JP2018036749A - Design evaluation support system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reinforce an FD/FP function targeting a device design regarding a multiloop heating apparatus.SOLUTION: A design evaluation support system includes: a deterioration index detecting part 1 for detecting deterioration indexes of a plurality of multiloop heating apparatuses to be evaluated, for individual heating apparatuses and for individual temperature control systems in the heating apparatuses; a deterioration index collecting part 2 for collecting the deterioration indexes detected by the deterioration index detecting part 1 for the individual heating apparatuses of the same type; an initial value storage part 3 for previously storing initial values of the deterioration indexes of the heating apparatuses to be evaluated, for the individual heating apparatuses and for the individual temperature control systems in the heating apparatuses; and a deterioration index change presenting part 4 for calculating data indicating secular changes of the deterioration indexes and present the data, on the basis of the deterioration indexes collected by the deterioration index collecting part 2 and the initial values of the deterioration indexes stored in the initial value storage part 3.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a heating device of a multi-loop temperature control system in which a plurality of controllers respectively control the temperature of a corresponding temperature control zone, and more particularly to a design evaluation support system that provides information that leads to improvement in the design of the heating device. is there.

  In semiconductor manufacturing equipment, EES (Equipment Engineering System) has entered a practical stage. The EES is a system that checks whether or not a semiconductor manufacturing apparatus is functioning normally with data and improves the reliability and productivity of the apparatus. The main purpose of EES is failure detection (FD: Fault Detection) and failure prediction (FP: Fault Prediction) for the device itself.

  In FD / FP, there is a way of grasping hierarchies of device control level, module level, subsystem level, and I / O device level. The main components at the I / O device level are sensors and actuators. Regarding the FD / FP of the actuator, it can be said that the sequence control operation that requires only the bit string data (actuator data) of (0, 1) is in a practical stage.

  On the other hand, regarding the FD / FP of the sensor, process quantities such as temperature, pressure, and flow rate become target data. For these data, msec. It is not reasonable to save all data at the level. Therefore, an EES-compliant substrate processing apparatus (see Patent Document 1) that checks the representative value by converting the sensor data into a representative value for each processing unit managed by the apparatus or for a certain period of time has been proposed. ing. The representative value is a maximum value, a minimum value, an average value, or the like. If FD / FP can be realized with these representative values, the amount of communication, the amount of required memory, and the like can be greatly reduced as compared with the case of monitoring all data.

  Here, as for a control loop corresponding to a subsystem (a controller level for executing PID control or the like), as in Patent Document 2 and Patent Document 3, one that calculates the characteristics of the temperature control response of the heating device has been proposed. Yes. For example, as shown in FIG. 13, the heating apparatus includes a heat treatment furnace 100 that heats an object to be treated, an electric heater 101, a temperature sensor 102 that measures the temperature in the heat treatment furnace 100, and a heat treatment furnace. A temperature controller 103 that controls the temperature in 100, a power regulator 104, a power supply circuit 105, and a PLC (Programmable Logic Controller) 106 that controls the entire heating device. The temperature controller 103 calculates the operation amount MV so that the temperature PV (control amount) measured by the temperature sensor 102 matches the temperature set value SP. The power regulator 104 determines power according to the operation amount MV, and supplies the determined power to the electric heater 101 through the power supply circuit 105.

  The technique disclosed in Patent Document 2 calculates the ratio Kp / Tp between the process gain Kp to be controlled and the process time constant Tp in the heating apparatus shown in FIG. 13, for example. The technique disclosed in Patent Document 3 Is to calculate the maximum change rate ΔPVmax of the control amount PV. These techniques are techniques for representing a control result as a representative value in order to grasp a control malfunction state (for example, heater deterioration of a heating device).

JP 2010-219460 A JP 2007-293474 A JP 2014-170343 A

  As the FD / FP using the representative value, the techniques disclosed in Patent Document 2 and Patent Document 3 are known as described above. These can be said to be FD / FP functions that directly handle the control state itself.

  However, with only the FD / FP function that handles the control state itself, it is difficult to obtain an effect that reduces the occurrence of control problems. That is, as a problem in device design that leads to the occurrence of control defects, it is required to further strengthen the FD / FP function that directly handles the device design itself.

