JP2018163050A - Displacement sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a displacement sensor that detects an amount of displacement of inspection objects, and enable abnormality of each part to be detected.SOLUTION: A displacement sensor 1 comprises: a first output unit 14 that outputs signals in accordance with a diagnosis result of a first diagnosis unit 13 diagnosing whether both of a pair of first detection units 11 work abnormally; a second output unit 24 that outputs signals in accordance with a diagnosis result of a second diagnosis unit 23 diagnosing whether both of a pair of second detection units 21 work abnormally; a first determination unit 17 that, in accordance with an input to the first diagnosis unit 13 of a pair of first simulation signals diagnosing one of the pair of first detection units 11 as being abnormal, determines whether the first diagnosis unit 13 works normally on the basis of the signal output from the first output unit 14; and a second determination unit 27 that, in accordance with an input to the second diagnosis unit 23 of a pair of second simulation signals diagnosing one of the pair of second detection units 21 as being abnormal, determines that the second diagnosis unit 23 works normally on the basis of the signal output from the second output unit 24.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a displacement sensor that detects a displacement amount of a detection target.

  Conventionally, displacement sensors that detect the amount of displacement have been widely used. Some displacement sensors of this type have a self-diagnosis function for diagnosing whether or not the detection unit that detects the amount of displacement is abnormal (for example, Patent Document 1).

  The displacement sensor described in Patent Document 1 is configured by making the first detection unit, the first signal processing unit, the second detection unit, and the second signal processing unit redundant. With this configuration, the first diagnosis unit compares the signals from the pair of first signal processing units to diagnose whether both of the pair of first detection units are abnormal, and the second diagnosis unit includes the pair of first detection units. By comparing signals from the second signal processing unit, it is diagnosed whether or not both of the pair of second detection units are abnormal. The first output unit outputs a signal indicating that one of the pair of first detection units is abnormal when one of the pair of first detection units is diagnosed to be abnormal, and the second output The unit outputs a signal indicating that one of the pair of second detection units is abnormal when one of the pair of second detection units is diagnosed as abnormal.

Japanese Patent Laid-Open No. 2006-169963

  The displacement sensor described in Patent Literature 1 is based on the detection result of the pair of first detection units and the detection result of the pair of second detection units, and both of the pair of first detection units and the pair of second detection units. Is diagnosing whether or not is abnormal. However, for example, because the first diagnosis unit or the second diagnosis unit is out of order, regardless of the detection results of the pair of first detection units and the pair of second detection units, the pair of first detection units and the pair of first detection units When it is diagnosed that the second detection unit is not abnormal, or when the pair of first detection units and the pair of second detection units are diagnosed as abnormal, the pair of first detection units and the pair of second detection units Whether or not the detection unit is abnormal cannot be properly diagnosed, and there is room for improvement in improving the reliability of the detection result of the displacement amount of the detection target.

  Therefore, there is a need for a displacement sensor that can detect the amount of displacement while ensuring the reliability of the detection result of the amount of displacement of the detection target, and can detect an abnormality in the diagnostic unit.

  The characteristic configuration of the displacement sensor according to the present invention is based on the detection result of the pair of first detection units and the pair of first detection units arranged adjacent to each other, detecting the displacement amount of the same detection target. A first diagnosis unit that diagnoses whether or not both of the pair of first detection units are abnormal, a first output unit that outputs a signal according to a diagnosis result of the first diagnosis unit, and the first detection unit; Based on the detection results of the pair of second detection units and the pair of second detection units that are disposed adjacent to the pair of first detection units, the displacement amount of the same detection target is detected. A second diagnostic unit for diagnosing whether or not both of the detection units are abnormal, and a second output unit for outputting a signal according to a diagnostic result of the second diagnostic unit, wherein the first diagnostic unit A pair of first simulation signals for diagnosing that one of the pair of first detection units is abnormal is input to the first diagnosis unit. Second simulation signal input for inputting a first simulation signal input unit and a pair of second simulation signals that the second diagnosis unit diagnoses that one of the pair of second detection units is abnormal to the second diagnosis unit And a signal indicating that one of the pair of first detection units is abnormal is output from the first output unit in response to the input of the pair of first simulation signals to the first diagnosis unit A first determination unit that determines that the first diagnosis unit is normal, and the pair of second simulation signals from the second output unit to the pair of second simulation signals in response to an input to the second diagnosis unit. A second determination unit that determines that the second diagnosis unit is normal when a signal indicating that one of the second detection units is abnormal is output.

  With such a characteristic configuration, the diagnosis of the first diagnosis unit with respect to the input of the pair of first simulation signals that is known in advance that the first diagnosis unit diagnoses that one of the pair of first detection units is abnormal. Based on the result and the diagnosis result of the second diagnosis unit with respect to the input of the pair of second simulation signals that is known in advance that the second diagnosis unit diagnoses that one of the pair of second detection units is abnormal It is possible to appropriately determine whether or not the diagnostic unit is normal and whether or not the second diagnostic unit is normal. Therefore, for example, when a result indicating that the first detection unit or the second detection unit is not abnormal is output from the displacement sensor, whether the first detection unit or the second detection unit is abnormal, the first diagnosis unit, 2 It becomes possible to specify whether the diagnosis unit is abnormal. Therefore, it is possible to detect an abnormality in the diagnosis unit, and to detect the displacement amount while ensuring the reliability of the detection result of the displacement amount of the detection target.

