JP2018063203A - Potential detection substrate and potential measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a potential detection substrate which can prevent a small potential difference from being buried in noise, and a potential measuring device having the potential detection substrate.SOLUTION: The potential detection substrate is for detecting the potential of a liquid sample. A first potential detection substrate includes at least one electrode and a plurality of wirings connected to each electrode on a substrate. Each electrode has an irregular surface in which at least one recess part 12A is formed by patterning. The at least one recess part has a width larger than twice the thickness of an electric double layer 120 in contact with the irregular surface.SELECTED DRAWING: Figure 5

Description

  The present disclosure relates to a potential detection substrate and a potential measurement device including the same.

  In recent years, electrical properties of a liquid sample are measured, and physical properties of the liquid sample are determined from the measurement results, and types of cells and the like included in the liquid sample are determined (for example, Patent Document 1). , 2).

Japanese Patent Laid-Open No. 11-187865 JP 2001-281001 A

  The minute voltage generated from the liquid sample is, for example, about 50 to 60 mV, and the potential difference that can be detected by the potential sensor through the medium is, for example, only 10 mV or less. For this reason, it is preferable to prevent a minute potential difference, for example, about 10 mV or less from being buried in noise. For example, the electrochemical resistance is preferably as low as possible. For example, it is preferable that the electrochemical resistance be as uniform as possible for each electrode. Therefore, it is desirable to provide a potential detection substrate capable of suppressing a minute potential difference from being buried in noise and a potential measurement device including the potential detection substrate.

  The first potential detection substrate according to an embodiment of the present disclosure is for detecting the potential of a liquid sample. The first potential detection substrate includes one or a plurality of electrodes and a plurality of wirings connected to each electrode on the substrate. Each electrode has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning. The width of the one or more recesses is wider than twice the thickness of the electric double layer formed in contact with the uneven surface.

  A first potential measurement device according to an embodiment of the present disclosure includes a potential detection substrate for detecting a potential of a liquid sample, and a signal processing unit that processes a potential signal detected by the potential detection substrate. . In the first potential measurement device, the potential detection substrate has the same components as the first potential detection substrate.

  In the first potential detection substrate and the first potential measurement device according to an embodiment of the present disclosure, the uneven surface is formed by patterning on each electrode. Thereby, the width | variety of the 1 or several recessed part contained in an unevenness | corrugation can be easily set to a desired magnitude | size compared with the case where an uneven surface is formed with porous. In the first potential detection substrate and the first potential measurement device, the width of the one or more recesses included in the uneven surface is more than twice the thickness of the electric double layer formed in contact with the uneven surface. It is getting wider. Thereby, an electric double layer can be formed following the uneven surface. As a result, the surface area of the electric double layer can be increased as compared with the case where the uneven surface is formed of a porous material.

  The second potential detection substrate according to an embodiment of the present disclosure is for detecting the potential of the liquid sample. The second potential detection substrate includes a plurality of electrodes and a plurality of wirings connected to each electrode on the substrate. Each electrode has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning. The layout or density of the one or more recesses is the same for each electrode.

  A second potential measurement device according to an embodiment of the present disclosure includes a potential detection substrate for detecting a potential of a liquid sample, and a signal processing unit that processes a potential signal detected by the potential detection substrate. . In the first potential measurement device, the potential detection substrate has the same components as those of the second potential detection substrate.

  In the second potential detection substrate and the second potential measurement device according to an embodiment of the present disclosure, the uneven surface is formed by patterning on each electrode. Thereby, the width | variety of the 1 or several recessed part contained in an unevenness | corrugation can be easily set to a desired magnitude | size compared with the case where an uneven surface is formed with porous. In the second potential detection substrate and the second potential measurement device, the layout or density of one or more recesses is equal to each other for each electrode. Thereby, the surface area of the electric double layer can be made more uniform for each electrode as compared with the case where the uneven surface is formed of a porous material.

  The third potential detection substrate according to an embodiment of the present disclosure is for detecting the potential of the liquid sample. The third potential detection substrate includes a plurality of electrodes and a plurality of wirings connected to each electrode on the substrate. Each electrode has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning. The width of the one or more recesses is such that the number of recesses included in the uneven surface and the number of recesses included in the surface of the electric double layer formed in contact with the uneven surface are equal to each other. .

  A third potential measurement device according to an embodiment of the present disclosure includes a potential detection substrate for detecting a potential of a cell or a drug solution, and a signal processing unit that processes a potential signal detected by the potential detection substrate. Yes. In the first potential measurement device, the potential detection substrate has the same components as the third potential detection substrate.

