JP2019220588A - 自動教示方法及び制御装置 - Google Patents
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Abstract
Description
本開示に実施形態に係る自動教示方法を実施することができる基板処理システムの一例について説明する。図1は、基板処理システムの構成例を示す斜視図である。図2は、図1の基板処理システムの平面図である。
基板処理システム100の動作の一例について説明する。
搬送装置23を用いた搬送における動作の自動教示方法について説明する。自動教示方法は、支持ピック119を水平移動させながら発光部51a,52a,61a,62aから支持ピック119の下方の対象物に光を照射すると共に受光部51b,52b,61b,62bにより対象物からの反射光を受光し、反射光の強度変化を取得する工程と、反射光の強度変化に基づいて、対象物の端部位置を特定する工程と、を有する。自動教示方法は、例えば基板処理システム100の立ち上げ時やメンテナンス後に、基板処理システム100の制御部30とは別に設けられた制御装置200により実行される。但し、自動教示方法は、基板処理システム100の制御部30により実行されてもよい。
第1の実施形態では、搬送装置23のロードロック室5における動作の自動教示方法の一例について説明する。図8は、第1の実施形態の自動教示方法を示すフローチャートである。
第2の実施形態では、搬送装置23のプロセスチャンバ1aにおける動作の自動教示方法の一例について説明する。なお、搬送装置23のプロセスチャンバ1b,1cにおける動作の自動教示方法についても同様である。図15は、第2の実施形態の自動教示方法を示すフローチャートである。
第3の実施形態では、ポジショナ29の動作の自動教示方法の一例について説明する。図21は、第3の実施形態の自動教示方法を示すフローチャートである。
50 センサ部
51,52,53,61,62,63 光学センサ
51a,52a,53a,61a,62a,63a 発光部
51b,52b,53b,61b,62b,63b 受光部
101 フォーク
119 支持ピック
S 基板
Claims (16)
- 基板を保持する保持部の先端に発光部と受光部とを有する光学センサを備える搬送装置を用いた搬送における動作の自動教示方法であって、
前記保持部を水平移動させながら前記発光部から前記保持部の下方の対象物に光を照射すると共に前記受光部により前記対象物からの反射光を受光し、前記反射光の強度変化を取得する工程と、
前記反射光の強度変化に基づいて、前記対象物の端部位置を特定する工程と、
を有する、
自動教示方法。 - 前記水平移動は、回転移動である、
請求項1に記載の自動教示方法。 - 前記反射光の強度変化を取得する工程では、前記保持部の短手方向に沿って配置された発光部と受光部とを有する光学センサにより前記光を照射する、
請求項2に記載の自動教示方法。 - 前記水平移動は、直線移動である、
請求項1に記載の自動教示方法。 - 前記反射光の強度変化を取得する工程では、前記保持部の長手方向に沿って配置された発光部と受光部とを有する光学センサにより前記光を照射する、
請求項4に記載の自動教示方法。 - 前記対象物の端部位置を特定する工程で特定された前記端部位置に基づいて、前記搬送装置の動作を補正する補正値を算出する工程を有する、
請求項1乃至5のいずれか一項に記載の自動教示方法。 - 前記搬送装置は、前記保持部の逃げ溝を形成すると共に前記基板を支持する複数の支持部が間隔をあけて構成されたバッファが設けられたロードロック室に進退可能であり、
前記対象物は、前記バッファである、
請求項6に記載の自動教示方法。 - 前記対象物の端部位置を特定する工程で特定された前記端部位置に基づいて、前記基板の位置合わせを行うポジショナの動作を補正する補正値を算出する工程を有する、
請求項1乃至5のいずれか一項に記載の自動教示方法。 - 前記搬送装置は、前記基板を載置する載置面を有する載置台が設けられた処理室に進退可能であり、
前記対象物は、前記載置面及び前記載置面に載置された前記基板である、
請求項8に記載の自動教示方法。 - 前記反射光の強度変化を取得する工程は、前記載置面に前記基板が載置されていない状態で前記光を照射する工程と、前記載置面に前記基板が載置されている状態で前記光を照射する工程と、を含み、
前記対象物の端部位置を特定する工程は、前記載置面に前記基板が載置されていない状態で前記光を照射したときの反射光の強度変化に基づいて、前記載置面の端部位置を特定する工程と、前記載置面に前記基板が載置されている状態で前記光を照射したときの反射光の強度変化に基づいて、前記基板の端部位置を特定する工程と、を含み、
前記ポジショナの動作を補正する補正値を算出する工程は、前記載置面の端部位置及び前記基板の端部位置に基づいて、前記基板の位置合わせを行うポジショナの動作を補正する補正値を算出する工程を含む、
請求項9に記載の自動教示方法。 - 前記反射光の強度を取得する工程は、前記載置面に前記基板が載置されている状態で前記光を照射する工程を含み、
前記対象物の端部位置を特定する工程は、前記載置面に前記基板が載置されている状態で前記光を照射したときの反射光の強度に基づいて、前記載置面の端部位置及び前記基板の端部位置を特定する工程を含み、
前記ポジショナの動作を補正する補正値を算出する工程は、前記載置面の端部位置及び前記基板の端部位置に基づいて、前記基板の位置合わせを行うポジショナの動作を補正する補正値を算出する工程を含む、
請求項9に記載の自動教示方法。 - 前記載置面の外形は前記基板の外形よりも小さく、
前記ポジショナの動作を補正する補正値を算出する工程は、前記載置面の端部位置及び前記基板の端部位置に基づいて算出された前記載置面に対する前記基板のはみ出し量が予め定められたはみ出し量となるように前記ポジショナの動作を補正する補正値を算出する工程である、
請求項10又は11に記載の自動教示方法。 - 前記保持部を移動させながら前記発光部から前記保持部の先端方向に位置する第2の対象物に光を照射すると共に前記受光部により前記第2の対象物からの反射光を受光し、前記反射光の強度変化を取得する第2の取得工程と、
前記反射光の強度変化に基づいて、前記第2の対象物の位置を特定する第2の特定工程と、
を有する、
請求項1乃至12のいずれか一項に記載の自動教示方法。 - 前記第2の対象物は、前記基板が設けられる搬送室と前記搬送室に接続されたロードロック室又は処理室との間に設けられる開口部である、
請求項13に記載の自動教示方法。 - 前記第2の対象物は、前記基板を載置する載置台の載置面に対して昇降する昇降ピンである、
請求項13に記載の自動教示方法。 - 基板を保持する保持部の先端に発光部と受光部とを有する光学センサを備える搬送装置を用いた搬送における動作の自動教示方法を実行する制御装置であって、
前記保持部を水平移動させながら前記発光部から前記保持部の下方の対象物に光を照射すると共に前記受光部により前記対象物からの反射光を受光し、前記反射光の強度変化を取得する工程と、
前記反射光の強度変化に基づいて、前記対象物の端部位置を特定する工程と、
を実行する、
制御装置。
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