JP2017124611A - Recording element substrate and liquid discharge head - Google Patents

Recording element substrate and liquid discharge head Download PDF

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Publication number
JP2017124611A
JP2017124611A JP2016239369A JP2016239369A JP2017124611A JP 2017124611 A JP2017124611 A JP 2017124611A JP 2016239369 A JP2016239369 A JP 2016239369A JP 2016239369 A JP2016239369 A JP 2016239369A JP 2017124611 A JP2017124611 A JP 2017124611A
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Japan
Prior art keywords
recording
substrate
liquid
pressure chamber
path
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Pending
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JP2016239369A
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Japanese (ja)
Inventor
孝胤 守屋
Takatsugu Moriya
孝胤 守屋
信太郎 笠井
Shintaro Kasai
信太郎 笠井
喜幸 中川
Yoshiyuki Nakagawa
喜幸 中川
亜紀子 齊藤
Akiko Saito
亜紀子 齊藤
石田 浩一
Koichi Ishida
浩一 石田
辰也 山田
Tatsuya Yamada
辰也 山田
慎治 岸川
Shinji Kishikawa
慎治 岸川
貴之 関根
Takayuki Sekine
貴之 関根
周三 岩永
Shuzo Iwanaga
周三 岩永
Original Assignee
キヤノン株式会社
Canon Inc
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Priority to JP2016002957 priority Critical
Priority to JP2016002957 priority
Application filed by キヤノン株式会社, Canon Inc filed Critical キヤノン株式会社
Priority claimed from US15/397,517 external-priority patent/US10293607B2/en
Publication of JP2017124611A publication Critical patent/JP2017124611A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers

Abstract

PROBLEM TO BE SOLVED: To provide a recording element substrate and a liquid discharge head configured to discharge liquid by communicating air bubbles with atmospheric air, which can further reduce satellites.SOLUTION: A recording element substrate 10 comprises: a discharge port 13 for discharging liquid; a pressure chamber 23 communicating with the discharge port 13; a recording element 15 for bubbling liquid, provided in the pressure chamber 23 to face the discharge port 13; and a substrate 11 having the recording element 15 formed therein. The height of pressure chamber is set to be 7μm or less. When the recording element 15 is driven so that liquid in the pressure chamber 23 is discharged, air bubbles which are generated communicate with atmospheric air, and a discharge port projected region 13P having the discharge port 13 projected onto the substrate 11 includes a region protruding from a heated-region projected region 15P having a heated region of the recording element 15 projected onto the substrate 11, or a visible outline of the discharge port projected region 13P internally contacts a visible outline of the heated-region projected region 15P.SELECTED DRAWING: Figure 23

Description

  The present invention relates to a recording element substrate used for ejecting a liquid such as ink, and a liquid ejection head including the recording element substrate.

As a method for discharging a liquid by a liquid discharge head, for example, an ink jet recording head, there is a thermal ink jet method in which a film is boiled by applying heat to the liquid and the foaming force is used. A liquid discharge head used for a thermal ink jet method includes a discharge port for discharging a liquid, a pressure chamber communicating with the discharge port, a flow path for supplying liquid to the pressure chamber, and a supply port for supplying liquid to the flow path. The recording element substrate is formed. A heating resistance element (heater) is formed in the pressure chamber of the recording element substrate, and the liquid is discharged from the discharge port by the discharge energy generated by the heating resistance element.
When liquid is ejected by such a liquid ejection head, the ejected liquid has a columnar shape including a main droplet and an elongated tail extending so as to be connected to the rear of the main droplet. In many cases, the tailing is separated from the main droplet during flight due to the surface tension of the liquid and the speed difference between the leading and trailing ends of the liquid column, and becomes a minute droplet called a satellite. If the satellite lands on the recording medium at a position shifted from the main droplet, the image quality may be deteriorated.
As a method of reducing the generation of such satellites, when the liquid in the pressure chamber is separated from the liquid in the flow path by the bubbles generated by applying thermal energy to the liquid by the heating resistor element, the bubbles are discharged into the atmosphere. There is a known method for communicating with the. When this method is used, the rear part of the liquid to be ejected has a velocity component toward the direction of the heating resistance element, so that the portion that can be a satellite is easily separated from the main droplet before it exits from the ejection port, and outside the ejection port. The liquid flying as satellites can be reduced.
Further, Patent Document 1 discloses a technique for reducing satellites by adjusting dimensions such as the height of the pressure chamber and the size of the discharge port so that the amount of liquid contained in the main droplet of the main droplet and tailing is increased. It is disclosed. In the technique described in Patent Document 1, the size of the heating resistor element is larger than the opening of the discharge port.

International Publication No. 2010/044775

However, in the technique described in Patent Document 1, the timing at which bubbles communicate with the atmosphere may be delayed. For this reason, there are still cases where satellites are generated because the rear portion of the droplet is separated from the main droplet portion.
SUMMARY An advantage of some aspects of the invention is that it provides a recording element substrate and a liquid discharge head that can further reduce satellites in a liquid discharge head that discharges liquid by communicating bubbles to the atmosphere.

  The liquid discharge head according to the present invention includes a discharge port for discharging a liquid, a pressure chamber communicating with the discharge port, a recording element provided in the pressure chamber for generating thermal energy for foaming the liquid, and the pressure A flow path communicating with the chamber, and a substrate on which the recording element is formed, and the height of the pressure chamber in a direction perpendicular to the substrate is 7 μm or less, as viewed from the direction perpendicular to the substrate, The rectangle circumscribing the outline of the ejection port projection area in which the ejection port is projected onto the substrate includes a heat generation area projection area in which the heat generation area of the recording element is projected onto the substrate.

  According to the present invention, the timing at which bubbles communicate with the atmosphere can be accelerated, so that the elongated tail extending so as to be connected to the back of the main droplet is shortened, and satellites separated from the main droplet can be reduced. Recording image quality can be improved.

It is a figure which shows schematic structure of the recording device 1000 which concerns on the 1st application example of this invention. FIG. 4 is a diagram illustrating a first circulation path through which liquid of the recording apparatus 1000 circulates. 6 is a diagram illustrating a second circulation path of the recording apparatus 1000. FIG. 3 is a perspective view of a liquid ejection head 3 according to a first application example of the present invention. FIG. FIG. 5 is an exploded perspective view of the liquid ejection head 3 in FIG. 4. FIG. 5 is a diagram illustrating a configuration of first to third flow path members that constitute a flow path member 210 included in the liquid ejection head 3 of FIG. 4. It is a figure for demonstrating the connection relation of each flow path in the flow path member. It is the EE sectional view taken on the line of FIG. 2 is a perspective view and an exploded view of a discharge module 200. FIG. 2 is a diagram illustrating a configuration of a recording element substrate 10. FIG. FIG. 11 is a perspective view illustrating a configuration of a recording element substrate 10 and a lid member 20 including a BB cross section in FIG. 10. FIG. 3 is a plan view showing a partially enlarged adjacent portion of a recording element substrate 10 in two adjacent discharge modules. It is a figure which shows the structure of the recording device 1000 which concerns on the 2nd application example of this invention. It is a perspective view of the liquid discharge head 3 which concerns on the 2nd application example of this invention. FIG. 15 is an exploded perspective view of the liquid ejection head 3 in FIG. 14. It is a figure which shows the structure of the 1st and 2nd flow path member which comprises the flow path member 210 which the liquid discharge head 3 of FIG. 14 has. FIG. 4 is a diagram for explaining a connection relationship of liquids in the recording element substrate and the flow path member. It is the FF sectional view taken on the line of FIG. 2 is a perspective view and an exploded view of a discharge module 200. FIG. 2 is a diagram illustrating a configuration of a recording element substrate 10. FIG. FIG. 2 is a diagram for explaining a first embodiment of a recording element substrate. It is a figure for demonstrating the dimension and ink discharge process of the comparative example of this invention. It is a figure for demonstrating the dimension of the recording element board | substrate 10 of FIG. 21, and an ink discharge process. 4 is a top view for explaining a second embodiment of the recording element substrate 10. FIG. FIG. 6 is a cross-sectional view of a recording element substrate according to a second embodiment and a diagram for explaining an ink ejection process. FIG. 10 is a continuous diagram illustrating an ink discharge process in a comparative example of the present invention and a second embodiment. It is a figure which shows the relationship between the distance C of an ejection opening and a printing element, and the time until a bubble communicates with air | atmosphere. FIG. 6 is a diagram for explaining a third embodiment of the recording element substrate. FIG. 6 is a diagram for explaining a fourth embodiment of a recording element substrate. 6 is a diagram illustrating a third circulation path of the recording apparatus 1000. FIG. It is a figure which shows the modification of the liquid discharge head 3 which concerns on the 1st application example of this invention. It is a figure which shows schematic structure of the modification of the liquid discharge head 3 which concerns on the 1st application example of this invention. It is a figure which shows the modification of the liquid discharge head 3 which concerns on the 1st application example of this invention. It is a figure which shows the modification of the liquid discharge head 3 which concerns on the 1st application example of this invention. It is a figure which shows schematic structure of the recording device 1000 which concerns on the 3rd application example of this invention. It is a figure which shows the 4th circulation path | route of this invention. It is a figure which shows the liquid discharge head 3 which concerns on the 3rd application example of this invention. It is a figure which shows the liquid discharge head 3 which concerns on the 3rd application example of this invention.

  Hereinafter, application examples and embodiments of the present invention will be described with reference to the accompanying drawings. In addition, in this specification and drawing, the description which overlaps may be abbreviate | omitted by attaching | subjecting the same code | symbol about the component which has the same function.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the following description does not limit the scope of the present invention.
The application example and the embodiment are an ink jet recording apparatus (recording apparatus) configured to circulate a liquid such as ink between a tank and a liquid discharge head, but may be in other forms. For example, the ink in the pressure chamber may be flowed by providing two tanks on the upstream side and the downstream side of the liquid discharge head without circulating the ink and flowing the ink from one tank to the other tank. .
The application example and the embodiment are so-called line type heads having a length corresponding to the width of the recording medium, but are so-called serial type liquid discharge heads that perform recording while scanning the recording medium. The present invention can also be applied to. As the serial type liquid discharge head, for example, there is a configuration in which one recording element substrate for black ink and one for color ink are mounted, but the present invention is not limited to this. For example, a serial type liquid discharge head creates a short line head shorter than the width of the recording medium, in which several recording element substrates are arranged so that the discharge ports overlap in the discharge port array direction. The recording medium may be scanned.

Hereinafter, application examples to which the present invention can be suitably applied will be described.
(First application example)
(Description of inkjet recording apparatus)
FIG. 1 shows a schematic configuration of an apparatus for ejecting liquid, particularly an ink jet recording apparatus 1000 (hereinafter also referred to as a recording apparatus) that performs recording by ejecting ink according to the present invention. The recording apparatus 1000 includes a transport unit 1 that transports the recording medium 2 and a line type (page wide type) liquid ejection head 3 that is disposed substantially orthogonal to the transport direction of the recording medium. The recording apparatus 1000 performs continuous recording in one pass while conveying a plurality of recording media 2 continuously or intermittently. The recording medium 2 is not limited to cut paper but may be continuous roll paper. The liquid ejection head 3 can perform full color printing with CMYK inks (cyan, magenta, yellow, black). As will be described later, the liquid discharge head 3 is fluidly connected to a liquid supply means that is a supply path for supplying ink to the liquid discharge head, a main tank, and a buffer tank (see FIG. 2). The liquid ejection head 3 is electrically connected to an electric control unit that transmits electric power and ejection control signals to the liquid ejection head 3. The liquid path and the electric signal path in the ejection head 3 will be described later.