  Further, the first simulation signal input unit inputs a pair of first simulation signals having the same potential that the first diagnosis unit determines that both of the pair of first detection units are not abnormal to the first diagnosis unit. The second simulation signal input unit inputs a pair of second simulation signals having the same potential that the second diagnosis unit determines that both of the pair of second detection units are not abnormal to the second diagnosis unit. In response to the input of the pair of first simulation signals having the same potential to the first diagnosis unit, a signal indicating that both of the pair of first detection units are not abnormal is output from the first output unit. In this case, the first determination unit determines that the first diagnosis unit and the first output unit are normal, and inputs a pair of second simulation signals having the same potential to the second diagnosis unit. Depending on the condition, both the second output unit and the pair of second detection units are not abnormal. When the signal is output, the second determination unit is suitable that the second diagnosis unit and the second output unit is determined to be normal.

  With such a configuration, it is possible to determine whether the first output unit and the second output unit are normal together with the first diagnostic unit and the second diagnostic unit. Therefore, for example, when a result indicating that the first detection unit or the second detection unit is not abnormal is output from the displacement sensor, it is possible to specify whether the first output unit or the second output unit is abnormal. Become.

  In addition, the first simulation signal input unit sends a pair of first simulation signals having different potentials to the first diagnosis unit that the first diagnosis unit determines that both of the pair of first detection units are not abnormal. The second simulation signal input unit inputs a pair of second simulation signals having different potentials that the second diagnosis unit determines that both of the pair of second detection units are not abnormal. In response to the input of the pair of first simulation signals having different potentials to the first diagnosis unit, both the first output unit and the pair of first detection units are not abnormal. When a signal is output, the first determination unit determines that the first output unit is normal, and responds to input of the pair of second simulation signals having different potentials to the second diagnosis unit. A pair of the second detection units from the second output unit. If the signal indicating that no abnormality is outputted, the second determination unit is suitable that the second output unit is determined to be normal.

  With such a configuration, it is possible to determine whether the diagnostic accuracy of the first diagnostic unit and the output accuracy of the first output unit according to the diagnostic result of the first diagnostic unit are normal. It is possible to determine whether or not the diagnostic accuracy of the second diagnostic unit and the output accuracy of the second output unit according to the diagnostic result of the second diagnostic unit are normal.

  Further, the pair of first detection units and the pair of second detection units detect the amount of displacement according to a change in distance from the detection target, and the pair of first detection units and the pair of second detection units. It is preferable that the detection unit is arranged in an annular shape with the detection target at the center.

  In this way, by arranging the pair of first detection units and the pair of second detection units so that the detection target is located in the annular central portion, the distance between each of the pair of first detection units and the detection target. Can be made uniform, and the distance between each of the pair of second detection units and the detection target can be made uniform. Therefore, the same diagnostic process can be performed without particularly correcting the detection results of the pair of first detection units and the detection results of the pair of second detection units, and the configuration of the displacement sensor is simplified. Can be

  In addition, it is preferable that a first power supply unit that supplies power to the pair of first detection units and a second power supply unit that supplies power to the pair of second detection units are separately provided.

  With such a configuration, if at least one of the pair of first detection units and the pair of second detection units is supplied with power, it is possible to prevent the output of the displacement sensor from being stopped due to power shortage.

  Each of the first diagnosis unit and the second diagnosis unit is preferably diagnosed as not abnormal when the difference between two detection results to be diagnosed is smaller than a preset set value.

  With such a configuration, it is possible to easily specify whether or not each of the pair of first detection units and the pair of second detection units is abnormal.

It is a block diagram which shows typically the structure of the function part of a displacement sensor. It is a top view of a displacement sensor. It is a figure which shows the example of an output of a displacement sensor. It is a figure which shows the 1st simulation signal and the 2nd simulation signal at the time of determination of a 1st diagnostic part and a 2nd diagnostic part. It is a figure which shows the 1st simulation signal and the 2nd simulation signal at the time of determination of a 1st diagnostic part, a 2nd diagnostic part, a 1st output part, and a 2nd output part. It is a figure which shows the 1st simulation signal and the 2nd simulation signal at the time of determination of a 1st output part and a 2nd output part.

  The displacement sensor according to the present invention is configured to be able to detect abnormality of each part while continuously detecting the amount of displacement of the detection target. Hereinafter, the displacement sensor 1 of the present embodiment will be described. In the following description, it is assumed that the displacement sensor 1 is a rotation sensor that detects the rotation speed of a magnet attached to the rotating body.

  FIG. 1 is a block diagram schematically illustrating a configuration of a functional unit of the displacement sensor 1. FIG. 2 is a top view of the displacement sensor 1 (however, the mold portion (the portion indicated by the two-dot chain line) is transparent). As shown in FIG. 1, the displacement sensor 1 includes a first detection unit 11, a first signal processing unit 12, a first diagnosis unit 13, a first output unit 14, a first power supply unit 15, and a first simulation signal input unit. 16, 1st determination part 17, 2nd detection part 21, 2nd signal processing part 22, 2nd diagnosis part 23, 2nd output part 24, 2nd power supply part 25, 2nd simulation signal input part 26, 2nd determination Each functional unit of the unit 27 is configured. Among these, as shown in FIG. 1, the first detection unit 11, the first signal processing unit 12, the first diagnosis unit 13, the first output unit 14, the first power supply unit 15, the first simulated signal input unit 16, the first The determination unit 17 is configured as the first chip 10, and includes a second detection unit 21, a second signal processing unit 22, a second diagnosis unit 23, a second output unit 24, a second power supply unit 25, and a second simulation signal input unit. 26, the second determination unit 27 is configured as the second chip 20.

