JP2020168609A - Defoaming method and defoaming device - Google Patents

Defoaming method and defoaming device Download PDF

Info

Publication number
JP2020168609A
JP2020168609A JP2019071774A JP2019071774A JP2020168609A JP 2020168609 A JP2020168609 A JP 2020168609A JP 2019071774 A JP2019071774 A JP 2019071774A JP 2019071774 A JP2019071774 A JP 2019071774A JP 2020168609 A JP2020168609 A JP 2020168609A
Authority
JP
Japan
Prior art keywords
defoaming
liquid
bubbles
net
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019071774A
Other languages
Japanese (ja)
Inventor
雅貴 伊藤
Masaki Ito
雅貴 伊藤
久始 加藤
Hisashi Kato
久始 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP2019071774A priority Critical patent/JP2020168609A/en
Publication of JP2020168609A publication Critical patent/JP2020168609A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Degasification And Air Bubble Elimination (AREA)

Abstract

To provide a defoaming method that can be used for process of manufacturing a printed wiring board readily and inexpensively, and to provide a defoaming device.SOLUTION: A defoaming method for removing foam floating on a surface of liquid includes the steps of: storing liquid containing foam in a liquid tank; arranging a defoaming mesh horizontally in a position separated upward from the surface of liquid inside the liquid tank; and breaking the foam floating on the surface of liquid when the defoaming mesh comes into contact with the foam.SELECTED DRAWING: Figure 1

Description

本発明は、プリント配線板の製造過程等に使用される消泡方法および消泡装置に関する。 The present invention relates to a defoaming method and a defoaming device used in a manufacturing process of a printed wiring board or the like.

近年のファインピッチ化されたプリント配線板を製造する方法のひとつにセミアディティブ法が知られている。セミアディティブ法とは、絶縁層あるいは絶縁基板上に例えば無電解めっきでシード層を設け、そのシード層をパターン部が開口されためっきレジストで覆い、めっきレジストの開口から露出したシード層部分に電解めっきで回路パターンを形成し、その後にめっきレジストを剥離液で除去してから、回路パターン以外のシード層部分をエッチングで除去して、回路パターンを持つ導体回路層を形成する方法である。 The semi-additive method is known as one of the methods for manufacturing a printed wiring board having a fine pitch in recent years. In the semi-additive method, a seed layer is provided on an insulating layer or an insulating substrate by, for example, electroless plating, the seed layer is covered with a plating resist having an open pattern portion, and the seed layer portion exposed from the opening of the plating resist is electrolyzed. This is a method in which a circuit pattern is formed by plating, then the plating resist is removed with a stripping solution, and then the seed layer portion other than the circuit pattern is removed by etching to form a conductor circuit layer having the circuit pattern.

このようなプリント配線板の製造過程では、例えばめっきレジストを剥離液で除去した後のプリント配線板の水洗工程で、基板表面に付着した剥離液が水洗槽内の洗浄水に混入して攪拌されることで泡が発生する場合があり、この泡が水洗槽外に溢れ出る可能性がある。このため水洗槽に泡を除去する消泡装置を設けることが望ましい。 In the manufacturing process of such a printed wiring board, for example, in the washing step of the printed wiring board after removing the plating resist with a stripping solution, the stripping solution adhering to the substrate surface is mixed with the washing water in the washing tank and stirred. This may generate bubbles, which may overflow out of the flush tub. Therefore, it is desirable to provide a defoaming device for removing bubbles in the washing tank.

特許文献1は、インキやオイル等の液体に含まれる泡を除去する消泡装置を提案しており、この消泡装置は、液体容器内の液体の液面上から液中まで被せた袋状の網の下端開口部から泡が含まれる液体を網内に供給し、網の下部から網を通して泡を除去した液体を液体容器外に取り出す一方、網の内面に沿って上昇して液面上に出た泡が壊れて出た気体を網の上部から網を通して液体容器外に取り出している。 Patent Document 1 proposes a defoaming device that removes bubbles contained in a liquid such as ink or oil, and this defoaming device has a bag shape that covers the liquid in a liquid container from above the liquid surface to the inside of the liquid. The liquid containing bubbles is supplied into the net from the lower end opening of the net, and the liquid from which the bubbles have been removed is taken out of the liquid container through the net from the bottom of the net, while rising along the inner surface of the net and above the liquid surface. The gas that has broken out of the bubbles is taken out of the liquid container from the top of the net through the net.