(Explanation of the first circulation path)
FIG. 2 is a schematic diagram showing a first circulation path which is one form of the circulation path applied to the recording apparatus of this application example. FIG. 2 is a diagram in which the liquid discharge head 3 is fluidly connected to a first circulation pump (high pressure side) 1001, a first circulation pump (low pressure side) 1002, a buffer tank 1003, and the like. In FIG. 2, for the sake of simplicity, only the path through which one color of CMYK ink flows is shown, but in reality, the circulation paths for four colors are the liquid ejection head 3 and the recording apparatus main body. Provided. A buffer tank 1003 serving as a sub tank connected to the main tank 1006 has an air communication port (not shown) that communicates the inside and outside of the tank, and can discharge bubbles in the ink to the outside. The buffer tank 1003 is also connected to a refill pump 1005. The replenishment pump 1005 transfers the consumed ink from the main tank 1006 to the buffer tank 1003 when the ink is consumed by the liquid ejection head 3. The ink is consumed by the liquid discharge head 3 when the ink is discharged (discharged) from the discharge port of the liquid discharge head, for example, for recording by discharging the ink or suction recovery.
The two first circulation pumps 1001 and 1002 have a role of drawing ink from the liquid connection portion 111 of the liquid discharge head 3 and flowing it to the buffer tank 1003. As the first circulation pump, a positive displacement pump having a quantitative liquid feeding capacity is preferable. Specific examples include tube pumps, gear pumps, diaphragm pumps, syringe pumps, and the like. For example, a general constant flow valve or relief valve may be provided at the pump outlet to ensure a constant flow rate. I can do it. When the liquid discharge head 300 is driven, a certain amount of ink flows through the common supply path 211 and the common recovery flow path 212 by the first circulation pump (high pressure side) 1001 and the first circulation pump (low pressure side) 1002, respectively. The flow rate is preferably set to a level that does not affect the temperature difference between the recording element substrates 10 in the liquid ejection head 3. However, if the flow rate is set too high, the negative pressure difference is excessively increased in each recording element substrate 10 due to the pressure loss of the flow path in the liquid discharge unit 300, resulting in image density unevenness. For this reason, it is preferable to set the flow rate in consideration of the temperature difference and the negative pressure difference between the recording element substrates 10.
The negative pressure control unit 230 is provided between the path of the second circulation pump 1004 and the liquid discharge unit 300. For this reason, the negative pressure control unit 230 is a constant pressure in which the pressure downstream of the negative pressure control unit 230 (that is, the liquid discharge unit 300 side) is set in advance even when the flow rate of the circulation system fluctuates due to the difference in duty for recording. It has a function of operating so as to be maintained. As the two pressure adjusting mechanisms constituting the negative pressure control unit 230, any mechanism can be used as long as it can control the pressure downstream of itself with a fluctuation within a certain range around a desired set pressure. May be used. As an example, a mechanism similar to a so-called “decompression regulator” can be employed. When the pressure reducing regulator is used, it is preferable to pressurize the upstream side of the negative pressure control unit 230 via the liquid supply unit 220 by the second circulation pump 1004 as shown in FIG. In this way, the influence of the water head pressure on the liquid discharge head 3 of the buffer tank 1003 can be suppressed, so that the layout flexibility of the buffer tank 1003 in the recording apparatus 1000 can be increased. The second circulation pump 1004 may be any pump that has a head pressure higher than a certain pressure in the range of the ink circulation flow rate used when the liquid discharge head 3 is driven, and a turbo pump, a positive displacement pump, or the like can be used. Specifically, a diaphragm pump or the like is applicable. Further, instead of the second circulation pump 1004, for example, a water head tank arranged with a certain water head difference with respect to the negative pressure control unit 230 can be applied.
As shown in FIG. 2, the negative pressure control unit 230 includes two pressure adjustment mechanisms each having a different control pressure. Of the two negative pressure adjustment mechanisms, the relatively high pressure setting side (denoted as H in FIG. 2) and the relatively low pressure setting side (denoted as L in FIG. 2) pass through the liquid supply unit 220, respectively. The common supply path 211 and the common recovery channel 212 in the liquid discharge unit 300 are connected. The liquid ejection unit 300 is provided with a common supply path 211, a common recovery path 212, and an individual supply path 213a and an individual recovery path 213b that communicate with each recording element substrate 10. Since the individual supply channels 213a and 213b communicate with the common supply channel 211 and the common recovery channel 212, a part of the ink passes through the internal channel of the recording element substrate 10 from the common supply channel 211 and is shared. A flow (arrow in FIG. 2) flowing to the recovery flow path 212 is generated. This is because a pressure adjustment mechanism H is connected to the common supply flow path 211 and a pressure adjustment mechanism L is connected to the common recovery flow path 212, so that a differential pressure is generated between the two common flow paths.
In this way, in the liquid ejection unit 300, a part of the ink passes through each recording element substrate 10 while flowing the ink so as to pass through the common supply channel 211 and the common recovery channel 212, respectively. Flow occurs. For this reason, the heat generated in each recording element substrate 10 can be discharged to the outside of the recording element substrate 10 through the flow of the common supply channel 211 and the common recovery channel 212. Further, with such a configuration, when recording is performed by the liquid discharge head 3, it is possible to cause an ink flow even in an ejection port or a pressure chamber where recording is not performed. Can be suppressed. Further, thickened ink and foreign matter in the ink can be discharged to the common recovery channel 212. For this reason, the liquid discharge head 3 of this application example can perform high-speed and high-quality recording.

(Explanation of second circulation path)
FIG. 3 is a schematic diagram showing a second circulation path having a circulation form different from the first circulation path described above, among the circulation paths applied to the recording apparatus of the present application example. The main differences from the first circulation path described above are as follows. First, both of the two pressure adjusting mechanisms constituting the negative pressure control unit 230 control a pressure upstream of the negative pressure control unit 230 with a fluctuation within a certain range around a desired set pressure (so-called “ It has a mechanical component that works in the same way as the back pressure regulator. Next, the second circulation pump 1004 functions as a negative pressure source for reducing the pressure on the downstream side of the negative pressure control unit 230. Further, a first circulation pump (high pressure side) 1001 and a first circulation pump (low pressure side) 1002 are arranged on the upstream side of the liquid ejection head, and a negative pressure control unit 230 is arranged on the downstream side of the liquid ejection head.
In the second application example, the negative pressure control unit 230 is a pressure on its upstream side (that is, the liquid ejection unit 300 side) even if the flow rate fluctuates due to a change in the recording duty when recording is performed by the liquid ejection head 3. Operates so that the fluctuation is within a certain range. The pressure fluctuation is, for example, within a certain range around a preset pressure. As shown in FIG. 3, it is preferable to pressurize the downstream side of the negative pressure control unit 230 through the liquid supply unit 220 by the second circulation pump 1004. In this way, since the influence of the water head pressure of the buffer tank 1003 on the liquid discharge head 3 can be suppressed, the selection range of the layout of the buffer tank 1003 in the recording apparatus 1000 can be widened. Instead of the second circulation pump 1004, for example, a water head tank arranged with a predetermined water head difference with respect to the negative pressure control unit 230 can be applied.
Similar to the first application example, the negative pressure control unit 230 shown in FIG. 3 includes two pressure adjustment mechanisms each having a different control pressure. Of the two negative pressure adjusting mechanisms, the high pressure setting side (denoted as H in FIG. 3) and the low pressure setting side (denoted as L in FIG. 3) pass through the liquid supply unit 220, respectively, in the liquid discharge unit 300. Are connected to the common supply channel 211 and the common recovery channel 212. The pressure of the common supply channel 211 is made relatively higher than the pressure of the common recovery channel 212 by two negative pressure adjusting mechanisms. With this configuration, an ink flow that flows from the common supply channel 211 to the common recovery channel 212 via the individual channels 213 and the internal channels of each recording element substrate 10 is generated (arrow in FIG. 3). As described above, in the second circulation path, an ink flow state similar to that in the first circulation path can be obtained in the liquid ejection unit 300, but there are two advantages different from the case of the first circulation path.
The first advantage is that since the negative pressure control unit 230 is arranged on the downstream side of the liquid discharge head 3 in the second circulation path, there is a concern that dust and foreign matters generated from the negative pressure control unit 230 may flow into the head. There are few. The second advantage is that the maximum value of the required flow rate supplied from the buffer tank 1003 to the liquid discharge head 3 is smaller in the second circulation path than in the first circulation path. The reason is as follows. A is the sum of the flow rates in the common supply channel 211 and the common recovery channel 212 when circulating during recording standby. The value A is defined as the minimum flow rate necessary for adjusting the temperature difference in the liquid discharge unit 300 within a desired range when the temperature of the liquid discharge head 3 is adjusted during recording standby. Further, F is defined as an ejection flow rate when ink is ejected from all ejection ports of the liquid ejection unit 300 (when all ejection is performed). Then, in the case of the first circulation path (FIG. 2), the set flow rates of the first circulation pump (high-pressure side) 1001 and the first circulation pump (low-pressure side) 1002 are A. The maximum value of the liquid supply amount to the head 3 is A + F.
On the other hand, in the case of the second circulation path (FIG. 3), the liquid supply amount to the liquid ejection head 3 required during recording standby is the flow rate A. The amount of supply to the liquid discharge head 3 required for full ejection is the flow rate F. Then, in the case of the second circulation path, the total value of the set flow rates of the first circulation pump (high pressure side) 1001 and the first circulation pump (low pressure side) 1002, that is, the maximum value of the necessary supply flow rate is the larger of A or F It becomes the value of. For this reason, as long as the liquid discharge unit 300 having the same configuration is used, the maximum value (A or F) of the necessary supply amount in the second circulation path is greater than the maximum value (A + F) of the necessary supply flow rate in the first circulation path. Will always be smaller. Therefore, in the case of the second circulation path, the degree of freedom of the applicable circulation pump is increased. For this reason, for example, a low-cost circulation pump with a simple configuration can be used, or the load of a cooler (not shown) installed in the main body side path can be reduced, and the cost of the recording apparatus main body can be reduced. There is an advantage. This advantage becomes larger as the line head has a relatively large value of A or F, and among the line heads, a line head having a long length in the longitudinal direction is more beneficial.
On the other hand, however, the first circulation path is advantageous over the second circulation path. That is, in the second circulation path, the flow rate flowing through the liquid ejection unit 300 is maximized during recording standby, so that the lower the recording duty, the higher the negative pressure applied to each nozzle. For this reason, in particular, the width of the common supply flow path 211 and the common recovery flow path 212 (the length in the direction perpendicular to the ink flow direction) is reduced to reduce the head width (the length in the short direction of the liquid discharge head). Is made small, a high negative pressure is applied to the nozzle in a low-duty image in which unevenness is easily visible. For this reason, there is a possibility that the influence of the satellite droplet is increased. On the other hand, in the case of the first circulation path, since a high negative pressure is applied to the nozzle when forming a high duty image, it is difficult to visually recognize even if a satellite is generated, and the effect on the image is small. is there. The two circulation paths can be selected in light of the specifications of the liquid discharge head and the recording apparatus main body (discharge flow rate F, minimum circulation flow rate A, and in-head flow path resistance).
(Explanation of the third circulation path)
FIG. 30 is a schematic diagram showing a third circulation path which is one form of the circulation path applied to the recording apparatus of this application example. A description of functions and configurations similar to those of the first and second circulation paths will be omitted, and different points will be mainly described.
In this circulation path, the liquid is supplied into the liquid ejection head 3 from a total of three locations, two at the center of the liquid ejection head 3 and one at one end of the liquid ejection head 3. The liquid passes through the pressure chambers 23 from the common supply flow path 211 and is then recovered in the common recovery flow path 212 and is recovered to the outside from the recovery opening at the other end of the liquid discharge head 3. The individual flow path 213 communicates with the common supply path 211 and the common recovery flow path 212, and the recording element substrate 10 and the pressure chamber 23 disposed in the recording element substrate are provided in the path of each individual flow path 213. ing. Therefore, a part of the liquid flowing in the first circulation pump 1002 passes through the pressure chamber 23 of the recording element substrate 10 from the common supply channel 211 and flows to the common recovery channel 212 (arrow in FIG. 30). This is because a pressure difference is provided between the pressure adjustment mechanism H connected to the common supply flow path 211 and the pressure adjustment mechanism L connected to the common recovery flow path 212, so that the first circulation pump 1002 can perform the common recovery flow. This is because it is connected only to the path 212.
In this way, in the liquid ejection unit 300, the liquid flow that passes through the common recovery channel 212 and the common recovery channel that passes from the common supply channel 211 to the pressure chamber 23 in each recording element substrate 10. A flow occurs at 212. Therefore, heat generated in each recording element substrate 10 can be discharged to the outside of the recording element substrate 10 by the flow from the common supply channel 211 to the common recovery channel 212 while suppressing an increase in pressure loss. Further, according to this circulation path, it is possible to reduce the number of pumps which are liquid transporting means as compared with the first and second circulation paths.

