JP2020078849A - Grinding method and grinding apparatus - Google Patents

Grinding method and grinding apparatus Download PDF

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JP2020078849A
JP2020078849A JP2018213701A JP2018213701A JP2020078849A JP 2020078849 A JP2020078849 A JP 2020078849A JP 2018213701 A JP2018213701 A JP 2018213701A JP 2018213701 A JP2018213701 A JP 2018213701A JP 2020078849 A JP2020078849 A JP 2020078849A
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grinding
pressure water
abrasive grains
supply nozzle
workpiece
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弘樹 宮本
Hiroki Miyamoto
弘樹 宮本
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Disco Abrasive Systems KK
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Disco Abrasive Systems KK
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Abstract

To make it possible for ground chips to be appropriately removed continuously from a grinding surface of a grinding stone while preventing deformation of the jetting port of a nozzle, when removing the ground chips by spraying a mixture to the grinding surface of the grinding stone.SOLUTION: A grinding method for grinding a work piece W by rotating a grinding wheel 74 in which grinding stones 740 are annularly disposed and by bringing part of a grinding surface 740a of the grinding stone 740 into contact with the work piece W; spraying high-pressure water from a high-pressure water supply nozzle 20 toward the grinding surface 740a overhanging from the work piece W; also mixing air containing abrasive grains with the high-pressure water between the high-pressure water supply nozzle 20 and the grinding surface 740a; and grinding the work piece W while spraying the mixture of the high-pressure water and air and abrasive grains to the grinding surface 740a.SELECTED DRAWING: Figure 2

Description

本発明は、半導体ウェーハ等の被加工物を研削する研削方法及び研削装置に関する。   The present invention relates to a grinding method and a grinding device for grinding a workpiece such as a semiconductor wafer.

研削装置では、保持テーブルが保持した半導体ウェーハ等の板状の被加工物に回転する研削砥石を接触させて研削している。被加工物が樹脂や軟らかい金属等の場合、研削砥石の研削面に樹脂や金属が研削された研削屑が付着する。そのため、研削砥石の研削力が落ちて研削が続行できないという問題があり、この問題を解決するために、特許文献1に記載のように、研削砥石の研削面に水と粉体(例えば砥粒)とを混合させた混合物を吹きかけて、研削面に付着した研削屑を除去している。   In the grinding device, a rotating grinding wheel is brought into contact with a plate-shaped workpiece such as a semiconductor wafer held by a holding table to perform grinding. When the object to be processed is resin or soft metal, grinding debris obtained by grinding the resin or metal adheres to the grinding surface of the grinding wheel. Therefore, there is a problem that the grinding force of the grinding wheel decreases and the grinding cannot be continued. In order to solve this problem, as described in Patent Document 1, water and powder (for example, abrasive grains) are applied to the grinding surface of the grinding wheel. ) Is sprayed on to remove grinding debris adhering to the grinding surface.

特開2016−179533号公報JP, 2016-179533, A

しかし、特許文献1に記載されている研削装置では、ノズルから混合物を噴出させているため、粉体がノズルの噴出口を削ってしまうという問題があり、噴出口の形状が変化したことで、混合物の吹きかけによって研削屑を研削面から適切に除去できなくなるという問題がある。   However, in the grinding device described in Patent Document 1, since the mixture is ejected from the nozzle, there is a problem that the powder scrapes off the ejection port of the nozzle, and the shape of the ejection port has changed. There is a problem that the grinding dust cannot be properly removed from the ground surface by spraying the mixture.

よって、混合物を研削砥石の研削面に吹きかけ研削屑を除去する場合には、ノズルの噴出口の変形を防ぎ、研削砥石の研削面から研削屑を継続的に適切に除去できるようにするという課題がある。   Therefore, when the mixture is sprayed on the grinding surface of the grinding wheel to remove the grinding debris, it is possible to prevent deformation of the ejection port of the nozzle so that the grinding debris can be continuously and appropriately removed from the grinding surface of the grinding wheel. There is.

上記課題を解決するための本発明は、研削砥石を環状に配設した研削ホイールを回転させ、被加工物に該研削砥石の研削面の一部を接触させ被加工物を研削する研削方法であって、被加工物からオーバーハングした該研削面に向かって高圧水供給ノズルから高圧水を吹きかけると共に、該高圧水供給ノズルと該研削面との間で該高圧水に砥粒を含んだエアを混合させ、該高圧水と該エアと該砥粒との混合物を該研削面に吹きかけながら被加工物を研削する研削方法である。   The present invention for solving the above problem is a grinding method in which a grinding wheel in which a grinding grindstone is annularly arranged is rotated, and a part of the grinding surface of the grinding grindstone is brought into contact with the workpiece to grind the workpiece. And spraying high-pressure water from the high-pressure water supply nozzle toward the overhanging grinding surface from the work piece, and air containing abrasive grains in the high-pressure water between the high-pressure water supply nozzle and the grinding surface. Is mixed, and a mixture of the high-pressure water, the air, and the abrasive grains is sprayed on the grinding surface to grind the workpiece.

前記砥粒の粒径は、前記研削砥石に含まれる砥粒の粒径以下であると好ましい。   The grain size of the abrasive grains is preferably equal to or smaller than the grain size of the abrasive grains contained in the grinding stone.

本発明に係る研削方法においては、前記混合物を間欠的に生成すると好ましい。   In the grinding method according to the present invention, it is preferable to intermittently generate the mixture.

また、上記課題を解決するための本発明は、被加工物を保持する保持手段と、研削砥石を環状に配設した研削ホイールを回転させ被加工物に該研削砥石の研削面の一部を接触させ被加工物を研削する研削手段と、を備える研削装置であって、被加工物からオーバーハングした該研削面に高圧水を吹きかける高圧水供給ノズルと、該高圧水供給ノズルと該研削面との間で該高圧水に該砥粒を混合するように供給する砥粒供給ノズルと、該砥粒供給ノズルに砥粒を供給する砥粒供給手段と、を備え、該砥粒供給手段は、該砥粒供給ノズルとエア源とを連通する第1の配管と、該第1の配管に配設されエアの流速で負圧を生成する負圧生成部と、該負圧生成部と砥粒供給源とを連通し該負圧生成部で生成された負圧で該砥粒を吸引し該第1の配管へと導く第2の配管と、を備えた研削装置である。   Further, the present invention for solving the above-mentioned problems, a holding means for holding a work piece, and a grinding wheel having a grinding wheel arranged annularly are rotated to form a part of a grinding surface of the grinding wheel on the work piece. A grinding device comprising: a grinding means for contacting and grinding a work piece; a high pressure water supply nozzle for blowing high pressure water to the grinding surface overhanging from the work piece; the high pressure water supply nozzle; and the grinding surface. An abrasive grain supply nozzle for supplying the abrasive grains to the high pressure water so as to mix the abrasive grains, and an abrasive grain supply means for supplying the abrasive grains to the abrasive grain supply nozzle. A first pipe that connects the abrasive grain supply nozzle and an air source, a negative pressure generation unit that is disposed in the first pipe and that generates a negative pressure at the flow velocity of the air, and the negative pressure generation unit and the grinding unit. And a second pipe which communicates with a grain supply source and sucks the abrasive grains by a negative pressure generated by the negative pressure generating unit and guides the abrasive grains to the first pipe.

前記第1の配管にバルブを備え、該バルブをON又はOFFさせて間欠的にエアの供給を行って間欠的に前記高圧水と該エアと前記砥粒との混合物を生成すると好ましい。   It is preferable that a valve be provided in the first pipe, and that the valve be turned on or off to intermittently supply air to intermittently generate a mixture of the high-pressure water, the air, and the abrasive grains.