  For example, some heating apparatuses use a tunnel furnace 200 having a plurality of temperature control zones Z1 to Z8 as shown in FIG. The tunnel furnace 200 is specifically a solder reflow furnace, a ceramic firing furnace, or a print drying furnace, and is a furnace that allows a work to flow by a conveyor in the direction from the temperature control zone Z1 to Z8. In such a heating apparatus using the tunnel furnace 200, even if it is intended to design each zone appropriately, it is only a story at the design stage, and between zones according to the environment and conditions at the practical stage. Variations in suitability can occur.

  The zone Z1 close to the opened entrance and the zone Z8 close to the exit have a structure that radiates heat more easily than the zone Z4 and zone Z5 closer to the center, and therefore theoretically requires more heating by the heater. Further, when comparing the zone Z1 close to the entrance and the zone Z8 close to the exit, the zone Z1 into which the workpiece cooled at room temperature enters is compared with the zone Z8 in which the workpiece after passing through the high temperature zone is received from the zone Z7. In theory, a lot of heating with a heater is required. When a series of steps such as reflow, firing, and drying are performed in the tunnel furnace 200, if the flow is preheating, main heating, and cooling, the set temperatures of the zones will be different. Heating by is not uniform.

  Therefore, the appropriateness of the design changes depending on the environment and conditions at the practical stage, and if the design is inappropriate, it is a problem of the device design that leads to the occurrence of control failure. become. However, the problem in this case is a problem of the nature of the magnitude of variation between zones.

  The present invention has been made to solve the above-described problems, and provides a design evaluation support system capable of strengthening the FD / FP function for device design of a multi-loop type heating apparatus as compared with the conventional one. Objective.

The design evaluation support system of the present invention uses a multi-loop type heating device that controls the temperature of the temperature control zone corresponding to each controller as an evaluation target, and sets deterioration indicators of a plurality of multi-loop type heating devices to be evaluated as heating devices. A deterioration index detecting means for detecting each temperature control system in each heating device, a deterioration index collecting means for collecting the deterioration index detected by the deterioration index detecting means for each heating device of the same type, and an evaluation object Initial value storage means for storing in advance the initial value of the deterioration index of the heating device for each heating device and for each temperature control system in the heating device, the deterioration index collected by the deterioration index collecting means and the initial value It is characterized by comprising deterioration index change presenting means for calculating and presenting data showing the secular change of the deterioration index from the initial value of the deterioration index stored in the storage means. It is intended.
In addition, one configuration example of the design evaluation support system according to the present invention further includes an operation amount history average based on time series data of operation amounts output from individual controllers of a plurality of multi-loop heating devices to be evaluated. Average manipulated variable calculation means for calculating a value for each heating device and each temperature control system in the heating device, data indicating the deterioration index deterioration presented by the deterioration index change presentation means, and the history average value And a manipulated variable effect presenting means for presenting the relevance to each other.

Further, in one configuration example of the design evaluation support system of the present invention, the deterioration index detection means detects a ratio S_res = Kp / Tp between the process gain Kp to be controlled and the process time constant Tp as the deterioration index, The deterioration index change presenting means uses the ratio R_S_res as data indicating the secular change of the deterioration index from the ratio S_res collected by the deterioration index collecting means and the initial value S_ini stored in the initial value storage means. / S_ini is calculated.
Further, in one configuration example of the design evaluation support system of the present invention, the manipulated variable effect presenting means extracts a minimum value MVm_min from the history average value MVm calculated by the average manipulated variable calculating means in the same heating apparatus. A process of calculating a visualization ratio U = MVm_min / MVm using the minimum value MVm_min as a numerator and each history average value MVm as a denominator and presenting the visualization ratio together with data indicating the secular change of the deterioration index is provided for each heating device and This is performed for each temperature control system in the heating device.
Further, in one configuration example of the design evaluation support system of the present invention, the deterioration index detecting means identifies transient state data for the time series data of the temperature and the time series data of the manipulated variable collected from the heating device, and the transient state The model equation to be controlled is identified from the temperature data and the manipulated variable data, and the ratio S_res = Kp / Tp between the process gain Kp to be controlled and the process time constant Tp is calculated based on the model equation to be controlled. The treatment is performed for each heating device and for each temperature control system in the heating device.