  The first detection unit 11 includes a pair of first detection units 11A and 11B. The first detection units 11A and 11B detect the same amount of displacement of the detection target and are arranged adjacent to each other. “Detecting the same displacement amount of the detection target” means that the first detection unit 11A and the first detection unit 11B both detect the rotation amount of the magnet attached to the rotating body as the detection target. . Such 1st detection part 11A, 11B can be comprised using a Hall element, for example. In this case, the first detection units 11A and 11B are arranged adjacent to each other in order to reduce the difference between the detection results of the first detection units 11A and 11B. The detection result of the first detection unit 11 is transmitted to the first signal processing unit 12 described later.

  Similarly to the first detection unit 11, the first signal processing unit 12 is also configured as a pair. The present embodiment includes a first signal processing unit 12A to which the detection result of the first detection unit 11A is transmitted and a first signal processing unit 12B to which the detection result of the first detection unit 11B is transmitted. The first signal processing unit 12 adjusts an offset amount and reduces noise, for example, in order to make it easier for the first diagnosis unit 13 described later to diagnose the detection results of the first detection units 11A and 11B. Signal processing such as signal amplification is performed. The detection results of the first detection units 11A and 11B subjected to signal processing by the first signal processing units 12A and 12B are transmitted to the first diagnosis unit 13 described later.

  The first diagnosis unit 13 diagnoses whether or not both of the pair of first detection units 11A and 11B are abnormal based on the detection results of the pair of first detection units 11A and 11B. The first diagnosis unit 13 compares the detection result of the first detection unit 11A subjected to the predetermined signal processing by the first signal processing units 12A and 12B and the detection result of the first detection unit 11B. At this time, the comparison items may be the period, amplitude, and phase of the detection result. Of course, the comparison may be made with other items.

  The first diagnosis unit 13 is not abnormal when the difference between the two detection results to be diagnosed, that is, the detection result of the first detection unit 11A and the detection result of the first detection unit 11B is smaller than a preset set value. Diagnose. As described above, when the first diagnosis unit 13 compares the period, amplitude, and phase of the detection result of the first detection unit 11A and the detection result of the first detection unit 11B, for all items, When the difference between the detection result of the first detection unit 11A and the detection result of the first detection unit 11B is smaller than a preset set value, it may be diagnosed that the first detection unit 11A and the first detection unit 11B are not abnormal.

  On the other hand, when the first diagnosis unit 13 has a difference of at least one of the period, amplitude, and phase between the detection result of the first detection unit 11A and the detection result of the first detection unit 11B equal to or larger than a preset set value It is preferable to diagnose that one of the first detection unit 11A and the first detection unit 11B is abnormal. In addition, it is good to set with the preset setting value in consideration of the error which arises on arrangement | positioning of 1st detection part 11A, 11B. The diagnosis result of the first diagnosis unit 13 is transmitted to the first output unit 14 described later.

  The first output unit 14 outputs a signal according to the diagnosis result of the first diagnosis unit 13. When the first diagnosis unit 13 diagnoses that the first detection unit 11A and the first detection unit 11B are not abnormal, the first output unit 14 includes the first detection unit 11A and the first detection unit 11B. A signal corresponding to one detection result of the detection unit 11B is output. Here, both the first detection unit 11A and the first detection unit 11B output analog values, but the first output unit 14 amplifies the outputs of the first detection unit 11A and the first detection unit 11B with a predetermined amplification factor. Output analog values.

  On the other hand, when the first diagnosis unit 13 diagnoses that one of the first detection unit 11A and the first detection unit 11B is abnormal, the first output unit 14 detects the detection result of the first detection unit 11A and the first detection unit 11A. The other signal different from the detection result of 1 detection part 11B is output. As such other signals, for example, a high signal can be used or a low signal can be used. In the present embodiment, the first output unit 14 outputs a first output unit 14A that outputs a result corresponding to the diagnosis result of the first detection unit 11A, and a first output unit 14A that outputs a result corresponding to the diagnosis result of the first detection unit 11B. 1 output unit 14B.

  The first detection unit 11, the first signal processing unit 12, the first diagnosis unit 13, and the first output unit 14 mounted on the first chip 10 described above, as well as a first simulated signal input unit 16 and a first output unit described later. The first determination unit 17 is supplied with power by the first power supply unit 15. The first power supply unit 15 of the displacement sensor 1 is supplied with power from an external power supply (for example, a battery) through the terminal electrode 70 as shown in FIG. The first power supply unit 15 uses the first detection unit 11, the first signal processing unit 12, the first diagnosis unit 13, the first output unit 14, the first simulated signal input unit 16, and the first determination as to the voltage related to the power. The voltage is regulated to a voltage suitable for driving the unit 17. In this case, the first power supply unit 15 may be configured using a regulator. The regulator can be appropriately selected from a step-down regulator, a step-up regulator, and a step-up / step-down regulator according to the relationship between the output voltage of the external power supply and the voltage suitable for driving.

