JP2017075787A - Coordinate measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coordinate measuring apparatus that can suppress deformation of a moving body supported by a supporting member like a cantilever.SOLUTION: The coordinate measuring apparatus is a three-dimensional measuring apparatus that specifies the three-dimensional shape of a non-measurement object, and includes a base, an X-axis column, a Y-axis beam 30, a Z-axis spindle, and a probe. The Y-axis beam 30 has one end part 30a in a longer direction, which is supported by the X-axis column so that the end part can move into a direction perpendicular to the longer direction, and has another end part 30b in the longer direction of the Y-axis beam 30, which has a width smaller than that of the one end part 30a.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a coordinate measuring apparatus, and more particularly, to a coordinate measuring apparatus including a support body that movably supports one end portion of a moving body in a longitudinal direction.

As a coordinate measuring apparatus, a three-dimensional measuring apparatus that measures the coordinates of the outer shape of the object to be measured is used to measure the shape and dimensions of the object to be measured.
For example, the three-dimensional measuring apparatus disclosed in Patent Document 1 below moves relative to the base in the three axial directions of the X, Y, and Z axes in order to bring the probe into contact with the object to be measured on the base. And a column that is a support that cantilever-supports one end of the moving mechanism in the longitudinal direction.

Japanese Patent Laying-Open No. 2015-7641

  However, when one end of the moving body in the longitudinal direction is cantilevered by the support, the other end that is not supported is bent by its own weight. In particular, since the movable body is configured to move in the three-axis directions, the length of the movable body in the longitudinal direction is increased, and the deflection is likely to be increased. In such a case, since the position of the probe provided on the other end side of the moving body cannot be detected with high accuracy, the measurement accuracy of the coordinate measuring apparatus may be reduced.

  Therefore, the present invention has been made in view of these points, and an object thereof is to provide a coordinate measuring apparatus capable of suppressing the bending of a moving body that is cantilevered by a support.

  In a first aspect of the present invention, a movable body, and a support body that supports one end of the movable body in the longitudinal direction so as to be movable in an orthogonal direction perpendicular to the longitudinal direction, A coordinate measuring device is provided in which the width of the other end of the movable body in the longitudinal direction is smaller than the width of the one end.

  Moreover, it is good also as the width | variety of the said mobile body becoming gradually small toward the said other end part from the said one end part.

The moving body may be made of a casting.
A plurality of ribs may be formed in the movable body from the one end side to the other end side.

  The moving body has a recess formed from the one end side to the other end side, and a second moving body movable along the longitudinal direction is connected to the moving body. In addition, at least a part of the drive unit that moves the second moving body may be provided in the recess.

  Two guide mechanisms for guiding the movement of the movable body in the orthogonal direction are provided between the support and the one end of the movable body, and each of the two guide mechanisms is It is good also as having the 1st rail member extended along the orthogonal direction, and being fixed on the support body, and the 1st moving member which moves along the 1st rail member.

  Further, the support and the moving body are made of materials having different thermal expansion coefficients, and are provided on at least one guide mechanism side of the two guide mechanisms, and the one end side of the moving body is the longitudinal side as the temperature changes. It is good also as providing the displacement part which displaces to the said longitudinal direction when expanding / contracting to a direction.

  The displacement portion extends along the longitudinal direction and is fixed to the second rail member fixed to the first moving member, and the moving body, and the one end side of the displacement portion is fixed to the longitudinal portion as the temperature changes. And a second moving member that moves along the second rail member when expanding and contracting in the direction.

  The displacement portion is connected to the one end portion of the movable body and the first moving member, and has a leaf spring provided along the orthogonal direction, and the leaf spring is accompanied by a temperature change. When the one end portion side expands and contracts in the longitudinal direction, it may be bent in the longitudinal direction.

  Further, the displacement portion includes a groove portion provided along the longitudinal direction on a surface of the first moving member facing the moving body, a sphere movable along the groove portion, and the one end of the moving body. A pressing member that presses the portion toward the first moving member, and the one end portion expands and contracts in the longitudinal direction along the groove portion in contact with the sphere as the temperature changes. Good.