  According to the present invention, the deterioration index of a plurality of multi-loop heating devices to be evaluated is detected for each heating device and for each temperature control system in the heating device, and the detected deterioration index is detected for each heating device of the same type. It is possible to provide information that leads to improvement of device design by calculating and presenting data indicating the secular change of the deterioration index from the collected deterioration index and the initial value of the deterioration index. The FD / FP function for the target can be strengthened.

  Further, in the present invention, based on the time-series data of the operation amount output from the individual controllers of the plurality of multi-loop heating devices to be evaluated, the history average value of the operation amount is determined for each heating device and in each heating device. The amount of operation affects the deterioration of the heater system as information that leads to the improvement of the device design by presenting the relationship between the data indicating the secular change of the deterioration index and the historical average value. The degree of information can be provided.

It is a block diagram which shows the structure of the design evaluation assistance system which concerns on the 1st Embodiment of this invention. It is a flowchart explaining operation | movement of the design evaluation assistance system which concerns on the 1st Embodiment of this invention. It is a figure which shows the example of the data which show the secular change of the initial value of the degradation parameter | index of a heating apparatus, the collected degradation parameter | index, and a degradation parameter | index. It is a figure which shows the example which displayed the data which show the secular change of a degradation parameter | index as a graph. It is a figure which shows another example of the data which show the initial value of the degradation parameter | index of a heating apparatus, the collected degradation parameter | index, and a secular change of a degradation parameter | index. It is a figure which shows another example which displayed the data which show the secular change of a degradation parameter | index as a graph. It is a figure which shows another example of the data which show the initial value of the degradation parameter | index of a heating apparatus, the collected degradation parameter | index, and a secular change of a degradation parameter | index. It is a figure which shows another example which displayed the data which show the secular change of a degradation parameter | index as a graph. It is a block diagram which shows the structure of the design evaluation assistance system which concerns on the 2nd Embodiment of this invention. It is a flowchart explaining operation | movement of the design evaluation assistance system which concerns on the 2nd Embodiment of this invention. It is a figure which shows the example of the data which show the secular change of the deterioration parameter | index of a heating apparatus, the visualization ratio, and the historical average value of the operation amount. It is a figure which shows the example which displayed the data and visualization ratio which show a secular change of a degradation parameter | index as a graph. It is a block diagram which shows the structure of a heating apparatus. It is a block diagram which shows another structure of a heating apparatus.

[Principle of Invention 1]
The inventor noticed that even if an index is given to each control loop, when a plurality of control loops are targeted, analyzing the tendency between the plurality of indices leads to improvement information of the device design.

  That is, for example, when targeting a control system in a device including a plurality of sensors and heaters, it can be obtained from a plurality of devices of the same type as to which sensor or controller (for example, temperature controller) provides deterioration information. If the tendency of concentration of deterioration appears when data is analyzed, there is a possibility that a problem in device design is inherent. Based on this, concentration of deterioration is targeted for a plurality of control loops and a plurality of devices by using an index (for example, Kp / Tp ratio of Patent Document 2 or ΔPVmax of Patent Document 3) for detecting deterioration of a control system component. I came up with the usefulness of visualizing trends.

[Principle of Invention 2]
As an element that causes the heater to be easily deteriorated, there is an average heater output (an operation amount MV average value) at the time of maintaining a high temperature. In other words, the level of the temperature (control amount PV) at the time of maintaining the high temperature is not necessarily directly connected to the load of the heater depending on the influence of inter-zone interference. For example, the heater output at 700 ° C. may be larger than the heater output at the 800 ° C. zone.
Therefore, it is more preferable to visualize the manipulated variable MV average value at the time of maintaining the high temperature. This visualization makes it possible for the operator to consider with higher confidence.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a design evaluation support system according to the first embodiment of the present invention. The present embodiment is an example corresponding to Principle 1 of the invention described above. In the present embodiment, the above-described Kp / Tp ratio (that is, an indicator of heater deterioration) will be described as an example of an indicator for detecting deterioration of components of the control system. In this case, a degradation index detection function for detecting (calculating) a known degradation index is generally mounted on the temperature controller side, and other functions are generally mounted on the host system of the temperature controller.