(Description of liquid discharge head configuration)
The configuration of the liquid ejection head 3 according to the first application example will be described. 4A and 4B are perspective views of the liquid ejection head 3 according to this application example. The liquid ejection head 3 is a line type liquid ejection head in which 15 recording element substrates 10 each capable of ejecting ink of four colors C / M / Y / K are arranged in a straight line (arranged inline). As shown in FIG. 4A, the liquid ejection head 3 includes a signal input terminal 91 and a power supply terminal 92 electrically connected to each recording element substrate 10 via the flexible wiring board 40 and the electric wiring board 90. Is provided. The signal input terminal 91 and the power supply terminal 92 are electrically connected to the control unit of the recording apparatus 1000, and supply an ejection drive signal and electric power necessary for ejection to the recording element substrate 10, respectively. By consolidating the wiring by the electric circuit in the electric wiring board 90, the number of signal output terminals 91 and power supply terminals 92 can be reduced as compared with the number of recording element boards 10. Accordingly, the number of electrical connection portions that need to be removed when the liquid discharge head 3 is assembled to the recording apparatus 1000 or when the liquid discharge head is replaced can be reduced. As shown in FIG. 4B, the liquid connection portions 111 provided at both ends of the liquid ejection head 3 are connected to the liquid supply system of the recording apparatus 1000. Thus, CMYK four color inks are supplied from the supply system of the recording apparatus 1000 to the liquid discharge head 3, and ink that has passed through the liquid discharge head 3 is collected into the supply system of the recording apparatus 1000. As described above, the ink of each color can be circulated through the path of the recording apparatus 1000 and the path of the liquid discharge head 3.
FIG. 5 shows an exploded perspective view of each component or unit constituting the liquid ejection head 3. The liquid discharge unit 300, the liquid supply unit 220, and the electric wiring substrate 90 are attached to the housing 80. The liquid supply unit 220 is provided with a liquid connection portion 111 (FIG. 3), and each color communicating with each opening of the liquid connection portion 111 is provided inside the liquid supply unit 220 to remove foreign matters in the supplied ink. Another filter 221 (FIGS. 2 and 3) is provided. The two liquid supply units 220 are each provided with filters 221 for two colors. The ink that has passed through the filter 221 is supplied to the negative pressure control unit 230 disposed on the supply unit 220 corresponding to each color. The negative pressure control unit 230 is a unit composed of a pressure regulating valve for each color. The negative pressure control unit 230 is provided in the supply system of the recording apparatus 1000 (the supply system on the upstream side of the liquid ejection head 3) generated by the change in the ink flow rate by the action of a valve, a spring member, or the like provided therein. Significantly attenuates changes in pressure loss. Therefore, the negative pressure control unit 230 can stabilize the negative pressure change on the downstream side (the liquid discharge unit 300 side) from the pressure control unit within a certain range. In the negative pressure control unit 230 for each color, as described in FIG. 2, two pressure regulating valves for each color are incorporated. These pressure regulating valves are set to different control pressures, and the high pressure side communicates with the common supply channel 211 in the liquid discharge unit 300 and the low pressure side communicates with the common recovery channel 212 via the liquid supply unit 220.
The casing 80 includes a liquid discharge unit support part 81 and an electric wiring board support part 82, supports the liquid discharge unit 300 and the electric wiring board 90, and ensures the rigidity of the liquid discharge head 3. The electric wiring board support part 82 is for supporting the electric wiring board 90, and is fixed to the liquid discharge unit support part 81 by screws. The liquid discharge unit support portion 81 has a role of correcting the warp and deformation of the liquid discharge unit 300 and ensuring the relative positional accuracy of the plurality of recording element substrates 10, thereby suppressing streaks and unevenness in the recorded matter. Therefore, the liquid discharge unit support portion 81 preferably has sufficient rigidity, and a metal material such as SUS or aluminum, or a ceramic such as alumina is preferable as the material. The liquid discharge unit support portion 81 is provided with openings 83 and 84 into which the joint rubber 100 is inserted. The ink supplied from the liquid supply unit 220 is guided to the third flow path member 70 constituting the liquid discharge unit 300 through the joint rubber.
The liquid discharge unit 300 includes a plurality of discharge modules 200 and a flow path member 210, and a cover member 130 is attached to the surface of the liquid discharge unit 300 on the recording medium side. Here, as shown in FIG. 5, the cover member 130 is a member having a frame-like surface provided with a long opening 131, and the recording element substrate 10 included in the ejection module 200 and the sealing member are sealed from the opening 131. The stopper 110 (FIG. 9) is exposed. The frame portion around the opening 131 functions as a contact surface of a cap member that caps the liquid ejection head 3 during recording standby. For this reason, a closed space is formed at the time of capping by applying an adhesive, a sealing material, a filler, or the like along the periphery of the opening 131 and filling the irregularities and gaps on the discharge port surface of the liquid discharge unit 300. It is preferable to do so.

Next, the configuration of the flow path member 210 included in the liquid discharge unit 300 will be described. As shown in FIG. 5, the flow path member 210 is a laminate of the first flow path member 50, the second flow path member 60, and the third flow path member 70. The flow path member 210 distributes the ink supplied from the liquid supply unit 220 to each discharge module 200, and returns the ink circulated from the discharge module 200 to the liquid supply unit 220. The flow path member 210 is fixed to the liquid discharge unit support portion 81 with screws, and thereby warpage and deformation of the flow path member 210 are suppressed.
FIGS. 6A to 6F are views showing the front and back surfaces of each flow path member of the first to third flow path members. 6A shows the surface of the first flow path member 50 on the side where the discharge module 200 is mounted, and FIG. 6F shows the liquid discharge unit support portion 81 of the third flow path member 70. The surface on the abutting side is shown. The first flow path member 50 and the second flow path member 60 are joined so that FIG. 6B and FIG. 6C, which are contact surfaces of the respective flow path members, face each other. The member and the third flow path member are joined so that FIG. 6D and FIG. 6E, which are contact surfaces of the respective flow path members, face each other. By joining the second flow path member 60 and the third flow path member 70, eight common channel grooves 62 and 71 formed in the respective flow path members extend in the longitudinal direction of the flow path member. The common flow path is formed. As a result, a set of the common supply channel 211 and the common recovery channel 212 is formed in the channel member 210 for each color (FIG. 7). The communication port 72 of the third flow path member 70 communicates with each hole of the joint rubber 100 and is in fluid communication with the liquid supply unit 220. A plurality of communication ports 61 are formed in the bottom surface of the common flow channel 62 of the second flow channel member 60 and communicate with one end of the individual flow channel 52 of the first flow channel member 50. A communication port 51 is formed at the other end of the individual flow channel 52 of the first flow channel member 50, and is in fluid communication with the plurality of discharge modules 200 via the communication port 51. The individual flow channel 52 enables the flow channels to be concentrated on the center side of the flow channel member.
The first to third flow path members are preferably made of a material having corrosion resistance to ink and a low linear expansion coefficient. As a material, for example, a composite material (resin material) in which inorganic fillers such as silica fine particles and fibers are added using alumina, LCP (liquid crystal polymer), PPS (polyphenyl sulfide), and PSF (polysulfone) as a base material is preferably used. be able to. Modified PPE (polyphenylene ether) can also be used as the base material. As a method for forming the flow path member 210, three flow path members may be laminated and bonded to each other. When a resin composite resin material is selected as the material, a joining method by welding may be used.

Next, the connection relation of each flow path in the flow path member 210 will be described with reference to FIG. 7 shows a part of the flow path in the flow path member 210 formed by joining the first to third flow path members from the surface side of the first flow path member 50 on which the discharge module 200 is mounted. It is the perspective view expanded. The flow path member 210 has a common supply flow path 211 (211a, 211b, 211c, 211d) and a common recovery flow path 212 (212a, 212b, 212c, 212d) extending in the longitudinal direction of the liquid ejection head 3 for each color. Is provided. A plurality of individual supply channels (213 a, 213 b, 213 c, and 213 d) formed by the individual channel grooves 52 are connected to the common supply channel 211 of each color via the communication port 61. In addition, a plurality of individual recovery channels (214a, 214b, 214c, 214d) formed by the individual channel grooves 52 are connected to the common recovery channel 212 of each color via the communication port 61. With such a flow path configuration, it is possible to collect ink from each common supply flow path 211 via the individual supply flow path 213 to the recording element substrate 10 located at the center of the flow path member. Ink can be recovered from the recording element substrate 10 to each common recovery channel 212 via the individual recovery channel 214.
FIG. 8 is a view showing a cross section taken along line EE of FIG. As shown in this figure, each individual recovery channel (214a, 214c) communicates with the discharge module 200 via the communication port 51. Although only the individual recovery flow paths (214a, 214c) are shown in FIG. 8, the separate supply flow path 213 and the discharge module 200 communicate with each other in another cross section as shown in FIG. The support member 30 and the recording element substrate 10 included in each ejection module 200 have a flow path for supplying ink from the first flow path member 50 to the recording element 15 (FIG. 10) provided on the recording element substrate 10. Is formed. The support member 30 and the recording element substrate 10 are provided with a flow path for collecting (circulating) a part or all of the ink supplied to the recording element 15 to the first flow path member 50. Here, the common supply channel 211 of each color is connected to the corresponding negative pressure control unit 230 (high pressure side) via the liquid supply unit 220, and the common recovery channel 212 is connected to the negative pressure control unit 230 ( And a liquid supply unit 220. By this negative pressure control unit 230, a differential pressure (pressure difference) is generated between the common supply channel 211 and the common recovery channel 212. For this reason, as shown in FIGS. 7 and 8, in the liquid ejection head of this application example in which the respective flow paths are connected, the common supply flow path 211 to the individual supply flow path 213a to the recording element substrate 10 to the individual recovery flow for each color. A flow that flows in order from the channel 213b to the common recovery channel 212 is generated.

(Description of discharge module)
FIG. 9A shows a perspective view of one discharge module 200, and FIG. 9B shows an exploded view thereof. As a manufacturing method of the discharge module 200, first, the recording element substrate 10 and the flexible wiring substrate 40 are bonded onto the support member 30 provided with the liquid communication port 31 in advance. Thereafter, the terminals 16 on the recording element substrate 10 and the terminals 41 on the flexible wiring substrate 40 are electrically connected by wire bonding, and then the wire bonding portion (electrical connection portion) is covered with the sealing material 110 and sealed. . A terminal 42 of the flexible wiring board 40 opposite to the recording element substrate 10 is electrically connected to a connection terminal 93 (see FIG. 5) of the electric wiring board 90. The support member 30 is a support member that supports the recording element substrate 10 and is a flow path member that fluidly communicates the recording element substrate 10 and the flow path member 210. Therefore, the flatness is high and sufficiently high. Those that can be reliably bonded to the recording element substrate are preferable. As a material, for example, alumina or a resin material is preferable.