  In the third potential detection substrate and the third potential measurement device according to an embodiment of the present disclosure, the uneven surface is formed on each electrode by patterning. Thereby, the width | variety of the several recessed part contained in an unevenness | corrugation can be easily set to a desired magnitude | size compared with the case where an uneven surface is formed with porous. Further, in the third potential detection substrate and the third potential measurement device, the width of the one or more recesses is formed on the number of the recesses included in the uneven surface and the surface of the electric double layer formed in contact with the uneven surface. The size is such that the number of recesses included is equal to each other. Thereby, the surface area of an electric double layer can be enlarged compared with the case where an uneven surface is formed with porous.

According to the first and third potential detection substrates according to one embodiment of the present disclosure and the first and third potential measurement devices according to one embodiment of the present disclosure, In comparison, since the surface area of the electric double layer can be increased, the electrochemical resistance can be reduced to such an extent that a minute potential difference is not buried in noise. As a result, it is possible to suppress a minute potential difference from being buried in noise. In addition, the effect of this indication is not necessarily limited to the effect described here, Any effect described in this specification may be sufficient.
According to the first, second, and third potential detection substrates according to an embodiment of the present disclosure, and the first, second, and third potential measurement devices according to an embodiment of the present disclosure, the uneven surface is made porous. Compared to the case where the electrode is made of a material, the surface area of the electric double layer can be made more uniform for each electrode, so that the electrochemical resistance is reduced to the extent that a minute potential difference is not buried in noise. Can be made uniform. As a result, it is possible to suppress a minute potential difference from being buried in noise. In addition, the effect of this indication is not necessarily limited to the effect described here, Any effect described in this specification may be sufficient.

It is a figure showing the example of schematic structure of the potential measuring device concerning one embodiment of this indication. It is a figure showing the example of a plane structure of the electric potential detection board | substrate of FIG. It is a figure which expands and represents the electrode group part of the electric potential detection board | substrate of FIG. It is a figure showing the cross-sectional structural example of the electric potential detection board | substrate of FIG. It is a figure showing the cross-sectional structural example of the electrode of FIG. It is a figure showing the cross-sectional structural example of the electrode of FIG. It is a figure showing the cross-sectional structural example of the electrode of FIG. FIG. 4 is a diagram illustrating a cross-sectional configuration example of two electrodes adjacent to each other in FIG. 3. It is a figure showing the cross-sectional structural example of the electrode of FIG. It is a figure showing the upper surface structural example of the recessed part of the electrode of FIGS. It is a figure showing the cross-sectional structural example for demonstrating the manufacturing method of the electrode of FIG. It is a figure showing an example of the manufacturing process following Drawing 11A. It is a figure showing an example of the manufacturing process following Drawing 11B. It is a figure showing the cross-sectional structural example for demonstrating the manufacturing method of the electrode of FIG. It is a figure showing an example of the manufacturing process following Drawing 12A. It is a figure showing an example of the manufacturing process following Drawing 12B. It is a figure showing the modification of the electrode of FIG.

  Hereinafter, modes for carrying out the present disclosure will be described in detail with reference to the drawings. The following description is one specific example of the present disclosure, and the present disclosure is not limited to the following aspects. In addition, the present disclosure is not limited to the arrangement, dimensions, dimensional ratio, and the like of each component illustrated in each drawing.

[Constitution]
A configuration of the potential measurement apparatus 1 according to an embodiment of the present disclosure will be described. FIG. 1 shows a schematic configuration example of a potential measuring apparatus 1 according to the present embodiment. The potential measuring apparatus 1 is an apparatus for measuring, for example, the potential of a liquid sample, determining physical properties of the liquid sample from the measurement result, and determining the type of cells or the like contained in the liquid sample. Examples of the solvent material contained in the liquid sample include a culture solution containing NaCl in the range of 0.8 to 1.0 W / V%. The potential measurement apparatus 1 includes, for example, a potential detection substrate 10 for detecting the potential of a liquid sample, a measurement unit signal processing unit 20 that processes a potential signal 10A detected by the potential detection substrate 10, and a measurement unit signal processing unit. And a display unit 30 for displaying the processing result at 20.

  FIG. 2 illustrates a planar configuration example of the potential detection substrate 1. FIG. 3 is an enlarged view of the electrode group 12E (described later) portion of the potential detection substrate 1. FIG. 4 illustrates a cross-sectional configuration example of the potential detection substrate 10.