また特許文献2は、界面活性作用を有する物質が混入した冷却水等の液体を貯蔵するタンク内で、その液体から発生する泡を吸引して除去する消泡装置を提案しており、この消泡装置は、タンク内の液体の液面上にフロートで浮いていて、タンク内の液体の液面上に生じる泡をその液面付近に位置する吸引口から装置内のモータ駆動の羽根車の回転により吸引除去している。 Further, Patent Document 2 proposes a defoaming device that sucks and removes bubbles generated from a liquid such as cooling water mixed with a substance having a surface-active effect in a tank for storing the liquid. The foaming device floats on the liquid level of the liquid in the tank, and the bubbles generated on the liquid level of the liquid in the tank are discharged from the suction port located near the liquid level of the impeller driven by the motor in the device. It is removed by suction by rotation.

特開2006−320800号公報Japanese Unexamined Patent Publication No. 2006-320800 特開2007−222721号公報JP-A-2007-222721

しかしながら特許文献1記載の装置は、液面に上昇して壊れた泡から発生した気体を網の上部から取り出すだけであり、泡を積極的に消去する機能は持っていない。また特許文献2記載の装置は、液面付近に位置する吸引口から泡を装置内のモータ駆動の羽根車の回転により吸引して除去するので、装置が複雑かつ高価になる。 However, the apparatus described in Patent Document 1 only takes out the gas generated from the broken bubbles rising to the liquid surface from the upper part of the net, and does not have a function of positively eliminating the bubbles. Further, the device described in Patent Document 2 sucks and removes bubbles from a suction port located near the liquid surface by the rotation of a motor-driven impeller in the device, which makes the device complicated and expensive.

本発明は、プリント配線板の製造過程等において使用できる容易かつ安価な消泡方法および消泡装置の提供を目的とする。 An object of the present invention is to provide an easy and inexpensive defoaming method and defoaming device that can be used in the manufacturing process of a printed wiring board or the like.

本発明の消泡方法は、
液体の液面上に浮上した泡を除去する方法であって、
泡を含む液体が液体槽内に溜められることと、
液体槽内の液体の液面から上方に離間した位置に消泡網が水平に配置されることと、
液体の液面上に浮上した泡がその消泡網に接触して壊れることと、
を含んでいる。
The defoaming method of the present invention
A method of removing bubbles that have floated on the surface of a liquid.
The fact that the liquid containing bubbles is stored in the liquid tank
The defoaming net is placed horizontally at a position above the liquid level in the liquid tank, and
When the bubbles floating on the surface of the liquid come into contact with the defoaming net and break,
Includes.

本発明の消泡方法においては、好ましくは、消泡網は、液体槽内の所定高さの位置に着脱可能に配置されており、もしくは、液体槽内の液体の液面上の泡にその泡に対する浮力で浮かんでいる。 In the defoaming method of the present invention, preferably, the defoaming net is detachably arranged at a predetermined height position in the liquid tank, or is formed on the foam on the liquid surface of the liquid in the liquid tank. Floating with buoyancy against bubbles.

また、本発明の消泡装置は、
液体の液面上に浮上した泡を除去する装置であって、
泡を含む液体を溜める液体槽と、
液体槽内の液体の液面から上方に離間した位置に水平に配置され、液体の液面上に浮上した泡に接触してその泡を壊す消泡網と、
を備えている。
Further, the defoaming device of the present invention is
A device that removes bubbles that have floated on the surface of a liquid.
A liquid tank that stores liquid containing bubbles,
A defoaming net that is placed horizontally at a position above the liquid level of the liquid in the liquid tank and comes into contact with bubbles floating on the liquid level to break the bubbles.
Is equipped with.