  ADVANTAGE OF THE INVENTION According to this invention, there exists an effect that the bending of the mobile body cantilever-supported by the support body can be suppressed.

It is a perspective view showing an example of composition of coordinate measuring device 1 concerning one embodiment of the present invention. 3 is a perspective view illustrating an example of a configuration of a Y-axis beam 30. FIG. 3 is a plan view of a Y-axis beam 30. FIG. It is AA sectional drawing of FIG. It is a figure which shows an example of a structure of the guide mechanisms 60 and 70 and a peripheral part. 5 is a perspective view for explaining a detailed configuration of a displacement portion 71. FIG. FIG. 10 is a perspective view showing a first modification of guide mechanism 70. It is a figure which shows the detailed structure of the displacement part 71 which concerns on a 1st modification. FIG. 10 is a perspective view showing a second modification of guide mechanism 70. It is a figure which shows the detailed structure of the displacement part 71 which concerns on a 2nd modification.

<1. Configuration of coordinate measuring device>
With reference to FIG. 1, an example of the configuration of a coordinate measuring apparatus 1 according to an embodiment of the present invention will be described.

  FIG. 1 is a perspective view showing an example of the configuration of the coordinate measuring apparatus 1. The coordinate measuring device 1 is a three-dimensional measuring device that specifies the three-dimensional shape of the object to be measured by measuring the coordinates of the outer shape of the object to be measured. As shown in FIG. 1, the coordinate measuring apparatus 1 includes a base 10, an X-axis column 20, a Y-axis beam 30, a Z-axis spindle 40, a probe 42, and an installation table 50.

  The base 10 is a stone surface plate and is installed on the installation table 50. An object to be measured (work) is placed on the upper surface of the base 10. The shape of the base 10 when viewed in plan is a rectangular shape.

  The X-axis column 20 stands on the upper surface of the base 10 and is a support that supports the Y-axis beam 30. The X-axis column 20 is fixed to the upper surface of the base 10. The X-axis column 20 has a substantially T-shape extending in the X-axis direction shown in FIG. 1 on the edge side of the upper surface of the base 10. The X-axis column 20 supports one end of the Y-axis beam 30 in the longitudinal direction (Y-axis direction in FIG. 1) so as to be movable in the X-axis direction. That is, in this embodiment, the X-axis column 20 is configured to support the Y-axis beam 30 in a cantilever manner. For this reason, it is possible to reduce the size of the coordinate measuring apparatus 1 and to make it easier for the measurer to place the object to be measured on the base 10 as compared with the case where both ends in the longitudinal direction of the Y-axis beam 30 are supported. .

  The Y-axis beam 30 is a beam-like member extending in the Y-axis direction so as to be orthogonal to the X-axis column 20. The Y-axis beam 30 is a moving body that moves in the X-axis direction. The coordinate measuring apparatus 1 includes a scale and a detection sensor for detecting the movement amount (coordinates) of the Y-axis beam 30 in the X-axis direction. In addition, a drive mechanism for moving the Y-axis beam 30 is provided on the X-axis column 20.

  The Y-axis beam 30 that is cantilevered by the X-axis column 20 is configured to suppress bending due to its own weight, as will be described in detail later. As will be described in detail later, the guide mechanism that moves the Y-axis beam 30 in the X-axis direction is provided with a configuration that suppresses the influence of expansion and contraction in the longitudinal direction of the Y-axis beam 30 due to temperature changes.

  The Z-axis spindle 40 is a prismatic member extending in the Z-axis direction, and is movably connected to the Y-axis beam 30. The Z-axis spindle 40 is a moving body (second moving body) that moves in the Y-axis direction and the Z-axis direction, respectively. The coordinate measuring apparatus 1 includes a scale and a detection sensor for detecting the movement amount (coordinates) of the Z-axis spindle 40 in the Y-axis direction and the Z-axis direction. The Y-axis beam 30 is provided with a drive mechanism that moves the Z-axis spindle 40.