  The potential detection substrate 1 includes, for example, an electrode group 12E at the central portion of the upper surface of the substrate 11. For example, as illustrated in FIG. 3, the electrode group 12 </ b> E includes a plurality of electrodes 12 arranged in a matrix with a predetermined gap therebetween. In the electrode group 12E, for example, 64 electrodes 12 are arranged in an 8 × 8 matrix. The size of each electrode 12 is, for example, about 50 μm square. The gap between the two electrodes 12 adjacent to each other is, for example, about 150 μm. The size of the electrode group 12E at this time is, for example, about 1 × 1 mm square. Further, for example, one or a plurality of reference electrodes are arranged around the electrode group 12E (for example, in the diagonal direction of the electrode group 12E in the drawing).

  The potential detection substrate 10 includes, for example, a plurality of electrodes 12 on the substrate 11, a plurality of wirings 13 connected to each electrode 12, and a pad 15 connected to the tip of each wiring 13 one by one. And have. Each wiring 13 serves as a lead wiring from the electrode 12. The pad 15 serves as a terminal electrode for connecting the potential detection substrate 1 to an external circuit. In each wiring 13, one end is connected to the electrode 12 and the other end is connected to the pad 15. The potential detection substrate 10 may further include, for example, a base layer 14 in a portion corresponding to a position directly below the electrode 12 in each wiring 13. The underlayer 14 is for improving the adhesion between the electrode 12 and the wiring 14, and is disposed between the electrode 12 and the wiring 13.

5, 6, and 7 illustrate examples of the cross-sectional configuration of the electrode 12. 5, 6, and 7 illustrate the state in which the electric double layer 120 is formed on the surface of the electrode 12 (uneven surface 12 </ b> S). The electric double layer 120 is a layer generated on the surface of each electrode 12 by positive and negative ions contained in the liquid sample. The thickness T1 of the electric double layer 120 is represented by the following formula, for example.
T1 = √ (ε ₀ ε ₁ kT) / 2πnz ² e ² )
ε ₀ : dielectric constant in vacuum ε ₁ : relative dielectric constant of medium k: Boltzmann constant T: temperature n: ion density z: ion valence e: elementary electric charge

  FIG. 8 illustrates a cross-sectional configuration example of two electrodes 12 adjacent to each other in FIG. FIG. 8 illustrates a state in which the electric double layer 120 is formed on the surface of the electrode 12 (uneven surface 12S).

  Each electrode 12 has an uneven surface 12S in which one or a plurality of recesses 12A are formed by patterning. Here, it is preferable that the width of one or the plurality of recesses 12A is wider than D1 and twice the thickness T1 of the electric double layer 120 formed in contact with the uneven surface 12S. The cross-sectional shape of the recess 12A is not particularly limited. The cross-sectional shape of the recess 12A may be rectangular, for example, as shown in FIGS. 5, 7, and 8, or may be elliptical, for example, as shown in FIG. Good. The depths of the recesses 12A are preferably equal to each other.

  Regarding the width D1 of the one or more recesses 12A, the number of recesses 12A included in the uneven surface 12S is equal to the number of recesses 120A included in the surface of the electric double layer 120 formed in contact with the uneven surface 12S. Such a size is preferable. The width D1 indicates the width at the opening end of the recess 12A. The recess 120A is generated inside the recess 12A when the electric double layer 120 is formed following the inner surface of the recess 12A. When the width D1 is substantially equal to the thickness T1 × 2, the recess 120A is formed on the outermost surface of the electric double layer 120 immediately above the recess 12A, for example, as shown in FIG.

  Attention is paid to two electrodes 12 adjacent to each other. At this time, it is preferable that the layout or density of the one or more recesses 12A is equal to each other for each electrode 12, as shown in FIG. At this time, in the two electrodes 12 adjacent to each other, the width D1 and the depth of the recess 12A are preferably equal to each other.

  FIG. 9 illustrates a modification of the cross-sectional configuration of the electrode 12. FIG. 9 illustrates a state where the electric double layer 120 is formed on the surface of the electrode 12 (uneven surface 12S). The electrode 12 may be configured by a plurality of electrode layers stacked on each other. For example, as illustrated in FIG. 9, the electrode 12 may be a multilayer electrode in which a first electrode layer 121, a second electrode layer 122, and a third electrode layer 123 are stacked in this order from the substrate 11 side. At this time, on the bottom surface of each recess 12A, the second electrode layer (for example, the second electrode layer) from the top among the plurality of electrode layers (first electrode layer 121, second electrode layer 122, and third electrode layer 123). The surface of the electrode layer 122) is preferably exposed. For example, when the surface of the second electrode layer 122 is exposed at the bottom surface of each recess 12A, the second electrode layer 122 is more specific than the third electrode layer 123 in contact with the upper surface of the second electrode layer 122. It is preferable that the material is made of a material having a relatively low etching rate with respect to the etching gas.