(Description of structure of recording element substrate)
The configuration of the recording element substrate 10 in this application example will be described. FIG. 10A shows a plan view of the surface of the recording element substrate 10 on which the discharge port 13 is formed, FIG. 10B shows an enlarged view of the portion indicated by A in FIG. FIG.10 (c) shows the top view of the back surface of Fig.10 (a). As shown in FIG. 10A, the discharge port forming member 12 of the recording element substrate 10 is formed with four rows of discharge port rows corresponding to the respective ink colors. Hereinafter, the direction in which the discharge port array in which the plurality of discharge ports 13 are arranged is referred to as “discharge port array direction”.
As shown in FIG. 10B, a recording element 15 that is a heating element for causing ink to foam by thermal energy is disposed at a position corresponding to each ejection port 13. A partition 22 defines a pressure chamber 23 having the recording element 15 therein. The recording element 15 is electrically connected to the terminal 16 in FIG. 10A by electrical wiring (not shown) provided on the recording element substrate 10. The recording element 15 generates heat based on a pulse signal input from the control circuit of the recording apparatus 1000 via the electric wiring board 90 (FIG. 5) and the flexible wiring board 40 (FIG. 9) to boil the ink. Ink is ejected from the ejection port 13 by the force of foaming due to boiling. As shown in FIG. 10B, along each discharge port array, a liquid supply path 18 extends on one side and a liquid recovery path 19 extends on the other side. The liquid supply path 18 and the liquid recovery path 19 are flow paths provided in the recording element substrate 10 and extending in the direction of the discharge port array, and communicate with the discharge ports 13 through the supply path 17a and the recovery path 17b, respectively. The supply path 17a and the recovery path 17b extend in a direction intersecting the substrate 11, and communicate with the liquid supply path 18 and the liquid recovery path 19, respectively.
As shown in FIGS. 10C and 11, a sheet-like lid member 20 is laminated on the back surface of the recording element substrate 10 on which the discharge ports 13 are formed. A plurality of openings 21 communicating with the liquid supply path 18 and the liquid recovery path 19 are provided. In this application example, three openings 21 are provided in the lid member 20 for one liquid supply path 18 and two openings 21 for one liquid recovery path 19. As shown in FIG. 10B, each opening 21 of the lid member 20 communicates with a plurality of communication ports 51 shown in FIG. As shown in FIG. 11, the lid member 20 has a function as a lid that forms part of the walls of the liquid supply path 18 and the liquid recovery path 19 formed in the substrate 11 of the recording element substrate 10. The lid member 20 is preferably one having sufficient corrosion resistance against ink, and high accuracy is required for the opening shape and opening position of the opening 21 from the viewpoint of preventing color mixing. For this reason, it is preferable to use a photosensitive resin material or a silicon plate as the material of the lid member 20 and provide the opening 21 by a photolithography process. As described above, the lid member converts the pitch of the flow path by the opening 21. In consideration of the pressure loss, the lid member is desirably thin and is preferably formed of a film-like member.
Next, the flow of ink in the recording element substrate 10 will be described. FIG. 11 is a perspective view showing a cross section of the recording element substrate 10 and the lid member 20 on the BB plane in FIG. The recording element substrate 10 includes a substrate 11 formed of Si and a discharge port forming member 12 formed of a photosensitive resin, and a lid member 20 is bonded to the back surface of the substrate 11. A recording element 15 is formed on one surface side of the substrate 11 (FIG. 10), and grooves constituting a liquid supply path 18 and a liquid recovery path 19 extending along the ejection port array are formed on the back surface side thereof. Is formed. The liquid supply path 18 and the liquid recovery path 19 formed by the substrate 11 and the lid member 20 are connected to the common supply path 211 and the common recovery path 212 in the flow path member 210, respectively. A differential pressure is generated between the liquid recovery passageway 19 and the liquid recovery passageway 19. When the ink is ejected from the plurality of ejection ports 13 of the liquid ejection head 3 and recording is performed, the liquid supply path 18 provided in the substrate 11 is ejected by the differential pressure at the ejection port not performing the ejection operation. The ink inside has a flow indicated by an arrow C in FIG. That is, the ink flows to the liquid recovery path 19 via the supply path 17a, the pressure chamber 23, and the recovery path 17b. With this flow, in the ejection port 13 and the pressure chamber 23 where recording is paused, it is possible to collect the thickened ink generated by evaporation from the ejection port 13 and bubbles / foreign matter in the liquid recovery path 19. Further, it is possible to suppress the thickening of the ink in the ejection port 13 and the pressure chamber 23. The ink recovered to the liquid recovery path 19 passes through the opening 21 of the lid member 20 and the liquid communication port 31 of the support member 30 (see FIG. 9B). Recovery is performed in the order of the recovery flow path 212. This ink is finally collected into the supply path of the recording apparatus 1000.
That is, the ink supplied from the recording apparatus main body to the liquid discharge head 3 flows in the following order, and is supplied and recovered. The ink first flows into the liquid ejection head 3 from the liquid connection portion 111 of the liquid supply unit 220. The ink is supplied from the joint rubber 100, the communication port 72 and the common flow channel 71 provided in the third flow channel member, the common flow channel 62 and the communication port 61 provided in the second flow channel member, and the first flow channel. The individual flow channel 52 and the communication port 51 provided in the member are supplied in this order. Thereafter, the pressure is supplied to the pressure chamber 23 through the liquid communication port 31 provided in the support member 30, the opening 21 provided in the lid member, the liquid supply path 18 and the supply path 17 a provided in the substrate 11 in this order. Of the ink supplied to the pressure chamber 23, the ink that has not been ejected from the ejection port 13 passes through the recovery path 17 b and the liquid recovery path 19 provided in the substrate 11, the opening 21 provided in the lid member, and the support member 30. It flows through the provided liquid communication port 31 in order. Thereafter, the ink flows into the communication port 51 and the individual flow channel 52 provided in the first flow channel member, the communication port 61 and the common flow channel 62 provided in the second flow channel member, and the third flow channel member 70. It flows through the provided common channel groove 71, the communication port 72, and the joint rubber 100 in this order. Further, the ink flows from the liquid connection portion 111 provided in the liquid supply unit to the outside of the liquid ejection head 3. In the form of the first circulation path shown in FIG. 2, the ink flowing from the liquid connecting portion 111 is supplied to the joint rubber 100 after passing through the negative pressure control unit 230. In the form of the second circulation path shown in FIG. 3, the ink collected from the pressure chamber 23 passes through the joint rubber 100 and then passes from the liquid connection unit 111 to the outside of the liquid ejection head via the negative pressure control unit 230. To flow.
Further, as shown in FIGS. 2 and 3, not all ink that flows from one end of the common supply channel 211 of the liquid ejection unit 300 is supplied to the pressure chamber 23 via the individual supply channel 213 a. Some ink flows from the other end of the common supply channel 211 to the liquid supply unit 220 without flowing into the individual supply channel 213a. As described above, by providing a path that flows without passing through the recording element substrate 10, even if the recording element substrate 10 having a fine flow path having a high flow resistance is provided as in this application example, the ink can be used. The reverse flow of the circulating flow can be suppressed. In this way, in the liquid discharge head of this application example, it is possible to suppress the increase in the viscosity of the ink in the vicinity of the pressure chamber and the discharge port, so it is possible to suppress the deviation of the discharge direction from the normal direction and the non-discharge, resulting in high Recording with high image quality can be performed.

(Description of positional relationship between recording element substrates)
FIG. 12 is a plan view showing a partially enlarged adjacent portion of the recording element substrate in two adjacent ejection modules. As shown in FIG. 10, in this application example, a substantially parallelogram recording element substrate is used. As shown in FIG. 12, the ejection port arrays (14a to 14d) in which the ejection ports 13 in each recording element substrate 10 are arranged are arranged so as to be inclined at a certain angle with respect to the conveyance direction of the recording medium. Accordingly, at least one ejection port in the ejection port array in the adjacent portion between the recording element substrates 10 overlaps in the conveyance direction of the recording medium. In FIG. 12, the two discharge ports on the D line are in an overlapping relationship with each other. With such an arrangement, even if the position of the recording element substrate 10 is slightly deviated from a predetermined position, the black streaks and white spots of the recorded image are made inconspicuous by driving control of the overlapping discharge ports. it can. Even when the plurality of recording element substrates 10 are arranged in a straight line (inline) instead of in a staggered arrangement, the configuration shown in FIG. 12 can be obtained. As a result, it is possible to take measures against black streaks and white spots at the connecting portion between the recording element substrates 10 while suppressing an increase in the length of the liquid ejection head 3 in the recording medium conveyance direction. In this application example, the main plane of the recording element substrate is a parallelogram, but the present invention is not limited to this. For example, even when a rectangular, trapezoidal or other shape recording element substrate is used, the present invention is not limited thereto. The configuration can be preferably applied.
(Description of Modification of Liquid Discharge Head Configuration)
A modified example of the liquid ejection head configuration described above will be described with reference to FIGS. A description of the same configuration and function as those in the above-described example will be omitted, and different points will be mainly described. In this modification, as shown in FIGS. 31 and 32, a plurality of liquid connection portions 111 that are liquid connection portions between the liquid discharge head 3 and the outside are concentrated on one end side in the longitudinal direction of the liquid discharge head 3. Are arranged. A plurality of negative pressure control units 230 are collectively arranged on the other end side of the liquid discharge head 3 (FIG. 33). The liquid supply unit 220 included in the liquid discharge head 3 is configured as a long unit corresponding to the length of the liquid discharge head 3 and includes a flow path and a filter 221 corresponding to the four colors of liquid to be supplied. As shown in FIG. 33, the openings 83 to 86 provided in the liquid discharge unit support portion 81 are also provided at positions different from those of the liquid discharge head 3 described above.
FIG. 34 shows the laminated state of the flow path members 50, 60, and 70. As shown in FIG. A plurality of recording element substrates 10 are linearly arranged on the upper surface of the first flow path member 50 that is the uppermost layer of the plurality of flow path members 50, 60, 70. The flow paths communicating with the openings 21 (FIG. 19) formed on the back side of each recording element substrate 10 are two individual supply flow paths 213 and one individual recovery flow path 214 for each liquid color. Yes. Correspondingly, the opening 21 formed in the lid member 20 provided on the back surface of the recording element substrate 10 also has two supply openings 21 and one recovery opening 21 for each liquid color. As shown in FIG. 34, common supply channels 211 and common recovery channels 212 extending along the longitudinal direction of the liquid ejection head 3 are alternately arranged in parallel.

(Second application example)
The configurations of the ink jet recording apparatus 1000 and the liquid ejection head 3 according to the second application example of the present invention will be described. In the following description, only the parts different from the first application example will be mainly described, and the description of the same parts as the first application example will be omitted.
(Description of inkjet recording apparatus)
FIG. 13 shows an ink jet recording apparatus according to a second application example of the present invention. The recording apparatus 1000 of the second application example is different from the first application example in that full-color recording is performed on a recording medium by arranging four monochromatic liquid ejection heads 3 corresponding to CMYK inks in parallel. In the first application example, the number of ejection port arrays that can be used per color is one, whereas in this application example 2, the number of ejection port arrays that can be used per color is 20 (FIG. 20). (A)). For this reason, it is possible to perform very high-speed recording by appropriately recording the recording data to a plurality of ejection port arrays. Furthermore, even if there is a discharge port that fails to discharge, reliability can be achieved by interpolating discharge from the discharge ports in the other rows that are at positions corresponding to the transport direction of the recording medium with respect to the discharge port. It is improved and suitable for commercial printing. Similarly to the first application example, the supply system of the recording apparatus 1000, the buffer tank 1003, and the main tank 1006 (FIG. 2) are fluidly connected to each liquid ejection head 3. Each liquid discharge head 3 is electrically connected to an electric control unit that transmits power and a discharge control signal to the liquid discharge head 3.

(Explanation of circulation route)
As the liquid circulation path between the recording apparatus 1000 and the liquid discharge head 3, the first and second circulation paths shown in FIG. 2 or FIG. 3 can be used as in the first application example.

