JP2016531299A5 - - Google Patents
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- JP2016531299A5 JP2016531299A5 JP2016540898A JP2016540898A JP2016531299A5 JP 2016531299 A5 JP2016531299 A5 JP 2016531299A5 JP 2016540898 A JP2016540898 A JP 2016540898A JP 2016540898 A JP2016540898 A JP 2016540898A JP 2016531299 A5 JP2016531299 A5 JP 2016531299A5
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- JP
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- Prior art keywords
- pressure
- absolute
- integrated
- deucer
- calibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005259 measurement Methods 0.000 claims 1
Claims (1)
- 前記回路基板は、その挙動が前記絶対圧差圧統合型圧力トランスデューサーによってもたらされる圧力信号の較正に影響を及ぼす計測増幅器および回路を更に具備する請求項8に記載の絶対圧差圧統合型圧力トランスデューサー。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361874830P | 2013-09-06 | 2013-09-06 | |
US61/874,830 | 2013-09-06 | ||
PCT/US2014/051560 WO2015034663A2 (en) | 2013-09-06 | 2014-08-18 | Absolute and differential pressure transducer |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2016531299A JP2016531299A (ja) | 2016-10-06 |
JP2016531299A5 true JP2016531299A5 (ja) | 2017-09-28 |
JP6522624B2 JP6522624B2 (ja) | 2019-05-29 |
Family
ID=51688389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016540898A Active JP6522624B2 (ja) | 2013-09-06 | 2014-08-18 | 絶対圧差圧圧力トランスデューサー |
Country Status (5)
Country | Link |
---|---|
US (1) | US9562796B2 (ja) |
JP (1) | JP6522624B2 (ja) |
KR (1) | KR102240813B1 (ja) |
CN (1) | CN105518419B (ja) |
WO (1) | WO2015034663A2 (ja) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
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US20160298575A1 (en) * | 2015-04-02 | 2016-10-13 | Sensata Technologies, Inc. | Combined temperature, absolute and differential pressure sensor assembly |
EP3112819B1 (en) * | 2015-06-30 | 2020-03-11 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Miniature differential pressure flow sensor |
EP3112830B1 (en) | 2015-07-01 | 2018-08-22 | Sensata Technologies, Inc. | Temperature sensor and method for the production of a temperature sensor |
CN106404237B (zh) * | 2015-07-29 | 2021-06-01 | 浙江盾安人工环境股份有限公司 | 压力传感器芯片及制备方法、绝压传感器芯片 |
NL2016557B1 (en) * | 2016-04-06 | 2017-10-17 | Fugro Eng B V | Pressure measurement device. |
US10520383B2 (en) * | 2016-09-30 | 2019-12-31 | Rosemount Inc. | Temperature-compensating absolute pressure sensor |
JP6871721B2 (ja) | 2016-11-17 | 2021-05-12 | 株式会社堀場エステック | 圧力式流量計 |
US10428716B2 (en) | 2016-12-20 | 2019-10-01 | Sensata Technologies, Inc. | High-temperature exhaust sensor |
US9889995B1 (en) * | 2017-03-15 | 2018-02-13 | Core Flow Ltd. | Noncontact support platform with blockage detection |
DE112017007273T5 (de) * | 2017-04-07 | 2019-12-05 | Formosa Measurement Technology Inc. Ltd. | Differenzdrucksensor und Verfahren zu seiner Herstellung |
US10502641B2 (en) | 2017-05-18 | 2019-12-10 | Sensata Technologies, Inc. | Floating conductor housing |
US11073846B2 (en) | 2018-01-30 | 2021-07-27 | Illinois Tool Works Inc. | Mass flow controller with absolute and differential pressure transducer |
JP2020020736A (ja) * | 2018-08-03 | 2020-02-06 | アズビル株式会社 | 層流型差圧流量計 |
US11608840B2 (en) * | 2018-08-21 | 2023-03-21 | Michael Yuan | Piezoelectric ring bender servo valve assembly for aircraft flight control actuation and fuel control systems |
US10890474B2 (en) | 2018-09-18 | 2021-01-12 | Swagelok Company | Fluid monitoring module arrangements |
US10883865B2 (en) | 2018-09-19 | 2021-01-05 | Swagelok Company | Flow restricting fluid component |