本発明の消泡装置においては、好ましくは、消泡網は、液体槽内の所定高さの位置に着脱可能に配置されており、もしくは、液体槽内の液体の液面上の泡にその泡に対する浮力で浮かんでいる。 In the defoaming device of the present invention, preferably, the defoaming net is detachably arranged at a predetermined height position in the liquid tank, or is formed on the foam on the liquid surface of the liquid in the liquid tank. Floating with buoyancy against bubbles.

(a)および(b)は、本発明の消泡方法の一実施形態に用いられる、本発明の消泡装置の一実施形態を示す斜視図および断面図である。(A) and (b) are perspective views and sectional views which show one Embodiment of the defoaming apparatus of this invention used in one Embodiment of the defoaming method of this invention. (a)および(b)は、本発明の消泡方法の他の一実施形態に用いられる、本発明の消泡装置の他の一実施形態を示す斜視図および断面図である。(A) and (b) are perspective views and cross-sectional views showing another embodiment of the defoaming apparatus of the present invention used in another embodiment of the defoaming method of the present invention. 上記他の実施形態の消泡装置の一変形例を示す斜視図である。It is a perspective view which shows one modification of the defoaming apparatus of the other embodiment.

図1(a)は、本発明の消泡方法の一実施形態に用いられる、本発明の消泡装置の一実施形態を示す斜視図であり、図1(b)は、その実施形態の消泡装置を示す断面図である。この実施形態の消泡装置は、例えばプリント配線板の製造過程において、例えばめっきレジストを剥離液で除去した後のプリント配線板の水洗工程で、表面に剥離液が付着した基板を浸漬してその剥離液を洗い流す際に用いられるものであり、その剥離液が混入するため泡が発生する、泡を含む液体としての洗浄水Lを留める液体槽としての回収水洗槽1と、その回収水洗槽1内に配置される消泡網2と、を具えている。 FIG. 1 (a) is a perspective view showing an embodiment of the defoaming device of the present invention used in one embodiment of the defoaming method of the present invention, and FIG. 1 (b) is an extinguishing of the embodiment. It is sectional drawing which shows the foaming apparatus. In the defoaming device of this embodiment, for example, in the manufacturing process of the printed wiring board, for example, in the water washing step of the printed wiring board after removing the plating resist with the stripping liquid, the substrate to which the stripping liquid adheres is immersed on the surface thereof. A recovery water washing tank 1 as a liquid tank for holding the washing water L as a liquid containing bubbles, which is used when washing away the peeling liquid and generates bubbles due to the mixing of the peeling liquid, and a recovery water washing tank 1 thereof. It is equipped with a defoaming net 2 arranged inside.

回収水洗槽1は、図示しない給水管を介して槽内に洗浄水Lを給水されて貯留し、その洗浄水L内に、例えばめっきレジストの剥離液が表面に付着した図示しない基板を浸漬されて、その剥離液を洗浄水Lで洗浄除去し、剥離液の洗浄除去後の基板が取り出される、という洗浄工程を所定数の基板について繰り返された後、図示しない排水管を介して槽内の洗浄水Lを排水される。この洗浄工程において、剥離液が混入した洗浄水Lには比較的多くの泡が発生し、その泡の上面BSは、消泡網2がない通常の場合、水面LSの上方の、水面LSから概ね所定の高さ、例えば水面LSから最大200mmの高さに達する。 In the recovery water washing tank 1, washing water L is supplied and stored in the tank via a water supply pipe (not shown), and a substrate (not shown) having, for example, a plating resist stripping solution adhered to the surface is immersed in the washing water L. After repeating the cleaning step of cleaning and removing the stripping solution with washing water L and taking out the substrate after cleaning and removing the stripping solution for a predetermined number of substrates, the inside of the tank is in the tank via a drain pipe (not shown). The wash water L is drained. In this cleaning step, a relatively large amount of bubbles are generated in the cleaning water L mixed with the stripping liquid, and the upper surface BS of the bubbles is normally above the water surface LS and from the water surface LS without the defoaming net 2. It reaches a generally predetermined height, for example, a maximum height of 200 mm above the water surface LS.