  The design evaluation support system includes a degradation index detection unit 1 that detects degradation indexes of a plurality of multi-loop heating devices to be evaluated for each heating device and each temperature control system in the heating device, and a degradation index detection unit 1. The degradation index collection unit 2 that collects the degradation index detected by each heating device of the same type, and the initial value of the degradation index of the heating device to be evaluated for each heating device and each temperature control system in the heating device From the initial value storage unit 3 stored in advance, the degradation index collected by the degradation index collection unit 2 and the initial value of the degradation index stored in the initial value storage unit 3, data indicating the aging of the degradation index is calculated. And a deterioration index change presentation unit 4 for presentation.

  In the present invention, a multi-loop type heating apparatus as shown in FIG. 14 is an apparatus to be evaluated. In FIG. 14, temperature sensors S1 to S8 measure temperatures PV1 to PV8 of temperature control zones Z1 to Z8 heated by heaters H1 to H8, respectively. The temperature controllers C1 to C8 calculate the manipulated variables MV1 to MV8 so that the temperatures PV1 to PV8 measured by the temperature sensors S1 to S8 respectively coincide with the temperature set value SP. The power adjusters P1 to P8 supply power corresponding to the operation amounts MV1 to MV8 output from the temperature controllers C1 to C8 to the heaters H1 to H8, respectively. In FIG. 14, eight temperature control systems that independently control the temperatures PV1 to PV8 of the temperature control zones Z1 to Z8 to which the temperature controllers C1 to C8 respectively correspond are formed.

  In this embodiment, the temperature control system (control loop) as shown in FIG. 14 has eight multi-loop heating devices as the heating device A, and the temperature control system has 12 multi-loop heating devices as the heating device B. The multi-loop type heating device having 14 temperature control systems is called a heating device C.

  Hereinafter, the operation of the design evaluation support system of the present embodiment will be described with reference to FIG. The deterioration index detection unit 1 detects deterioration indexes of a plurality of heating devices for each heating device and for each individual temperature control system (for each heater) in the heating device (step S100 in FIG. 2). In the present embodiment, the ratio S = Kp / Tp is used as the deterioration index of the components of the heating device, specifically, the deterioration index of the heater.

  The deterioration index detection unit 1 identifies the transient state data in the first half of the step response for the time series data of the temperature PV and the time series data of the manipulated variable MV collected from the heating device, and the temperature PV data and the manipulated variable MV in the transient state. The control target model formula is identified from the data, and the ratio S = Kp / Tp between the control target process gain Kp and the process time constant Tp is calculated based on the control target model formula.

Control targets of the present embodiment include a heat treatment furnace (tunnel furnace), an object to be heated such as a semiconductor device, and a heater. Assuming that such a controlled object can be approximated by a first order delay and a dead time, the model mathematical expression Gp of the controlled object can be described as the following expression.
Gp = Kpexp (−Lps) / (1 + Tps) (1)

  In Expression (1), s is a Laplace operator, and Lp is a dead time. If the data of the temperature PV and the data of the manipulated variable MV in the transient state of the temperature control can be acquired, the equation (1) can be determined and the ratio S = Kp / Tp can be calculated. The deterioration index detection unit 1 performs the above processing for each heating device and for each temperature control system (for each heater) in the heating device. Since the method for calculating the ratio S = Kp / Tp is disclosed in Patent Document 2, detailed description thereof is omitted.

  Next, the degradation index collection unit 2 collects and stores the degradation index (S = Kp / Tp) detected by the degradation index detection unit 1 for each heating device of the same type (same type) (step S101 in FIG. 2). . Here, the same type of heating device basically means a heating device having the same design and specifications, and typically refers to a heating device to which the device manufacturer has assigned the same model number. In this embodiment, there are six heating devices to be evaluated, the first and fourth furnaces are the heating device A, the second and fifth furnaces are the heating devices B, and the third and sixth furnaces are the heating devices. Suppose that C.