本発明に係る研削方法は、被加工物からオーバーハングした研削面に向かって高圧水供給ノズルから高圧水を吹きかけると共に、高圧水供給ノズルと研削面との間で高圧水に砥粒を含んだエアを混合させ、高圧水とエアと砥粒との混合物を研削面に吹きかけながら被加工物を研削するため、高圧水を噴出させるノズルの噴出口が砥粒により変形(磨耗)してしまうことを防ぎ、研削砥石の研削面から研削屑を継続的に適切に除去できるようになる。   The grinding method according to the present invention sprays high-pressure water from the high-pressure water supply nozzle toward the overhanging grinding surface from the workpiece, and includes abrasive grains in the high-pressure water between the high-pressure water supply nozzle and the grinding surface. Since the work is ground while air is mixed and the mixture of high-pressure water, air, and abrasive grains is sprayed on the grinding surface, the ejection port of the nozzle that ejects high-pressure water may be deformed (worn) by the abrasive grains. It becomes possible to continuously and properly remove grinding debris from the grinding surface of the grinding wheel.

砥粒供給ノズルから供給する砥粒の粒径を、研削砥石に含まれる砥粒の粒径以下とすることで、研削砥石の気孔に溜まった研削屑を気孔から効率よく排除することが可能となる。   By setting the particle size of the abrasive particles supplied from the abrasive particle supply nozzle to be equal to or smaller than the particle size of the abrasive particles contained in the grinding wheel, it is possible to efficiently remove the grinding debris accumulated in the pores of the grinding wheel from the pores. Become.

本発明に係る研削方法において、研削砥石の研削面に吹きかける混合物を間欠的に生成することで、研削砥石の研削力が落ちている場合、即ち、研削面に研削屑が多く付着している場合に混合物を研削面に吹きかけ、研削砥石の研削力が落ちていない場合には高圧水を研削面に吹きかけることで、砥粒の無駄な使用を減らすことが可能となる。   In the grinding method according to the present invention, by intermittently generating a mixture sprayed on the grinding surface of the grinding wheel, when the grinding force of the grinding wheel is reduced, that is, when a large amount of grinding debris is attached to the grinding surface. It is possible to reduce wasteful use of the abrasive grains by spraying the mixture onto the grinding surface and spraying high-pressure water onto the grinding surface when the grinding force of the grinding wheel is not reduced.

本発明に係る研削装置は、被加工物からオーバーハングした研削砥石の研削面に高圧水を吹きかける高圧水供給ノズルと、高圧水供給ノズルと研削砥石の研削面との間で高圧水に砥粒を混合するように供給する砥粒供給ノズルと、砥粒供給ノズルに砥粒を供給する砥粒供給手段と、を備え、砥粒供給手段は、砥粒供給ノズルとエア源とを連通する第1の配管と、第1の配管に配設されエアの流速で負圧を生成する負圧生成部と、負圧生成部と砥粒供給源とを連通し負圧生成部で生成された負圧で砥粒を吸引し第1の配管へと導く第2の配管と、を備えているため、高圧水供給ノズルの噴出口の砥粒による変形(磨耗)を防ぐことができ、研削砥石の研削面から研削屑を継続的に適切に除去できるようになる。   The grinding apparatus according to the present invention is a high-pressure water supply nozzle that sprays high-pressure water onto the grinding surface of a grinding wheel overhanging from a workpiece, and a high-pressure water abrasive grain between the high-pressure water supply nozzle and the grinding surface of the grinding wheel. An abrasive grain supply nozzle that supplies so as to mix, and an abrasive grain supply means that supplies the abrasive grain to the abrasive grain supply nozzle, and the abrasive grain supply means connects the abrasive grain supply nozzle and the air source to each other. No. 1 pipe, a negative pressure generation unit which is arranged in the first pipe and generates a negative pressure at the flow velocity of air, and a negative pressure generation unit which connects the negative pressure generation unit and the abrasive grain supply source to each other. Since the second pipe is provided that sucks the abrasive grains by pressure and guides it to the first pipe, it is possible to prevent deformation (wear) of the jet port of the high-pressure water supply nozzle due to the abrasive grains, and It becomes possible to continuously and properly remove grinding debris from the grinding surface.

なお、本発明に係る研削装置及び研削方法において研削砥石の研削面に研削屑が付着しない場合には、研削面をエアと高圧水と砥粒との混合物でドレッシングすることが可能である。
例えば、被加工物が硬い場合、接着力の強い接着剤で砥粒を接着させた研削砥石を用いているが、接着力が強いため砥粒が研削面から脱落せず、そのため砥粒が摩滅して研削力が低下する。そこで、研削面から砥粒を脱落させるために、ノズルの噴出口の変形を防ぎつつ混合物を研削面に吹きかけ、接着剤を除去して摩滅した砥粒を脱落させ新たな砥粒を研削面に表出させるドレッシングを行うことで、被加工物に対する良好な研削加工を継続的に実施することが可能となる。
In addition, in the grinding apparatus and the grinding method according to the present invention, when the grinding dust does not adhere to the grinding surface of the grinding wheel, the grinding surface can be dressed with a mixture of air, high-pressure water and abrasive grains.
For example, when the work piece is hard, a grinding wheel is used in which the abrasive grains are bonded with an adhesive that has a strong adhesive force.However, because the adhesive force is so strong that the abrasive grains do not fall off the ground surface, the abrasive grains wear out. Then, the grinding force is reduced. Therefore, in order to remove the abrasive grains from the grinding surface, spray the mixture onto the grinding surface while preventing deformation of the nozzle outlet, remove the adhesive and remove the worn abrasive particles, and add new abrasive particles to the grinding surface. By performing the dressing to be exposed, it becomes possible to continuously perform good grinding on the workpiece.

本発明に係る研削装置においては、第1の配管にバルブを備え、バルブをON又はOFFさせて間欠的にエアの供給を行って間欠的に高圧水とエアと砥粒との混合物を生成することで、研削砥石の研削力が落ちている場合、即ち、研削面に研削屑が多く付着している場合に混合物を研削面に吹きかけ、研削砥石の研削力が落ちていない場合には高圧水を研削面に吹きかけることで、砥粒の無駄な使用を減らすことが可能となる。   In the grinding apparatus according to the present invention, a valve is provided in the first pipe, and the valve is turned on or off to intermittently supply air to intermittently generate a mixture of high-pressure water, air, and abrasive grains. Therefore, if the grinding force of the grinding wheel is low, that is, if the grinding surface has a lot of grinding debris, the mixture is sprayed onto the grinding surface, and if the grinding force of the grinding wheel is not decreased, high-pressure water is used. It is possible to reduce the wasteful use of the abrasive grains by spraying the abrasive particles onto the grinding surface.

研削装置の一例を示す斜視図である。It is a perspective view showing an example of a grinding device. 研削装置の要部の一例を示す断面図である。It is sectional drawing which shows an example of the principal part of a grinding device. 負圧生成部の別例を示す断面図である。It is sectional drawing which shows another example of a negative pressure production|generation part. 研削加工中の研削砥石の研削面に高圧水とエアと砥粒との混合物が吹きかけられている状態を説明する側面図である。It is a side view explaining the state where the mixture of high pressure water, air, and abrasive grains is sprayed on the ground surface of the grinding wheel during the grinding process.

図1に示す本発明に係る研削装置1は、保持手段30上に保持された被加工物Wを研削手段7によって研削する装置である。研削装置1のベース10上の前方(−Y方向側)は、保持手段30に対して被加工物Wの着脱が行われる領域であり、ベース10上の後方(+Y方向側)は、研削手段7によって保持手段30上に保持された被加工物Wの研削が行われる領域である。   The grinding device 1 according to the present invention shown in FIG. 1 is a device for grinding the workpiece W held on the holding means 30 by the grinding means 7. The front side (-Y direction side) of the base 10 of the grinding apparatus 1 is a region where the workpiece W is attached to and detached from the holding means 30, and the rear side (+Y direction side) of the base 10 is the grinding means. This is a region in which the workpiece W held on the holding means 30 by 7 is ground.