  The second detection unit 21 includes a pair of second detection units 21A and 21B. The second detection units 21 </ b> A and 21 </ b> B detect the same amount of displacement of the detection target as the first detection unit 11 and are disposed adjacent to the pair of first detection units 11. As described above, in the present embodiment, the first detection unit 11 detects the amount of rotation of the magnet. Therefore, the second detectors 21 </ b> A and 21 </ b> B also detect the rotation amount of the same magnet as the detection target of the first detector 11. Such second detectors 21A and 21B can also be configured using, for example, a Hall element, similarly to the first detectors 11A and 11B. The second detection units 21A and 21B are arranged adjacent to the first detection units 11A and 11B in order to reduce the difference in detection results from the first detection unit 11. The detection result of the second detection unit 21 is transmitted to the second signal processing unit 22 described later.

  Similarly to the first signal processing unit 12, the second signal processing unit 22 is also configured as a pair. In the present embodiment, the second signal processing unit 22 includes a second signal processing unit 22A to which the detection result of the second detection unit 21A is transmitted, and a second signal processing unit to which the detection result of the second detection unit 21B is transmitted. 22B. The second signal processing unit 22 makes the second diagnosis unit 23, which will be described later, easily diagnose the detection results of the second detection units 21A and 21B, with respect to the detection results of the second detection units 21A and 21B. Processing similar to that of the first signal processing unit 12 (for example, signal processing such as adjustment of offset amount, reduction of noise, and signal amplification) is performed. The detection results of the second detection units 21A and 21B subjected to the signal processing by the second signal processing units 22A and 22B are transmitted to the second diagnosis unit 23 described later.

  The second diagnosis unit 23 diagnoses whether or not both of the pair of second detection units 21A and 21B are abnormal based on the detection results of the pair of second detection units 21A and 21B. The second diagnosis unit 23 compares the detection result of the second detection unit 21A subjected to the predetermined signal processing by the second signal processing units 22A and 22B and the detection result of the second detection unit 21B. At this time, the comparison items may be the period, amplitude, phase, and the like of the detection result, as in the first diagnosis unit 13.

  The second diagnosis unit 23 is not abnormal when the difference between the two detection results to be diagnosed, that is, the detection result of the second detection unit 21A and the detection result of the second detection unit 21B is smaller than a preset set value. Diagnose. As described above, when the second diagnosis unit 23 compares the period, amplitude, and phase of the detection result of the second detection unit 21A and the detection result of the second detection unit 21B, for all items, When the difference between the detection result of the second detection unit 21A and the detection result of the second detection unit 21B is smaller than a preset set value, it may be diagnosed that the second detection unit 21A and the second detection unit 21B are not abnormal.

  On the other hand, when the second diagnosis unit 23 has a difference between at least one of the period, amplitude, and phase between the detection result of the second detection unit 21A and the detection result of the second detection unit 21B equal to or larger than a preset set value. It may be diagnosed that one of the second detection unit 21A and the second detection unit 21B is abnormal. In addition, it is good to set with the preset setting value in consideration of the error which arises on arrangement | positioning of 2nd detection part 21A, 21B. The diagnosis result of the second diagnosis unit 23 is transmitted to the second output unit 24 described later.

  The second output unit 24 outputs a signal according to the diagnosis result of the second diagnosis unit 23. When the second diagnosis unit 23 determines that the second detection unit 21 </ b> A and the second detection unit 21 </ b> B are not abnormal, the second output unit 24 includes the second detection unit 21 </ b> A and the second detection unit 21 </ b> A. A signal corresponding to one detection result of the detection unit 21B is output. Here, both the second detection unit 21A and the second detection unit 21B output analog values, but the second output unit 24 is similar to the first output unit 14 in the second detection unit 21A and the second detection unit 21B. It is preferable to output an analog value obtained by amplifying the output with a predetermined amplification factor.

  On the other hand, when the second diagnosis unit 23 diagnoses that one of the second detection unit 21A and the second detection unit 21B is abnormal, the second output unit 24 outputs the detection result of the second detection unit 21A and the second detection unit 21A. The other signal different from the detection result of 2 detection part 21B is output. As such other signals, a high signal or a low signal may be output as in the first output unit 14. In the present embodiment, the second output unit 24 outputs a second output unit 24A that outputs a result according to the diagnosis result of the second detection unit 21A, and a second output unit 24A that outputs a result according to the diagnosis result of the second detection unit 21B. And 2 output units 24B.

  In the present embodiment, the first power supply unit 15 and the second power supply unit 25 are provided separately. Therefore, the second detection unit 21, the second signal processing unit 22, the second diagnosis unit 23, and the second output unit 24 mounted on the second chip 20 described above, and a second simulation signal input unit 26 described later. The second determination unit 27 is supplied with power by the second power supply unit 25. The second power supply unit 25 of the displacement sensor 1 is supplied with power from an external power supply (for example, a battery) via the terminal electrode 70 as shown in FIG. The second power supply unit 25 uses the second detection unit 21, the second signal processing unit 22, the second diagnosis unit 23, the second output unit 24, the second simulation signal input unit 26, and the second determination as to the voltage related to this power. The voltage is regulated to a voltage suitable for driving the unit 27. In this case, the second power supply unit 25 may be configured using a regulator. The regulator can be appropriately selected from a step-down regulator, a step-up regulator, and a step-up / step-down regulator according to the relationship between the output voltage of the external power supply and the voltage suitable for driving.

