JP2017185543A5

JP2017185543A5 -

Info

Publication number: JP2017185543A5
Application number: JP2017048143A
Authority: JP
Filing date: 2017-03-14
Publication date: 2019-12-26
Anticipated expiration: 2036-04-01

Description

本発明は、レーザ発振器より射出されたレーザ光のビームパラメータ積を可変させるビームパラメータ積可変装置と、前記ビームパラメータ積可変装置より射出されたレーザ光のビーム径を可変させるビーム径可変装置と、正の焦点距離を有し、前記ビーム径可変装置より射出されたレーザ光を集光して板材に照射させる第３のレンズとを備え、前記ビーム径可変装置は、
光軸方向に移動自在とされ、正の焦点距離を有して、レーザ光の射出端より射出されたレーザ光の発散光を収束光に変換する第１のレンズと、光軸方向に移動自在とされ、負の焦点距離を有して、前記収束光が入射される第２のレンズとを有し、前記第２のレンズは、前記第１のレンズの光軸方向の位置に対応して、前記収束光が集光する位置から前記第１のレンズ側に、前記第２のレンズの焦点距離と同じ距離だけずらした位置に配置されて、前記収束光を平行光に変換するように構成されており、前記第２のレンズから射出する平行光のビーム径をＤ、前記ビームパラメータ積可変装置によって設定されるレーザ光のビームパラメータ積をＢＰＰ、前記第３のレンズの焦点距離をｆ、前記第３のレンズによって集光されるレーザ光の集光径をｄとしたとき、式（１）を満たす目標とするビーム径Ｄ及び集光径ｄとするために、

前記ビームパラメータ積可変装置を制御してＢＰＰを所定の値に設定し、かつ、前記第１及び第２のレンズの位置を決定する制御部をさらに備えるレーザ加工機を提供する。 The present invention is over a beam parameter product varying device for varying a beam parameter product of the laser beam emitted from The oscillator, the beam parameter product variator beam diameter varying device for varying the beam diameter of the laser beam emitted from the And a third lens having a positive focal length and condensing the laser light emitted from the beam diameter variable device to irradiate the plate material, the beam diameter variable device,
A first lens that is movable in the optical axis direction, has a positive focal length, and converts divergent light of laser light emitted from the emission end of the laser light into convergent light, and is movable in the optical axis direction And a second lens having a negative focal length and receiving the convergent light, wherein the second lens corresponds to the position of the first lens in the optical axis direction. Is arranged at a position shifted by the same distance as the focal length of the second lens from the position where the convergent light is converged to the first lens side, and converts the convergent light into parallel light. D is the beam diameter of the parallel light emitted from the second lens, BPP is the beam parameter product of the laser light set by the beam parameter product variable device, f is the focal length of the third lens, Focusing of laser light focused by the third lens The when the d, to the beam diameter D and Atsumariko径d to target satisfying the equation (1),

Wherein by controlling a beam parameter product variator sets the BPP to a predetermined value, and to provide further comprising les chromatography The machine control unit for determining the position of said first and second lenses.

上記のレーザ加工機において、前記第１のレンズを移動させるための第１の移動機構と、前記第２のレンズを移動させるための第２の移動機構と、前記第１の移動機構を駆動する第１の駆動部と、前記第２の移動機構を駆動する第２の駆動部とをさらに備え、前記制御部は、前記第１及び第２のレンズを前記板材の加工条件に応じて移動させるよう、前記第１及び第２の駆動部を制御することが好ましい。 In the above-described laser beam machine, a first moving mechanism for moving the first lens, a second moving mechanism for moving the second lens, and driving the first moving mechanism The apparatus further includes a first driving unit and a second driving unit that drives the second moving mechanism , wherein the control unit moves the first and second lenses according to processing conditions of the plate material. as, it is preferable to control the first and second driving portions.

上記のレーザ加工機において、前記制御部は、前記板材の板厚が薄いほど集光径ｄを小さくするよう、前記第３のレンズに入射されるレーザ光のビーム径Ｄを大きくし、前記板材の板厚が厚いほど集光径ｄを大きくするよう、前記第３のレンズに入射されるレーザ光のビーム径Ｄを小さくするよう前記第１及び第２の駆動部を制御することが好ましい。 In the above-mentioned laser beam machine, the control unit increases the beam diameter D of the laser light incident on the third lens so as to reduce the converging diameter d as the plate thickness of the plate material decreases, It is preferable to control the first and second driving units so that the beam diameter D of the laser light incident on the third lens is reduced so that the condensing diameter d increases as the thickness of the lens increases .

このとき、前記第１及び第２の駆動部が前記第１及び第２のレンズを移動させても、前記第３のレンズより射出されて前記板材に集光するレーザ光の焦点位置は一定である。 At this time, before Symbol be first and second drive unit moves the first and second lens, the focal position of the laser beam focused on the plate is emitted from the third lens constant It is.