被加工物Wは、例えば、外形が円形板状で基板上に積層された複数のデバイスチップが樹脂で封止されて構成されるパッケージ基板である。即ち、図1において上側を向いている被加工物Wの被研削面Wbは樹脂封止されている。なお、被加工物Wは樹脂基板、又はシリコン、ガリウムヒ素、サファイア、窒化ガリウム若しくはシリコンカーバイド等からなるウェーハであってもよい。   The workpiece W is, for example, a package substrate configured by sealing a plurality of device chips each having a circular plate-shaped outer shape and stacked on the substrate with a resin. That is, the ground surface Wb of the workpiece W facing upward in FIG. 1 is resin-sealed. The workpiece W may be a resin substrate or a wafer made of silicon, gallium arsenide, sapphire, gallium nitride, silicon carbide, or the like.

被加工物Wを保持する保持手段30は、例えば、その外形が円形状であり、ポーラス部材等からなり被加工物Wを吸着する吸着部300と、吸着部300を支持する枠体301とを備える。吸着部300は図示しない吸引源に連通し、吸着部300の露出面である保持面300a上で被加工物Wを吸引保持する。保持面300aは、保持手段30の回転中心を頂点とする極めて緩やか傾斜を備える円錐面に形成されている。   The holding means 30 that holds the workpiece W has, for example, a circular outer shape, and includes a suction portion 300 configured to suction the workpiece W, which is made of a porous member or the like, and a frame body 301 that supports the suction portion 300. Prepare The suction unit 300 communicates with a suction source (not shown), and suction-holds the workpiece W on the holding surface 300a which is the exposed surface of the suction unit 300. The holding surface 300a is formed as a conical surface having an extremely gentle inclination with the rotation center of the holding means 30 as the apex.

保持手段30はZ軸方向の軸心周りに回転可能であると共に、図示しない移動手段によってY軸方向に往復移動可能となっている。また、保持手段30の下方には、傾き調整機構31が配設されている。傾き調整機構31は、保持手段30の保持面300aの水平面(X軸Y軸平面)に対する傾きを調節することができる。   The holding means 30 is rotatable about an axis in the Z-axis direction, and can be reciprocated in the Y-axis direction by a moving means (not shown). An inclination adjusting mechanism 31 is arranged below the holding means 30. The tilt adjusting mechanism 31 can adjust the tilt of the holding surface 300a of the holding means 30 with respect to the horizontal plane (X-axis Y-axis plane).

研削領域には、コラム11が立設されており、コラム11の前面には研削手段7を保持手段30に対して離間又は接近するZ軸方向(鉛直方向)に研削送りする研削送り手段5が配設されている。研削送り手段5は、鉛直方向の軸心を有するボールネジ50と、ボールネジ50と平行に配設された一対のガイドレール51と、ボールネジ50の上端に連結しボールネジ50を回動させるモータ52と、内部のナットがボールネジ50に螺合し側部がガイドレール51に摺接する昇降板53とを備えており、モータ52がボールネジ50を回動させると、これに伴い昇降板53がガイドレール51にガイドされてZ軸方向に往復移動し、昇降板53に固定された研削手段7がZ軸方向に研削送りされる。   A column 11 is provided upright in the grinding area, and a grinding feed means 5 for feeding the grinding means 7 in the Z-axis direction (vertical direction) which is spaced from or close to the holding means 30 is provided on the front surface of the column 11. It is arranged. The grinding feed means 5 includes a ball screw 50 having a vertical axis, a pair of guide rails 51 arranged in parallel with the ball screw 50, a motor 52 connected to the upper end of the ball screw 50 to rotate the ball screw 50, It is provided with an elevating plate 53 whose internal nut is screwed to the ball screw 50 and whose side portion is in sliding contact with the guide rail 51. When the motor 52 rotates the ball screw 50, the elevating plate 53 is attached to the guide rail 51. The reciprocating movement in the Z-axis direction is guided, and the grinding means 7 fixed to the lift plate 53 is ground and fed in the Z-axis direction.

保持手段30に保持された被加工物Wを研削する研削手段7は、軸方向がZ軸方向であるスピンドル70と、スピンドル70を回転可能に支持するハウジング71と、スピンドル70を回転駆動するモータ72と、スピンドル70の下端に接続された円環状のマウント73と、マウント73の下面に着脱可能に装着された研削ホイール74と、ハウジング71を支持し研削送り手段5の昇降板53にその側面が固定されたホルダ75とを備える。   The grinding means 7 for grinding the workpiece W held by the holding means 30 includes a spindle 70 whose axial direction is the Z-axis direction, a housing 71 which rotatably supports the spindle 70, and a motor which rotationally drives the spindle 70. 72, an annular mount 73 connected to the lower end of the spindle 70, a grinding wheel 74 detachably mounted on the lower surface of the mount 73, and a side surface of the lifting plate 53 of the grinding feed means 5 that supports the housing 71. Is fixed to the holder 75.

研削ホイール74は、ホイール基台741と、ホイール基台741の底面に環状に配置された略直方体形状の複数の研削砥石740とを備える。研削砥石740は、適宜のバインダー(接着剤)でダイヤモンド砥粒(例えば、番手♯2000〜♯4000)等が固着されて成形されており、主にその下面が研削面740aとなる。
スピンドル70の軸心線上には研削ホイール74の回転中心が位置しており、スピンドル70が回転することで、研削ホイール74は研削ホイール74の中心を軸にしてZ軸方向の軸心周りに回転する。
The grinding wheel 74 includes a wheel base 741 and a plurality of substantially rectangular parallelepiped grinding wheels 740 that are annularly arranged on the bottom surface of the wheel base 741. The grinding stone 740 is formed by fixing diamond abrasive grains (for example, counts #2000 to #4000) and the like with an appropriate binder (adhesive), and the lower surface thereof mainly serves as the grinding surface 740a.
The rotation center of the grinding wheel 74 is located on the axis of the spindle 70, and the rotation of the spindle 70 causes the grinding wheel 74 to rotate about the center of the grinding wheel 74 about the axis in the Z-axis direction. To do.

スピンドル70の内部には、図示しない研削水供給源に連通し研削水の通り道となる流路70aが、スピンドル70の軸方向(Z軸方向)に貫通して設けられており、流路70aは、さらにマウント73を通り、ホイール基台741の底面において研削砥石740に向かって研削水を噴出できるように開口している。   Inside the spindle 70, a flow path 70a, which communicates with a grinding water supply source (not shown) and serves as a passage for the grinding water, is provided so as to penetrate in the axial direction (Z-axis direction) of the spindle 70. Further, through the mount 73, an opening is formed on the bottom surface of the wheel base 741 so that the grinding water can be ejected toward the grinding wheel 740.

図1、2に示すように、被加工物Wの研削時において、研削手段7の研削砥石740の回転中心が被加工物Wの回転中心に対して所定距離だけ水平方向にずれ、研削砥石740の回転軌道が被加工物Wの回転中心を通るように被加工物Wが位置付けられる。即ち、研削砥石740の一部は、被加工物Wからオーバーハングした状態になる。   As shown in FIGS. 1 and 2, when the workpiece W is ground, the center of rotation of the grinding wheel 740 of the grinding means 7 is horizontally displaced from the center of rotation of the object W by a predetermined distance, and the grinding wheel 740 is rotated. The workpiece W is positioned so that the rotation trajectory of the object passes through the center of rotation of the workpiece W. That is, a part of the grinding wheel 740 is in a state of overhanging from the workpiece W.

