JP2020500412A - 真空チャンバを洗浄するためのシステム、真空チャンバを洗浄するための方法、及び真空チャンバを洗浄するコンプレッサの使用 - Google Patents
真空チャンバを洗浄するためのシステム、真空チャンバを洗浄するための方法、及び真空チャンバを洗浄するコンプレッサの使用 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 40
- 238000010926 purge Methods 0.000 claims description 75
- 229930195733 hydrocarbon Natural products 0.000 claims description 14
- 150000002430 hydrocarbons Chemical class 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 10
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- 230000033228 biological regulation Effects 0.000 claims description 8
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- 229910052760 oxygen Inorganic materials 0.000 claims description 8
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- 238000003795 desorption Methods 0.000 claims description 6
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- 238000010586 diagram Methods 0.000 abstract description 7
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229920006328 Styrofoam Polymers 0.000 description 1
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- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
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- PRAKJMSDJKAYCZ-UHFFFAOYSA-N dodecahydrosqualene Natural products CC(C)CCCC(C)CCCC(C)CCCCC(C)CCCC(C)CCCC(C)C PRAKJMSDJKAYCZ-UHFFFAOYSA-N 0.000 description 1
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- 229940031439 squalene Drugs 0.000 description 1
- TUHBEKDERLKLEC-UHFFFAOYSA-N squalene Natural products CC(=CCCC(=CCCC(=CCCC=C(/C)CCC=C(/C)CC=C(C)C)C)C)C TUHBEKDERLKLEC-UHFFFAOYSA-N 0.000 description 1
- 150000003431 steroids Chemical class 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
- B08B9/0328—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid by purging the pipe with a gas or a mixture of gas and liquid
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- General Chemical & Material Sciences (AREA)
- Epidemiology (AREA)
- Cleaning In General (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
排出口に接続された注入口側、及び注入口に接続された排出口側を有するコンプレッサを備え得る。図2で例示されたように、幾つかの実施形態によれば、システム200は、配管、導管132、及び/又はスロットル230などの圧力上昇ユニットをさらに備え得る。
Claims (17)
- 真空チャンバ(110)を洗浄するためのシステム(100、200、300、400、500)であって、
注入口(111)及び排出口(112)を有する前記真空チャンバ、並びに
前記排出口(112)に接続された注入口側(121)、及び前記注入口(111)に接続された排出口側(122)を有するコンプレッサ(120)
を備えているシステム(100、200、300、400、500)。 - 圧力上昇ユニット(230)をさらに備えている、請求項1に記載のシステム。
- 前記圧力上昇ユニットが、剛性配管、スロットル、及びこれらの組み合わせからなる群から選択される、請求項2に記載のシステム。
- 前記システムが、パージガス注入口(341)、パージガス排出口(342)、及びポンピングユニット(340)をさらに備えている、請求項1から3のいずれか一項に記載のシステム。
- 前記システムが、圧力調節ユニット(450)をさらに備えている、請求項1から4のいずれか一項に記載のシステム。
- 前記システムが、プラズマ源(560)をさらに備えている、請求項1から5のいずれか一項に記載のシステム。
- 前記システムが、前記真空チャンバ内の表面上の材料の脱着を促すように構成されている、請求項1から6のいずれか一項に記載のシステム。
- 前記材料が、炭化水素、水、及びこれらの組み合わせからなる群から選択される、請求項7に記載のシステム。
- 前記コンプレッサが、非接触型コンプレッサ、オイルフリーコンプレッサ、グリースフリーコンプレッサ、磁気駆動コンプレッサ、磁気浮上軸受コンプレッサ、及びこれらの任意の組み合わせからなる群から選択される、請求項1から8のいずれか一項に記載のシステム。
- 前記コンプレッサが、15から20kWの電力、及び/又は5から10kWの有効加熱力を有する、請求項1から9のいずれか一項に記載のシステム。
- 前記コンプレッサが、前記真空チャンバ内のパージガスを圧縮するように構成され、前記パージガスが、乾燥空気、N2、Ar、O2、O2/N2、O2/乾燥空気、O3、ROS、及びこれらの任意の組み合わせからなる群から選択される、請求項1から10のいずれか一項に記載のシステム。
- 真空チャンバを洗浄するための方法であって、
パージガスを圧縮することと、
圧縮された前記パージガスで前記真空チャンバを加熱することと
を含む方法。 - 圧縮された前記パージガスを前記真空チャンバから少なくとも部分的に除去することと、
前記真空チャンバ内で100mbar(1.0*104Pa)から300mbar(3.0*104Pa)のパージ圧力を保ちながら、清浄なパージガスを前記真空チャンバ内に導入することと
をさらに含む、請求項12に記載の方法。 - 前記真空チャンバ内での0.1mbar(10Pa)から1mbar(100Pa)のプラズマ処理圧力において、O3、ROS、及びこれらの組み合わせからなる群から選択されたプラズマを前記真空チャンバ内に導入することをさらに含む、請求項12又は13に記載の方法。
- 前記パージガス及び前記清浄なパージガスが、乾燥空気、N2、Ar、O2、O2/N2、O2/乾燥空気、O3、ROS、及びこれらの任意の組み合わせからなる群から個別に選択される、請求項12から14のいずれか一項に記載の方法。
- 真空チャンバを洗浄するコンプレッサの使用。
- 前記コンプレッサが、非接触型コンプレッサ、オイルフリーコンプレッサ、グリースフリーコンプレッサ、磁気駆動コンプレッサ、磁気浮上軸受コンプレッサ、及びこれらの任意の組み合わせからなる群から選択される、請求項16に記載の使用。
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JP2023519677A (ja) * | 2020-03-31 | 2023-05-12 | アプライド マテリアルズ インコーポレイテッド | 電子機器製造システムのためのチャンバの遠隔プラズマ洗浄 |
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JP2023519677A (ja) * | 2020-03-31 | 2023-05-12 | アプライド マテリアルズ インコーポレイテッド | 電子機器製造システムのためのチャンバの遠隔プラズマ洗浄 |
JP7477637B2 (ja) | 2020-03-31 | 2024-05-01 | アプライド マテリアルズ インコーポレイテッド | 電子機器製造システムのためのチャンバの遠隔プラズマ洗浄 |
Also Published As
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TW201923128A (zh) | 2019-06-16 |
WO2019057310A1 (en) | 2019-03-28 |
CN109844170A (zh) | 2019-06-04 |
KR20190036508A (ko) | 2019-04-04 |
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