  FIG. 10 illustrates an example of a top surface configuration of the recess 12A of the electrode 12 of FIGS. For example, the recess 12A may have a hole shape as shown in FIGS. 10 (A) and 10 (B). At this time, in the recess 12A in FIG. 10A, the opening shape is circular. In addition, in the recess 12A in FIG. 10B, the opening shape is rectangular. For example, as shown in FIG. 10B, it may have a hole shape. The recess 12A may have a groove shape as shown in FIGS. 10C and 10D, for example. At this time, in the recess 12A in FIG. 10C, the opening shape is rectangular. Further, in the recess 12A in FIG. 10D, the opening shape is a lattice shape.

[Production method]
Next, an example of a method for manufacturing the electrode 12 will be described. FIG. 11A shows a cross-sectional configuration example for explaining a method for manufacturing the electrode 12. FIG. 11B shows an example of a manufacturing process following FIG. 11A. FIG. 11C shows an example of a manufacturing process following FIG. 11B. First, a resist layer 200 in which one or more predetermined openings 200A are formed is formed on the surface of the single layer electrode 12. Next, the electrode 12 is selectively removed by dry etching using the resist layer 200 as a mask. As a result, one or a plurality of recesses 12A are formed at predetermined positions. Thereafter, the resist layer 200 is removed by ashing. In this way, the electrode 12 having the uneven surface 12S is manufactured. At this time, the depths of the recesses 12A included in the uneven surface 12S are equal to each other.

  Next, another example of the method for manufacturing the electrode 12 will be described. FIG. 12A shows a cross-sectional configuration example for explaining a method for manufacturing the electrode 12. FIG. 12B shows an example of a manufacturing process following FIG. 12A. FIG. 12C illustrates an example of a manufacturing process subsequent to FIG. 12B. First, a resist layer in which a predetermined one or a plurality of openings 200A are formed on the surface of the electrode 12 in which a plurality of electrode layers (first electrode layer 121, second electrode layer 122, and third electrode layer 123) are laminated. 200 is formed. Next, the uppermost layer (third electrode layer 123) of the electrodes 12 is selectively removed by dry etching using the resist layer 200 as a mask. As a result, one or a plurality of recesses 12A are formed at predetermined positions in the uppermost layer (third electrode layer 123) of the electrodes 12. At this time, it is preferable to use an etching gas whose etching rate for the third electrode layer 123 in contact with the upper surface of the second electrode layer 122 is larger than that for the second electrode layer 122. In such a case, the surface of the second electrode layer 122 is exposed at the bottom surface of each recess 12 </ b> A, and the depth of each recess 12 </ b> A is equal to the thickness of the third electrode layer 123. Thereafter, the resist layer 200 is removed by ashing. In this way, the electrode 12 having the uneven surface 12S is manufactured.

In addition, the combination of the material of the electrode 12 in FIG. 11A or the electrode 123 in FIG. 12A and the etching gas is as shown in Table 1 below, for example.

The electrode 12 may have a protective layer on the surface so that the surface does not directly touch the liquid sample. For example, as shown in FIG. 13, the electrode 12 may have a protective layer 12D on the surface (uneven surface 12S). The protective layer 12D covers the uneven surface 12S so as to follow the uneven surface 12S. At this time, the width D1 of the one or more recesses 12A is wider than twice the thickness (the thickness T1 of the electric double layer 120 formed in contact with the uneven surface 12S + the thickness of the protective layer 24). preferable. Examples of the material of the protective layer 12D include materials shown in Table 2 below. The protective layer 12D preferably has conductivity.

[effect]
Next, the effect of the potential detection substrate 10 according to the present embodiment will be described.

  In recent years, electrical properties of a liquid sample are measured, and physical properties of the liquid sample are determined from the measurement results, and types of cells and the like included in the liquid sample are determined (for example, Patent Document 1). , 2).