研削装置1は、研削時に保持手段30に保持された被加工物Wからオーバーハングした研削砥石740の研削面740aに高圧水を吹きかける高圧水供給ノズル20と、高圧水供給ノズル20と研削面740aとの間で高圧水に砥粒を混合するように供給する砥粒供給ノズル21と、砥粒供給ノズル21に砥粒を供給する砥粒供給手段22と、を備えている。   The grinding device 1 includes a high-pressure water supply nozzle 20 for spraying high-pressure water onto the grinding surface 740a of the overhanging grinding wheel 740 from the workpiece W held by the holding means 30 during grinding, the high-pressure water supply nozzle 20, and the grinding surface 740a. An abrasive grain supply nozzle 21 for supplying the abrasive grains to the high pressure water so as to mix the abrasive grains with each other, and an abrasive grain supply means 22 for supplying the abrasive grains to the abrasive grain supply nozzle 21.

高圧水供給ノズル20は、例えば、直進ノズルであり、研削位置まで降下した状態の研削ホイール74に隣接する位置(例えば、ベース10上)に配設されている。高圧水供給ノズル20の噴出口20aは、例えば、保持手段30に保持された被加工物Wからオーバーハングした研削砥石740の研削面740aに向かって少しだけ斜め下方から対向している。なお、高圧水供給ノズル20の研削砥石740の研削面740aに対する角度は変更可能となっている。
高圧水供給ノズル20は、図1、2に示す純水等を溜めた水源29に水流路290を介して連通しており、ポンプ291により水源29から吸い上げられた水が送給される。
The high-pressure water supply nozzle 20 is, for example, a straight-ahead nozzle, and is arranged at a position (for example, on the base 10) adjacent to the grinding wheel 74 in a state where the nozzle descends to the grinding position. The ejection port 20a of the high-pressure water supply nozzle 20 faces, for example, slightly obliquely downward from the workpiece W held by the holding means 30 toward the grinding surface 740a of the grinding wheel 740 that is overhung. The angle of the high-pressure water supply nozzle 20 with respect to the grinding surface 740a of the grinding wheel 740 can be changed.
The high-pressure water supply nozzle 20 communicates with the water source 29 storing pure water or the like shown in FIGS. 1 and 2 through the water flow path 290, and the water sucked up from the water source 29 is fed by the pump 291.

図2に示すように、砥粒供給ノズル21は、例えば、略逆L字状の外形を備えており、その噴出口21aは高圧水供給ノズル20の高圧水の噴出軌道に対して径方向外側から対向している。砥粒供給ノズル21の下端側は砥粒供給手段22の負圧生成部223に連通している。   As shown in FIG. 2, the abrasive grain supply nozzle 21 has, for example, a substantially inverted L-shaped outer shape, and its ejection port 21 a is radially outward with respect to the ejection path of the high pressure water supply nozzle 20. Facing from. The lower end side of the abrasive grain supply nozzle 21 communicates with the negative pressure generation unit 223 of the abrasive grain supply means 22.

図1、2に示す砥粒供給手段22は、砥粒供給ノズル21とコンプレッサー等からなるエア源28とを連通する第1の配管221と、第1の配管221に配設されエアの流速で負圧を生成する負圧生成部223と、負圧生成部223と砥粒供給源26とを連通し負圧生成部223でエジェクター効果により生成された負圧で砥粒を吸引し第1の配管221へと導く第2の配管222と、を備えている。   The abrasive grain supply means 22 shown in FIGS. 1 and 2 includes a first pipe 221 that connects the abrasive grain supply nozzle 21 and an air source 28 composed of a compressor, and the like. A negative pressure generation unit 223 that generates a negative pressure is connected to the negative pressure generation unit 223 and the abrasive grain supply source 26, and the negative pressure generation unit 223 sucks the abrasive grains with the negative pressure generated by the ejector effect to obtain the first pressure. The second pipe 222 leading to the pipe 221 is provided.

図2に示すように、第2の配管222は、負圧生成部223に対して略垂直に連通されている。負圧生成部223は、その内部に径が絞られた流路を備えており、負圧生成部223に至ったエアがこの径の絞られた流路を通過して砥粒供給ノズル21に流れていくことで、負圧生成部223により、第2の配管222を介して砥粒供給源26から砥粒を吸引する負圧が生成される。   As shown in FIG. 2, the second pipe 222 communicates with the negative pressure generation unit 223 substantially vertically. The negative pressure generating unit 223 has a flow passage whose diameter is narrowed inside, and the air reaching the negative pressure generating unit 223 passes through the flow passage whose diameter is reduced to the abrasive grain supply nozzle 21. By flowing, the negative pressure generating unit 223 generates a negative pressure for sucking the abrasive grains from the abrasive grain supply source 26 via the second pipe 222.

負圧生成部223は、図2に示す形状の例に限定されるものではない。例えば、図3に示す負圧生成部225を砥粒供給手段22が備えるものとしてもよい。負圧生成部225は、内部に砥粒供給ノズル21側に向かって縮径するテーパノズル部225aを備えており、テーパノズル部225aの外周側に形成される略環状の空間225bに、第2の配管222が略垂直に連通されている。負圧生成部225内部のテーパノズル部225aよりも砥粒供給ノズル21側の空間はディフューザー部225cとなっている。
負圧生成部225は、テーパノズル部225aからディフューザー部225cに向かって流速が速められたエアが高圧噴射されることで、空間225bに真空雰囲気を生成し第2の配管222に連通する砥粒供給源26から砥粒を吸引する。エアは吸引された砥粒を同伴混合しながらディフューザー部225cを砥粒供給ノズル21に向かって流れていく。
The negative pressure generation unit 223 is not limited to the example of the shape shown in FIG. For example, the negative pressure generation unit 225 shown in FIG. 3 may be included in the abrasive grain supply means 22. The negative pressure generating unit 225 includes a taper nozzle portion 225a whose diameter is reduced toward the abrasive grain supply nozzle 21 side, and the second pipe is provided in a substantially annular space 225b formed on the outer peripheral side of the taper nozzle portion 225a. 222 are communicated in a substantially vertical manner. A space inside the negative pressure generating section 225 on the abrasive grain supply nozzle 21 side of the taper nozzle section 225a is a diffuser section 225c.
The negative pressure generating unit 225 generates a vacuum atmosphere in the space 225b by injecting high-pressure air from the taper nozzle unit 225a toward the diffuser unit 225c, and supplies the abrasive grains communicating with the second pipe 222. Aspirate abrasive particles from source 26. The air flows toward the abrasive grain supply nozzle 21 through the diffuser portion 225c while entraining and mixing the sucked abrasive grains.

図1、2に示す砥粒供給源26には、粉体状の砥粒、例えば、番手♯1000〜♯4000のGC砥粒(グリーンカーボン砥粒)、CBN砥粒、又はアルミナ砥粒等が溜められている。なお、砥粒供給源26から砥粒供給ノズル21に供給される砥粒の粒径は、研削砥石740に含まれる砥粒の粒径以下であると好ましい。即ち、砥粒供給源26から砥粒供給ノズル21に供給される砥粒の番手は、研削砥石740に含まれる砥粒の番手以上であると好ましい。   In the abrasive grain supply source 26 shown in FIGS. 1 and 2, powdery abrasive grains, for example, GC abrasive grains (green carbon abrasive grains) of count #1000 to #4000, CBN abrasive grains, or alumina abrasive grains are used. It is stored. The particle size of the abrasive particles supplied from the abrasive particle supply source 26 to the abrasive particle supply nozzle 21 is preferably equal to or smaller than the particle size of the abrasive particles contained in the grinding wheel 740. That is, it is preferable that the number of abrasive grains supplied from the abrasive grain supply source 26 to the abrasive grain supply nozzle 21 is equal to or greater than the number of abrasive grains contained in the grinding wheel 740.