消泡網2は、基板の洗浄工程では洗浄水に対する基板の浸漬および取り出しを妨げないよう取り外しておけるように、回収水洗槽1に対し着脱可能に配置されている。消泡網2は、例えばステンレス等の金属製の網本体2aと、その網本体2aの外枠に設けられるとともに上端部の折り返し部で回収水洗槽1の上端縁に掛合する、これも例えばステンレス等の金属製の板状の複数のフック2bとを有しており、網本体2aは、回収水洗槽1内の洗浄水Lの水面LSから上方に所定距離、例えば5mm離間して、通常位置する泡の上面BSよりも低い高さに水平に位置する。 The defoaming net 2 is detachably arranged with respect to the recovery water washing tank 1 so that it can be removed so as not to interfere with the immersion and removal of the substrate in the cleaning water in the substrate cleaning step. The defoaming net 2 is provided on a metal net body 2a such as stainless steel and an outer frame of the net body 2a, and is engaged with the upper end edge of the recovery water washing tank 1 at a folded portion at the upper end. It has a plurality of metal plate-shaped hooks 2b such as, etc., and the net body 2a is at a normal position at a predetermined distance upward from the water surface LS of the washing water L in the recovery water washing tank 1, for example, 5 mm. It is located horizontally at a height lower than the upper surface BS of the foam.

この実施形態の消泡装置を用いた上記実施形態の消泡方法は、洗浄水Lの水面LS上に浮上した泡を除去する方法であって、泡を含む洗浄水Lが回収水洗槽1内に溜められることと、回収水洗槽1内の洗浄水Lの水面LSから上方に離間した位置に消泡網2の網本体2aが水平に配置されることと、洗浄水Lの水面LS上に浮上した泡がその消泡網2の網本体2aに接触して壊れることと、を含んでいる。 The defoaming method of the above embodiment using the defoaming device of this embodiment is a method of removing bubbles floating on the water surface LS of the washing water L, and the washing water L containing the bubbles is collected in the water washing tank 1. The net body 2a of the defoaming net 2 is horizontally arranged at a position separated upward from the water surface LS of the washing water L in the recovery water washing tank 1, and is placed on the water surface LS of the washing water L. It includes that the floating bubbles come into contact with the net body 2a of the defoaming net 2 and break.

ここで、泡が網本体2aに接触して壊れるのは、互いに隣接する泡と泡との間の泡膜が互いに120度の角度を持つと泡が安定な状態になるのに対し、網本体2aに接触した泡膜が本体2aへの付着によりその120度の角度を維持できなくなって、泡が不安定な状態になるからと推定される。 Here, the reason why the bubbles come into contact with the net body 2a and break is that the bubbles become stable when the bubble films adjacent to each other have an angle of 120 degrees with each other, whereas the bubbles become stable. It is presumed that the foam film in contact with 2a cannot maintain its 120-degree angle due to adhesion to the main body 2a, and the foam becomes unstable.

従って、この実施形態の消泡装置を用いたこの実施形態の消泡方法によれば、プリント配線板の製造過程において、安価な構成により容易に泡を消去して除去することができる。 Therefore, according to the defoaming method of this embodiment using the defoaming device of this embodiment, bubbles can be easily erased and removed by an inexpensive configuration in the manufacturing process of the printed wiring board.