  The minute voltage generated from the liquid sample is, for example, about 50 to 60 mV, and the potential difference that can be detected by the potential sensor through the medium is, for example, only 10 mV or less. For this reason, it is preferable to prevent a minute potential difference, for example, about 10 mV or less from being buried in noise. For example, the electrochemical resistance is preferably as low as possible. For example, it is preferable that the electrochemical resistance be as uniform as possible for each electrode.

  On the other hand, in the present embodiment, each electrode 12 is provided with an uneven surface 12S by patterning. Thereby, compared with the case where the uneven surface 12S is formed of a porous material, the width of the one or more recessed portions 12A included in the unevenness can be easily set to a desired size. In the present embodiment, the width D1 of one or more recesses 12A included in the uneven surface 12S is wider than twice the thickness T1 of the electric double layer 120 formed in contact with the uneven surface 12S. Yes. Thereby, the electric double layer 120 can be formed following the uneven surface 12S. As a result, the surface area of the electric double layer 120 can be increased as compared with the case where the uneven surface 12S is formed of a porous material, and the electrochemical resistance is reduced to such an extent that a minute potential difference is not buried in noise. be able to. Therefore, it is possible to suppress a minute potential difference from being buried in noise.

  In the present embodiment, the layout or density of one or more recesses 12 </ b> A is the same for each electrode 12. Thereby, the surface area of the electric double layer 120 can be made more uniform for each electrode 12 as compared with the case where the uneven surface 12S is formed of a porous material. As a result, the electrochemical resistance can be made uniform for each electrode to such an extent that a minute potential difference is not buried in noise. Therefore, it is possible to suppress a minute potential difference from being buried in noise.

  In the present embodiment, the width D1 of one or more recesses 12A is such that the number of recesses 12A included in the uneven surface 12S and the recesses included in the surface of the electric double layer 120 formed in contact with the uneven surface 12S. The size of 120A is equal to each other. Thereby, the surface area of the electric double layer 120 can be increased as compared with the case where the uneven surface 12S is formed of a porous material, and the electrochemical resistance is reduced to such an extent that a minute potential difference is not buried in noise. be able to. Therefore, it is possible to suppress a minute potential difference from being buried in noise.

  In the present embodiment, when all the recesses 12A are formed by one dry etching, the depths of the recesses 12A can be made equal to each other. Thus, in this embodiment, the resistance values for each electrode 12 can be easily made uniform by forming all the recesses 12A by one dry etching.

  The present disclosure has been described above with reference to a plurality of embodiments and their modifications. However, the present disclosure is not limited to the above-described embodiments, and various modifications can be made. In addition, the effect described in this specification is an illustration to the last. The effects of the present disclosure are not limited to the effects described in this specification. The present disclosure may have effects other than those described in this specification.

For example, this indication can take the following composition.
(1)
A potential detection substrate for detecting the potential of a liquid sample,
On the substrate, one or more electrodes, and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
The width of one or more of the recesses is wider than twice the thickness of the electric double layer formed in contact with the uneven surface.
(2)
The potential detection substrate according to (1), wherein a layout or density of one or more of the recesses is equal to each other for each of the electrodes.
(3)
The potential detecting substrate according to (1) or (2), wherein the concave portion has a hole shape.
(4)
The potential detecting substrate according to (1) or (2), wherein the concave portion has a groove shape.
(5)
Each of the electrodes is composed of a plurality of electrode layers stacked on each other,
The potential detection substrate according to any one of (1) to (4), wherein a surface of the second and subsequent electrode layers from among a plurality of the electrode layers is exposed on a bottom surface of each of the recesses. .
(6)
A protective layer covering the uneven surface so as to follow the uneven surface;
The width of one or more of the recesses is wider than twice the thickness (the thickness of the electric double layer formed in contact with the uneven surface + the thickness of the protective layer). (1) to (5) The potential detection substrate according to any one of the above.
(7)
The potential detection substrate according to (6), wherein the protective layer has conductivity.
(8)
A potential detection substrate for detecting the potential of a liquid sample,
On the substrate, a plurality of electrodes, and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface having a plurality of concave portions formed by patterning,
A potential detection substrate in which a layout or density of one or more of the recesses is equal to each other for each of the electrodes.
(9)
A potential detection substrate for detecting the potential of a liquid sample,
On the substrate, a plurality of electrodes, and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface having a plurality of concave portions formed by patterning,
The width of the one or more recesses is such that the number of the recesses included in the uneven surface is equal to the number of the recesses included in the surface of the electric double layer formed in contact with the uneven surface. The potential detection board.
(10)
A potential detection substrate for detecting the potential of the liquid sample;
A signal processing unit that processes a potential signal detected by the potential detection substrate,
The potential detection substrate is
On the substrate, having one or a plurality of electrodes and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
The width of the one or more recesses is wider than twice the thickness of the electric double layer formed in contact with the uneven surface.
(11)
A potential detection substrate for detecting the potential of the liquid sample;
A signal processing unit that processes a potential signal detected by the potential detection substrate,
The potential detection substrate is
On the substrate, have a plurality of electrodes and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
A potential measuring device in which the layout or density of one or more of the recesses is equal to each other for each of the electrodes.
(12)
A potential detection substrate for detecting the potential of the liquid sample;
A signal processing unit that processes a potential signal detected by the potential detection substrate,
The potential detection substrate is
On the substrate, have a plurality of electrodes and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
The width of the one or more recesses is such that the number of the recesses included in the uneven surface is equal to the number of the recesses included in the surface of the electric double layer formed in contact with the uneven surface. A potential measuring device.