(Description of liquid discharge head structure)
The structure of the liquid ejection head 3 according to the second application example of the present invention will be described. 13A and 13B are perspective views of the liquid discharge head 3 according to this application example. The liquid discharge head 3 is an ink jet type line recording head that includes 16 recording element substrates 10 arranged in a straight line in the longitudinal direction of the liquid discharge head 3 and can perform recording with one color ink. Similar to the first application example, the liquid discharge head 3 includes a liquid connection portion 111, a signal input terminal 91, and a power supply terminal 92. However, since the liquid ejection head 3 of this application example has more ejection port arrays than the first application example, the signal output terminal 91 and the power supply terminal 92 are arranged on both sides of the liquid ejection head 3. This is to reduce voltage drop and signal transmission delay that occur in the wiring portion provided on the recording element substrate 10.
FIG. 14 is a perspective view of the liquid discharge head 3, and FIG. 15 is an exploded perspective view of the liquid discharge head 3. Each component or unit constituting the liquid discharge head 3 is divided and displayed for each function. The role of each unit and member and the order of liquid circulation in the liquid discharge head are basically the same as those in the first application example, but the function of ensuring the rigidity of the liquid discharge head is different. In the first application example, the liquid discharge head rigidity is mainly secured by the liquid discharge unit support portion 81. However, in the liquid discharge head of the second application example, the second flow path member 60 included in the liquid discharge unit 300 is used. The rigidity of the liquid discharge head is guaranteed. The liquid discharge unit support portion 81 in this application example is connected to both ends of the second flow path member 60, and the liquid discharge unit 300 is mechanically coupled to the carriage of the recording apparatus 1000, so that the liquid discharge head 3 Perform positioning. The liquid supply unit 220 including the negative pressure control unit 230 and the electric wiring board 90 are coupled to the liquid discharge unit support portion 81. Each of the two liquid supply units 220 includes a filter (not shown). The two negative pressure control units 230 are set so as to control the pressure with different relatively high and low negative pressures. Further, when the negative pressure control unit 230 on the high pressure side and the low pressure side is installed at both ends of the liquid discharge head 3 as shown in this figure, the common supply flow path 211 extending in the longitudinal direction of the liquid discharge head 3 and The ink flows in the common recovery channel 212 face each other. In this way, heat exchange is promoted between the common supply channel 211 and the common recovery channel 212, and the temperature difference in the two common channels is reduced. For this reason, there is an advantage that a temperature difference in each of the recording element substrates 10 provided in a plurality along the common flow path is difficult to occur, and recording unevenness due to the temperature difference is less likely to occur.
Next, details of the flow path member 210 of the liquid discharge unit 300 will be described. As shown in FIG. 15, the flow path member 210 is a laminate of the first flow path member 50 and the second flow path member 60, and distributes the ink supplied from the liquid supply unit 220 to each ejection module 200. . The flow path member 210 functions as a flow path member for returning ink circulated from the ejection module 200 to the liquid supply unit 220. The second flow path member 60 of the flow path member 210 is a flow path member in which a common supply flow path 211 and a common recovery flow path 212 are formed, and has a function of mainly responsible for the rigidity of the liquid ejection head 3. Have. For this reason, as a material of the 2nd flow path member 60, what has sufficient corrosion resistance with respect to ink and high mechanical strength is preferable. Specifically, SUS, Ti, alumina or the like can be preferably used.
FIG. 16A shows the surface of the first flow path member 50 on the side where the discharge module 200 is mounted, and FIG. 16B shows the back surface of the first flow path member 50 that is in contact with the second flow path member 60. FIG. Unlike the first application example, the first flow path member 50 in the second application example has a plurality of members corresponding to each discharge module 200 arranged adjacent to each other. By adopting such a divided structure, it is possible to correspond to the length of the liquid discharge head by arranging a plurality of modules, so that, for example, a relatively long scale corresponding to a B2 size or longer. The present invention can be particularly preferably applied to the liquid discharge head. As shown in FIG. 16 (a), the communication port 51 of the first flow path member 50 is in fluid communication with the discharge module 200, and as shown in FIG. 16 (b), the individual communication of the first flow path member 50 is performed. The port 53 is in fluid communication with the communication port 61 of the second flow path member 60. FIG. 16C shows a surface of the second flow path member 60 on the side in contact with the first flow path member 50, and FIG. 16D shows a cross section of the central portion in the thickness direction of the second flow path member 60. FIG. 16 (e) is a diagram showing a surface of the second flow path member 60 on the side in contact with the liquid supply unit 220. The functions of the flow path and the communication port of the second flow path member 60 are the same as for one color of the first application example. One of the common channel grooves 71 of the second channel member 60 is a common supply channel 211 shown in FIG. 17 and the other is a common recovery channel 212, respectively, along the longitudinal direction of the liquid ejection head 3. Ink is supplied from one end side to the other end side. In this application example, unlike the first application example, the longitudinal directions of the inks in the common supply channel 211 and the common recovery channel 212 are opposite to each other.
FIG. 17 is a perspective view showing the ink connection relationship between the recording element substrate 10 and the flow path member 210. As shown in FIG. 17, a pair of common supply channel 211 and common recovery channel 212 extending in the longitudinal direction of the liquid ejection head 3 are provided in the channel member 210. The communication port 61 of the second flow path member 60 is connected in alignment with the individual communication port 53 of each first flow path member 50, and is connected to the common supply flow path from the communication port 72 of the second flow path member 60. A liquid supply path that communicates with the communication port 51 of the first flow path member 50 via 211 is formed. Similarly, a liquid supply path that communicates from the communication port 72 of the second flow channel member 60 to the communication port 51 of the first flow channel member 50 via the common recovery flow channel 212 is also formed.
18 is a view showing a cross section taken along line FF in FIG. As shown in this figure, the common supply channel is connected to the discharge module 200 via the communication port 61, the individual communication port 53, and the communication port 51. Although not shown in FIG. 8, it is apparent with reference to FIG. 17 that in another cross section, the individual recovery flow path is connected to the discharge module 200 through a similar path. As in the first application example, each ejection module 200 and the recording element substrate 10 are formed with a flow path communicating with each ejection port 13, and a part or all of the supplied ink pauses the ejection operation. Through the discharge port 13 (pressure chamber 23), it is possible to circulate. Similarly to the first application example, the common supply channel 211 is connected to the negative pressure control unit 230 (high pressure side), and the common recovery channel 212 is connected to the negative pressure control unit 230 (low pressure side) and the liquid supply unit 220. It is connected. For this reason, the differential pressure causes a flow that flows from the common supply channel 211 to the common recovery channel 212 through the discharge port 13 (pressure chamber 23) of the recording element substrate 10.

(Description of discharge module)
FIG. 19A shows a perspective view of one discharge module 200, and FIG. 19B shows an exploded view thereof. The difference from the first application example is that a plurality of terminals 16 are arranged on both sides (long side portions of the recording element substrate 10) along the plurality of ejection port array directions of the recording element substrate 10, respectively. . Further, two flexible wiring boards 40 that are electrically connected to the terminals 16 are also arranged on one recording element substrate 10. This is because the number of ejection port arrays provided on the recording element substrate 10 is 20, which is significantly larger than the 8 arrays of the first application example. That is, an object is to reduce the voltage drop and signal transmission delay that occur in the wiring portion in the recording element substrate 10 by suppressing the maximum distance from the terminal 16 to the recording element 15 provided corresponding to the ejection port array. It is said. Further, the liquid communication port 31 of the support member 30 is provided in the recording element substrate 10 and is opened so as to straddle the entire R ejection port array. The other points are the same as in the first application example.

(Description of structure of recording element substrate)
20A is a schematic diagram of the surface of the recording element substrate 10 on the side where the discharge ports 13 are arranged, and FIG. 20C is a schematic diagram illustrating the back surface of the surface of FIG. FIG. 10B is a schematic diagram showing the surface of the recording element substrate 10 when the lid member 20 provided on the back surface side of the recording element substrate 10 is removed in FIG. As shown in FIG. 10B, the liquid supply path 18 and the liquid recovery path 19 are alternately provided on the back surface of the recording element substrate 10 along the discharge port array direction. Although the number of ejection port arrays is significantly increased as compared with the first application example, the essential difference from the first application example is that the terminals 16 are located on both sides along the ejection port array direction of the recording element substrate as described above. It is arranged in the part. A set of liquid supply path 18 and liquid recovery path 19 is provided for each discharge port array, and an opening 21 communicating with the liquid communication port 31 of the support member 30 is provided in the lid member 20. The basic configuration is the same as that of the first application example.

The example of the liquid ejection head 3 of the present invention has been described above using the first application example and the second application example. The recording element substrate 10 included in the liquid ejection head 3 described here can be configured as the first to fourth embodiments below.
(Third application example)
The configurations of the ink jet recording apparatus 1000 and the liquid discharge head 3 according to the third application example of the present invention will be described. The liquid ejection head of the third application example is a page-wide type that performs recording in one scan on a B2 size recording medium. Since the third application example is similar in many respects to the second application example, in the following description, parts different from the second application example will be mainly described, and the same parts as the second application example will be described. Will not be described.
(Description of inkjet recording apparatus)
FIG. 35 is a schematic diagram of an ink jet recording apparatus according to this application example. The recording apparatus 1000 does not perform direct recording from the liquid ejection head 3 to the recording medium 2, and once ejects liquid onto the intermediate transfer member (intermediate transfer drum 1007) to form an image, the image is then recorded on the recording medium 2. It is the structure which transfers to. In the recording apparatus 1000, four single-color liquid ejection heads 3 respectively corresponding to four types of CMYK inks are arranged in an arc along the intermediate transfer drum 1007. As a result, full-color recording is performed on the intermediate transfer member, and the recorded image is appropriately dried on the intermediate transfer member and then transferred to the recording medium 2 conveyed by the paper conveying roller 1009 by the transfer unit 1008. Transcribed. The paper conveyance system of the second application example is a horizontal conveyance mainly intended for cut paper, whereas in this application example, it can also be applied to continuous paper supplied from a main body roll (not shown). In such a drum transport system, it is easy to transport the paper while applying a constant tension to the paper, so that there is little transport jam even at high speed recording. For this reason, the reliability of the apparatus is improved and it is suitable for commercial printing and the like. As in the first and second application examples, the supply system of the recording apparatus 1000, the buffer tank 1003, and the main tank 1006 are fluidly connected to each liquid ejection head 3. Each liquid discharge head 3 is electrically connected to an electric control unit that transmits power and a discharge control signal to the liquid discharge head 3.
(Explanation of the fourth circulation path)
Similar to the second application example, the first and second circulation paths shown in FIG. 2 or 3 are also applicable as the liquid circulation path between the tank of the recording apparatus 1000 and the liquid ejection head 3. However, the circulation path shown in FIG. 36 is preferable. The main difference from the second circulation path of FIG. 3 is that a bypass valve 1010 communicating with the flow paths of the first circulation pumps 1001 and 1002 and the second circulation pump 1004 is added. The bypass valve 1010 has a function (first function) of lowering the pressure on the upstream side of the bypass valve 1010 by opening the valve when a preset pressure is exceeded. Also, it has a function (second function) for opening and closing the valve at an arbitrary timing by a signal from the control board of the printing apparatus main body.
By the first function, it is possible to suppress an excessive or excessive pressure from being applied to the flow path on the downstream side of the first circulation pumps 1001 and 1002 or the upstream side of the second circulation pump 1004. For example, when troubles occur in the functions of the first circulation pumps 1001 and 1002, an excessive flow rate or pressure may be applied to the liquid discharge head 3. As a result, liquid may leak from the discharge port of the liquid discharge head 3 or the joints in the liquid discharge head 3 may be broken. However, when a bypass valve is added to the first circulation pumps 1001 and 1002 as in this application example, even when excessive pressure is generated, the bypass valve 1010 is opened so that the liquid path is upstream of each circulation pump. Since this is opened, the above trouble can be suppressed.
Further, due to the second function, when the circulation drive is stopped, all the bypass valves 1010 are promptly opened based on a control signal from the main body side after the first circulation pumps 1001 and 1002 and the second circulation pump 1004 are stopped. Thereby, the high negative pressure (for example, several to several tens kPa) in the downstream portion (between the negative pressure control unit 230 and the second circulation pump 1004) of the liquid discharge head 3 can be released in a short time. When a positive displacement pump such as a diaphragm pump is used as the circulation pump, a check valve is usually built in the pump. However, by opening the bypass valve, the pressure in the downstream portion of the liquid discharge head 3 can be released also from the downstream buffer tank 1003 side. Although the pressure release in the downstream portion of the liquid discharge head 3 can be performed only from the upstream side, there is a pressure loss in the upstream flow path of the liquid discharge head and in the liquid discharge head. For this reason, it takes time to release the pressure, and the pressure in the common flow path in the liquid discharge head 3 may transitively drop, and the meniscus at the discharge port may be destroyed. By opening the bypass valve 1010 on the downstream side of the liquid discharge head 3, pressure release on the downstream side of the liquid discharge head is promoted, so that the risk of meniscus destruction of the discharge port is reduced.
(Description of liquid discharge head structure)
The structure of the liquid ejection head 3 according to the third application example of the present invention will be described. FIG. 37A is a perspective view of the liquid discharge head 3 according to this application example, and FIG. 37B is an exploded perspective view thereof. The liquid discharge head 3 includes 36 recording element substrates 10 arranged in a straight line (inline) in the longitudinal direction of the liquid discharge head 3, and is an ink jet page-wide recording head that performs recording with one color liquid. is there. Like the second application example, the liquid ejection head 3 includes a signal input terminal 91 and a power supply terminal 92, and also includes a shield plate 132 that protects the longitudinal side surface of the head.
In FIG. 37 (b), each component or unit constituting the liquid ejection head 3 is divided and displayed for each function (the shield plate 132 is not shown). The role of each unit and each member and the order of the liquid circulation in the liquid discharge head 3 are the same as in the second application example. The main differences from the second application example are the electrical wiring board 90, the position of the negative pressure control unit 230, and the shape of the first flow path member 50, which are divided into a plurality of parts. As in this application example, in the case of the liquid ejection head 3 having a length corresponding to a recording medium of B2 size, for example, the power consumption of the liquid ejection head 3 is large, so that eight electrical wiring boards 90 are provided. Each of the electrical wiring boards 90 is attached to each side surface of the long electrical wiring board support part 82 attached to the liquid discharge unit support part 81 by four.
FIG. 38A is a side view of the liquid discharge head 3 including the liquid discharge unit 300, the liquid supply unit 220, and the negative pressure control unit 230. FIG. 38B is a schematic diagram showing the flow of the recording liquid inside the liquid ejection head 3. FIG.38 (c) is a perspective view which shows the cross section in the GG line of Fig.38 (a). In order to facilitate understanding, some configurations are simplified.
A liquid connection unit 111 and a filter 221 are provided in the liquid supply unit 220, and a negative pressure control unit 230 is integrally formed below the liquid supply unit 220. As a result, the distance in the height direction between the negative pressure control unit 230 and the recording element substrate 10 is shorter than that in the second application example. With this configuration, this application example has the advantage that not only the number of flow path connection portions in the liquid supply unit 220 is reduced and the reliability against leakage of the recording liquid is improved, but also the number of parts and the number of assembly steps can be reduced. There is.
Further, since the water head difference between the negative pressure control unit 230 and the surface on which the discharge port is formed becomes relatively small, in this application example, the inclination angle of the liquid discharge head 3 as shown in FIG. The present invention can be suitably applied to a recording apparatus that varies from head to head. This is because the difference in water and the like can be reduced, so that the negative pressure difference applied to the ejection openings of the respective recording element substrates can be reduced even when the plurality of liquid ejection heads 3 are used at different inclination angles. Further, in this application example, since the flow resistance between the negative pressure control unit 230 and the recording element substrate 10 is reduced, the pressure loss difference due to the change in the flow rate of the liquid is also reduced, and a more stable negative pressure is obtained. It is also preferable in that control can be performed.
FIG. 38B shows the flow of liquid in each component of the actual liquid discharge head 3 although it is the same in circuit as compared with the circulation path shown in FIG. A pair of common supply channel 211 and common recovery channel 212 extending in the longitudinal direction of the liquid discharge head 3 are provided in the long second channel member 60. The common supply flow path 211 and the common recovery flow path 212 are configured so that liquid flows in directions opposite to each other, and a filter 221 is provided on the upstream side of each flow path, and enters from the liquid connection portion 111 or the like. Trap foreign objects. In this way, it is preferable to flow the liquid in the direction in which the common supply flow path 211 and the common recovery flow path 212 face each other in that the temperature gradient in the longitudinal direction in the liquid discharge head 3 is reduced. In FIG. 36, the flows of the common supply channel 211 and the common recovery channel 212 are shown in the same direction for the sake of simplicity.
Negative pressure control units 230 are connected to the downstream sides of the common supply channel 211 and the common recovery channel 212, respectively. Further, in the middle of the common supply channel 211, there are branches to the plurality of individual supply channels 213a, and in the middle of the common recovery channel 212, there are branches to the plurality of individual recovery channels 213b. The individual supply channel 213 a and the individual recovery channel 213 b are formed in the plurality of first channel members 50, and each individual channel is an opening 21 of the lid member 20 provided on the back surface of the recording element substrate 10. (See FIG. 19C).
The negative pressure control unit 230 indicated by H and L in FIG. 38B is a unit that combines the high pressure side (H) and the low pressure side (L). Each negative pressure control unit 230 has a relatively high (H) or low (L) negative pressure, and is configured to control a pressure upstream of the negative pressure control unit 230. It is. The common supply flow path 211 is connected to the negative pressure control unit 230 (high pressure side), and the common recovery flow path 212 is connected to the negative pressure control unit 230 (low pressure side), whereby the common supply flow path 211 and the common recovery flow path are shared. A differential pressure is generated between the flow paths 212. Due to the differential pressure, the liquid sequentially passes from the common supply channel 211 to the individual supply channel 213a, the discharge port 13 (pressure chamber 23) in the recording element substrate 10, and the individual recovery channel 213b. It flows to.
In this application example, each discharge module 200 includes the first flow path member 50, the recording element substrate 10, and the flexible wiring substrate 40. In this application example, there is no support member 30 (FIG. 18) described in the second application example, and the recording element substrate 10 including the lid member 20 is directly bonded to the first flow path member 50. As shown in FIG. 38C, the common supply flow path 211 provided in the second flow path member 60 is individually formed on the lower surface of the first flow path member 50 from the communication port 61 formed on the upper surface thereof. It is supplied to the individual supply channel 213a through the communication port 53. Thereafter, the liquid is supplied to the pressure chamber 23 and is recovered to the common recovery channel 212 through the individual recovery channel 213b, the individual communication port 53, and the communication port 61 in this order.
Here, unlike the second application example shown in FIG. 15, the individual communication port 53 on the lower surface (the surface on the second flow channel member 60 side) of the first flow channel member 50 is provided on the second flow channel member 50. The opening is sufficiently large with respect to the communication port 61 formed on the upper surface of the. With this configuration, even when the position is shifted when the discharge module 200 is mounted on the second flow path member 60, fluid communication is reliably performed between the first flow path member 50 and the second flow path member 60. It is like that. For this reason, the yield at the time of manufacturing the head is improved, and the cost can be reduced.

