a fine substance discharge rail that discharges fine substances from which liquid has been removed
The fine substance removing device according to claim 15, wherein the fine substance discharge rail has a configuration in which the position of the discharge port can be changed.
前記斜め方向配置型微細物除去部のスクリュー軸方向は、
前記横方向配置型微細物除去部のスクリュー軸中心を支点として角度を可変可能な構成であることを特徴とする請求項15または請求項16に記載の微細物除去装置。
The screw axial direction of the diagonally arranged fine object removing portion is
The fine substance removing device according to claim 15 or 16, wherein the angle can be changed with the screw shaft center of the laterally arranged fine substance removing portion as a fulcrum.
JP2019220394A 2019-06-03 2019-12-05 Fine particle removal system and fine particle removal device Active JP7432888B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2020/017235 WO2020246162A1 (en) 2019-06-03 2020-04-21 Fine material amount detection device, clamp-type holder, centrifugal separation device, and fine material removal system
TW109114033A TWI779280B (en) 2019-06-03 2020-04-27 System for removing fine material
JP2023202266A JP2024026222A (en) 2019-10-11 2023-11-29 Fine particle removal device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019187437 2019-10-11
JP2019187437 2019-10-11

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023202266A Division JP2024026222A (en) 2019-10-11 2023-11-29 Fine particle removal device

Publications (2)

Publication Number Publication Date
JP2021062357A true JP2021062357A (en) 2021-04-22
JP7432888B2 JP7432888B2 (en) 2024-02-19

Family

ID=75487059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019220394A Active JP7432888B2 (en) 2019-06-03 2019-12-05 Fine particle removal system and fine particle removal device

Country Status (1)

Country Link
JP (1) JP7432888B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022210223A1 (en) 2021-03-31 2022-10-06 日本精工株式会社 Multi-row ball screw

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09174377A (en) * 1995-12-26 1997-07-08 Suzuki Motor Corp Cutting waste transporter
JP2001310235A (en) * 1999-04-14 2001-11-06 Enomoto Kogyo Kk Chip conveyer, and chip separating/recovering device used for it
KR200344615Y1 (en) * 2003-12-10 2004-03-16 주식회사 대흥엔지니어링 Separator of remnant in wastewater
JP2006075725A (en) * 2004-09-09 2006-03-23 Nikuni:Kk Liquid processing equipment
JP2016165775A (en) * 2015-03-10 2016-09-15 株式会社日進製作所 Liquid purification system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09174377A (en) * 1995-12-26 1997-07-08 Suzuki Motor Corp Cutting waste transporter
JP2001310235A (en) * 1999-04-14 2001-11-06 Enomoto Kogyo Kk Chip conveyer, and chip separating/recovering device used for it
KR200344615Y1 (en) * 2003-12-10 2004-03-16 주식회사 대흥엔지니어링 Separator of remnant in wastewater
JP2006075725A (en) * 2004-09-09 2006-03-23 Nikuni:Kk Liquid processing equipment
JP2016165775A (en) * 2015-03-10 2016-09-15 株式会社日進製作所 Liquid purification system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022210223A1 (en) 2021-03-31 2022-10-06 日本精工株式会社 Multi-row ball screw

Also Published As

Publication number Publication date
JP7432888B2 (en) 2024-02-19

Similar Documents

Publication Publication Date Title
US7909990B2 (en) Filter device
US4366069A (en) Coolant recovery system
CA2642316C (en) Filter device and filtering method
CN102006916A (en) High viscosity fluid filtering system
KR102541499B1 (en) Movable coolant chip cleaner purification system
JP2005013783A (en) Liquid centrifugal separator
JP7432888B2 (en) Fine particle removal system and fine particle removal device
KR20160125226A (en) Centrifugal separator and method for sludge separating using the same
WO2020246162A1 (en) Fine material amount detection device, clamp-type holder, centrifugal separation device, and fine material removal system
US5376268A (en) Rotary filtering apparatus
CN110790342A (en) Separator device
KR101022636B1 (en) Countercurrent filter system, especially for separating solids from liquids
JP2024026222A (en) Fine particle removal device
TWI779280B (en) System for removing fine material
KR20010000766A (en) Cyclone system analong filter auto backwash unit
JP2013107164A (en) Device and system for removing pulverized material
CN115650528B (en) Centrifugal concentrator effluent treatment plant
KR101155063B1 (en) Centrifugal filter
JP2021063794A (en) Clamp type holder, fine matter amount detection device, centrifugal separator, and fine matter removal system
JP2022105869A (en) Fine material discharge valve device, centrifuge device and fine material removal system
US11685670B2 (en) Apparatus and method for optimizing hydro-cyclone separation in a filtering system
JP2020197525A (en) Fine material amount detector and fine material removal system
EP3028757B1 (en) Filtering device and fluid purification system
KR102221961B1 (en) A slurry solid-liquid separation processing apparatus utilizing data obtained by measuring the distance between the center axis of the centrifugal filter and the slurry liquid wall by noncontact type and smart operation method thereof
US12403482B1 (en) Continuous clean centrifuge

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191223

AA64 Notification of invalidation of claim of internal priority (with term)

Free format text: JAPANESE INTERMEDIATE CODE: A241764

Effective date: 20191223

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20221026

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231006

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231129

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240129

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240129

R150 Certificate of patent or registration of utility model

Ref document number: 7432888

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150