JP2018195702A - 配線基板及びその製造方法 - Google Patents
配線基板及びその製造方法 Download PDFInfo
- Publication number
- JP2018195702A JP2018195702A JP2017098311A JP2017098311A JP2018195702A JP 2018195702 A JP2018195702 A JP 2018195702A JP 2017098311 A JP2017098311 A JP 2017098311A JP 2017098311 A JP2017098311 A JP 2017098311A JP 2018195702 A JP2018195702 A JP 2018195702A
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- Prior art keywords
- layer
- wiring
- wiring layer
- via hole
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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Abstract
Description
図4〜図16は実施形態の配線基板の製造方法を説明するための図、図17は実施形態の配線基板を示す図、図18は実施形態の電子部品装置を示す図である。
Claims (10)
- 第1配線層と、
前記第1配線層の上に配置され、感光性樹脂から形成された絶縁層と、
前記絶縁層に形成され、前記第1配線層に到達するビアホールと、
前記ビアホール内から前記絶縁層の上に形成され、前記第1配線層に接続された第2配線層と
を有し、
前記ビアホール内の前記第1配線層の表面が粗化面となっていることを特徴とする配線基板。 - 前記第1配線層の粗化面の表面粗さ(Ra)は、前記絶縁層の表面粗さ(Ra)及び前記ビアホール以外の領域の前記第1配線層の表面粗さ(Ra)よりも大きいことを特徴とする請求項1に記載の配線基板。
- 前記第2配線層は、シード層と、前記シード層の上に形成された金属めっき層とにより形成され、前記シード層がスパッタ膜であることを特徴とする請求項1又は2に記載の配線基板。
- 前記第1配線層の粗化面の表面粗さ(Ra)は30nm〜600nmであり、前記絶縁層及び前記ビアホール以外の領域の前記第1配線層の各表面粗さ(Ra)は30nm未満であることを特徴とする請求項2に記載の配線基板。
- 前記第1配線層は銅層からなり、
前記第1配線層の粗化面には、前記銅層の表面から厚み方向に、前記銅層の結晶粒の粒界部に沿って設けられた隙間によって凹凸が形成されていることを特徴とする請求項1乃至4のいずれか一項に記載の配線基板。 - 第1配線層の上に、感光性樹脂層を形成する工程と、
前記感光性樹脂層を露光、現像することにより、前記第1配線層に到達するビアホールを備えた絶縁層を形成する工程と、
前記ビアホール内の前記第1配線層の表面を粗化面にする工程と、
前記ビアホール内から前記絶縁層の上に、前記第1配線層に接続される第2配線層を形成する工程と
を有することを特徴とする配線基板の製造方法。 - 前記第1配線層の表面を粗化面にする工程において、
前記ビアホール内及び絶縁層の表面をギ酸溶液で処理して、前記第1配線層の表面を粗化面にし、
前記第1配線層の粗化面の表面粗さ(Ra)は、前記絶縁層の表面粗さ(Ra)及び前記ビアホール以外の領域の前記第1配線層の表面粗さ(Ra)よりも大きく設定されることを特徴とする請求項6に記載の配線基板の製造方法。 - 前記第2配線層を形成する工程は、
前記ビアホール内及び前記絶縁層の表面に、スパッタ法によりシード層を形成する工程と、
前記シード層の上に、開口部が設けられためっきレジスト層を形成する工程と、
前記シード層をめっき給電経路に利用する電解めっきにより、前記めっきレジスト層の開口部に金属めっき層を形成する工程と、
前記めっきレジスト層を除去する工程と、
前記金属めっき層をマスクにして前記シード層を除去する工程とを含むことを特徴とする請求項6又は7に記載の配線基板の製造方法。 - 前記第1配線層の粗化面の表面粗さ(Ra)は30nm〜600nmであり、前記絶縁層及び前記ビアホール以外の領域の前記第1配線層の各表面粗さ(Ra)は30nm未満であることを特徴とする請求項7に記載の配線基板の製造方法。
- 前記第1配線層は銅層からなり、
前記第1配線層の表面を粗化面にする工程において、
前記ギ酸溶液によって、前記銅層の結晶粒の粒界部が表面から厚み方向にエッチングされて凹凸が形成されることを特徴とする請求項6乃至9のいずれか一項に記載の配線基板の製造方法。
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JPH11243277A (ja) * | 1998-02-26 | 1999-09-07 | Ibiden Co Ltd | フィルドビア構造を有する多層プリント配線板 |
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