Each embodiment of the present invention will be described below. Each embodiment can apply the configuration of each application example described above.
(First embodiment)
FIG. 21 is a diagram for explaining the first embodiment of the recording element substrate 10 included in the liquid ejection head 3 of the present invention. FIG. 21A is a perspective view showing the appearance of the recording element substrate 10 according to the first embodiment. The recording element substrate 10 includes a substrate 11 and a discharge port forming member 12. A plurality of discharge ports 13 are formed in the discharge port forming member 12.
FIG.21 (b) is AA sectional drawing of Fig.21 (a). The recording element substrate 10 further includes a liquid discharge path (nozzle) 25, a pressure chamber 23, a flow path 24, and a recording element 15. The liquid discharge path 25 is a space communicating with the discharge port 13 and penetrates the discharge port forming member 12 at a position facing the pressure chamber 23 and the recording element 15. The outer end of the liquid discharge path 25, that is, the end opposite to the recording element 15 forms a discharge port 13 that is a hole for discharging ink. In the present specification, the ejection port 13 is an opening located on the outer surface of the ejection port forming member 12 facing the recording medium, and the liquid ejection path 25 means a through-hole penetrating the ejection port forming member 12.
The pressure chamber 23 is a space communicating with the discharge port 13 and the liquid discharge path 25, and is formed between the substrate 11 and the discharge port forming member 12. The recording element 15 is a heating resistor element, and is provided in the pressure chamber 23 on the substrate 11 so as to face the ejection port 13. The flow path 24 is a space communicating with the pressure chamber 23, and is formed between the substrate 11 and the discharge port forming member 12. The substrate 11 is provided with a supply path 17 a that is a through hole communicating with the flow path 24. With this configuration, when ink is introduced from the supply path 17 a, the ink is supplied to the pressure chamber 23 through the flow path 24. The ink in the pressure chamber 23 is ejected from the ejection port 13 by the ejection energy given by the recording element 15. In this embodiment, a supply path 17 a is provided on one side when viewed from each recording element 15.
FIG. 21C is an enlarged view of the recording element substrate 10 as viewed from the opening side of the ejection port 13. A plurality of pressure chambers 23 are formed on both sides of the supply path 17a, and a nozzle filter F is provided at the inlet of each pressure chamber 23. Each of the recording elements 15 in the pressure chamber 23 is provided at a position overlapping with each ejection port 13 when viewed from the opening side of the ejection port 13.

Here, the problem which this invention solves is demonstrated using the comparative example of this invention. FIG. 22 is a diagram for explaining a recording element substrate according to a comparative example of the present invention.
FIG. 22A is a diagram illustrating a state in which the outer shape of the recording element 15 and the ejection port 13 is projected onto the substrate 11 when viewed from a direction perpendicular to the substrate 11. In this comparative example, the rectangle S circumscribing the outline of the discharge port projection area 13P projected from the discharge port 13 onto the substrate 11 is the outline of the heat generation area projection area 15P obtained by projecting the heat generation area of the recording element 15 onto the substrate. Exists inside. Here, the area of the heat generation area projection area 15P is slightly smaller than the area of the recording element 15. This is because when the recording element 15 is driven, the outer peripheral area of the recording element 15 does not become a substantial heat generation area. In the present embodiment, the 2 μm region from the outer periphery to the inner side of the recording element 15 does not become a substantial heat generation region.
22B to 22F show a case where ink is ejected using the recording element substrate according to the comparative example of the present invention, which includes the ejection port 13 and the recording element 15 having the outer shape shown in FIG. It is a figure for demonstrating a state.
FIG. 22B shows a state in which the recording element 15 is driven in the state where the flow path 24 and the pressure chamber 23 are filled with ink in the recording element substrate. When the recording element 15 is driven, thermal energy is generated, and this thermal energy is given to the ink in the pressure chamber 23. When thermal energy is applied to the ink, bubbles B are generated on the recording element 15. Thereafter, when the volume of the bubble B increases, the ink in the pressure chamber 23 is pushed out from the discharge port 13 through the liquid discharge path 25 as shown in FIG. When the bubble B further increases, as shown in FIG. 22 (d), the bubble B enters the liquid discharge path 25, and the discharged ink droplet D and the ink I in the flow path 24 are separated by the bubble B. It becomes a state. Here, the flow of the bubbles B generated in the recording element 15 immediately below the end of the discharge port 13 is in a direction perpendicular to the substrate 11 in the flow path 24, that is, the discharge direction, as indicated by an arrow. The flow of the bubbles B hits the wall of the liquid discharge path 25 and becomes a flow in the direction toward the center of the discharge port 13 in the liquid discharge path 25. After bubble B grows to its maximum volume, its volume begins to decrease. As the bubble B contracts, the rear portion of the ejected ink droplet D moves toward the recording element 15 as shown in FIG. At this time, a speed difference in the reverse direction as indicated by an arrow occurs between the front end portion and the rear portion of the ejected ink droplet D with respect to the direction in which the ink is ejected. A pull is formed. Thereafter, as shown in FIG. 22 (f), the ejected ink droplet D separates from the ink I in the flow path and flies out of the ejection port 13. Eventually, the tailing causes the speed difference and the surface tension of the ink. Further separated into main drops and satellites.
As described above, the flow of the bubbles B generated on the recording element 15 immediately below the end of the ejection port 13 is in a direction perpendicular to the substrate 11 in the pressure chamber 23 when ejecting ink, that is, the ejection direction. Thereafter, the flow of the bubbles B hits the wall of the liquid discharge path 25 and becomes a flow in the direction toward the center of the discharge port 13 in the liquid discharge path 25. For this reason, a relatively thick liquid film Im is formed between the ejected ink droplet D and the ink I in the flow path. By increasing the thickness of the liquid film Im, the position where the bubble B communicates with the atmosphere becomes a position close to the recording element 15, and the timing when the bubble B communicates with the atmosphere is delayed. For this reason, the trailing of the ejected ink droplet D becomes long. As the tail of the ejected ink droplet D becomes longer, the ejected ink droplet D is easily separated into a main droplet and a satellite during the flight. When satellites are generated, there is a risk that the amount of ink that does not land at the target position increases, leading to a reduction in image quality.