  The initial value storage unit 3 stores in advance an initial value S_ini of the degradation index of the heating device to be evaluated for each heating device and for each temperature control system (for each heater) in the heating device. While the heater is not deteriorated, the deterioration indicator is detected by the deterioration indicator detector 1 during the initial operation of the heating device, and the detected deterioration indicator is registered in the initial value storage unit 3 as the initial value S_ini. That's fine.

The deterioration index change presentation unit 4 calculates data indicating the secular change of the deterioration index from the deterioration index collected by the deterioration index collection unit 2 and the initial value S_ini of the deterioration index stored in the initial value storage unit 3. Present (step S102 in FIG. 2). In the present embodiment, the ratio R with respect to the initial value S_ini is used as data indicating the secular change of the deterioration index. When the latest degradation index collected by the degradation index collection unit 2 is S_res, the ratio R is expressed by the following equation.
R = S_res / S_ini (2)

The deterioration index change presentation unit 4 performs the calculation of Expression (2) for each heating device and for each temperature control system (for each heater) in the heating device, and displays the calculated ratio R in a graph, for example.
Thus, the process of the design evaluation support system is completed. The design evaluation support system performs the above processing periodically or when a user requests it.

  FIG. 3 is a diagram showing numerical examples of initial values S_ini, deterioration indexes S_res, and ratios R of the deterioration indicators of the first and fourth furnaces belonging to the type of the heating apparatus A, and FIG. 4 is a graph showing the ratio R of FIG. FIG. In the graph shown in FIG. 4, a bar 41 indicating the ratio R of each heater in the No. 1 furnace and a bar 42 indicating the ratio R of each heater in the No. 4 furnace are displayed. The ratio R indicates that the smaller the value, the greater the degree of wear of the temperature control system components (specifically, the heater).

  FIG. 5 is a diagram showing numerical examples of initial values S_ini, deterioration indexes S_res, and ratios R of the deterioration indexes of the No. 2 and No. 5 furnaces belonging to the type of the heating device B, and FIG. 6 is a graph showing the ratio R of FIG. FIG. In the graph shown in FIG. 6, a bar 61 indicating the ratio R of each heater in the No. 2 furnace and a bar 62 indicating the ratio R of each heater in the No. 5 furnace are displayed.

  FIG. 7 is a view showing numerical examples of initial values S_ini, deterioration indicators S_res, and ratios R of the deterioration indicators of the No. 3 and No. 6 furnaces belonging to the type of the heating apparatus C, and FIG. 8 is a graph showing the ratio R of FIG. FIG. In the graph shown in FIG. 8, a bar 81 indicating the ratio R of each heater in the No. 3 furnace and a bar 82 indicating the ratio R of each heater in the No. 6 furnace are displayed.

  In the numerical examples of FIGS. 3 to 8, for simplicity of explanation, two apparatuses are used for each apparatus type. However, according to FIGS. 4, 6, and 8, the heater H 7 is deteriorated in the type of the heating apparatus A. It can be recognized that the heater H9 deteriorates in the heating device B type, and the heaters H10 and H14 deteriorate in the heating device C type. Therefore, these heaters or heater conditions can be used as improvement information for device design.

  As described above, in the present embodiment, deterioration indicators for multi-loop heating devices are collected for each heating device of the same type, and data indicating the aging of deterioration indicators is calculated and presented for each heating device and each heater. By doing so, it is possible to provide information that leads to improvement of the device design.

  In the present embodiment, it is important to collect deterioration indicators of a plurality of heating devices of the same type, not a single heating device. If the degradation index is collected for only one heating device, even if data indicating the aging of the degradation index is presented for each heater, whether the degradation of the heater is due to individual differences in the heating device It is difficult to judge whether it is derived from the design. On the other hand, if deterioration indicators for a plurality of heating devices of the same type are collected and data indicating the aging of the deterioration indicator is presented for each heating device and each heater, the tendency of deterioration common to each heating device can be obtained. Since it can be visualized, it can be determined that there is a high possibility that the location where deterioration is concentrated is derived from the device design.