  As shown in FIG. 2, the first detection unit 11A and the first detection unit 11B are arranged adjacent to each other. The second detection unit 21A and the second detection unit 21B are also arranged adjacent to each other. Further, the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B are disposed adjacent to each other. Therefore, the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B are arranged in an annular shape with the detection target at the center, and the distance between each other can be arranged at equal intervals. It becomes possible. Therefore, as described above, the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B are rotation sensors or stroke sensors that detect the amount of displacement according to the distance from the detection target. In some cases, the difference due to the arrangement included in the detection result can be minimized. The annular shape centering on the detection target in the present invention is not limited to a circular shape or the same plane in terms of shape. Like an arbitrary point on the surface of the sphere centered on the detection target, the ring is equidistant from the detection target. It means position.

  In addition, the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B are disposed on the edge portions of the substrates on different substrates. In the present embodiment, the substrate corresponds to the substrate constituting the first chip 10 and the substrate constituting the second chip 20. Accordingly, the pair of first detection units 11 </ b> A and 11 </ b> B are disposed at the edge of the first chip 10, and the pair of second detection units 21 </ b> A and 21 </ b> B are disposed at the edge of the second chip 20. By arranging the edge of the first chip 10 and the edge of the second chip 20 close to each other, the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B are connected to each other. It is possible to arrange them close to each other. Moreover, since the magnet as a detection object can be arrange | positioned facing the cyclic | annular center part formed by a pair of 1st detection part 11A, 11B and a pair of 2nd detection part 21A, 21B, it is from a magnet. The distances to the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B can be made equal, respectively, and the distance dependency in the detection result can be reduced.

  Of course, instead of the above configuration, the first detection unit 11 and the second detection unit 21 are set to 1 in order to make it easier to detect a change in magnetic flux according to the rotation of the magnet. You may arrange | position on one magnetic convergence board. Even in this case, since the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B can be arranged adjacent to each other, it is possible to bring them close to each other.

  Further, the pads of the respective functional units for connection to the terminal electrode 70 are different from the edges of the first chip 10 and the second chip 20 in which the first detection unit 11 and the second detection unit 21 are arranged. Therefore, it is possible to simplify the routing of the wire 80 used for wire bonding. In FIG. 2, the first simulation signal input unit 16, the first determination unit 17, the second simulation signal input unit 26, and the second determination unit 27 are omitted, but the first simulation signal input unit 16 and The first determination unit 17 is preferably mounted on a substrate constituting the first chip 10, and the second simulation signal input unit 26 and the second determination unit 27 are preferably mounted on a substrate constituting the second chip 20.

  FIG. 3 shows the waveforms of the respective parts of the displacement sensor 1. (I) is a detection result of the first detection unit 11A, and (II) is a detection result of the first detection unit 11B. Further, (IV) is a detection result of the second detection unit 21A, and (V) is a detection result of the second detection unit 21B. In the example of FIG. 3, at t = 0, the first detection units 11A and 11B and the second detection units 21A and 21B detect the rotation of the magnet and output the detection result. The first diagnosis unit 13 diagnoses whether there is an abnormality based on the detection result of the first detection unit 11A and the detection result of the first detection unit 11B, and transmits the diagnosis result to the first output unit 14.

  Until t = 1, there is no difference between the detection results of the first detection unit 11A and the first detection unit 11B, and therefore the first output unit 14 includes the first detection unit 11A and the first detection unit 11A as shown in (III). An analog signal corresponding to the detection result of the first detection unit 11B is output. However, after t = 1, as shown in (II), the detection result of the first detection unit 11A and the detection result of the first detection unit 11B are different from each other. 13 diagnoses that one of the first detection unit 11A and the first detection unit 11B is abnormal. Accordingly, the first output unit 14 outputs a signal (in the example of FIG. 3, a high signal) indicating that one of the first detection unit 11A and the first detection unit 11B is abnormal.

  On the other hand, the second detection unit 21A and the second detection unit 21B are shown in (VI) since there is no difference in their detection results as shown in (IV) and (V) after t = 0. In this way, an analog signal corresponding to the detection result of the second detection unit 21A and the detection result of the second detection unit 21B is continuously output.

  Thus, according to the present displacement sensor 1, even if any one of the first detection units 11A and 11B and the second detection units 21A and 21B is abnormal, it is abnormal if the other is not abnormal. It is possible to continuously output a signal corresponding to the detection result that is not a signal indicating.

  As described above, the displacement sensor 1 can detect whether or not both of the pair of first detection units 11 are normal (or “whether one of the first detection units 11 is abnormal”). Yes, it is possible to detect whether or not both of the pair of second detection units 21 are normal. The displacement sensor 1 of the present embodiment can further determine whether or not the first diagnosis unit 13 and the second diagnosis unit 23 are normal. This function will be described below.

  The first simulation signal input unit 16 inputs a pair of first simulation signals that the first diagnosis unit 13 diagnoses that one of the pair of first detection units 11 is abnormal to the first diagnosis unit 13. As described above, when the detection result of the first detection unit 11A and the detection result of the first detection unit 11B are different from each other and the difference is equal to or greater than a predetermined value, the first diagnosis unit 13 And one of the 1st detection parts 11B is diagnosed as abnormal. For this reason, “a pair of first simulation signals that the first diagnosis unit 13 diagnoses that one of the pair of first detection units 11 is abnormal” means a pair of signals having a difference equal to or greater than the predetermined value. . An example of such a pair of first simulation signals is shown in FIG. 4 (I) and (II). As shown in (I) and (II) of FIG. 4, the pair of first simulation signals have a difference of a predetermined value or more between the voltage levels after t = 0. The first simulation signal input unit 16 is preferably configured to input a pair of first simulation signals to the first diagnosis unit 13 in response to an instruction from a first determination unit 17 described later.