上記のレーザ加工機において、前記第１のレンズを移動させるための第１の移動機構と、前記第２のレンズを移動させるための第２の移動機構と、前記第３のレンズを移動させるための第３の移動機構と、前記第１の移動機構を駆動する第１の駆動部と、前記第２の移動機構を駆動する第２の駆動部と、前記第３の移動機構を駆動する第３の駆動部とをさらに備え、前記制御部は、前記第１のレンズ、前記第２のレンズ、及び、前記第３のレンズを前記板材の加工条件に応じて移動させるよう、前記第１の駆動部、前記第２の駆動部、及び、前記第３の駆動部を制御することが好ましい。 In the above-mentioned laser beam machine, a first moving mechanism for moving the first lens, a second moving mechanism for moving the second lens, and a mechanism for moving the third lens. A third driving mechanism, a first driving section for driving the first moving mechanism, a second driving section for driving the second moving mechanism, and a second driving section for driving the third moving mechanism. And a third drive unit , wherein the control unit is configured to move the first lens, the second lens, and the third lens according to processing conditions of the plate material. drive unit, said second driving unit, and a benzalkonium controls the third drive unit are preferred.

凸レンズ２８は、射出端１２２ｅから凸レンズ２８までの距離が凸レンズ２８の焦点距離以上となるように配置されている。よって、凸レンズ２８は、レーザ光の発散光を収束光に変換する。制御部５０は、凸レンズ２８を、射出端１２２ｅから凸レンズ２８までの距離が凸レンズ２８の焦点距離以上となる条件で光軸方向に移動させることができる。 The convex lens 28 is arranged such that the distance from the exit end 122e to the convex lens 28 is equal to or longer than the focal length of the convex lens 28. Therefore, the convex lens 28 converts the divergent light of the laser light into convergent light. The control unit 50 can move the convex lens 28 in the optical axis direction under the condition that the distance from the exit end 122e to the convex lens 28 is equal to or longer than the focal length of the convex lens 28.

Claims

A beam parameter product variable device that changes a beam parameter product of laser light emitted from a laser oscillator,
A beam diameter variable device that changes the beam diameter of the laser light emitted from the beam parameter product variable device,
A third lens having a positive focal length and condensing the laser beam emitted from the beam diameter variable device and irradiating the plate material with the laser beam;
With
The beam diameter variable device,
A first lens that is movable in the optical axis direction, has a positive focal length, and converts divergent light of the laser light emitted from the emission end of the laser light into convergent light;
A second lens movable in the optical axis direction, having a negative focal length, and receiving the convergent light;
Has,
The second lens has the same focal length as the second lens from the position where the convergent light is collected to the first lens side, corresponding to the position of the first lens in the optical axis direction. It is arranged at a position shifted by a distance, and is configured to convert the convergent light into parallel light,
The beam diameter of the parallel light emitted from the second lens is D, the beam parameter product of the laser light set by the beam parameter product variable device is BPP, the focal length of the third lens is f, and the third lens is When the focusing diameter of the laser light focused by the lens is d,
In order to set the target beam diameter D and the condensing diameter d that satisfy the expression (1),

The apparatus further includes a control unit that controls the beam parameter product variable device to set BPP to a predetermined value and determines the positions of the first and second lenses.
Les over The processing machine.

A first moving mechanism for moving the first lens;
A second moving mechanism for moving the second lens;
A first driving unit that drives the first moving mechanism;
A second driving unit that drives the second moving mechanism;
Further comprising
Wherein the control unit, so as to move the first and second lens according to the processing conditions of the plate, that controls the first and second drive unit
Laser processing machine according to 請 Motomeko 1.

The control unit increases the beam diameter D of the laser beam incident on the third lens so that the converging diameter d decreases as the thickness of the plate material decreases. 3. The laser beam machine according to claim 2 , wherein the first and second driving units are controlled to reduce a beam diameter D of the laser light incident on the third lens so as to increase the light diameter d . 4.

The focal position of laser light emitted from the third lens and focused on the plate material is constant even when the first and second driving units move the first and second lenses. 4. The laser beam machine according to 3.

The third lens is movable in the optical axis direction, the laser processing machine according to 請 Motomeko 1 that is configured to change the focal position of the laser beam.

A first moving mechanism for moving the first lens;
A second moving mechanism for moving the second lens;
A third moving mechanism for moving the third lens;
A first driving unit that drives the first moving mechanism;
A second driving unit that drives the second moving mechanism;
A third driving unit that drives the third moving mechanism;
Further comprising
The control unit is configured to move the first lens, the second lens, and the third lens according to processing conditions of the plate material, the first driving unit, the second driving unit and that controls the third driving unit
Laser processing machine according to 請 Motomeko 5.

The control unit increases the beam diameter D of the laser beam incident on the third lens so that the converging diameter d decreases as the thickness of the plate material decreases. 7. The laser beam machine according to claim 6, wherein the first and second driving units are controlled to reduce a beam diameter D of the laser light incident on the third lens so as to increase the light diameter d .