  The probe 42 is provided at the lower end of the Z-axis spindle 40. The coordinate measuring apparatus 1 detects the amount of movement (coordinates) of the Y-axis beam 30 and the Z-axis spindle 40 when the contact provided at the tip of the probe 42 contacts the object to be measured on the base 10. Measure the coordinates of the outer shape of the object to be measured.

  The installation base 50 is provided below the base 10 and supports the base 10. A control device for controlling the movement of the Y-axis beam 30 and the Z-axis spindle 40 is accommodated in the installation table 50.

<2. Detailed configuration of Y-axis beam>
A detailed configuration of the Y-axis beam 30 will be described with reference to FIGS.
FIG. 2 is a perspective view showing an example of the configuration of the Y-axis beam 30. FIG. 3 is a plan view of the Y-axis beam 30. 4 is a cross-sectional view taken along line AA in FIG. In FIG. 3, the drive unit 34 shown in FIG. 2 is omitted.

  The Y-axis beam 30 is made of a casting. Specifically, the Y-axis beam 30 is an aluminum casting manufactured by melting aluminum and pouring it into a mold made of sand or the like. Thus, when the Y-axis beam 30 is made of a casting, a complicated shape can be realized as compared with the case where the Y-axis beam 30 is manufactured by extrusion.

  The one end 30a side in the longitudinal direction of the Y-axis beam 30 is supported by the X-axis column 20 shown in FIG. 1, whereas the other end 30b side is not supported. As shown in FIG. 2, the Y-axis beam 30 includes a beam main body 31, a guide part 33, a drive part 34, a recessed part 35, and a supported part 36.

  The beam body 31 is formed in a prismatic shape having a hollow inside. Specifically, as shown in FIG. 2, the beam body 31 is surrounded by an upper wall 31a, a lower wall 31b, a right wall 31c, and a left wall 31d that are respectively along the longitudinal direction (Y-axis direction). The upper wall 31a, the lower wall 31b, the right wall 31c, and the left wall 31d are walls formed in a flat plate shape.

  In the present embodiment, as shown in FIG. 3, the width in the width direction (X-axis direction) on the other end 30b side of the beam body 31 is smaller than the width on the one end 30a side. Specifically, the width on the other end 30b side in the longitudinal direction of the upper wall 31a of the beam body 31 is smaller than the width on the one end 30a side. In such a case, the center of gravity of the beam body 31 is located on the one end 30a side with respect to the intermediate position between the one end 30a and the other end 30b in the longitudinal direction. Thereby, even if the Y-axis beam 30 in which the one end portion 30a is cantilevered is bent by its own weight, the bending on the other end portion 30b side can be suppressed.

  Further, as shown in FIG. 3, the width of the upper wall 31a of the beam body 31 gradually decreases from one end 30a in the longitudinal direction of the beam body 31 to the other end 30b (in other words, the upper side The width of the wall 31a decreases monotonously). Specifically, the upper wall 31a has a trapezoidal shape when viewed in plan. However, it is not limited to the above, for example, the width of the upper wall 31a may be reduced stepwise. As for the lower wall 31b, similarly to the upper wall 31a, the width of the lower wall 31b on the other end 30b side is smaller than that on the one end 30a side.

  As shown in FIG. 4, a plurality of ribs 32 a to 32 c are formed inside the beam body 31. A plurality of ribs 32a to 32c are formed from the one end 30a side to the other end 30b side. The ribs 32a to 32c are joined to the upper wall 31a, the lower wall 31b, the right wall 31c, and the left wall 31d, respectively, and have a function of reinforcing the strength of the beam body 31. In addition, by providing the ribs 32a to 32c on the other end 30b side, it is possible to effectively suppress a decrease in strength on the other end 30b side where the width is smaller than that on the one end 30a side. In particular, even if the Z-axis spindle 40 (FIG. 1) movably connected to the beam body 31 is located on the other end 30b side, the ribs 32a to 32c are provided on the other end 30b side. Thus, it is possible to suppress the displacement (bending) of the other end 30b due to the weight of the Z-axis spindle 40.

  As shown in FIG. 4, the ribs 32a are arranged in parallel with the Z-axis direction, and the ribs 32b and the ribs 32c are arranged obliquely with respect to the Z-axis direction. With this arrangement, the ribs 32a to 32c can be joined to each other. Since the ribs 32a to 32c are joined to each other, the beam body 31 can be reinforced more firmly.