  The second simulation signal input unit 26 inputs a pair of second simulation signals that the second diagnosis unit 23 diagnoses that one of the pair of second detection units 21 is abnormal to the second diagnosis unit 23. As described above, if the detection result of the second detection unit 21A and the detection result of the second detection unit 21B are different from each other and the difference is greater than or equal to a predetermined value, the second diagnosis unit 23 And one of the 2nd detection parts 21B is diagnosed as abnormal. For this reason, “a pair of second simulation signals that the second diagnosis unit 23 diagnoses that one of the pair of second detection units 21 is abnormal” means a pair of signals having a difference equal to or greater than the predetermined value. . The second simulation signal input unit 26 is preferably configured to input a pair of second simulation signals to the second diagnosis unit 23 in response to an instruction from a second determination unit 27 described later.

  The first determination unit 17 receives a signal indicating that one of the pair of first detection units 11 is abnormal from the first output unit 14 in response to the input of the pair of first simulation signals to the first diagnosis unit 13. When it is output, it is determined that the first diagnosis unit 13 is normal. The 1st determination part 17 acquires the output of the 1st output part 14 output according to the diagnosis of the 1st diagnostic part 13 into which a pair of 1st simulation signal was input. As shown after t = 0 in (III) of FIG. 4, when the acquired output indicates that one of the pair of first detection units 11 is abnormal (in the example of FIG. 4, a low signal ), The first determination unit 17 determines that the first diagnosis unit 13 is normal. On the other hand, when the acquired output does not indicate that the pair of first detection units 11 is abnormal, the first determination unit 17 determines that the first diagnosis unit 13 is not normal.

  In response to the input of the pair of second simulation signals to the second diagnosis unit 23, the second determination unit 27 receives a signal indicating that one of the pair of second detection units 21 is abnormal from the second output unit 24. If it is output, it is determined that the second diagnosis unit 23 is normal. The 2nd determination part 27 acquires the output of the 2nd output part 24 output according to the diagnosis of the 2nd diagnosis part 23 into which a pair of 2nd simulation signal was input. When the acquired output indicates that one of the pair of second detection units 21 is abnormal, the second determination unit 27 determines that the second diagnosis unit 23 is normal. On the other hand, when the acquired output does not indicate that the pair of second detection units 21 is abnormal, the second determination unit 27 determines that the second diagnosis unit 23 is not normal.

  Moreover, the 1st determination part 17 and the 2nd determination part 27 can also determine whether the 1st output part 14 and the 2nd output part 24 are normal, respectively. In this case, the first diagnosis signal input unit 16 outputs a pair of first simulation signals having the same potential that the first diagnosis unit 13 determines that both of the pair of first detection units 11 are not abnormal to the first diagnosis unit. 13 and the second simulation signal input unit 26 outputs a pair of second simulation signals having the same potential that the second diagnosis unit 23 determines that both of the pair of second detection units 21 are not abnormal to the second diagnosis unit. 23 may be input.

  “A pair of first simulation signals having the same potential” and “a pair of second simulation signals having the same potential” respectively mean that the pair of first simulation signals are the same signal, and a pair of second simulation signals. This means that the simulated signals are the same signal. (I) and (II) in FIG. 5 show a pair of first simulation signals composed of the same signals. The first simulation signal input unit 16 is configured to input a pair of first simulation signals to the first diagnosis unit 13 in response to an instruction from the first determination unit 17, and the second simulation signal input unit 26 includes It is preferable to configure the pair of second simulation signals to be input to the second diagnosis unit 23 in accordance with an instruction from the second determination unit 27. Further, in the examples of (I) and (II) in FIG. 5, each of the pair of first simulation signals has a form in which three types of signals having different potentials are sequentially input.

  In this case, the first determination unit 17 receives both the pair of first simulation signals having the same potential from the first output unit 14 to the pair of first detection units 11 according to the input to the first diagnosis unit 13. When the signal indicating that is not abnormal is output, it is determined that the first diagnosis unit 13 and the first output unit 14 are normal. The first determination unit 17 acquires the output of the first output unit 14 output in response to the diagnosis of the first diagnosis unit 13 to which the pair of first simulation signals having the same potential is input ((III in FIG. 5). )reference). When the acquired output indicates that both of the pair of first detection units 11 are normal, the first determination unit 17 determines that the first diagnosis unit 13 and the first output unit 14 are normal. To do. On the other hand, when the acquired output does not indicate that both of the pair of first detection units 11 are normal, the first determination unit 17 determines that one of the first diagnosis unit 13 and the first output unit 14 is not normal. Is determined.

  In addition, in the second determination unit 27, both the pair of second detection units 21 from the second output unit 24 are not abnormal in response to the input of the pair of second simulation signals having the same potential to the second diagnosis unit 23. When the signal which shows this is output, it determines with the 2nd diagnostic part 23 and the 2nd output part 24 being normal. The 2nd determination part 27 acquires the output of the 2nd output part 24 output according to the diagnosis of the 2nd diagnosis part 23 into which a pair of 2nd simulation signal which consists of the same electric potential was input. When the acquired output indicates that both of the pair of second detection units 21 are normal, the second determination unit 27 determines that the second diagnosis unit 23 and the second output unit 24 are normal. To do. On the other hand, when the acquired output does not indicate that both of the pair of second detection units 21 are normal, the second determination unit 27 indicates that one of the second diagnosis unit 23 and the second output unit 24 is not normal. Is determined.