図2(a)は、本発明の消泡方法の他の一実施形態に用いられる、本発明の消泡装置の他の一実施形態を示す斜視図であり、図2(b)は、その実施形態の消泡装置を示す断面図である。この実施形態の消泡装置も先の実施形態と同様、例えばプリント配線板の製造過程において、例えばめっきレジストを剥離液で除去した後のプリント配線板の水洗工程で、表面に剥離液が付着した基板を浸漬してその剥離液を洗い流す際に用いられるものであり、その剥離液が混入するため泡が発生する、泡を含む液体としての洗浄水Lを留める液体槽としての回収水洗槽1と、その回収水洗槽1内に配置される消泡網2と、を具えている。 FIG. 2A is a perspective view showing another embodiment of the defoaming device of the present invention used in another embodiment of the defoaming method of the present invention, and FIG. 2B is a perspective view thereof. It is sectional drawing which shows the defoaming apparatus of embodiment. Similar to the previous embodiment, the defoaming device of this embodiment also has the release liquid adhering to the surface in, for example, in the manufacturing process of the printed wiring board, for example, in the water washing step of the printed wiring board after removing the plating resist with the release liquid. The recovery water washing tank 1 as a liquid tank for retaining the washing water L as a liquid containing bubbles, which is used when the substrate is immersed and the stripping liquid is washed away, and bubbles are generated due to the mixing of the stripping liquid. , A defoaming net 2 arranged in the recovery water washing tank 1 is provided.

回収水洗槽1は先の実施形態におけるものと大差がないので、以下に消泡網2について主に説明する。この実施形態における消泡網2は、例えばステンレス等の金属製の網本体2aと、その網本体2aの外枠に設けられる、例えばポリプロピレン等の軽い樹脂製の細長い袋状の複数のフロート2cとを有しており、泡に対するそのフロート2cの浮力により、網本体2aは、回収水洗槽1内の洗浄水Lの水面LSから上方に所定距離、例えば5mm離間して、通常位置する泡の上面BSよりも低い高さに水平に位置する。なお、フロート2cは、袋状の複数のものに代えて、網本体2aの外枠の外側あるいは下側に重なる枠状のものとしても良い。 Since the recovery water washing tank 1 is not much different from that in the previous embodiment, the defoaming net 2 will be mainly described below. The defoaming net 2 in this embodiment includes, for example, a metal net body 2a such as stainless steel and a plurality of elongated bag-shaped floats 2c made of light resin such as polypropylene provided on the outer frame of the net body 2a. Due to the buoyancy of the float 2c with respect to the foam, the net body 2a is separated from the water surface LS of the washing water L in the recovery water washing tank 1 by a predetermined distance, for example, 5 mm, and is normally located on the upper surface of the foam. It is located horizontally at a height lower than BS. The float 2c may have a frame shape that overlaps the outer side or the lower side of the outer frame of the net body 2a instead of the plurality of bag-shaped floats.

この実施形態の消泡装置を用いたこの実施形態の消泡方法は、洗浄水Lの水面LS上に浮上した泡を除去する方法であって、先の実施形態の消泡方法と同様、泡を含む洗浄水Lが回収水洗槽1内に溜められることと、回収水洗槽1内の洗浄水Lの水面LSから上方に離間した位置に消泡網2の網本体2aが水平に配置されることと、洗浄水Lの水面LS上に浮上した泡がその消泡網2の網本体2aに接触して壊れることと、を含んでいる。 The defoaming method of this embodiment using the defoaming device of this embodiment is a method of removing bubbles floating on the water surface LS of the washing water L, and is the same as the defoaming method of the previous embodiment. The wash water L containing the above is stored in the recovery water washing tank 1, and the net body 2a of the defoaming net 2 is horizontally arranged at a position separated upward from the water surface LS of the washing water L in the recovery water washing tank 1. This includes the fact that the bubbles floating on the water surface LS of the washing water L come into contact with the net body 2a of the defoaming net 2 and break.

従って、この実施形態の消泡装置を用いたこの実施形態の消泡方法によっても、プリント配線板の製造過程において、安価な構成により容易に泡を消去して除去することができる。 Therefore, even by the defoaming method of this embodiment using the defoaming device of this embodiment, bubbles can be easily erased and removed by an inexpensive configuration in the manufacturing process of the printed wiring board.