図1に示すように、研削装置1は、例えば、装置全体の制御を行う制御手段9を備えている。制御手段9は、制御プログラムに従って演算処理するCPU及びメモリ等の記憶部90を備えており、研削送り手段5及び研削手段7等に電気的に接続されている。そして、制御手段9の制御の下で、研削送り手段5による研削手段7のZ軸方向への研削送り動作、及び研削手段7における研削ホイール74の回転動作等が制御される。   As shown in FIG. 1, the grinding device 1 includes, for example, a control unit 9 that controls the entire device. The control means 9 includes a storage unit 90 such as a CPU and a memory that performs arithmetic processing according to a control program, and is electrically connected to the grinding feed means 5, the grinding means 7, and the like. Then, under the control of the control means 9, the grinding feed operation of the grinding means 7 in the Z-axis direction by the grinding feed means 5, the rotation operation of the grinding wheel 74 in the grinding means 7, etc. are controlled.

例えば、研削手段7のモータ72には、モータ72の負荷電流値を検出する電流計79が電気的に接続されており、電流計79が読み取った負荷電流値についての情報は制御手段9に送信される。   For example, an ammeter 79 for detecting a load current value of the motor 72 is electrically connected to the motor 72 of the grinding means 7, and information about the load current value read by the ammeter 79 is transmitted to the control means 9. To be done.

本実施形態の研削装置1は、例えば、第1の配管221にバルブ25を備えている。バルブ25は、ソレノイド(電磁石)バルブであり、第1の配管221がエア源28に連通する状態(ON状態)と連通していない状態(OFF状態)とを切り換える機能を有している。そして、バルブ25には制御手段9が電気的に接続されており、制御手段9によってバルブ25に通電がなされ開閉(ON/OFF)を切り換える制御が行われる。   The grinding device 1 of the present embodiment includes, for example, the valve 25 in the first pipe 221. The valve 25 is a solenoid (electromagnet) valve, and has a function of switching between a state (ON state) in which the first pipe 221 communicates with the air source 28 and a state (OFF state) in which the first pipe 221 does not communicate. The control means 9 is electrically connected to the valve 25, and the control means 9 energizes the valve 25 to perform control for switching between open and closed (ON/OFF).

以下に、上述した研削装置1を用いて本発明に係る研削方法を実施して図1に示す被加工物Wを研削する場合の、研削装置1の動作について説明する。   The operation of the grinding device 1 when the grinding method according to the present invention is carried out using the above-described grinding device 1 to grind the workpiece W shown in FIG. 1 will be described below.

まず、研削装置1の着脱領域において、被加工物Wが、被研削面Wbを上側に向けて、保持面300aの中心と被加工物Wの中心とが略合致するように保持手段30の保持面300a上に載置される。そして、図示しない吸引源が作動して生み出された吸引力が保持面300aに伝達されることで、保持手段30により被加工物Wが保持される。
また、緩やかな円錐面である保持面300aが研削砥石740の研削面740aに対して平行になるように、傾き調整機構31によって保持手段30の傾きが調整されることで、円錐面である保持面300aにならって吸引保持されている被加工物Wの被研削面Wbが、研削面740aに対して平行になる。
First, in the attachment/detachment area of the grinding apparatus 1, the workpiece W is held by the holding means 30 so that the center of the holding surface 300a and the center of the workpiece W are substantially aligned with the surface Wb to be ground facing upward. It is placed on the surface 300a. Then, the suction force generated by the operation of the suction source (not shown) is transmitted to the holding surface 300a, so that the workpiece W is held by the holding means 30.
Further, the inclination of the holding means 30 is adjusted by the inclination adjusting mechanism 31 so that the holding surface 300a, which is a gentle conical surface, is parallel to the grinding surface 740a of the grinding wheel 740. The ground surface Wb of the workpiece W that is suction-held following the surface 300a becomes parallel to the grinding surface 740a.

被加工物Wを保持した保持手段30が、研削手段7の下まで+Y方向へ送られて、研削ホイール74と保持手段30に保持された被加工物Wとの位置合わせがなされる。位置合わせは、例えば、研削ホイール74の回転中心が被加工物Wの回転中心に対して所定の距離だけ水平方向にずれ、研削砥石740の回転軌跡が被加工物Wの回転中心を通るように行われる。そして、研削砥石740は、被加工物Wからオーバーハングした状態になる。   The holding means 30 holding the workpiece W is sent to the bottom of the grinding means 7 in the +Y direction, and the grinding wheel 74 and the workpiece W held by the holding means 30 are aligned with each other. The alignment is performed, for example, so that the rotation center of the grinding wheel 74 is horizontally displaced from the rotation center of the workpiece W by a predetermined distance, and the rotation locus of the grinding wheel 740 passes through the rotation center of the workpiece W. Done. Then, the grinding wheel 740 is in a state of overhanging from the workpiece W.

また、図2に示すように、モータ72がスピンドル70を+Z方向から見て例えば反時計回り方向に所定の回転速度(例えば、1000rpm〜2000rpm)で回転駆動し、これに伴って研削ホイール74が回転する。また、研削手段7が研削送り手段5により−Z方向へと所定の速度で研削送りされ、回転する研削砥石740が被加工物Wの被研削面Wbに当接することで研削が行われる。研削中は、保持手段30が+Z方向から見て反時計回り方向に例えば200rpm〜300rpmで回転するのに伴って、保持面300a上に保持された被加工物Wも回転するので、研削砥石740が被研削面Wb全面の研削加工を行う。また、研削水が研削砥石740と被研削面Wbとの接触部位に対して図1に示す流路70aを介して供給され、接触部位が冷却・洗浄される。   Further, as shown in FIG. 2, the motor 72 rotationally drives the spindle 70 in a counterclockwise direction at a predetermined rotation speed (for example, 1000 rpm to 2000 rpm) when viewed from the +Z direction, and the grinding wheel 74 accordingly. Rotate. Further, the grinding means 7 is ground and fed in the -Z direction by the grinding feed means 5 at a predetermined speed, and the rotating grinding wheel 740 abuts the surface Wb to be ground of the workpiece W to perform grinding. During the grinding, since the workpiece W held on the holding surface 300a also rotates as the holding means 30 rotates counterclockwise when viewed from the +Z direction, for example, at 200 rpm to 300 rpm, the grinding wheel 740. Grinds the entire surface Wb to be ground. Further, the grinding water is supplied to the contact portion between the grinding wheel 740 and the surface Wb to be ground through the flow path 70a shown in FIG. 1, and the contact portion is cooled and washed.

図2、4に示すように、研削加工中において、高圧水供給ノズル20の噴出口20aは、保持手段3が保持する被加工物Wから+Y方向側にオーバーハングした(はみ出した)研削加工中の研削砥石740の研削面に対向している。例えば、図4に示すように、高圧水供給ノズル20は、研削砥石740の回転方向に対して逆方向に少しだけ傾けられているとよい。   As shown in FIGS. 2 and 4, during the grinding process, the ejection port 20a of the high-pressure water supply nozzle 20 overhangs (protrudes) from the workpiece W held by the holding means 3 in the +Y direction. It faces the grinding surface of the grinding wheel 740. For example, as shown in FIG. 4, the high-pressure water supply nozzle 20 may be slightly tilted in the opposite direction to the rotation direction of the grinding wheel 740.