  Returning to FIG. 2, the guide portion 33 guides the movement of the Z-axis spindle 40 (FIG. 1) in the Y-axis direction. The guide portion 33 is provided along the Y-axis direction on the side surface of the upper wall 31a and the lower wall 31b of the beam body 31 on the right wall 31c side, and guides the movement of the Z-axis spindle 40 facing the right wall 31c. To do.

  The drive unit 34 moves the Z-axis spindle 40 in the longitudinal direction (Y-axis direction) of the Y-axis beam 30. Specifically, the drive unit 34 is a belt drive system, and includes a drive motor 34a that is a drive source, a belt 34b that rotates as the drive motor 34a rotates, and a pulley that stretches the belt 34b in a rotatable manner. 34c. The drive motor 34a is located on the one end 30a side (specifically, above the supported portion 36). In addition, the drive system of the drive part 34 is not limited to a belt drive system, For example, a ball screw drive system may be used.

  The recess 35 is a groove formed along the Y-axis direction on the right wall 31c side of the beam body 31. That is, the recess 35 is formed from one end 30a in the longitudinal direction to the other end 30b. The recess 35 accommodates at least a part of the drive unit 34. Specifically, the recess 35 accommodates the belt 34 b and the pulley 34 c of the drive unit 34. Thereby, since it is not necessary to arrange the belt 34b and the pulley 34c outside the beam body 31, the Y-axis beam 30 can be downsized.

  The supported portion 36 is a portion that is supported by the X-axis column 20 (FIG. 1) so as to be movable in the X-axis direction. The supported portion 36 is provided at a lower portion of the beam body 31 on the side of the one end portion 30a in the longitudinal direction so as to extend in an orthogonal direction (X-axis direction) orthogonal to the longitudinal direction. The supported portion 36 is integrated with the beam body 31.

  In the above description, the Y-axis beam 30 is made of casting, but is not limited thereto. For example, if the width on the other end 30b side in the longitudinal direction of the Y-axis beam 30 can be made smaller than the width on the one end 30a side supported by the X-axis column 20, the Y-axis beam 30 is manufactured by another manufacturing method. May be.

<3. Configuration of guide mechanism>
The configuration of the two guide mechanisms 60 and 70 that move the Y-axis beam 30 in the X-axis direction will be described with reference to FIG.

  FIG. 5 is a diagram illustrating an example of the configuration of the guide mechanisms 60 and 70 and the peripheral portion. As shown in FIG. 5, the guide mechanism 60 and the guide mechanism 70 are provided between the upper part of the X-axis column 20 and the supported part 36 on the one end part 30 a side of the Y-axis beam 30. Specifically, the guide mechanism 60 is provided on the upper portion 21 on one end side in the width direction (Y-axis direction) of the X-axis column 20, and the guide mechanism 70 is provided on the upper portion 22 on the other end side in the width direction. Yes. The upper part 21 is formed so as to protrude from the upper part 22 to the supported part 36 side.

The guide mechanism 60 is a linear guide and includes an X-axis rail portion 61 and an X-axis moving block 62 as shown in FIG.
The X-axis rail portion 61 is a first rail member that extends in the X-axis direction on the upper portion 21 of the X-axis column 20 (see FIG. 6). The X-axis rail portion 61 is fixed to the upper portion 21.

  The X-axis movement block 62 is in contact with the upper part of the X-axis rail portion 61 and is a block that can move along the X-axis rail portion 61 (see FIG. 6). Note that the X-axis moving block 62 smoothly moves relative to the X-axis rail portion 61 by contacting the X-axis rail portion 61 via a bearing ball (not shown). The X-axis moving block 62 is fixed to the supported portion 36 of the Y-axis beam 30. For this reason, when the X-axis moving block 62 moves along the X-axis rail portion 61, the Y-axis beam 30 moves in the X-axis direction.