  DESCRIPTION OF SYMBOLS 1 ... Potential measuring device, 10 ... Potential detection board | substrate, 10A ... Potential signal, 11 ... Board | substrate, 12 ... Electrode, 12A ... Recessed part, 12E ... Electrode group, 12S ... Irregular surface, 13 ... Wiring layer, 14 ... Underlayer, 15 DESCRIPTION OF SYMBOLS ... Pad, 20 ... Measurement part, 30 ... Display part, 120 ... Electric double layer, 120A ... Recessed part, 121 ... 1st electrode layer, 122 ... 2nd electrode layer, 123 ... 3rd electrode layer, 200 ... Resist layer, 200A ... opening, D1 ... width, T1 ... thickness.

Claims (12)

A potential detection substrate for detecting the potential of a liquid sample,
On the substrate, one or more electrodes, and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
The width of one or more of the recesses is wider than twice the thickness of the electric double layer formed in contact with the uneven surface. The potential detection substrate according to claim 1, wherein a layout or density of one or more of the recesses is equal to each other for each of the electrodes. The potential detection substrate according to claim 1, wherein the recess has a hole shape. The potential detection substrate according to claim 1, wherein the recess has a groove shape. Each of the electrodes is composed of a plurality of electrode layers stacked on each other,
2. The potential detection substrate according to claim 1, wherein a surface of the second and subsequent electrode layers among a plurality of the electrode layers is exposed on a bottom surface of each of the recesses. A protective layer covering the uneven surface so as to follow the uneven surface;
The electric potential according to claim 1, wherein the width of one or more of the recesses is larger than twice (the thickness of the electric double layer formed in contact with the uneven surface + the thickness of the protective layer). Detection board. The potential detection substrate according to claim 6, wherein the protective layer has conductivity. A potential detection substrate for detecting the potential of a liquid sample,
On the substrate, a plurality of electrodes, and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface having a plurality of concave portions formed by patterning,
A potential detection substrate in which a layout or density of one or more of the recesses is equal to each other for each of the electrodes. A potential detection substrate for detecting the potential of a liquid sample,
On the substrate, a plurality of electrodes, and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface having a plurality of concave portions formed by patterning,
The width of the one or more recesses is such that the number of the recesses included in the uneven surface is equal to the number of the recesses included in the surface of the electric double layer formed in contact with the uneven surface. The potential detection board. A potential detection substrate for detecting the potential of the liquid sample;
A signal processing unit that processes a potential signal detected by the potential detection substrate,
The potential detection substrate is
On the substrate, having one or a plurality of electrodes and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
The width of the one or more recesses is wider than twice the thickness of the electric double layer formed in contact with the uneven surface. A potential detection substrate for detecting the potential of the liquid sample;
A signal processing unit that processes a potential signal detected by the potential detection substrate,
The potential detection substrate is
On the substrate, have a plurality of electrodes and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
A potential measuring device in which the layout or density of one or more of the recesses is equal to each other for each of the electrodes. A potential detection substrate for detecting the potential of the liquid sample;
A signal processing unit that processes a potential signal detected by the potential detection substrate,
The potential detection substrate is
On the substrate, have a plurality of electrodes and a plurality of wirings connected to each of the electrodes,
Each of the electrodes has a concavo-convex surface in which one or a plurality of concave portions are formed by patterning,
The width of the one or more recesses is such that the number of the recesses included in the uneven surface is equal to the number of the recesses included in the surface of the electric double layer formed in contact with the uneven surface. A potential measuring device.

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