図3は、上記他の実施形態の消泡装置の消泡網2の一変形例を示す斜視図である。この変形例では、消泡網2の網本体2aは軽い樹脂製であり、泡に対する浮力を有している。樹脂製の網本体2aは、例えばステンレス等の金属製の枠状および筋交い状の補強材2dで補強されており、その補強材2dには、網本体2aが回収水洗槽1内の洗浄水Lの水面LSから上方に離間するとともに泡の表面BSから適度に沈んだ位置で泡内に浮かぶように、例えばステンレス等の金属製の複数の錘2eが吊り下げられている。 FIG. 3 is a perspective view showing a modified example of the defoaming net 2 of the defoaming device of the other embodiment. In this modification, the net body 2a of the defoaming net 2 is made of light resin and has buoyancy against bubbles. The resin net body 2a is reinforced with, for example, a metal frame-shaped and brace-shaped reinforcing material 2d such as stainless steel, and the net body 2a is provided with the washing water L in the recovery water washing tank 1 on the reinforcing material 2d. A plurality of metal weights 2e, such as stainless steel, are suspended so as to be separated from the water surface LS of the water surface and float in the foam at a position appropriately submerged from the surface BS of the foam.

この変形例の消泡網2を具える上記実施形態の消泡装置を用いたこの実施形態の消泡方法によっても、プリント配線板の製造過程において、安価な構成により容易に泡を消去して除去することができる。 Even by the defoaming method of this embodiment using the defoaming device of the above-described embodiment including the defoaming net 2 of this modified example, bubbles can be easily eliminated by an inexpensive configuration in the manufacturing process of the printed wiring board. Can be removed.

以上、図示例に基づき説明したが、この発明の消泡方法および消泡装置は上記の例に限定されるものでなく、特許請求の範囲の記載範囲内で適宜変更し得るものであり、例えばこの発明の消泡方法および消泡装置は、プリント配線板の他の製造過程や、プリント配線板の製造過程以外の用途に用いても良い。 Although described above based on the illustrated examples, the defoaming method and defoaming device of the present invention are not limited to the above examples, and can be appropriately changed within the scope of the claims, for example. The defoaming method and defoaming device of the present invention may be used for applications other than the manufacturing process of the printed wiring board and the manufacturing process of the printed wiring board.

また、消泡網2の構成も上記の例に限定されず、他の材料や構成を用いても良い。 Further, the configuration of the defoaming net 2 is not limited to the above example, and other materials and configurations may be used.

1 回収水洗槽
2 消泡網
2a 網本体
2b フック
2c フロート
2d 補強材
2e 錘
BS 泡の上面
L 洗浄水
LS 水面
1 Recovery water washing tank 2 Defoaming net 2a Net body 2b Hook 2c Float 2d Reinforcing material 2e Weight BS Foam top surface L Washing water LS Water surface

Claims (6)