  As shown in FIG. 5, the guide mechanism 70 includes an X-axis rail portion 61, an X-axis moving block 62, and a displacement portion 71. The X-axis rail portion 61 and the X-axis movement block 62 of the guide mechanism 70 have the same shape as the X-axis rail portion 61 and the X-axis movement block 62 of the guide mechanism 60. The X axis movement block 62 of the guide mechanism 70 moves together with the X axis movement block 62 of the guide mechanism 60.

  The displacement portion 71 is provided on the X-axis moving block 62, and is displaced in the longitudinal direction when the one end portion 30a side of the Y-axis beam 30 is displaced in the longitudinal direction (Y-axis direction) as the temperature rises. The reason for providing such a displacement portion 71 will be described below.

  The X-axis column 20 and the Y-axis beam 30 are made of materials having different coefficients of thermal expansion. Specifically, the X-axis column 20 is made of iron, and the Y-axis beam 30 is made of aluminum. For this reason, for example, when the temperature rises in an environment where the coordinate measuring apparatus 1 is installed, the Y-axis beam 30 expands more than the X-axis column 20. As the temperature changes, the amount of expansion / contraction of the X-axis column 20 and the Y-axis beam 30 in the Y-axis direction differs.

However, unlike the present embodiment, when the displacement portion 71 is not provided, the one end portion 30a is constrained by the guide mechanisms 60 and 70, so that it cannot be freely expanded and contracted when the temperature changes, and the Y-axis beam 30 is not expanded. May be deformed. When the Y-axis beam 30 is deformed, the amount of movement (coordinates) of the Y-axis beam 30 and the Z-axis spindle 40 when the contact of the probe 42 contacts the object to be measured on the base 10 is highly accurate. It cannot be detected.
On the other hand, when the displacement portion 71 is provided as in the present embodiment, the one end portion 30a connected to the X-axis column 20 by the guide mechanisms 60 and 70 moves in the Y-axis direction when the temperature changes. Can expand and contract freely. Thereby, since the deformation | transformation etc. of the Y-axis beam 30 can be suppressed, the fall of the measurement precision resulting from the deformation | transformation of the Y-axis beam 30 can be suppressed.

  FIG. 6 is a perspective view for explaining a detailed configuration of the displacement portion 71. As shown in FIG. 6, the displacement portion 71 includes a connecting plate 72, a Y-axis rail portion 73, and a Y-axis moving block 74. In FIG. 6, for convenience of explanation, the Y-axis rail portion 73 and the Y-axis moving block 74 are shown in a cross-sectional state.

  The connecting plate 72 is a flat member provided on the X-axis moving block 62. The connecting plate 72 is provided so as to be orthogonal to the moving direction of the X-axis moving block 62 (extend in the Y-axis direction). The X-axis moving block 62 of the guide mechanism 60 shown in FIG. 5 is fixed to the supported portion 36, but the X-axis moving block 62 of the guide mechanism 70 is fixed to the connecting plate 72 by screws 72a.

  The Y-axis rail portion 73 is a second rail member that is provided on the connecting plate 72 and extends in the Y-axis direction. The Y-axis rail portion 73 is fixed to the connecting plate 72 by screws 73a. For this reason, when the X-axis moving block 62 moves in the X-axis direction, the Y-axis rail portion 73 also moves in the X-axis direction.

  The Y axis moving block 74 is fixed to the Y axis beam 30. The Y-axis moving block 74 is arranged in the Y-axis direction along the Y-axis rail portion 73 when the one end 30a side of the Y-axis beam 30 expands and contracts in the longitudinal direction (specifically, the B direction indicated by the arrow) due to temperature change. It is the 2nd moving member which moves to. With the configuration of the linear guide block and rail described above, the one end 30a of the Y-axis beam 30 supported by the X-axis column 20 can freely expand and contract without being constrained by the guide mechanism 70.

  Returning to FIG. 5, a scale 23 provided along the X-axis direction is provided on the side surface 22 a of the upper portion 22 of the X-axis column 20 in order to detect the movement amount (coordinates) of the Y-axis beam 30. . A detection sensor 38 is provided so as to face the scale 23. The detection sensor 38 is connected to the Y-axis beam 30 so as to move in the X-axis direction (FIG. 1) in conjunction with the Y-axis beam 30.