  Furthermore, the first determination unit 17 and the second determination unit 27 determine whether the first output unit 14 and the second output unit 24 are normal, respectively, thereby determining the first diagnosis unit 13 and the second diagnosis unit. It is also possible to determine whether the determination threshold value of the unit 23 is not abnormal.

  In this case, the first simulation signal input unit 16 performs a first diagnosis on a pair of first simulation signals having different potentials that the first diagnosis unit 13 determines that both the pair of first detection units 11 are not abnormal. The second simulation signal input unit 26 inputs a second pair of second simulation signals having different potentials that the second diagnosis unit 23 determines that both of the pair of second detection units 21 are not abnormal. It may be input to the diagnosis unit 23.

  “A pair of first simulation signals having different potentials that the first diagnosis unit 13 determines that both of the pair of first detection units 11 are not abnormal” and “a second diagnosis unit 23 of the pair of second detection units 21 “A pair of second simulation signals having different potentials determined that both are not abnormal” means that the pair of first simulation signals is not the same signal, but the first diagnosis unit 13 is a pair of first detection units. 11 is a signal that falls within a determination threshold value for determining that both are not abnormal, and the pair of second simulation signals are not the same signal, but the second diagnosis unit 23 is a pair of second detection units 21. Both of the signals are within a determination threshold value for determining that both are not abnormal. Such signals are shown in FIGS. 6 (I) and (II). The first simulation signal input unit 16 is configured to input a pair of first simulation signals to the first diagnosis unit 13 in response to an instruction from the first determination unit 17, and the second simulation signal input unit 26 includes It is preferable to configure the pair of second simulation signals to be input to the second diagnosis unit 23 in accordance with an instruction from the second determination unit 27.

  In this case, the first determination unit 17 includes a first diagnosis unit 13 for a pair of first simulation signals having different potentials that the first diagnosis unit 13 determines that both the pair of first detection units 11 are not abnormal. When a signal indicating that both the pair of first detection units 11 are not abnormal is output from the first output unit 14 according to the input to the first output unit 14, it is determined that the first output unit 14 is normal. The first determination unit 17 is a diagnosis of the first diagnosis unit 13 to which the first diagnosis unit 13 is input with a pair of first simulation signals having different potentials that are determined that both the pair of first detection units 11 are not abnormal. The output of the 1st output part 14 output according to is acquired (refer (III) of FIG. 6). When the acquired output indicates that both of the pair of first detection units 11 are not abnormal, the first determination unit 17 determines that the first output unit 14 is normal. Thereby, it is possible to determine that the determination threshold value of the first diagnosis unit 13 is appropriate. On the other hand, when the acquired output does not indicate that both of the pair of first detection units 11 are not abnormal, the first determination unit 17 determines that one of the first diagnosis unit 13 and the first output unit 14 is not normal. judge.

  In addition, the second determination unit 27 inputs a pair of second simulation signals having different potentials that the second diagnosis unit 23 determines that both of the pair of second detection units 21 are not abnormal to the second diagnosis unit 23. Accordingly, when a signal indicating that both of the pair of second detection units 21 are not abnormal is output from the second output unit 24, it is determined that the second output unit 24 is normal. The second determination unit 27 is a diagnosis of the second diagnosis unit 23 to which a pair of second simulation signals having different potentials that the second diagnosis unit 23 determines that both of the pair of second detection units 21 are not abnormal are input. The output of the second output unit 24 that has been output in response to is acquired. When the acquired output indicates that both of the pair of second detection units 21 are not abnormal, the second determination unit 27 determines that the second output unit 24 is normal. Thereby, it is possible to determine that the determination threshold value of the second diagnosis unit 23 is appropriate. On the other hand, when the acquired output does not indicate that both of the pair of second detection units 21 are not abnormal, the second determination unit 27 indicates that one of the second diagnosis unit 23 and the second output unit 24 is not normal. judge.

  Accordingly, it is possible to determine whether or not the diagnostic accuracy of the first diagnostic unit 13 and the output accuracy of the first output unit 14 according to the diagnostic result of the first diagnostic unit 13 are normal, and the first It becomes possible to determine whether or not the output accuracy of the second output unit 24 according to the diagnosis accuracy of the second diagnosis unit 23 and the diagnosis result of the second diagnosis unit 23 is normal.

[Other Embodiments]
In the above embodiment, the displacement sensor 1 has been described as detecting the amount of rotation of the magnet. However, it is naturally possible to use it for a displacement sensor that detects other amounts of displacement.

  In the above embodiment, the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B are described as being annularly arranged. However, the pair of first detection units 11A and 11B and the pair of first detection units 11A and 11B It is naturally possible to arrange the two detectors 21A and 21B side by side in an I-shape or L-shape.

  In the above-described embodiment, the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B have been described as being disposed on the edge portions of the substrates on different substrates. It is also possible to arrange the first detectors 11A and 11B and the pair of second detectors 21A and 21B on the same substrate. Even in this case, the above-described effects can be obtained by arranging the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B on the edge of the substrate. Further, even when the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21B are arranged on different substrates, it is naturally possible to arrange them apart from the edges of the respective substrates. is there.

  In the above embodiment, the first power supply unit 15 and the second power supply unit 25 are described as being provided separately. However, the first power supply unit 15 and the second power supply unit 25 are configured by a single power supply unit. It is also possible to do.

