JP2018174302A5 - - Google Patents
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- JP2018174302A5 JP2018174302A5 JP2018011616A JP2018011616A JP2018174302A5 JP 2018174302 A5 JP2018174302 A5 JP 2018174302A5 JP 2018011616 A JP2018011616 A JP 2018011616A JP 2018011616 A JP2018011616 A JP 2018011616A JP 2018174302 A5 JP2018174302 A5 JP 2018174302A5
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- JP
- Japan
- Prior art keywords
- prefabricated
- simplify
- assembly
- component
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
少なくとも2つの層のうちの少なくとも1つの層を予備製造された構成部品として組み立てを簡易化する設計変更もあり得る。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2018244A NL2018244B1 (en) | 2017-01-27 | 2017-01-27 | Endeffektor |
NL2018244 | 2017-01-27 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018174302A JP2018174302A (ja) | 2018-11-08 |
JP2018174302A5 true JP2018174302A5 (ja) | 2019-12-26 |
JP7109927B2 JP7109927B2 (ja) | 2022-08-01 |
Family
ID=58606566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018011616A Active JP7109927B2 (ja) | 2017-01-27 | 2018-01-26 | エンドエフェクタ |
Country Status (9)
Country | Link |
---|---|
US (1) | US10343292B2 (ja) |
JP (1) | JP7109927B2 (ja) |
KR (1) | KR20180088597A (ja) |
CN (1) | CN108364896A (ja) |
AT (1) | AT519588B1 (ja) |
DE (1) | DE102018100855A1 (ja) |
NL (1) | NL2018244B1 (ja) |
SG (1) | SG10201800713TA (ja) |
TW (1) | TWI710437B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3896385B1 (en) * | 2018-12-11 | 2024-01-17 | Rorze Corporation | Electrostatic capacitance sensor |
JP7175735B2 (ja) * | 2018-12-11 | 2022-11-21 | 平田機工株式会社 | 基板搬送装置 |
US11574837B2 (en) * | 2020-06-12 | 2023-02-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Robot blade having multiple sensors for multiple different alignment tasks |
FR3112980B1 (fr) * | 2020-07-28 | 2022-07-22 | Defitech | Caisson d’aspiration pour un préhenseur |
USD949219S1 (en) * | 2020-08-20 | 2022-04-19 | Grey Orange Pte. Ltd. | Spatula gripper |
TWI796709B (zh) * | 2021-06-16 | 2023-03-21 | 盛詮科技股份有限公司 | 晶圓懸浮手臂 |
EP4273911A1 (de) | 2022-05-03 | 2023-11-08 | Werner Lieb GmbH | Haltevorrichtung und verfahren zum halten und/oder transportieren von werkstücken und/oder bauteilen, optional mit werkzeugfrei auswechselbaren saugerelementen |
CN118156204A (zh) * | 2022-12-07 | 2024-06-07 | 纬创资通(重庆)有限公司 | 晶圆搬运设备及其吸盘模块 |
CN115632023B (zh) * | 2022-12-22 | 2023-08-04 | 河北博特半导体设备科技有限公司 | 一种双臂晶圆传输装置 |
TWI814679B (zh) * | 2023-02-13 | 2023-09-01 | 盛詮科技股份有限公司 | 載板懸浮手臂 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4620738A (en) * | 1985-08-19 | 1986-11-04 | Varian Associates, Inc. | Vacuum pick for semiconductor wafers |
US5226636A (en) * | 1992-06-10 | 1993-07-13 | International Business Machines Corporation | Holding fixture for substrates |
EP0634787B1 (en) * | 1993-07-15 | 1997-05-02 | Applied Materials, Inc. | Subsrate tray and ceramic blade for semiconductor processing apparatus |