そして、水源29の水がポンプ291により水流路290に例えば圧力8MPa〜15MPaで送出され、該高圧水は高圧水供給ノズル20の噴出口20aから上方に噴出する。そして、被加工物Wからオーバーハングした研削砥石740の研削面740aに向かって高圧水供給ノズル20から高圧水が吹きかけられる。   Then, the water of the water source 29 is delivered to the water flow path 290 by the pump 291 at a pressure of 8 MPa to 15 MPa, for example, and the high pressure water is jetted upward from the jet port 20 a of the high pressure water supply nozzle 20. Then, high-pressure water is sprayed from the high-pressure water supply nozzle 20 toward the grinding surface 740a of the grinding wheel 740 that is overhung from the workpiece W.

また、第1の配管221のバルブ25が開かれた状態で、エア源28がエアを第1の配管221に例えば圧力0.4MPa〜0.5MPaで供給する。第1の配管221を流れるエアの流速で負圧生成部223において負圧が生成されて、砥粒供給源26から砥粒が吸引される。そして、砥粒供給ノズル21を砥粒とエアとの混合流体が噴出口21aに向かって流れていき、噴出口21aから該混合流体が高圧水供給ノズル20から噴出する高圧水の軌道上に向かって噴出する。   Further, the air source 28 supplies air to the first pipe 221 at a pressure of 0.4 MPa to 0.5 MPa, for example, in a state where the valve 25 of the first pipe 221 is opened. Negative pressure is generated in the negative pressure generating unit 223 at the flow velocity of the air flowing through the first pipe 221, and the abrasive grains are sucked from the abrasive grain supply source 26. Then, the mixed fluid of abrasive grains and air flows through the abrasive grain supply nozzle 21 toward the ejection port 21 a, and the mixed fluid flows from the ejection port 21 a onto the orbit of the high pressure water ejected from the high pressure water supply nozzle 20. Erupts.

その結果、図2、4に示すように、高圧水の流れにエアと砥粒との混合流体が乗って、高圧水供給ノズル20と研削砥石740の研削面740aとの間で高圧水に砥粒を含んだエアが混合されて、高圧水とエアと砥粒との混合物が研削面740aに吹きかけられる。   As a result, as shown in FIGS. 2 and 4, the mixed fluid of air and abrasive particles rides on the flow of the high-pressure water, and the high-pressure water is abraded between the high-pressure water supply nozzle 20 and the grinding surface 740a of the grinding wheel 740. The air containing particles is mixed, and a mixture of high-pressure water, air, and abrasive particles is sprayed on the grinding surface 740a.

上記のように本発明に係る研削方法は、被加工物Wからオーバーハングした研削砥石740の研削面740aに向かって高圧水供給ノズル20から高圧水を吹きかけると共に、高圧水供給ノズル20と研削面740aとの間で高圧水に砥粒を含んだエアを混合させ、高圧水とエアと砥粒との混合物を研削面740aに吹きかけながら被加工物Wを研削するため、高圧水供給ノズル20の噴出口20aが砥粒により変形(磨耗)してしまうことを防ぐことができる。また、混合物によって、研削砥石740の研削面740aにこびりついた研削屑(例えば、樹脂)を継続的に適切に除去できるようになり、研削面740aの接着剤が除去され研削砥石740の砥粒が研削面740aから突出する突出量が増やされたり、研削面740aから突出し過ぎている砥粒を脱落させたりするなどして、適切な自生発刃を促すことが可能となる。   As described above, the grinding method according to the present invention sprays high-pressure water from the high-pressure water supply nozzle 20 toward the grinding surface 740a of the grinding wheel 740 that is overhanging from the workpiece W, and simultaneously presses the high-pressure water supply nozzle 20 and the grinding surface. Of the high pressure water supply nozzle 20 to grind the workpiece W while mixing high pressure water with air containing abrasive grains and spraying a mixture of high pressure water, air and abrasive grains on the grinding surface 740a. It is possible to prevent the ejection port 20a from being deformed (worn) by the abrasive grains. Further, the mixture makes it possible to continuously and appropriately remove the grinding dust (for example, resin) stuck to the grinding surface 740a of the grinding wheel 740, remove the adhesive on the grinding surface 740a, and remove the abrasive grains of the grinding wheel 740. The amount of protrusion protruding from the grinding surface 740a is increased, or the abrasive grains protruding too much from the grinding surface 740a are dropped, so that proper self-generated blade can be promoted.

砥粒供給源26から砥粒供給ノズル21に供給される砥粒の粒径を、研削砥石740に含まれる砥粒の粒径以下とする、即ち、砥粒供給源26から砥粒供給ノズル21に供給される砥粒の番手を、研削砥石740に含まれる砥粒の番手以上とすることで、研削砥石740の気孔に溜まった研削屑を気孔から効率よく排除することが可能となる。   The grain size of the abrasive grains supplied from the grain supply source 26 to the grain supply nozzle 21 is set to be equal to or smaller than the grain size of the grain contained in the grinding wheel 740, that is, the grain supply nozzle 26 from the grain supply source 26. By setting the grain count of the abrasive grains supplied to the above to be equal to or larger than the grain count of the abrasive grains contained in the grinding stone 740, it becomes possible to efficiently remove the grinding dust accumulated in the pores of the grinding stone 740 from the pores.

例えば、高圧水とエアと砥粒との混合物を継続的に生成し、被加工物Wの研削加工中に高圧水とエアと砥粒との混合物を研削砥石740の研削面740aに常に吹きかけながら、被加工物Wを所望の仕上げ厚みになるまで研削した後、研削手段7を+Z方向へと移動させて被加工物Wから離間させる。   For example, while continuously generating a mixture of high-pressure water, air, and abrasive grains, and constantly spraying the mixture of high-pressure water, air, and abrasive grains on the grinding surface 740a of the grinding wheel 740 during grinding of the workpiece W. After the work W is ground to a desired finished thickness, the grinding means 7 is moved in the +Z direction and separated from the work W.

なお、本発明に係る研削装置1及び研削方法において研削砥石740の研削面740aに研削屑が付着しない場合には、研削面740aをエアと高圧水と砥粒との混合物でドレッシングすることが可能である。
例えば、被加工物Wが硬い場合、接着力の強い接着剤で砥粒を接着させた研削砥石740を用いるが、接着力が強いため砥粒が研削面740aから脱落せず、そのため砥粒が摩滅して研削力が低下する。そこで、研削面740aから砥粒を脱落させるために、高圧水供給ノズル20の噴出口20aの変形を防ぎつつ混合物を研削面740aに吹きかけ、接着剤を除去して摩滅した砥粒を脱落させ新たな砥粒を研削面740aに表出させるドレッシングを行うことで、被加工物Wに対する良好な研削加工を継続的に実施することが可能となる。
In addition, in the grinding apparatus 1 and the grinding method according to the present invention, when grinding dust does not adhere to the grinding surface 740a of the grinding wheel 740, the grinding surface 740a can be dressed with a mixture of air, high-pressure water, and abrasive grains. Is.
For example, when the workpiece W is hard, a grinding wheel 740 in which abrasive grains are bonded with an adhesive having a strong adhesive force is used. However, since the adhesive force is strong, the abrasive grains do not fall off the ground surface 740a, and therefore Abrasion reduces the grinding power. Therefore, in order to remove the abrasive particles from the grinding surface 740a, the mixture is sprayed onto the grinding surface 740a while preventing the deformation of the ejection port 20a of the high-pressure water supply nozzle 20, and the adhesive is removed to remove the worn abrasive particles. By performing dressing in which different abrasive grains are exposed on the grinding surface 740a, it becomes possible to continuously perform favorable grinding on the workpiece W.