  In the above description, the displacement portion 71 is provided on one guide mechanism 70 side of the guide mechanism 60 and the guide mechanism 70. However, the present invention is not limited to this. For example, the displacement part 71 may be provided on the guide mechanism 60 side. In such a case, the displacement portion 71 is provided on the guide mechanism 60 side away from the scale 23 shown in FIG. 5, so that the influence on the detection of the movement amount of the Y-axis beam 30 by the scale 23 and the detection sensor 38 can be prevented.

(Modification of guide mechanism 70)
A first modification and a second modification of the guide mechanism 70 will be described with reference to FIGS.

  FIG. 7 is a perspective view showing a first modification of the guide mechanism 70. FIG. 8 is a diagram illustrating a detailed configuration of the displacement unit 71 according to the first modification. In the first modified example shown in FIG. 7, the displacement portion 71 of the guide mechanism 70 is different from the configuration of the displacement portion 71 shown in FIG. 6, but the other configuration is the same as the configuration shown in FIG. 6.

As shown in FIG. 8, the displacement portion 71 of the first modification has a connection block 81 and a leaf spring 82.
The connecting block 81 is fixed to the X-axis moving block 62 with screws 81a. The leaf springs 82 are provided on both sides of the connection block 81, respectively. The lower ends of the two leaf springs 82 are fixed to the connection block 81 by screws 82a, respectively. The upper end portions of the two leaf springs 82 are fixed to the supported portion 36 of the Y-axis beam 30 by screws 82b, respectively.

  When the one end portion 30a side of the Y-axis beam 30 expands and contracts in the Y-axis direction (specifically, the B direction indicated by the arrow) as the temperature changes, the two leaf springs 82 bend in the B direction, thereby being supported. The part 36 can move in the Y-axis direction. Thereby, the Y-axis beam 30 can freely expand and contract in the Y-axis direction without being restricted by the guide mechanism 70.

  FIG. 9 is a perspective view showing a second modification of the guide mechanism 70. FIG. 10 is a diagram illustrating a detailed configuration of the displacement unit 71 according to the second modification. Also in the second modified example shown in FIG. 9, the displacement portion 71 of the guide mechanism 70 is different from the configuration of the displacement portion 71 shown in FIG. 6, but the other configuration is the same as the configuration shown in FIG. 6.

As shown in FIG. 10, the displacement portion 71 of the second modification has a connection block 91, a sphere 92, a screw 93, and a spring 94.
The connecting block 91 is fixed to the X-axis moving block 62 by screws (not shown). A groove portion 91a is formed along the Y-axis direction on the surface of the connecting block 91 facing the supported portion 36 (see FIG. 9). Here, the groove portion 91a has a V-shaped groove. A groove 36a is formed in the supported portion 36 of the Y-axis beam 30 along the Y-axis direction in parallel with the groove 91a.

  The spherical body 92 is sandwiched between the groove 91a and the groove 36a, and is a bearing that can move along the groove 91a and the groove 36a. The screw 93 is screwed into the connecting block 91 and the screw hole in a state where the screw portion passes through the supported portion 36. The spring 94 is a pressing member that is positioned between the screw head of the screw 93 and the supported portion 36 and presses the supported portion 36 toward the connecting block 91. Thereby, the state in which the spherical body 92 contacts the groove part 91a and the groove part 36a is maintained.

When the one end portion 30a side of the Y-axis beam 30 expands and contracts in the Y-axis direction as the temperature changes, the supported portion 36 in which the groove portion 36a that contacts the sphere 92 is formed along the groove portion 91a together with the sphere 92 in the Y-axis direction. Move to. Thereby, the Y-axis beam 30 can freely expand and contract in the Y-axis direction without being restricted by the guide mechanism 70.
In the above description, the groove portion 36a along the Y-axis direction is formed in the supported portion 36. However, the present invention is not limited to this. For example, the supported portion 36 may be formed with a conical recess capable of contacting the sphere 92 instead of the groove 36a.