JPH09139413A (ja) * | 1995-11-14 | 1997-05-27 | Du Pont Kk | 基板搬送部品および基板搬送装置 |
JPH11354607A (ja) * | 1998-06-10 | 1999-12-24 | Mitsubishi Chemical Corp | 搬送装置用ハンド |
US6244641B1 (en) * | 1999-12-02 | 2001-06-12 | M.E.C. Technology, Inc. | Wafer transfer arm |
JP2003168718A (ja) * | 2001-11-30 | 2003-06-13 | Murata Mach Ltd | 枚葉移載装置 |
JP4474601B2 (ja) * | 2002-07-29 | 2010-06-09 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 反射面付き炭素繊維複合移動部材 |
US6942265B1 (en) * | 2002-10-23 | 2005-09-13 | Kla-Tencor Technologies Corporation | Apparatus comprising a flexible vacuum seal pad structure capable of retaining non-planar substrates thereto |
US20050110292A1 (en) * | 2002-11-26 | 2005-05-26 | Axcelis Technologies, Inc. | Ceramic end effector for micro circuit manufacturing |
JP4214509B2 (ja) * | 2002-12-03 | 2009-01-28 | 株式会社ニコン | 吸着保持部材及び吸着保持装置 |
US7055875B2 (en) * | 2003-07-11 | 2006-06-06 | Asyst Technologies, Inc. | Ultra low contact area end effector |
DE102006031434B4 (de) * | 2006-07-07 | 2019-11-14 | Erich Thallner | Handhabungsvorrichtung sowie Handhabungsverfahren für Wafer |
US20080247857A1 (en) * | 2007-04-05 | 2008-10-09 | Ichiro Yuasa | End effector and robot for transporting substrate |
JP2009285823A (ja) * | 2008-05-28 | 2009-12-10 | Meian Kokusai Gigyo Kofun Yugenkoshi | ロボットアーム、並びに、その保持手段の構成材及び該構成材の製造方法 |
JP2011110682A (ja) * | 2009-11-30 | 2011-06-09 | Jx Nippon Oil & Energy Corp | ロボットハンド及びその製造方法 |
WO2013027828A1 (ja) * | 2011-08-24 | 2013-02-28 | 株式会社ハーモテック | 非接触搬送装置 |
JP2013078810A (ja) * | 2011-10-03 | 2013-05-02 | Smc Corp | 真空吸着装置 |
TWI611997B (zh) * | 2013-09-26 | 2018-01-21 | 應用材料股份有限公司 | 用於傳送基板的氣動端效器設備與基板傳送系統 |
JP6216219B2 (ja) | 2013-11-07 | 2017-10-18 | 一般財団法人ファインセラミックスセンター | 遮熱構造 |
US20150290815A1 (en) * | 2014-04-11 | 2015-10-15 | Varian Semiconductor Equipment Associates, Inc. | Planar end effector and method of making a planar end effector |
US9415519B2 (en) * | 2014-07-01 | 2016-08-16 | Varian Semiconductor Equipment Associates, Inc. | Composite end effector and method of making a composite end effector |
US20160254176A1 (en) * | 2015-02-27 | 2016-09-01 | AZSimilate, LLC | Positive Pressure Bernoulli Wand with Coiled Path |
-
2017
- 2017-01-27 NL NL2018244A patent/NL2018244B1/en active
-
2018
- 2018-01-16 DE DE102018100855.4A patent/DE102018100855A1/de active Pending
- 2018-01-19 US US15/875,708 patent/US10343292B2/en active Active
- 2018-01-22 TW TW107102183A patent/TWI710437B/zh active
- 2018-01-24 AT ATA50058/2018A patent/AT519588B1/de active
- 2018-01-26 JP JP2018011616A patent/JP7109927B2/ja active Active
- 2018-01-26 SG SG10201800713TA patent/SG10201800713TA/en unknown
- 2018-01-26 KR KR1020180009853A patent/KR20180088597A/ko not_active Application Discontinuation
- 2018-01-29 CN CN201810083865.7A patent/CN108364896A/zh active Pending
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