  The specific method of visualization is not limited to the table format as shown in FIGS. 3, 5, and 7 or the graph format as shown in FIGS. For example, the deterioration index change presentation unit 4 performs the calculation of Expression (2) for each heating device and for each temperature control system (for each heater) in the heating device, and shows the secular change of the deterioration index for the same type of heating device. You may make it show the average value of data (ratio R) for every temperature control system in which the position in a heating apparatus is the same. For example, in the example of FIG. 3, the average value of the ratio R of the heaters H1 of the No. 1 furnace and the No. 4 furnace is calculated and presented.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. FIG. 9 is a block diagram showing the configuration of the design evaluation support system according to the second embodiment of the present invention. The same components as those in FIG. 1 are denoted by the same reference numerals. The present embodiment is an example corresponding to Principle 2 of the invention described above. In the present embodiment, a display example is shown only for the type of the heating apparatus A, but it goes without saying that the heating apparatuses B and C are also applicable as in the first embodiment.

  The design evaluation support system according to the present embodiment includes a degradation index detection unit 1, a degradation index collection unit 2, an initial value storage unit 3, a degradation index change presentation unit 4, and multi-loop heating devices to be evaluated. The operation amount acquisition unit 5 that acquires time-series data of the operation amount MV from the temperature controller of the controller, and based on the time-series data of the operation amount MV, the history average value MVm of the operation amount MV is determined for each heating device and in the heating device. The manipulated variable that presents the relationship between the average manipulated variable calculating unit 6 that is calculated for each individual temperature control system, the data indicating the deterioration index deterioration presented by the degradation indicator change presenting unit 4, and the history average value MVm. And an influence presentation unit 7.

  Next, the operation of the design evaluation support system of this embodiment will be described with reference to FIG. The operations of the degradation index detection unit 1 and the degradation index collection unit 2 (steps S100 and S101 in FIG. 10) are as described in the first embodiment.

  The operation amount acquisition unit 5 acquires time-series data of the operation amount MV from the individual temperature controllers of the respective heating devices to be evaluated (step S103 in FIG. 10). In addition, what is necessary is just to let the acquisition period of the operation amount MV be a period until a fixed time passes, for example after the design evaluation support system starts the process of FIG. At this time, in the tunnel furnace 200 as shown in FIG. 14, for example, a series of steps such as reflow, firing, and drying are performed. Therefore, the acquisition period of the manipulated variable MV is set so that all these steps are included. It is preferable.

Based on the time series data of the operation amount MV acquired by the operation amount acquisition unit 5, the average operation amount calculation unit 6 determines the history average value MVm (average operation amount) for each heating device and for each temperature control system in the heating device. It is calculated every time (each heater) (step S104 in FIG. 10).
The operation (step S102 in FIG. 10) of the deterioration index change presentation unit 4 is as described in the first embodiment.

The manipulated variable effect presenting unit 7 presents the relationship between the history index MVm and the data indicating the degradation index deterioration presented by the degradation index change presenting unit 4 (step S105 in FIG. 10). The history average value MVm is preferably quantified such that the best condition is 1.0 and the maximum. Therefore, the manipulated variable effect presentation unit 7 extracts the minimum value MVm_min from the average history value MVm calculated by the average manipulated variable calculation unit 6 in the same heating apparatus, and uses the minimum value MVm_min as the numerator and each history average value MVm. Is calculated for each temperature control system (each heater) in the heating device. That is, the visualization ratio U is as follows.
U = MVm_min / MVm (3)

  The manipulated variable effect presentation unit 7 performs the calculation of Expression (3) for each heating device and for each temperature control system (for each heater) in the heating device, and the deterioration index change presentation unit 4 calculates the calculated visualization ratio U. Presented together with the data indicating the aging of the deterioration index.

  FIG. 11 is a diagram showing numerical examples of the ratio R, the visualization ratio U, and the history average value MVm between the first and fourth furnaces belonging to the type of the heating apparatus A, and FIG. 12 is a graph showing the ratio R and the visualization ratio U in FIG. It is a figure which shows the example displayed. The graph shown in FIG. 12 shows the bar 41 indicating the ratio R of each heater in the No. 1 furnace, the bar 42 indicating the ratio R of each heater in the No. 4 furnace, and the visualization ratio U of each heater in the No. 1 furnace. A broken line 43 and a broken line 44 indicating the visualization ratio U of each heater of the No. 4 furnace are displayed.