<4. Effects in this embodiment>
In the above-described embodiment, as shown in FIG. 3, in the Y-axis beam 30 in which one end 30 a in the longitudinal direction is cantilevered by the X-axis column 20, the width on the other end 30 b side in the longitudinal direction is one end. It is smaller than the width on the part 30a side.
In such a case, the center of gravity of the Y-axis beam 30 is positioned on the one end 30a side supported by the X-axis column 20 in the longitudinal direction. Thereby, even if the other end part 30b side of the Y-axis beam 30 in which the one end part 30a is cantilevered is bent by its own weight, the bending on the other end part 30b side can be suppressed. As a result, it is possible to suppress a decrease in measurement accuracy due to the deflection of the Y-axis beam 30.

  In the above description, the moving body is the Y-axis beam 30 (FIG. 1) that is provided so as to extend in the Y-axis direction and moves in the X-axis direction, but is not limited thereto. For example, the moving body may be an X-axis beam that is provided so as to extend in the X-axis direction and moves in the Y-axis direction. In such a case, the support that supports the X-axis beam is, for example, a Y-axis column that extends in the Y-axis direction.

  In the above description, the coordinate measuring apparatus 1 is a three-dimensional measuring apparatus that measures the coordinates of the outer shape of the object to be measured placed on the base 10, but the present invention is not limited to this. For example, the coordinate measuring apparatus 1 may be a measuring apparatus that captures an image of a measurement object placed on the base 10 while moving.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Coordinate measuring apparatus 20 X-axis column 30 Y-axis beam 30a One end part 30b Other end part 32a-32c Rib 35 Recessed part 40 Z-axis spindle 60, 70 Guide mechanism 61 X-axis rail part 62 X-axis moving block 71 Displacement part 73 Y-axis Rail 74 Y-axis moving block

Claims (10)

A movable body,
A support that supports one end of the moving body in the longitudinal direction so as to be movable in an orthogonal direction perpendicular to the longitudinal direction,
The coordinate measuring device, wherein the width of the other end of the moving body in the longitudinal direction is smaller than the width of the one end. The width of the moving body is gradually reduced from the one end to the other end.
The coordinate measuring apparatus according to claim 1. The moving body is made of a casting.
The coordinate measuring apparatus according to claim 1 or 2. A plurality of ribs are formed in the movable body from the one end side to the other end side.
The coordinate measuring apparatus according to any one of claims 1 to 3. The moving body has a recess formed from the one end side to the other end side,
A second movable body that is movable along the longitudinal direction is connected to the movable body,
At least a part of the drive unit for moving the second moving body is provided in the recess,
The coordinate measuring device according to any one of claims 1 to 4. Between the support and the one end of the movable body, two guide mechanisms for guiding the movement of the movable body in the orthogonal direction are provided,
Each of the two guide mechanisms is
A first rail member extending along the orthogonal direction and fixed on the support;
A first moving member that moves along the first rail member,
The coordinate measuring device according to any one of claims 1 to 5. The support and the moving body are made of materials having different thermal expansion coefficients,
A displacement portion that is provided on at least one guide mechanism side of the two guide mechanisms and that displaces in the longitudinal direction when the one end portion side of the movable body expands and contracts in the longitudinal direction in accordance with a temperature change;
The coordinate measuring apparatus according to claim 6. The displacement portion is
A second rail member extending along the longitudinal direction and fixed to the first moving member;
A second moving member that is fixed to the moving body and moves along the second rail member when the one end side expands and contracts in the longitudinal direction with a change in temperature.
The coordinate measuring apparatus according to claim 7. The displacement portion is connected to the one end portion of the movable body and the first moving member, and has a leaf spring provided along the orthogonal direction,
The leaf spring bends in the longitudinal direction when the one end side expands and contracts in the longitudinal direction as the temperature changes.
The coordinate measuring apparatus according to claim 7. The displacement portion is
A groove provided along the longitudinal direction on a surface of the first moving member facing the moving body;
A sphere movable along the groove;
A pressing member that presses the one end of the moving body toward the first moving member,
The one end portion expands and contracts in the longitudinal direction along the groove portion in contact with the sphere as the temperature changes.
The coordinate measuring apparatus according to claim 7.