US11675374B2 (en) | 2018-10-26 | 2023-06-13 | Illinois Tool Works Inc. | Mass flow controller with advanced zero trending diagnostics |
CN109349921B (zh) * | 2018-11-09 | 2021-04-13 | 青岛歌尔微电子研究院有限公司 | 电压力锅内部气压的检测结构、控制方法及电压力锅 |
CN209326840U (zh) | 2018-12-27 | 2019-08-30 | 热敏碟公司 | 压力传感器及压力变送器 |
US20200348702A1 (en) * | 2019-04-30 | 2020-11-05 | Illinois Tool Works Inc. | Advanced pressure based mass flow controllers and diagnostics |
US20210325223A1 (en) * | 2020-04-17 | 2021-10-21 | Illinois Tool Works Inc. | Flow through pressure sensor |
CN111948091A (zh) * | 2020-09-09 | 2020-11-17 | 中国科学技术大学 | 气体浓度测量装置及方法 |
CN112432675B (zh) * | 2020-11-04 | 2023-10-24 | 合肥科迈捷智能传感技术有限公司 | 一种基于位置传感器的差压流量计零点偏置自动修正方法 |
CN112504547A (zh) * | 2020-11-25 | 2021-03-16 | 成都凯天电子股份有限公司 | 一种长期稳定性的高精度动压测量方法及系统 |
US11940307B2 (en) | 2021-06-08 | 2024-03-26 | Mks Instruments, Inc. | Methods and apparatus for pressure based mass flow ratio control |
DE102021130134A1 (de) * | 2021-11-18 | 2023-05-25 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids |
US12000723B2 (en) | 2022-02-18 | 2024-06-04 | Mks Instruments, Inc. | Method and apparatus for pressure based mass flow control |
CN117109671B (zh) * | 2023-10-24 | 2023-12-22 | 苏芯物联技术(南京)有限公司 | 一种高精度差压式气体流量测量系统及使用方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
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US4249164A (en) * | 1979-05-14 | 1981-02-03 | Tivy Vincent V | Flow meter |
US4347745A (en) * | 1980-12-22 | 1982-09-07 | Bourns Instruments, Inc. | Pressure measuring apparatus |
JPS59106034U (ja) * | 1982-12-30 | 1984-07-17 | 富士電機株式会社 | 圧力差圧検出器 |
US5022270A (en) * | 1989-06-15 | 1991-06-11 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
JPH08160072A (ja) * | 1994-12-09 | 1996-06-21 | Tokin Corp | 加速度・圧力検出素子およびその製造方法 |
US6484585B1 (en) * | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
JPH11241966A (ja) * | 1998-02-26 | 1999-09-07 | Fuji Electric Co Ltd | 静電容量式圧力検出器 |
US6520020B1 (en) * | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
CN1139787C (zh) * | 2000-07-28 | 2004-02-25 | 山东科技大学资源与环境工程学院 | 组合式管道气、液流体多参数一体化传感器组件 |
JP2004020524A (ja) * | 2002-06-20 | 2004-01-22 | Yamatake Corp | 差圧発信器 |
JP2004157719A (ja) * | 2002-11-06 | 2004-06-03 | Stec Inc | マスフローコントローラ |
US7096738B2 (en) * | 2004-03-18 | 2006-08-29 | Rosemount Inc. | In-line annular seal-based pressure device |
JP2005291740A (ja) * | 2004-03-31 | 2005-10-20 | Yokogawa Electric Corp | 差圧測定装置 |
US7178409B2 (en) | 2004-10-25 | 2007-02-20 | Sierra Instruments, Inc. | Laminar flow meter or controller |
CN201421342Y (zh) * | 2009-04-10 | 2010-03-10 | 崔从文 | 温度补偿复合流量变送器 |
US8234927B2 (en) * | 2010-06-08 | 2012-08-07 | Rosemount Inc. | Differential pressure sensor with line pressure measurement |
JP5548531B2 (ja) * | 2010-06-17 | 2014-07-16 | アズビル株式会社 | デュアル物理量センサ |
US8132464B2 (en) * | 2010-07-12 | 2012-03-13 | Rosemount Inc. | Differential pressure transmitter with complimentary dual absolute pressure sensors |
CN202814461U (zh) * | 2012-06-25 | 2013-03-20 | 王士兴 | 一体化静压、差压检测装置 |
-
2014
- 2014-08-18 JP JP2016540898A patent/JP6522624B2/ja active Active
- 2014-08-18 KR KR1020167004046A patent/KR102240813B1/ko active IP Right Grant
- 2014-08-18 US US14/915,656 patent/US9562796B2/en active Active
- 2014-08-18 WO PCT/US2014/051560 patent/WO2015034663A2/en active Application Filing
- 2014-08-18 CN CN201480048958.6A patent/CN105518419B/zh active Active
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