液体の液面上に浮上した泡を除去する消泡方法において、
泡を含む液体が液体槽内に溜められることと、
液体槽内の液体の液面から上方に離間した位置に消泡網が水平に配置されることと、
液体の液面上に浮上した泡がその消泡網に接触して壊れることと、
を含んでいる。
In a defoaming method that removes bubbles floating on the surface of a liquid
The fact that the liquid containing bubbles is stored in the liquid tank
The defoaming net is placed horizontally at a position above the liquid level in the liquid tank, and
When the bubbles floating on the surface of the liquid come into contact with the defoaming net and break,
Includes.
請求項1記載の消泡方法であって、
前記消泡網は、前記液体槽内の所定高さの位置に着脱可能に配置されている。
The defoaming method according to claim 1.
The defoaming net is detachably arranged at a predetermined height in the liquid tank.
請求項1記載の消泡方法であって、
前記消泡網は、前記液体槽内の前記液体の液面上の泡にその泡に対する浮力で浮かんでいる。
The defoaming method according to claim 1.
The defoaming net floats on bubbles on the liquid surface of the liquid in the liquid tank by buoyancy against the bubbles.
液体の液面上に浮上した泡を除去する消泡装置において、
泡を含む液体を溜める液体槽と、
液体槽内の液体の液面から上方に離間した位置に水平に配置され、液体の液面上に浮上した泡に接触してその泡を壊す消泡網と、
を備えている。
In a defoaming device that removes bubbles floating on the surface of a liquid
A liquid tank that stores liquid containing bubbles,
A defoaming net that is placed horizontally at a position above the liquid level of the liquid in the liquid tank and comes into contact with bubbles floating on the liquid level to break the bubbles.
Is equipped with.
請求項4記載の消泡装置であって、
前記消泡網は、前記液体槽内の所定高さの位置に着脱可能に配置されている。
The defoaming device according to claim 4.
The defoaming net is detachably arranged at a predetermined height in the liquid tank.
請求項4記載の消泡装置であって、
前記消泡網は、前記液体槽内の前記液体の液面上の泡にその泡に対する浮力で浮かんでいる。
The defoaming device according to claim 4.
The defoaming net floats on bubbles on the liquid surface of the liquid in the liquid tank by buoyancy against the bubbles.
JP2019071774A 2019-04-04 2019-04-04 Defoaming method and defoaming device Pending JP2020168609A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019071774A JP2020168609A (en) 2019-04-04 2019-04-04 Defoaming method and defoaming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019071774A JP2020168609A (en) 2019-04-04 2019-04-04 Defoaming method and defoaming device

Publications (1)

Publication Number Publication Date
JP2020168609A true JP2020168609A (en) 2020-10-15

Family

ID=72745500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019071774A Pending JP2020168609A (en) 2019-04-04 2019-04-04 Defoaming method and defoaming device

Country Status (1)

Country Link
JP (1) JP2020168609A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117815747A (en) * 2024-03-06 2024-04-05 山西金馥康生物药业股份有限公司 Concentration equipment is used in yucca extract preparation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117815747A (en) * 2024-03-06 2024-04-05 山西金馥康生物药业股份有限公司 Concentration equipment is used in yucca extract preparation
CN117815747B (en) * 2024-03-06 2024-04-26 山西金馥康生物药业股份有限公司 Concentration equipment is used in yucca extract preparation

Similar Documents

Publication Publication Date Title
US11024520B2 (en) Substrate processing apparatus
JP2020168609A (en) Defoaming method and defoaming device
CN109790050B (en) Flotation separation device
JPH1130198A (en) Submerged pump device provided with flush valve
WO2011105072A1 (en) Substrate treating method and substrate treating apparatus
JP2011176085A (en) Substrate treating method, and substrate treating apparatus
JP4673430B2 (en) Foam processing equipment
KR100745213B1 (en) A remove device for bubble
JP2002263696A (en) Washing apparatus
JPH09108548A (en) Immersion type membrane separator
JP2008306104A (en) Device and method of wet treatment
JP2011256444A (en) Substrate treating method and substrate treating apparatus
JP3898257B2 (en) Wafer cleaning apparatus and wafer cleaning method
CN108282962A (en) Tin machine is moved back in a kind of etching of integrated circuit board processing
JP4476027B2 (en) Mounting mechanism for urinal chemical supply device
KR101124552B1 (en) Device for electroplating
JP5746896B2 (en) Foam defoaming apparatus and foam defoaming treatment method
JP2012120964A (en) Cleaning device and cleaning method
JPH0715114A (en) Surface processing vessel for formation of pattern of printed circuit board
JP2006301024A (en) Method and device for removing scum in developing machine
JP2004329026A (en) Method and apparatus for removing foreign matter or impurity from seaweed
KR101338053B1 (en) Apparatus for remove greasy of electrolysis painting
KR101386092B1 (en) Suction unit for bubble removal apparatus
JP3137488U (en) Equipment for chemical treatment of vertical shunt type thin plate materials
JPH086034Y2 (en) Secondary hot water washing tank after quenching glycol solution