  The history average value MVm is a variable that means that the larger the value, the greater the influence on the degree of wear of the temperature control system components (specifically, the heater). Therefore, the smaller the value of the visualization ratio U, the greater the influence on the degree of wear. On the other hand, the smaller the value of the ratio R, the greater the wear level, so the relationship between the operation amount MV and the wear level can be easily understood. That is, it is possible to provide information on the degree to which the manipulated variable MV affects the deterioration of the heater system as information that leads to improvement of the design of the multi-loop heating device.

  The configuration excluding the degradation index detection unit 1 of the design evaluation support system described in the first and second embodiments includes a computer having a CPU (Central Processing Unit), a storage device, and an interface, and hardware resources thereof. It can be realized by a program to be controlled. The CPU executes the processing described in the first and second embodiments in accordance with a program stored in the storage device. Moreover, the deterioration index detection unit 1 is provided for each individual temperature controller in the multi-loop heating device as described above. As is well known, the temperature controller can be realized by a computer and a program.

  The present invention can be applied to a technology that supports the design of a multi-loop heating apparatus.

  DESCRIPTION OF SYMBOLS 1 ... Degradation parameter | index detection part, 2 ... Degradation parameter | index collection part, 3 ... Initial value memory | storage part, 4 ... Degradation parameter | index change presentation part, 5 ... Operation amount acquisition part, 6 ... Average operation amount calculation part, 7 ... Operation amount influence presentation Department.

Claims (5)

Each controller controls a multi-loop heating device that controls the temperature of the corresponding temperature control zone, and the deterioration index of the multiple multi-loop heating devices to be evaluated is determined for each heating device and for each temperature in the heating device. A deterioration index detecting means for detecting each control system;
A deterioration index collecting means for collecting the deterioration index detected by the deterioration index detecting means for each heating device of the same type;
Initial value storage means for storing in advance the initial value of the deterioration index of the heating device to be evaluated for each heating device and for each temperature control system in the heating device;
Deterioration index change presenting means for calculating and presenting data indicating the secular change of the degradation index from the degradation index collected by the degradation index collection means and the initial value of the degradation index stored in the initial value storage means. A design evaluation support system characterized by comprising. In the design evaluation support system according to claim 1,
Further, based on the time series data of the operation amount output from the respective controllers of the plurality of multi-loop heating devices to be evaluated, the history average value of the operation amount is determined for each heating device and each temperature control system in the heating device. An average operation amount calculation means for calculating each time;
A design evaluation support system comprising: data indicating a deterioration change over time presented by the degradation index change presentation means; and an operation amount influence presentation means for presenting a relationship between the history average value. In the design evaluation support system according to claim 1 or 2,
The deterioration index detecting means detects a ratio S_res = Kp / Tp between the process gain Kp to be controlled and the process time constant Tp as the deterioration index,
The deterioration index change presenting means uses the ratio R_S_res as data indicating the secular change of the deterioration index from the ratio S_res collected by the deterioration index collecting means and the initial value S_ini stored in the initial value storage means. A design evaluation support system characterized by calculating / S_ini. In the design evaluation support system according to claim 2,
The manipulated variable effect presenting means extracts the minimum value MVm_min from the history average value MVm calculated by the average manipulated variable calculating means in the same heating apparatus, and uses the minimum value MVm_min as the numerator and each history average value MVm as the denominator. The visualization ratio U = MVm_min / MVm is calculated and presented together with data indicating the secular change of the deterioration index for each heating device and each temperature control system in the heating device. Design evaluation support system. In the design evaluation support system according to claim 3,
The deterioration index detecting means specifies transient state data for temperature time series data and manipulated variable time series data collected from the heating device, and controls the model formula of the controlled object based on the transient temperature data and manipulated variable data. And calculating the ratio S_res = Kp / Tp between the process gain Kp of the control target and the process time constant Tp based on the model formula of the control target for each heating device and individual temperature control in the heating device A design evaluation support system that is performed for each system.