  In the above embodiment, each of the first diagnosis unit 13 and the second diagnosis unit 23 has been described as diagnosing that there is no abnormality when the difference between the two detection results to be diagnosed is smaller than a preset value. The first diagnosis unit 13 and the second diagnosis unit 23 may be configured to diagnose whether there is an abnormality by comparing with a known reference signal, for example.

  In the above embodiment, the displacement sensor 1 includes a pair of first detection units 11A and 11B and a pair of second detection units 21A and 21B, and the pair of first detection units 11A and 11B and the pair of second detection units 21A and 21A. Although it has been described that the substrates different from 21B are arranged at the edges of the substrates, respectively, even when the displacement sensor 1 includes only the pair of first detection units 11A and 11B, the pair of first detection units 11A. 11B can be arranged at the edge of the substrate. In such a case, since the size of the substrate on which the pair of first detection units 11A and 11B is mounted can be reduced, the size of the displacement sensor 1 can be reduced.

  In the above embodiment, the displacement sensor 1 is shown as the lead component in which the terminal electrode 70 is inserted into the through hole or socket of the substrate and mounted in FIG. 2, but it can also be configured as a surface mount component.

  In the embodiment described above, the first output unit 14A and the first output unit 14B are configured to be separated from each other, and the second output unit 24A and the second output unit 24B are configured to be separated from each other. It is also possible to configure the first output unit 14A and the first output unit 14B integrally or adjacent to each other and configure the second output unit 24A and the second output unit 24B integrally or adjacent to each other. It is.

  The present invention can be used for a displacement sensor that detects a displacement amount of a detection target.

1: displacement sensor 11: first detection unit 13: first diagnosis unit 14: first output unit 15: first power supply unit 16: first simulation signal input unit 17: first determination unit 21: second detection unit 23: Second diagnostic unit 24: second output unit 25: second power supply unit 26: second simulation signal input unit 27: second determination unit

Claims (6)

A pair of first detectors that detect a displacement amount of the same detection target and are arranged adjacent to each other;
A first diagnosis unit that diagnoses whether or not both of the pair of first detection units are abnormal based on detection results of the pair of first detection units;
A first output unit that outputs a signal according to a diagnosis result of the first diagnosis unit;
Detecting a displacement amount of the same detection target as the first detection unit, and a pair of second detection units arranged adjacent to the pair of first detection units;
A second diagnostic unit that diagnoses whether or not both of the pair of second detection units are abnormal based on the detection results of the pair of second detection units;
A second output unit that outputs a signal according to a diagnosis result of the second diagnosis unit,
A first simulation signal input unit that inputs a pair of first simulation signals that the first diagnosis unit diagnoses that one of the pair of first detection units is abnormal to the first diagnosis unit;
A second simulation signal input unit that inputs a pair of second simulation signals that the second diagnosis unit diagnoses that one of the pair of second detection units is abnormal to the second diagnosis unit;
When a signal indicating that one of the pair of first detection units is abnormal is output from the first output unit in response to the input of the pair of first simulation signals to the first diagnosis unit, A first determination unit that determines that the first diagnosis unit is normal;
When a signal indicating that one of the pair of second detection units is abnormal is output from the second output unit in response to the input of the pair of second simulation signals to the second diagnosis unit, A second determination unit that determines that the second diagnosis unit is normal;
Displacement sensor. The first simulation signal input unit inputs a pair of first simulation signals having the same potential that the first diagnosis unit determines that both of the pair of first detection units are not abnormal to the first diagnosis unit,
The second simulation signal input unit inputs a pair of second simulation signals having the same potential that the second diagnosis unit determines that both of the pair of second detection units are not abnormal to the second diagnosis unit,
In response to the input of the pair of first simulation signals having the same potential to the first diagnosis unit, a signal indicating that both of the pair of first detection units are not abnormal is output from the first output unit. In the case, the first determination unit determines that the first diagnosis unit and the first output unit are normal,
In response to the input of the pair of second simulation signals having the same potential to the second diagnosis unit, a signal indicating that both of the pair of second detection units are not abnormal is output from the second output unit. The displacement sensor according to claim 1, wherein the second determination unit determines that the second diagnosis unit and the second output unit are normal. The first simulation signal input unit inputs a pair of first simulation signals having different potentials that the first diagnosis unit determines that both of the pair of first detection units are not abnormal to the first diagnosis unit. ,
The second simulation signal input unit inputs a pair of second simulation signals having different potentials that the second diagnosis unit determines that both of the pair of second detection units are not abnormal to the second diagnosis unit. ,
In response to the input of the pair of first simulation signals having different potentials to the first diagnosis unit, a signal indicating that both of the pair of first detection units are not abnormal is output from the first output unit. The first determination unit determines that the first output unit is normal,
In response to the input of the pair of second simulation signals having different potentials to the second diagnosis unit, a signal indicating that both of the pair of second detection units are not abnormal is output from the second output unit. The displacement sensor according to claim 1, wherein the second determination unit determines that the second output unit is normal. The pair of first detection units and the pair of second detection units detect the amount of displacement according to a change in the distance to the detection target,
The displacement sensor according to any one of claims 1 to 3, wherein the pair of first detection units and the pair of second detection units are arranged in an annular shape with the detection target at the center.   The first power supply unit that supplies power to the pair of first detection units and the second power supply unit that supplies power to the pair of second detection units are separately provided. The displacement sensor according to claim 1.   Each of the first diagnosis unit and the second diagnosis unit diagnoses that there is no abnormality when a difference between two detection results to be diagnosed is smaller than a preset set value. The displacement sensor according to the item.

Images