本発明に係る被加工物の研削方法は本実施形態に限定されず、その技術的思想の範囲内において種々異なる形態にて実施されてよいことは言うまでもない。また、添付図面に図示されている研削装置1の各構成についても、これに限定されず、本発明の効果を発揮できる範囲内で適宜変更可能である。   It goes without saying that the method for grinding a workpiece according to the present invention is not limited to this embodiment and may be carried out in various different forms within the scope of the technical idea thereof. Further, each configuration of the grinding device 1 illustrated in the accompanying drawings is not limited to this, and can be appropriately changed within a range in which the effects of the present invention can be exhibited.

例えば、被加工物Wの研削加工中において、高圧水とエアと砥粒との混合物を間欠的に生成し、高圧水とエアと砥粒との混合物を研削砥石740の研削面740aに間欠的に吹きかけながら、被加工物Wを所望の仕上げ厚みになるまで研削してもよい。   For example, during grinding of the workpiece W, a mixture of high-pressure water, air, and abrasive grains is intermittently generated, and the mixture of high-pressure water, air, and abrasive grains is intermittently formed on the grinding surface 740a of the grinding wheel 740. The workpiece W may be ground to a desired finished thickness while being sprayed onto the workpiece.

具体的には、回転する研削砥石740により被加工物Wの研削が開始されると、被加工物Wからオーバーハングした研削砥石740の研削面740aに向かって高圧水供給ノズル20から高圧水が吹きかけられると共に、電流計79が、スピンドル70を回転駆動するモータ72に流れる電流値を検出し始める。そして、電流計79が、検出したモータ72の負荷電流値についての情報を、制御手段9の電流値監視部91に順次送り、電流値監視部91がスピンドル70を回転駆動するモータ72の負荷電流値の監視を開始する。   Specifically, when grinding of the workpiece W is started by the rotating grinding wheel 740, high-pressure water is supplied from the high-pressure water supply nozzle 20 toward the grinding surface 740 a of the overhanging grinding wheel 740 from the workpiece W. As it is sprayed, the ammeter 79 starts to detect the current value flowing in the motor 72 that rotationally drives the spindle 70. Then, the ammeter 79 sequentially sends the information about the detected load current value of the motor 72 to the current value monitoring unit 91 of the control means 9, and the current value monitoring unit 91 rotates the spindle 70 to rotate the load current of the motor 72. Start monitoring values.

例えば、制御手段9の記憶部90には、予め、モータ72の負荷電流値についての所定の閾値が記憶されている。この閾値は、実験的、経験的、又は理論的に選択された値であり、研削砥石740の研削面740aに許容量を越える研削屑が付着したときに起きる研削砥石740の研削力の低下、即ち、モータ72の負荷電流値の変化を制御手段9の電流値監視部91が判断するために記憶される電流値である。制御手段9の電流値監視部91によるモータ72の負荷電流値の監視においては、電流計79が検出するモータ72の負荷電流値の値と上記所定の閾値とが順次比較され続けている。   For example, the storage unit 90 of the control unit 9 stores a predetermined threshold value for the load current value of the motor 72 in advance. This threshold value is a value selected experimentally, empirically, or theoretically, and a reduction in the grinding force of the grinding wheel 740 that occurs when the grinding surface 740a of the grinding wheel 740 adheres to the grinding surface 740a in excess of the allowable amount, That is, it is a current value stored for the current value monitoring unit 91 of the control means 9 to judge the change of the load current value of the motor 72. In the monitoring of the load current value of the motor 72 by the current value monitoring unit 91 of the control means 9, the value of the load current value of the motor 72 detected by the ammeter 79 and the predetermined threshold value are continuously compared.

研削面740aに研削屑がこびりついて目つぶれや目詰まりが起きることで、研削砥石740に掛かる負荷が大きくなる。ここで、研削砥石740が回転している最中においては、図示しない電源からモータ72に電力が供給され続けており、研削砥石740に作用する負荷が大きくなった場合でもスピンドル70を一定の回転数で回転させるようにモータ72はフィードバック制御されている。そのため、研削面740aに研削屑が付着していくことで、モータ72の負荷電流値が上昇していき記憶部90に記憶されている閾値を越える。その結果、制御手段9の電流値監視部91は、研削面740aの混合物による洗浄が必要であると判断する。   The grinding dust sticks to the grinding surface 740a to cause crushing or clogging, which increases the load on the grinding wheel 740. Here, while the grinding wheel 740 is rotating, electric power is continuously supplied to the motor 72 from a power source (not shown), and the spindle 70 is rotated at a constant speed even when the load acting on the grinding wheel 740 becomes large. The motor 72 is feedback-controlled so as to rotate by a number. Therefore, as the grinding dust adheres to the grinding surface 740a, the load current value of the motor 72 increases and exceeds the threshold value stored in the storage unit 90. As a result, the current value monitoring unit 91 of the control means 9 determines that the grinding surface 740a needs to be cleaned with the mixture.

図4に示す制御手段9からバルブ25に通電がなされ、バルブ25が開かれた状態(ON状態)になる。また、エア源28がエアを第1の配管221に例えば圧力0.4MPa〜0.5MPaで供給する。第1の配管221を流れるエアの流速で負圧生成部223において負圧が生成されて、砥粒供給源26から砥粒が吸引される。そして、砥粒供給ノズル21を砥粒とエアとの混合流体が噴出口21aに向かって流れていき、該混合流体が噴出口21aから高圧水供給ノズル20から噴出する高圧水の軌道上に向かって噴出する。高圧水供給ノズル20と研削砥石740の研削面740aとの間で高圧水に砥粒を含んだエアが混合されて、高圧水とエアと砥粒との混合物がオーバーハングした研削面740aに吹きかけられる。   The valve 25 is energized by the control means 9 shown in FIG. 4, and the valve 25 is opened (ON state). Further, the air source 28 supplies air to the first pipe 221 at a pressure of 0.4 MPa to 0.5 MPa, for example. Negative pressure is generated in the negative pressure generation unit 223 with the flow velocity of the air flowing through the first pipe 221, and the abrasive grains are sucked from the abrasive grain supply source 26. Then, the mixed fluid of abrasive grains and air flows through the abrasive grain supply nozzle 21 toward the jet port 21a, and the mixed fluid goes toward the orbit of the high pressure water jetted from the high pressure water feed nozzle 20 from the jet port 21a. Erupts. Air containing abrasive grains is mixed in the high-pressure water between the high-pressure water supply nozzle 20 and the grinding surface 740a of the grinding wheel 740, and the mixture of the high-pressure water, the air and the abrasive particles is sprayed on the overhanging grinding surface 740a. Be done.

高圧水とエアと砥粒との混合物によって、研削砥石740の研削面740aにこびりついた研削屑(例えば、樹脂)が適切に除去され、研削面740aの接着剤が除去され研削砥石740の砥粒が研削面740aから突出する突出量が増やされたり、研削面740aから突出しすぎている砥粒を脱落させたりするなどして、適切な自生発刃が促される。そして、モータ72の負荷電流値が下降していき記憶部90に記憶されている閾値を下回る。その結果、制御手段9の電流値監視部91は、研削面740aの混合物による洗浄が不要で有ると判断する。そして、制御手段9からのバルブ25に対する通電が停止され、バルブ25が閉じられた状態(OFF状態)になる。したがって、砥粒供給源26からの砥粒の吸引が停止され、被加工物Wからオーバーハングした研削砥石740の研削面740aに対して、高圧水供給ノズル20から噴出する高圧水のみが吹きかけられる。   The mixture of high-pressure water, air, and abrasive grains appropriately removes the grinding dust (for example, resin) stuck to the grinding surface 740a of the grinding stone 740, removes the adhesive on the grinding surface 740a, and removes the abrasive grains of the grinding stone 740. The amount of protrusion from the grinding surface 740a is increased, or the abrasive grains protruding too much from the grinding surface 740a are dropped, so that proper self-generated blade is promoted. Then, the load current value of the motor 72 decreases and falls below the threshold value stored in the storage unit 90. As a result, the current value monitoring unit 91 of the control means 9 determines that cleaning of the grinding surface 740a with the mixture is unnecessary. Then, the energization of the valve 25 from the control means 9 is stopped, and the valve 25 is closed (OFF state). Therefore, the suction of the abrasive grains from the abrasive grain supply source 26 is stopped, and only the high pressure water ejected from the high pressure water supply nozzle 20 is sprayed onto the grinding surface 740a of the grinding wheel 740 that is overhung from the workpiece W. .