Next, the recording element substrate 10 according to the first embodiment of the invention will be described. FIG. 23 is a diagram for explaining the configuration of the recording element substrate according to the first embodiment of the invention. FIG. 23A is a diagram illustrating a state in which the recording element 15 and the ejection port 13 are projected in a direction perpendicular to the surface of the substrate 11 on which the recording element 15 is provided. In the recording element substrate 10 according to the first embodiment, the rectangle S circumscribing the outline of the ejection port projection area 13P where the ejection port 13 is projected onto the substrate 11 projects the heat generation area of the recording element 15 onto the substrate 11. The heat generation area projection area 15P is included. Here, being included includes a case where the outline of the heat generation region projection region 15P is the same as the rectangle S (when overlapping). Further, the area of the heat generation area projection area 15P here is slightly smaller than the area of the recording element 15 as in the comparative example described above. In the rectangle S, two opposite sides are substantially parallel to the direction in which the liquid flows in the flow path 24. Alternatively, the rectangle S has two opposite sides substantially parallel to the direction of the discharge port array in which the discharge ports 13 are arranged.
23B to 23F discharge ink using the recording element substrate according to the first embodiment of the present invention, which includes the discharge port 13 and the recording element 15 having the outer shape shown in FIG. It is a figure for demonstrating the state at the time of having carried out.
As in the recording element substrate 10 according to the first embodiment of the present invention, the flow of the bubbles B when the heat generation region projection region 15P is included in the rectangle S circumscribing the ejection port projection region 13P is shown in FIG. ) To (f). When the recording element 15 is driven and thermal energy is applied to the ink, bubbles B are generated as shown in FIG. As shown in FIG. 23 (c), the volume of the bubble B increases. The flow of the bubbles B is a flow having a velocity component toward the wall surface of the liquid discharge path 25 in the pressure chamber 23 as shown by the arrow in FIG. Therefore, when the bubble B enters the inside of the liquid discharge path 25, the flow of the bubble in the part that has entered becomes a flow in the direction along the outer edge of the liquid discharge path 25, that is, the bubble flow is the outer edge of the liquid discharge path 25 ( The flow is substantially parallel to the inner wall surface of the liquid discharge path 25. The direction of this flow differs depending on the size of the recording element 15 and the like, and in the comparative example, the direction was relatively toward the center of the ejection port 13 as compared to the example of FIG. When the heat generation region projection region 15P is the same as or included in the rectangle S, the flow is relatively closer to the direction along the wall surface of the liquid discharge path 25 than in the comparative example. That is, it is closer to the direction toward the outer periphery of the discharge port 13 than in the comparative example. When the flow of the bubbles B approaches the direction toward the outer edge of the ejection port 13, the thinning of the liquid film Im between the ejection ink droplet D and the ink I in the flow path is further promoted. For this reason, the timing at which the bubbles B communicate with the atmosphere is earlier than in the comparative example, and the tailing of the ejected ink droplets D is shortened. By shortening the tail of the ejected ink droplets D, the droplets are easily collected during flight, and satellites are less likely to be generated. Print quality is improved because satellites are less likely to occur. As described above, in the present embodiment, the flow of bubbles that have entered the liquid discharge path 25 from the pressure chamber 23 suppresses components toward the center of the discharge port 13, while the outer edge (inner wall surface) of the liquid discharge path 25. The point is to make the flow component along the line larger. In order to obtain such a flow of bubbles, the dimensions of the liquid discharge head may be appropriately set as will be described later.

(Second Embodiment)
A recording element substrate 10 according to a second embodiment of the present invention will be described. FIG. 24 is a top view of the recording element substrate 10 according to the present embodiment. FIG. 25 is a diagram schematically showing a cross-sectional configuration of the recording element substrate 10 according to the embodiment. In the second embodiment, a supply path 17 a is formed on each side of the recording element 15 for each recording element 15. Ink is supplied into the pressure chamber 23 through two supply paths 17 a arranged at symmetrical positions on both sides of the pressure chamber 23 with the recording element 15 in between.
FIGS. 25B to 25F are views for explaining a state when ink is ejected using the recording element substrate 10 according to the second embodiment of the present invention. In the first embodiment, when viewed from the recording element 15, the supply path 17 a is formed only on one side, so that the manner of expansion of the bubbles B during foaming is asymmetrical.
On the other hand, in the second embodiment, when viewed from the recording element 15, the supply path 17a is formed on both sides, and the pressure chamber 23 and the flow path 24 are formed substantially symmetrically. Therefore, the bubbles B spread symmetrically. As the bubbles B spread symmetrically, the thinning of the liquid film Im is easily promoted symmetrically. For this reason, the ejection direction of the ejection ink droplet D tends to be a direction perpendicular to the substrate 11. Therefore, the possibility of ink droplets landing at a desired position on the recording medium is increased, and further improvement in print quality can be expected as compared with the first embodiment.
FIG. 26 is a continuous diagram showing the ejection state when ink is ejected using the recording element substrate 10 according to the second embodiment of the present invention, and FIGS. 26A to 26G are comparative examples, FIG. 26 (h) to (n) show embodiments of the present invention. In FIGS. 26A to 26G, which are comparative examples, the outer shape of the discharge port 13 is a circular shape having a diameter of 18 μm, and the heat generation area projection region of the recording element 15 is a square having a side of 19 μm. In this example, the outline of the heat generation area projection area 15P is the same as the rectangle S circumscribing the outline of the discharge port projection area 13P. Next, in FIGS. 26 (h) to 26 (n) showing the embodiment of the present invention, the outer shape of the discharge port 13 is a circular shape having a diameter of 18 μm, and the recording element 15 is a square having a side of 15 μm. In this example, the outline of the heat generation area projection area 15P is included in the rectangle S circumscribing the outline of the discharge port projection area 13P. In all the examples shown in FIG. 26, the height of the pressure chamber 23, that is, the distance H1 between the substrate 11 in the pressure chamber 23 and the back surface of the discharge port forming member 12 is 7 μm, and the discharge port 13 (the surface of the discharge port) ) To the recording element 15 is 12 μm. 26 (a) to (g) and FIGS. 26 (h) to (n), the tailing length of the ejected ink droplets D is greater than that of FIGS. 26 (a) to 26 (g). h) to (n) are shorter. Thereby, generation | occurrence | production of a satellite can be reduced.
FIG. 27 shows the time from when the ejection energy is given to the recording element 15 to when the bubble B communicates with the atmosphere when the recording element substrate 10 according to the present embodiment is used, and the relative time compared with the ejection port 13. The relationship with the size of the recording element 15 is shown. The relative size of the recording element 15 is indicated by a distance C between the heat generation region projection region 15P and the ejection port projection region 13P, as shown in FIG. The distance C is a distance from one side of the heat generation region projection region 15P to one side of the rectangle S circumscribing the discharge port projection region 13P. Here, when the heat generation area projection area 15P is inside the rectangle S, the value of the distance C is negative. Here, the ejection port 13 has a circular shape with a diameter of 18 μm, and the outer shape of the effective foaming region of the recording element 15 is a square. In the direction perpendicular to the substrate 11, the height H1 of the pressure chamber 23 is 7 μm, and the distance H2 from the ejection port 13 to the recording element 15 is 12 μm. The distance from the ejection port 13 to the recording element 15 is the distance from the surface of the surface on which the ejection port 13 is formed to the surface of the substrate 11 on which the recording element 15 is formed.
Referring to FIG. 27B, it can be seen that the shorter the distance C value, that is, the larger the clearance value, the shorter the time from when the recording element 15 is driven until the bubble B communicates with the atmosphere. . In other words, the shorter the outline of the heat generation area projection area 15P is than the rectangle S circumscribing the outline of the discharge port projection area 13P, the shorter the time until the bubble B communicates with the atmosphere. By shortening the time until the bubble B communicates with the atmosphere, the tailing of the ejected ink droplets D becomes relatively short, and the droplets are likely to be gathered during flight, so that satellites are hardly generated. Since the satellite is less likely to be generated, the possibility that the ejected ink droplet D reaches the desired position is increased, and the print quality is improved.
Since the effect of shortening the time until the bubble B communicates with the atmosphere tends to increase as the distance C increases (the interval increases), a region where the distance C is −2 μm or less can also be suitably applied.
Furthermore, in order to enhance the effect of the present embodiment, the height of the pressure chamber 23 is preferably low. This is because the flow in the direction toward the outer edge of the discharge port 13 in the vicinity of the discharge port 13 by the recording element 15 becomes stronger when the height of the pressure chamber 23 is lower. Further, by reducing the height of the flow path 24, it is possible to suppress the entry of foreign matter into the flow path. Thereby, since the same effect as the nozzle filter F can be given at the exit part of the supply path 17a, it can be set as the structure which does not use the nozzle filter F. FIG. In addition, by reducing the height of the flow path 24, the flow resistance from the supply path 17a to the pressure chamber 23 is sufficiently increased, so that the restriction existing in the path from the supply path 17a to the pressure chamber 23 is present. A resistance part (not shown) becomes unnecessary.
For example, when the distance from the ejection port 13 to the recording element 15 is 9.5 μm, the diameter of the ejection port 13 is 20 μm, the recording element 15 is a square having a side of 14 μm, and the width of the pressure chamber 23 is 35 μm, the height of the pressure chamber 23 is increased. The height of the channel 24 can be 5 μm. In this case, foreign matter larger than 5 μm in the height of the flow path 24 cannot flow before the supply path 17a. Therefore, the nozzle filter F is not necessary when the height of the flow path 24 is low. Further, when the distance from the supply path 17a to the pressure chamber 23 is 60 μm, the flow resistance becomes sufficiently large. For this reason, the energy generated by the recording element 15 can be sufficiently applied to the ejected droplets D, and the influence of the pressure on the adjacent pressure chambers 23 is reduced. Here, in order to sufficiently give the energy generated by the recording element 15 to the ejection droplet D, it is preferable that at least the distance from the ejection port 13 to the recording element 15 is smaller than twice the height of the flow path 24. . This enables energy efficient ejection.
In order to increase the printing speed, it is necessary to increase the ink refill frequency. For this reason, it is desirable to shorten the distance from the supply path 17a to the pressure chamber 23 or to increase the height of a part of the flow path 24 from the supply path 17a to the pressure chamber 23. In this case, since the influence of the pressure wave on the adjacent pressure chamber 23 (the influence of crosstalk) becomes large, it is preferable to provide a wall 101 between the supply paths 17a as shown in FIG. In the case where the wall 101 is provided between the supply paths 17a, the supply path 17a is blocked by foreign matter or the like during the manufacturing process of the liquid discharge head or the use of the liquid discharge head, and ink is supplied to the specific pressure chamber 23. There is a risk that it will not be broken. Therefore, the wall 101 is separated from the wall 102 of the pressure chamber 23 so as to provide a gap so that the supply of ink does not stop even if a certain supply path 17a is blocked. Is preferred. It is more preferable that there are two gaps at both ends of the wall 101, specifically, two locations on the pressure chamber 23 side and the opposite side of the supply path 17a. Of the both ends of the wall 101, the former gap 101a provided at the end close to the pressure chamber 23 is the latter gap 101b far from the pressure chamber 23 in order to supply ink while suppressing the influence of the pressure wave. Narrower than that. For example, the former gap portion 101a is preferably about 3 to 7 μm, and the latter gap portion 101b is preferably about 15 to 30 μm.

(Third embodiment)
In the first and second embodiments, the shape of the discharge port 13 is circular, but in the present invention, the shape of the discharge port 13 is not limited to a circular shape. For example, the discharge port 13 protrudes toward the center of the discharge port 13 from the plurality of arc portions 13a that form part of the peripheral edge of the discharge port 13, and the plurality of arc portions 13a, and connects the plurality of arc portions 13a. The shape including the protrusion part 13b may be sufficient. FIGS. 28A and 28B show examples of the discharge port 13 having such a shape. The recording element substrate 10 having the discharge port 13 having such a shape has an effect of promoting thinning of the liquid film Im when the rectangle S circumscribing the outline of the discharge port projection region 13P includes the heat generation region projection region 15P. Can be further strengthened. For this reason, the time until the bubbles B communicate with the atmosphere can be further shortened, and the generation of satellites can be reduced. At this time, if the width W of the protruding portion 13b shown in FIGS. 28A and 28B is too wide, the effect of promoting the thinning of the liquid film Im is reduced, and if it is too narrow, two droplets are formed. There is a risk of breaking. For this reason, it is preferable that the width | variety W of the protrusion part 13b is about 2-8 micrometers.
In the first and second embodiments and the present embodiment shown in FIGS. 28A and 28B, the shape of the heat generation region projection region 15P is square, but the present invention is not limited to such an example. For example, as shown in FIG. 28C, the shape of the recording element 15 and the shape of the heat generation area projection area 15P may be rectangles having different lengths of adjacent sides. The rectangular recording element 15 is suitable, for example, when it is desired to arrange the recording elements 15 at a high density.
FIG. 28D and FIG. 28E are top views of the recording element substrate 10 according to the present embodiment. As shown in these drawings, the discharge port 13 is preferably arranged so that the two arc portions 13a are aligned in the direction of the discharge port array. This is to reduce the influence on the print quality due to the deviation of the landing position of the droplets that occurs when the shape of the discharge port 13 is not symmetrical but varies.