このように本発明に係る研削装置1においては、第1の配管221にバルブ25を備え、バルブ25をON又はOFFさせて間欠的にエアの供給を行って間欠的に高圧水とエアと砥粒との混合物を生成することで、研削砥石740の研削面740aの研削力が落ちている場合、即ち、研削面740aに研削屑が多く付着している場合に混合物を研削面740aに吹きかけ、研削砥石740の研削力が落ちていない場合には高圧水を研削面740aに吹きかけることで、砥粒の無駄な使用を減らすことが可能となる。   As described above, in the grinding apparatus 1 according to the present invention, the first pipe 221 is provided with the valve 25, and the valve 25 is turned on or off to intermittently supply air to intermittently supply high-pressure water, air, and grinding. By generating a mixture with the particles, when the grinding force of the grinding surface 740a of the grinding wheel 740 is reduced, that is, when the grinding surface 740a has a lot of grinding debris, the mixture is sprayed on the grinding surface 740a, When the grinding force of the grinding wheel 740 is not reduced, it is possible to reduce the wasteful use of the abrasive grains by spraying high-pressure water on the grinding surface 740a.

W:被加工物
1:研削装置 10:ベース 11:コラム
30:保持手段 300a:保持面 31:傾き調整機構
5:研削送り手段 50:ボールネジ 52:モータ
7:研削手段 70:スピンドル 72:モータ 74:研削ホイール 740:研削砥石
740a:研削砥石の研削面
79:電流計
20:高圧水供給ノズル 20a:噴出口
21:砥粒供給ノズル
22:砥粒供給手段 221:第1の配管 222:第2の配管 223:負圧生成部
29:水源 290:水流路 291:ポンプ
28:エア源 25:バルブ 26: 砥粒供給源 225:負圧生成部
9:制御手段 90:記憶部 91:電流値監視部
W: Workpiece 1: Grinding device 10: Base 11: Column 30: Holding means 300a: Holding surface 31: Tilt adjusting mechanism 5: Grinding feeding means 50: Ball screw 52: Motor 7: Grinding means 70: Spindle 72: Motor 74 : Grinding Wheel 740: Grinding Wheel 740a: Grinding Wheel Grinding Surface 79: Ammeter 20: High Pressure Water Supply Nozzle 20a: Jet 21: Abrasive Grain Supply Nozzle 22: Abrasive Grain Supply Means 221: First Pipe 222: Second Piping 223: Negative pressure generation unit 29: Water source 290: Water flow path 291: Pump
28: Air source 25: Valve 26: Abrasive grain supply source 225: Negative pressure generating unit 9: Control means 90: Storage unit 91: Current value monitoring unit

Claims (5)

研削砥石を環状に配設した研削ホイールを回転させ、被加工物に該研削砥石の研削面の一部を接触させ被加工物を研削する研削方法であって、
被加工物からオーバーハングした該研削面に向かって高圧水供給ノズルから高圧水を吹きかけると共に、該高圧水供給ノズルと該研削面との間で該高圧水に砥粒を含んだエアを混合させ、該高圧水と該エアと該砥粒との混合物を該研削面に吹きかけながら被加工物を研削する研削方法。
A grinding method in which a grinding wheel in which a grinding wheel is annularly arranged is rotated, and a part of a grinding surface of the grinding wheel is brought into contact with a workpiece to grind the workpiece,
High-pressure water is sprayed from the high-pressure water supply nozzle toward the overhanging grinding surface from the workpiece, and the high-pressure water is mixed with air containing abrasive grains between the high-pressure water supply nozzle and the grinding surface. A grinding method of grinding a workpiece while spraying a mixture of the high-pressure water, the air, and the abrasive grains on the grinding surface.
前記砥粒の粒径は、前記研削砥石に含まれる砥粒の粒径以下である請求項1記載の研削方法。   The grinding method according to claim 1, wherein the particle size of the abrasive grains is equal to or smaller than the particle size of the abrasive grains contained in the grinding stone. 前記混合物を間欠的に生成する請求項1又は2記載の研削方法。   The grinding method according to claim 1, wherein the mixture is generated intermittently. 被加工物を保持する保持手段と、研削砥石を環状に配設した研削ホイールを回転させ被加工物に該研削砥石の研削面の一部を接触させ被加工物を研削する研削手段と、を備える研削装置であって、
被加工物からオーバーハングした該研削面に高圧水を吹きかける高圧水供給ノズルと、該高圧水供給ノズルと該研削面との間で該高圧水に該砥粒を混合するように供給する砥粒供給ノズルと、該砥粒供給ノズルに砥粒を供給する砥粒供給手段と、を備え、
該砥粒供給手段は、該砥粒供給ノズルとエア源とを連通する第1の配管と、該第1の配管に配設されエアの流速で負圧を生成する負圧生成部と、該負圧生成部と砥粒供給源とを連通し該負圧生成部で生成された負圧で該砥粒を吸引し該第1の配管へと導く第2の配管と、を備えた研削装置。
Holding means for holding the work piece, and grinding means for grinding the work piece by rotating a grinding wheel in which a grinding grindstone is annularly arranged to bring a part of the grinding surface of the grinding grind stone into contact with the work piece. A grinding device equipped with,
High-pressure water supply nozzle for spraying high-pressure water onto the grinding surface overhanging from the workpiece, and abrasive grains supplied so as to mix the abrasive grains with the high-pressure water between the high-pressure water supply nozzle and the grinding surface A supply nozzle and an abrasive grain supply means for supplying abrasive grains to the abrasive grain supply nozzle,
The abrasive grain supply means includes a first pipe that connects the abrasive grain supply nozzle and an air source, a negative pressure generation unit that is disposed in the first pipe and generates a negative pressure at a flow velocity of air, A grinding device including a negative pressure generating unit and an abrasive grain supply source, which are connected to each other ..
前記第1の配管にバルブを備え、該バルブをON又はOFFさせて間欠的にエアの供給を行って間欠的に前記高圧水と該エアと前記砥粒との混合物を生成する請求項4記載の研削装置。   5. A valve is provided in the first pipe, and the valve is turned on or off to intermittently supply air to intermittently generate a mixture of the high-pressure water, the air, and the abrasive grains. Grinding equipment.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102434185B1 (en) * 2021-06-11 2022-08-19 주식회사 엔티에스 Dressing apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04289075A (en) * 1991-03-14 1992-10-14 Mitsui Constr Co Ltd Mixed injection for cutting fluid and device thereof
JPH0724735A (en) * 1993-07-12 1995-01-27 Nippon Steel Corp Nozzle assembly for abrasive water jet
JP2016179533A (en) * 2015-03-24 2016-10-13 株式会社ディスコ Workpiece grinding method and grinding device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04289075A (en) * 1991-03-14 1992-10-14 Mitsui Constr Co Ltd Mixed injection for cutting fluid and device thereof
JPH0724735A (en) * 1993-07-12 1995-01-27 Nippon Steel Corp Nozzle assembly for abrasive water jet
JP2016179533A (en) * 2015-03-24 2016-10-13 株式会社ディスコ Workpiece grinding method and grinding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102434185B1 (en) * 2021-06-11 2022-08-19 주식회사 엔티에스 Dressing apparatus

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