(Fourth embodiment)
In the first to third embodiments, an example in which the supply path 17a is provided on one side of the recording element 15 or an example in which the supply path 17a is provided on both sides of the recording element 15 has been described. It is not limited to. The recording element substrate 10 according to the fourth embodiment of the present invention includes a supply path 17 a and a recovery path 17 b that communicate with the pressure chamber 23. FIG. 29 is a view for explaining a recording element substrate 10 according to the fourth embodiment of the present invention.
In the present embodiment, a supply path 17 a and a recovery path 17 b that communicate with the pressure chamber 23 are provided. The supply path 17 a functions as a flow path for allowing ink to flow into the pressure chamber 23, and the recovery path 17 b functions as a flow path for recovering ink from the pressure chamber 23. Both the supply path 17 a and the recovery path 17 b are provided as through holes that penetrate the substrate 11. Thereby, the ink in the pressure chamber 23 circulates. When the ink is not circulated, the viscosity of the ink in the vicinity of the ejection port 13 gradually increases as the ink evaporates from the ejection port 13. For this reason, it becomes difficult to eject ink. In particular, as shown in FIG. 29 (b), the closer to the edge of the ejection port 13, the higher the ink viscosity of the ink.
Also in the present embodiment, the outline of the heat generation area projection area 15P is included in the rectangle S that circumscribes the outline of the discharge port projection area 13P. Here, being included means that the outline of the heat generation region projection region 15P includes the same case as the rectangle S. Furthermore, in this embodiment as well, in this case, as described above, it is important that the flow of the bubbles B is in the direction toward the outer edge of the ejection port 13, but this flow becomes weaker as the ink viscosity increases. End up. Therefore, by adopting a configuration in which the ink is circulated as in the present embodiment, the ink in the vicinity of the ejection port 13 can be constantly refreshed, so that the ink in the vicinity of the ejection port 13 as shown in FIG. An increase in viscosity can be suppressed. In this case, as shown in FIG. 29 (d), when the bubble B hits the wall of the discharge port 13, it is possible to suppress a decrease in the flow toward the outer edge of the discharge port 13. Thinning of the liquid film Im with the ink I can be promoted. For this reason, it is possible to further improve the printing quality as compared with the first to third embodiments.

As described above, in each embodiment of the present invention, the flow of bubbles entering the liquid discharge path 25 from the pressure chamber 23 suppresses the component toward the center of the discharge port 13, and the outer edge of the liquid discharge path 25. The point is to increase the flow component along the (inner wall surface).
While the present invention has been described with reference to the embodiments, the present invention is not limited to the above embodiments. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the technical idea of the present invention.
For example, in the above-described embodiment, a plurality of examples are given as the shape of the discharge port 13, but the shape is not limited to that shown in the drawing, and various shapes can be used within the scope of the technical idea of the present invention. it can.
For example, in the above-described embodiment, the discharge port 13, the pressure chamber 23, and the flow path 24 are formed by one discharge port forming member 12, but the present invention is not limited to such an example. The discharge port 13, the pressure chamber 23, and the flow path 24 may be formed by combining a plurality of members.
For example, in the above-described embodiment, an example of the height of the flow path 24 and the distance between the ejection port 13 and the recording element 15 in the direction perpendicular to the substrate 11 has been described, but the present invention is not limited to such an example. In order for the flow of bubbles that have entered the liquid discharge path 25 from the pressure chamber 23 to have a larger flow component along the outer edge (inner wall surface) of the liquid discharge path 25, (1) It is effective to appropriately set (2) the distance between the ejection port 13 and the recording element 15. The height of the pressure chamber 23 is preferably 7 μm or less, and the distance between the ejection port 13 and the recording element 15 is preferably 12 μm or less. If the height of the pressure chamber is 8 μm or more, it is not preferable because the flow of bubbles that have entered the liquid discharge section 25 has more components toward the center of the discharge port. Further, the distance from the ejection port 13 to the recording element 15 is preferably not more than twice the height of the flow path 24. In addition to the dimensions of the liquid ejection head, the dimensions of the liquid ejection heads of each part and the physical properties of the liquid influence the flow of the bubbles, but the dimensions (1) and (2) are dominant. Affect.
The liquid discharge head used in the present embodiment has been described using a general ink jet recording apparatus as an example. However, the liquid discharge head of the present invention can be used for all liquid discharge apparatuses.
In this specification, “recording” is not only for forming significant information such as characters and figures, but also for whether it is manifested so that it can be perceived by human beings, regardless of significance. It doesn't matter. Furthermore, “recording” is a concept that includes a case where an image, a pattern, a pattern, or the like is widely formed on a recording medium, or a case where the medium is processed.
In the present specification, the term “ink” should be broadly interpreted in the same manner as the definition of “recording”. A liquid that can be used for forming an image, a pattern, a pattern, or the like, processing of the recording medium, or processing of ink by being applied to the recording medium. Therefore, it is a concept that encompasses any liquid that can be used for recording.

DESCRIPTION OF SYMBOLS 10 Recording element board | substrate 11 Substrate 12 Ejection port forming member 13 Ejection port 15 Recording element 17 Supply port 23 Pressure chamber 24 Flow path S Rectangular which circumscribes the outline of the ejection opening F Nozzle filter I Ink in flow path Im Liquid film

Claims (20)

  1. A discharge port for discharging liquid;
    A pressure chamber communicating with the discharge port;
    A recording element that is provided in the pressure chamber so as to face the discharge port and generates thermal energy for foaming the liquid;
    A flow path communicating with the pressure chamber;
    A substrate on which the recording element is formed,
    The height of the pressure chamber in the direction perpendicular to the substrate is 7 μm or less,
    Bubbles generated in the pressure chamber by driving the recording element communicate with the atmosphere,
    The rectangle circumscribing the outline of the ejection port projection area in which the ejection port is projected onto the substrate as viewed from the direction perpendicular to the substrate includes the heating area projection area in which the heating area of the recording element is projected onto the substrate. A recording element substrate.
  2. A discharge port for discharging liquid;
    A recording element that is provided opposite to the discharge port and generates thermal energy for foaming the liquid;
    A pressure chamber having the recording element therein;
    A liquid discharge passage communicating the discharge port and the pressure chamber;
    A flow path communicating with the pressure chamber;
    A substrate on which the recording element is formed,
    Bubbles generated in the pressure chamber by driving the recording element communicate with the atmosphere after entering the inside of the liquid discharge path, and discharge liquid from the discharge port,
    The recording element substrate according to claim 1, wherein the flow of bubbles entering the liquid discharge path is a flow along a wall surface of the liquid discharge path.
  3.   The rectangle circumscribing the outline of the ejection port projection area in which the ejection port is projected onto the substrate as viewed from the direction perpendicular to the substrate includes the heating area projection area in which the heating area of the recording element is projected onto the substrate. The recording element substrate according to claim 2, wherein:
  4.   4. The recording element substrate according to claim 2, wherein a height of the pressure chamber in a direction perpendicular to the substrate is 7 μm or less. 5.
  5.   5. The recording element substrate according to claim 1, wherein a distance between the ejection port and the recording element is 12 μm or less in a direction perpendicular to the substrate. 6.
  6.   The distance between the ejection port and the recording element in a direction perpendicular to the substrate is not more than twice the height of the flow path, according to any one of claims 1 to 5. Recording element substrate.
  7.   The recording element according to claim 1, wherein the substrate includes a supply path for supplying a liquid to the pressure chamber and a recovery path for recovering the liquid from the pressure chamber. substrate.
  8.   The recording element substrate according to claim 7, wherein the supply path and the recovery path extend in a direction intersecting the substrate.
  9.   The recording element substrate according to claim 7, wherein the supply path is formed on one side of the pressure chamber, and the recovery path is formed on the other side of the pressure chamber.
  10.   The discharge port includes a plurality of arc portions that form a part of a peripheral edge of the discharge port, and a protrusion that projects from an end of the plurality of arc portions toward the center of the discharge port and connects the plurality of arc portions. The recording element substrate according to claim 1, wherein the recording element substrate includes a portion.
  11.   The recording element substrate according to claim 1, wherein a plurality of the pressure chambers are arranged, and walls are provided between the pressure chambers adjacent to each other. .
  12.   The recording element substrate according to claim 11, wherein the wall is provided with a gap for allowing liquid to flow between adjacent pressure chambers.
  13.   A plurality of the gap portions are provided on the wall, and the gap portion provided on the side closer to the pressure chamber among the plurality of gap portions is more than the gap portion provided on the side far from the pressure chamber. The recording element substrate according to claim 12, wherein the recording element substrate is narrow.
  14.   The gap portion provided on the side far from the pressure chamber is formed between an end of the wall and a discharge port forming member provided with the discharge port. The recording element substrate as described.
  15.   A liquid discharge head comprising the recording element substrate according to claim 1.
  16.   The liquid discharge head according to claim 15, wherein the liquid in the pressure chamber is circulated between the pressure chamber and the outside.
  17.   17. The liquid discharge head according to claim 15, wherein the recording element is driven to discharge the liquid from the discharge port in a state where the liquid in the pressure chamber is circulating.
  18. A discharge port for discharging liquid;
    A pressure chamber communicating with the discharge port;
    A recording element provided in the pressure chamber for generating thermal energy for foaming the liquid;
    A flow path communicating with the pressure chamber;
    A substrate on which the recording element is formed,
    The height of the pressure chamber in the direction perpendicular to the substrate is 7 μm or less,
    The rectangle circumscribing the outline of the ejection port projection area in which the ejection port is projected onto the substrate as viewed from the direction perpendicular to the substrate includes the heating area projection area in which the heating area of the recording element is projected onto the substrate. A liquid discharge head.
  19.   The liquid discharge head according to claim 18, wherein a distance between the discharge port and the recording element in a direction perpendicular to the substrate is 12 μm or less.
  20.   20. The liquid ejection head according to claim 18, wherein the liquid in the pressure chamber is circulated between the outside of the pressure chamber.
JP2016239369A 2016-01-08 2016-12-09 Recording element substrate and liquid discharge head Pending JP2017124611A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016002957 2016-01-08
JP2016002957 2016-01-08

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US15/397,517 US10293607B2 (en) 2016-01-08 2017-01-03 Recording element board and liquid discharge head
KR1020170002147A KR20170083500A (en) 2016-01-08 2017-01-06 Recording element board and liquid discharge head
EP17000020.2A EP3192655B1 (en) 2016-01-08 2017-01-06 Recording element board and liquid discharge head
CN201710011145.5A CN107009742B (en) 2016-01-08 2017-01-06 Recording element plate and liquid discharging head
US16/375,746 US20190232653A1 (en) 2016-01-08 2019-04-04 Recording element board and liquid discharge head

Publications (1)

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JP2017124611A true JP2017124611A (en) 2017-07-20

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JP3179834B2 (en) * 1991-07-19 2001-06-25 株式会社リコー Liquid flight recorder
US6113221A (en) * 1996-02-07 2000-09-05 Hewlett-Packard Company Method and apparatus for ink chamber evacuation
JPH11291500A (en) * 1998-02-10 1999-10-26 Canon Inc Liquid delivery method and liquid delivery head
US6652084B1 (en) * 1999-09-30 2003-11-25 Canon Kabushiki Kaisha Ink-set, ink-jet recording method, recording unit, ink-cartridge, ink-jet recording apparatus and bleeding reduction method using it
US6588887B2 (en) * 2000-09-01 2003-07-08 Canon Kabushiki Kaisha Liquid discharge head and method for liquid discharge head
US7431432B2 (en) * 2005-10-11 2008-10-07 Silverbrook Research Pty Ltd Printhead that combines ink from adjacent actuators
JP2009137173A (en) * 2007-12-06 2009-06-25 Canon Inc Liquid discharge head and recording device
US8651624B2 (en) * 2008-10-14 2014-02-18 Hewlett-Packard Development Company, L.P. Fluid ejector structure
JP5393400B2 (en) * 2008-11-18 2014-01-22 キヤノン株式会社 Liquid discharge head
JP5489629B2 (en) * 2008-12-05 2014-05-14 キヤノン株式会社 Recording device
JP5569092B2 (en) * 2010-03-26 2014-08-13 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting head unit, and liquid ejecting apparatus
US9315019B2 (en) * 2011-04-29 2016-04-19 Hewlett-Packard Development Company, L.P. Systems and methods for degassing fluid
JP5875293B2 (en) * 2011-08-25 2016-03-02 キヤノン株式会社 Recording head and ink jet recording apparatus
JP6270533B2 (en) * 2014-02-25 2018-01-31 キヤノン株式会社 Liquid ejection head, recording apparatus, and heat dissipation method for liquid ejection head
JP6537312B2 (en) * 2014-05-12 2019-07-03 キヤノン株式会社 Liquid discharge head, method of manufacturing the same, and liquid discharge apparatus

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KR20170083500A (en) 2017-07-18
CN107009742B (en) 2019-08-02
CN107009742A (en) 2017-08-04

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